Abstract: A modular subsystem of a fluidic system is formed by assembling a set of chemically etched sheets of material. The modular subsystem includes mechanical, electrical, and fluidic components. A plurality of sheet members is provided. Respective ones of the sheet members are etched to form portions of mechanical, electrical, and fluidic components. A set of the sheet members are attached to each other to form a modular subsystem comprising the mechanical, electrical, and fluidic components. The resulting modular subsystem is assembled from a set of chemically etched sheets of material, and comprises a set of sheet members attached to each other. Each sheet member within the set is etched so that the mechanical, electrical, and fluidic components are formed when the sheet members are attached to each other.