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  • Patent number: 7970200
    Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: June 28, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga
  • Patent number: 7769226
    Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.
    Type: Grant
    Filed: January 19, 2006
    Date of Patent: August 3, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga
  • Patent number: 8311315
    Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: November 13, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga