Abstract: The growth temperature of carbon nanotubes on a catalyst distributed on a substrate is reduced by controlling graphene layer formation on the catalyst and catalyst deactivation by catalytic oxidation.

Abstract: The present invention is a catalytic chemical vapor deposition method and apparatus for synthesizing carbon nanotubes and/or carbon nanofibers (CNTs) on a substrate by selectively heating a catalyst for CNT synthesis on or near the surface of the substrate. Selective heating of the catalyst is achieved using an exothermic oxidation reaction on the surface of the catalyst, inductive heating from a radio frequency source, or both. Selective heating of the catalyst prevents heating of the substrate and enables the synthesis of CNTs on temperature sensitive substrates.

Abstract: The present invention is a catalytic chemical vapor deposition method and apparatus for synthesizing carbon nanotubes and/or carbon nanofibers (CNTs) on a substrate by selectively heating a catalyst for CNT synthesis on or near the surface of the substrate. Selective heating of the catalyst is achieved using an exothermic oxidation reaction on the surface of the catalyst. Selective heating of the catalyst prevents heating of the substrate and enables the synthesis of CNTs on temperature sensitive substrates.