Patents Represented by Attorney Allston L. Jones
  • Patent number: 7148159
    Abstract: Apparatus and method for performing laser thermal annealing (LTA) of a substrate using an annealing radiation beam that is not substantially absorbed in the substrate at room temperature. The method takes advantage of the fact that the absorption of long wavelength radiation (1 micron or greater) in some substrates, such as undoped silicon substrates, is a strong function of temperature. The method includes heating the substrate to a critical temperature where the absorption of long-wavelength annealing radiation is substantial, and then irradiating the substrate with the annealing radiation to generate a temperature capable of annealing the substrate.
    Type: Grant
    Filed: September 29, 2003
    Date of Patent: December 12, 2006
    Assignee: Ultratech, Inc.
    Inventors: Somit Talwar, Michael O. Thompson, Boris Grek, David A. Markle
  • Patent number: 7145104
    Abstract: An apparatus and method for uniformizing the temperature distribution across a semiconductor wafer during radiation annealing of process regions formed in the wafer is disclosed. The method includes forming a silicon layer atop the upper surface of the wafer and irradiating the layer with one or more pulses of radiation having wavelengths that are substantially absorbed by the silicon layer. The silicon layer acts to uniformly absorb the one or more radiation pulses and then transfers the heat from the absorbed radiation to the process regions across the wafer.
    Type: Grant
    Filed: February 26, 2004
    Date of Patent: December 5, 2006
    Assignee: Ultratech, Inc.
    Inventors: Somit Talwar, Michael O. Thompson
  • Patent number: 7140621
    Abstract: A steering control mechanism for a kick scooter includes a mounting seat connected fixedly to a front end of a footplate, a wheel seat with a fixed camming element, and an inclined rotating shaft extending through the wheel seat and connected fixedly to the mounting seat so as to allow for rotation of the wheel seat about the rotating shaft. A pressing unit is disposed slidably on the mounting seat, and is formed with a follower unit. A biasing unit biases the pressing unit to move relative to the mounting seat so as to press the follower unit of the pressing unit against the camming element of the wheel seat, thereby turning the camming element toward a central position.
    Type: Grant
    Filed: September 23, 2004
    Date of Patent: November 28, 2006
    Inventor: Sheng-Huan Cheng
  • Patent number: 7116496
    Abstract: An optical system for projection photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a large field over both a narrow and a broad spectral range. The optical system includes a positive lens group having a positive subgroup of elements that includes at least a plano-convex element and a negative subgroup that includes at least a negative meniscus element. The lens subgroups are separated by a small air space. The positive and negative subgroups constitute a main lens group arranged adjacent to but spaced apart from a concave mirror along the mirror axis. The system also includes a variable aperture stop so that the system has a variable NA. A projection photolithography system that employs the optical system is also disclosed.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: October 3, 2006
    Assignee: Ultratech, Inc.
    Inventor: Romeo I. Mercado
  • Patent number: 7098155
    Abstract: Apparatus and method for performing laser thermal annealing (LTA) of a substrate using an annealing radiation beam that is not substantially absorbed in the substrate at room temperature. The method takes advantage of the fact that the absorption of long wavelength radiation (1 micron or greater) in some substrates, such as undoped silicon substrates, is a strong function of temperature. The method includes heating the substrate to a critical temperature where the absorption of long-wavelength annealing radiation is substantial, and then irradiating the substrate with the annealing radiation to generate a temperature capable of annealing the substrate.
    Type: Grant
    Filed: January 22, 2004
    Date of Patent: August 29, 2006
    Assignee: Ultratech, Inc.
    Inventors: Somit Talwar, David A. Markle
  • Patent number: 7095904
    Abstract: A method and apparatus (10) for determining a best focus position of an object (30) relative to a reference position (e.g., axis A) of a dark-field optical imaging system (20), with an effective focusing range up to 10 times of the depth of field of the system. The method includes the steps of first forming a dark-field image of the object at different focus positions (zm). Each dark-field image has a corresponding image intensity distribution with an average intensity and a variance of intensity. The next step is forming a set of contrast values by calculating a contrast value (Cm) for each dark-field image based on the variance and the average intensity. The last step is determining the best focus position by fitting a Lorentzian function to the set of contrast values plotted as a function of the different focus positions and identifying the focus position associated with the maximum contract value (Cmax).
    Type: Grant
    Filed: January 14, 2004
    Date of Patent: August 22, 2006
    Assignee: Ultratech, Inc.
    Inventor: Weijian Wang
  • Patent number: 7078736
    Abstract: A light emitting device includes a photonic crystal having a periodic pattern of elements exhibiting a spectrum of electromagnetic modes that includes guided modes of frequencies below a predetermined cutoff frequency, and radiation modes of frequencies below and above the cutoff frequency. A radiation source is associated with the photonic crystal. Each of the elements is covered by a reflective layer so as to introduce at least an omnidirectional photonic band gap between the guided modes and so as to permit coupling of the radiation to the radiation modes rather than to the guided modes.
    Type: Grant
    Filed: May 27, 2004
    Date of Patent: July 18, 2006
    Assignee: Han Shin Company, Ltd.
    Inventors: Chung-Hsiang Lin, Chia-Feng Lin
  • Patent number: 7076228
    Abstract: The present invention reduces the degradation in performance of one or more radio signals that are co-transmitted with a first radio signal from the same transmitting antenna in the same frequency channel and received by the same antenna due to multipath or other shared interference, where the one or more radio signals can be separated from the first radio signal.
    Type: Grant
    Filed: March 30, 2003
    Date of Patent: July 11, 2006
    Inventor: Kenneth F. Rilling
  • Patent number: 7063514
    Abstract: An air pump is capable of inflating an inflatable object, and includes a housing unit, a motor and a fan. The motor and the fan are disposed within the housing unit. The housing unit is formed with a pair of first and second intake port units and an exhaust port unit. The fan includes a middle plate connected fixedly to a driving shaft of the motor, and a pair of first and second fan blade units extending respectively from two opposite side surfaces of the middle plate. Air is sucked into the housing unit by the first and second fan blade units through the first and second intake port units, respectively, and is subsequently forced out of the housing unit by the first and second fan blade units through the exhaust port unit.
    Type: Grant
    Filed: January 24, 2005
    Date of Patent: June 20, 2006
    Inventor: Hsin-Tsai Wu
  • Patent number: 7059441
    Abstract: A mount frame includes a first frame unit having a first rear frame portion which is provided with an anchoring member and a gripped member. A second frame unit has a second front frame portion provided with a seat post, an anchored member which is disposed to be journalled on the anchoring member about a rotational axis. Thus, the second frame unit is rotatable relative to the axis to facilitate assembly of the first rear frame portion and the second front frame portion. A gripping member is disposed on the second front frame portion to confront the gripped member. A tightening unit is disposed to push the gripping member to abut tightly against the gripped member.
    Type: Grant
    Filed: January 14, 2004
    Date of Patent: June 13, 2006
    Assignee: Kwang Yang Motor Co. Ltd.
    Inventor: Jui-Tien Chen
  • Patent number: 7049544
    Abstract: A beamsplitter apparatus for use with high-power radiation is disclosed. The apparatus includes a thermally conductive frame with a central aperture. The frame holds a window in the central aperture at the window's periphery. The window includes a diamond substrate with an optional coating formed thereon. Because the substrate is diamond and the frame is thermally conductive, the window is less susceptible to thermal effects caused by absorption of the incident radiation by the window. Thus, the original flatness of the widow surfaces is preserved, and variations in its index of refraction will be minimal. The result is that high-power radiation beams reflected from and transmitted by the widow remain substantially undistorted.
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: May 23, 2006
    Assignee: Ultratech, Inc.
    Inventor: Igor Landau
  • Patent number: 6989515
    Abstract: An image stabilization apparatus and method for stabilizing the imaging of a high-performance optical system prone to imaging instabilities from thermal effects. Thermal instabilities within the lens, such as convection, can result in image placement errors in a high-performance optical system. The apparatus includes a heating element arranged on the upper surface of the optical system to provide heat to one or more gas-filled spaces in the optical system. An insulating blanket covers a portion of the optical system to uniformize the heating of the optical system and increase efficiency of the apparatus. The gas in the spaces is heated so that the warmer gases reside near the upper portion of the optical system, while the cooler gases reside near the lower portion of the optical system. This creates a stable thermal environment within the lens system, thereby stabilizing the imaging. Optionally gas can be flowed over the lower surface to keep heat from heating the lower portion of the optical system.
    Type: Grant
    Filed: July 18, 2003
    Date of Patent: January 24, 2006
    Assignee: Ultratech, Inc.
    Inventors: Michael A. Newcomb, Evan R. Mapoles, David P. Gaines, Steve Shannon
  • Patent number: 6979211
    Abstract: An expansion device includes a card bus connector and a masking bracket. The card bus connector includes a connector housing that has a card slot defined by opposite long lateral walls and opposite short lateral walls. The masking bracket includes a frame plate for abutting against an outer wall surface of one of the long lateral walls, an anchoring plate that extends from a lateral edge of the frame plate for abutting against an outer wall surface of one of the short lateral walls, and a masking plate that extends a top edge of the frame plate toward the other one of the long lateral walls so as to shield a predetermined portion of the card slot. The masking plate has a bottom side formed with a rib projection that extends into the card slot when the masking bracket engages the card bus connector.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: December 27, 2005
    Assignee: Universal Scientific Industrial Co., Ltd.
    Inventor: Ying-Chih Shen
  • Patent number: 6975786
    Abstract: An optical switch uses two ferroelectric liquid crystal spatial light modulators (10, 11) with an interconnect region in between. The switch uses bulk lenses (2, 8) to focus light from an input fibre array (1) to a first spatial light modulator (10), and from the second spatial light modulator (11) to an output array (9). Each spatial light modulator displays a respective hologram selected from a previously calculated set, to cause a desired switching of light from the input fibre array to the output array.
    Type: Grant
    Filed: October 4, 2000
    Date of Patent: December 13, 2005
    Assignee: Thomas Swan & Co. Ltd.
    Inventors: Steven Warr, Kim Leong Tan, William Crossland, Ilias Manolis, Maura Redmond, Timothy Wilkinson, Melanie Holmes, Brian Robertson
  • Patent number: 6954252
    Abstract: An optical switch uses a polarization insensitive spatial light modulator operating by a double pass through a liquid crystal cell. The switch includes two such modulators in a cross bar arrangement. Different embodiments employing techniques for reducing cross talk are described.
    Type: Grant
    Filed: October 4, 2000
    Date of Patent: October 11, 2005
    Assignee: Thomas Swan & Co. LTD
    Inventors: William Crossland, Melanie Holmes, Ilias Manolis, Timothy Wilkinson, Maura Redmond, Brian Robertson
  • Patent number: 6948369
    Abstract: An external focused ultrasonic beam, non-destructive, open-air, inspection method of sheet metal spot and seam weldments using a probe in combination with motion measurement of the probe over the weldments during inspection without immersion of the material. Reflected ultrasonic waves are received and signals produced and processed or displayed as A-scan, B-scan and C-scan images that are easily recognized. An A-Scan is based on the time-of-flight difference between the outer surface, the weldment and inner and opposite surfaces of the component. B-scan and C-scan indicate the degree of weld fusion and provide data relative to fused thickness and defects sheet metal or welds. A special purpose scanner that enables ultrasonic examination welds. Scanner is pencil like ultrasonic probe with bearing face and position sensing device disposed adjacent a weld position. Scanner collects data for method to determine various characteristics of welded items.
    Type: Grant
    Filed: January 12, 2005
    Date of Patent: September 27, 2005
    Assignee: Applied Metrics, Inc.
    Inventors: Marvin F. Fleming, Jack P. Clark
  • Patent number: 6946815
    Abstract: A switch for a variable-speed induction motor includes conductive connecting pieces, a rotary member, and a driving unit. The connecting pieces are mounted in a housing, are adapted to be connected to the induction motor, and have distal contact parts that surround an axis of the housing. The distal contact parts of any two of the connecting pieces form either an angular or height difference therebetween with respect to the axis. The rotary member is rotatable about the axis inside the housing, and is formed with contacting regions that are arranged along the axis and that are in sliding contact with the distal contact parts. The driving unit is operable so as to drive rotation of the rotary member about the axis such that the connecting pieces are bridged selectively and electrically by the contacting regions of the rotary member for varying the speed of the induction motor.
    Type: Grant
    Filed: September 9, 2004
    Date of Patent: September 20, 2005
    Inventors: Chung-Hsin Hao, Jui-Li Lin
  • Patent number: 6925882
    Abstract: Spot and seam weldments in sheet metal components are inspected by a method in which a focused ultrasonic beam is directed into the weldment from the outside surface together with measuring the motion of the ultrasonic beam over the weldment. Reflected ultrasonic waves are received and signals indicative thereof are produced and processed or displayed as image forms that are easily recognized by an operator. This data is displayed as an A-Scan where a predetermined time window is established on the display, based on the time-of-flight difference between the outer surface, the weld interface or interfaces and the inner or opposite surface of the component. Certain ultrasonic signals are indicative of the degree of complete fusion in the weld zone and provide data relative to the total fused thickness and to defects either in the sheet metal or in the weld.
    Type: Grant
    Filed: October 7, 2002
    Date of Patent: August 9, 2005
    Inventors: Marvin F. Fleming, Jack P. Clark
  • Patent number: 6922513
    Abstract: An optical fiber has a core, an inner cladding and an outer cladding on. In a first region the inner cladding refractive index has a first value which differs from the core refractive index by about 0.0045. The inner cladding refractive index changes along said fiber from the first value to a second value at a free-space end. The second value matches the core refractive index, so that the effective diameter of the core at the free-space end is that of the core plus the inner cladding. Hence the outer cladding acts to constrain the light in the end region. The spot-size and the V number (normalized frequency) are increased, thereby increasing offset tolerances.
    Type: Grant
    Filed: December 4, 2000
    Date of Patent: July 26, 2005
    Assignee: Thomas Swan & Co., Ltd.
    Inventor: Melanie Holmes
  • Patent number: 6898306
    Abstract: A method of measuring machine alignment offset of an optical machine having an alignment system, so that subsequent processing of substrates on set of optical machines can be performed in a machine-independent manner. The optical machine forms overlayed images of first and second patterns formed on either one or two reticles onto a substrate at respective first and second levels. The method of the invention includes forming a virtual zero-offset alignment pattern and a virtual zero-offset metrology pattern and imaging first and second metrology patterns on the substrate at the first and second levels, respectively. The second metrology pattern is aligned to the first metrology pattern using the zero-offset alignment pattern so that the exposures are performed in an overlayed manner. The first and second metrology patterns are based on the virtual zero-offset metrology pattern.
    Type: Grant
    Filed: May 14, 2001
    Date of Patent: May 24, 2005
    Assignee: Ultratech, Inc.
    Inventor: Shin-Yee Lu