Abstract: Systems and methods that improve process control in semiconductor manufacturing are disclosed. According to an aspect of the invention, conditions in a cluster tool environment and/or a wafer therein can be monitored in-situ via, for example, a scatterometry system, to determine whether parameters associated with wafer production are within control limits. A cluster tool environment can include, for example, a lithography track, a stepper, a plasma etcher, a cleaning tool, a chemical bath, etc. If an out-of-control condition is detected, either associated with a tool in the cluster tool environment or with the wafer itself, compensatory measures can be taken to correct the out-of-control condition. The invention can further employ feedback/feed-forward loop(s) to facilitate compensatory action in order to improve process control.

Abstract: The present invention relates to an improved system and method for an automated electronic messaging system employing at least one host computer and at least one designated device, such as a mobile device. A forwarding agent sends a message from the host computer to the designated device. The designated device receives the forwarded message, sends a response message directly to a recipient and sends a copy message, which is associated with the response message, to the host computer. The response message is configured using an address associated with the host computer.

Abstract: The present invention analyzes a user's or client application's requirements and searches for a solution based on the end-to-end latency requirements (requested or derived), data formats, control protocols, timing and synchronization, local streaming, and resource availability. The search for a solution is tracked to allow backtracking from the point of no solution. Once a solution is determined, the system translates the solution into requirements for the individual components of the graph.

Abstract: An improved network content filtering system and method utilize the network address translation functionality of a shared network connection to redirect outgoing packets from a client intended for a destination web server to an access controlling web server instead. Before a session to the destination web server is established, the access controlling web server either approves or refuses the connection, providing a content filtering mechanism. If the connection is refused, the access controlling web server may substitute other content for a filtered URL. In order to identify the client, the shared connection may additionally embed an identifier token in the redirected traffic, so as to customize the filtering action or to facilitate billing functions.

Abstract: Methods and systems for improving at least one of carrier ion/charge mobility, distribution and permeability in a semiconducting polymer layer of a microelectronic device are disclosed. The methods include forming a semiconducting polymer layer containing at least one semiconducting polymer with one or more ion-complexing side-chain groups. The methods provide for the manufacture of microelectronic devices with one or more of improved carrier ion/charge mobility, distribution and permeability.

Abstract: The present invention generally relates to semiconductor processing, and in particular to methods and systems for analyzing photolithographic reticle defects that include detecting soft defects on a reticle and analyzing the material composition of the defects for a particular chemical signature. Specifically, the present invention scans and images a soft defect via an optical inspection scan of a reticle, mills the defect using a Focused Ion Beam, and analyzes the defect for signatures using Electron Spectroscopy for Chemical Analysis and/or Fourier Transform Infrared Spectroscopy. The present invention thus provides for real-time analysis of the chemical composition of a soft defect on a reticle without the need for a defect identification navigation system. According to an aspect of the present invention, reticle defects can be monitored without removal of a pellicle, thus facilitating increased throughput and decreased cost in reticle repair and/or cleaning.

Abstract: The present invention relates to a system and methodology to facilitate multiattribute adjustments and control associated with messages and other communications and informational items that are directed to a user via automated systems. An interface, specification language, and controls are provided for defining a plurality of variously configured groups that may attempt to communicate respective items. Controls include the specification of priorities and preferences as well as the modification of priorities and preferences that have been learned from training sets via machine learning methods. The system provides both a means for assessing parameters used in the control of messaging and communications and for the inspection and modification of parameters that have been learned autonomously.

Abstract: A system and method for facilitating interactions between two or more entities where the entities have different versions of a data type is provided. The system includes a data type identifier that can identify whether interacting entities have a mismatched resolvable data type and a data type resolver that can resolve the data types by employing features appearing in the different resolvable data types that are common between the data types. The system employs a resolvable data type that includes attributes, methods and metadata, where the metadata describes the resolvable data type, its attributes and/or its methods. The resolvable data type may be associated with a proxy. The resolvable data type may also be adapted to be incrementally extended on an as-needed basis.

Abstract: A multi-layer immersion medium monitoring system for a lithographic process monitors characteristics of an immersion medium of a semiconductor manufacturing process. The multi-layer immersion medium includes at least a first liquid of a first density (or viscosity) and a second liquid of a lower density (or viscosity), both of which are interspersed between a final optical component and a semiconductor layer. The higher density layer is provided to reduce turbulence in the immersion medium during the lithographic processes. A scatterometry system monitors optical characteristics of the multi-layer immersion medium to effectuate control of a lithographic process.

Abstract: A system and method for employing a file system and file system services on the industrial controller. The file system allows industrial control programs to implement many functions previously performed within the industrial control program and stored in the same memory as the industrial control program. An execution engine is provided that interprets instructions included in an industrial control program. The instructions utilize services in the file system for including user defined routine files loaded from local or remote locations, to load and unload recipe files from local and remote locations, to log and retrieve measured data and trend data to files at local or remote locations, to select different operating systems and to select a running program from a plurality of running programs utilizing the file system.

Abstract: The present invention relates generally to photolithographic systems and methods, and more particularly to systems and methodologies that facilitate the reduction of line-edge roughness (LER) and/or standing wave expression during pattern line formation in an integrated circuit. Systems and methods are disclosed for retaining a target critical dimension (CD) of photoresist lines, comprising a non-lithographic shrink component that facilitates mitigating LER and/or standing wave expression, wherein the shrink component is employed to heat a particular resist to the glass transition temperature of the resist to effectuate mitigation of LER and/or standing wave expression. Additionally, by heating the resist to its glass transition temperature, the systems and methods of the present invention effectively impede deviation from a desired target critical dimension.

Abstract: The present invention leverages curve fitting data techniques to provide automatic detection of data anomalies in a “data tube” from a data perspective, allowing, for example, detection of data anomalies such as on-screen, drill down, and drill across data anomalies in, for example, pivot tables and/or OLAP cubes. It determines if data substantially deviates from a predicted value established by a curve fitting process such as, for example, a piece-wise linear function applied to the data tube. A threshold value can also be employed by the present invention to facilitate in determining a degree of deviation necessary before a data value is considered anomalous. The threshold value can be supplied dynamically and/or statically by a system and/or a user via a user interface. Additionally, the present invention provides an indication to a user of the type and location of a detected anomaly from a top level data perspective.

Abstract: A data compression system is provided in accordance with the present invention. The system includes a scanning component which scans at least a portion of a transformed image. The scan is performed substantially in a horizontal direction on a first section of the portion and in a vertical direction on a second section of the portion to enable improved data compression of the transformed image. The horizontal and vertical scan directions are performed via a contiguous scan of the respective sections to further enable improved data compression of the transformed image.

Abstract: A system facilitating measurement and correction of overlay between multiple layers of a wafer is disclosed. The system comprises an overlay target that represents overlay between three or more layers of a wafer and a measurement component that determines overlay error existent in the overlay target, thereby determining overlay error between the three or more layers of the wafer. A control component can be provided to correct overlay error between adjacent and non-adjacent layers, wherein the correction is based at least in part on measurements obtained by the measurement component.

Abstract: A system and method for facilitating remote access of an application available via a stateless protocol is provided. Such applications are typically accessed via the World Wide Web portion of the Internet (the “Web”) using a browser application and an HTTP protocol. The system can include one or more components for caching data associated with the remote access, the data comprising state and/or user specific information. The state and/or user specific information can be stored in a user context object (UCO). One or more user context objects can be managed by a user context manager that facilitates locating user context objects and reclaiming memory associated with user context objects that are no longer necessary to support remote access of the application accessed via a stateless protocol.

Abstract: The present invention relates generally to a consumer interactive shopping and marketing system. The system includes a portable data terminal for communicating information over a communication network. The present system has aspects that may be used within a shopping establishment or at a user's home.

Abstract: Optical integrated circuits are disclosed having a gap traversing the lens or the waveguide grating and an actuator that controllably positions the optical integrated circuit on each side of the gap. As a result, the thermal sensitivity of the optical integrated circuits, for example, arrayed waveguide gratings, is mitigated. Also disclosed are methods for fabricating optical integrated circuits employing the gap and actuator.

Abstract: The transmission of information during ad click-through is disclosed. In one embodiment, a computer-implemented method selects an ad to be displayed on a web page, as one of a plurality of ads within a current cluster in which each of the ad has a probability to be selected. The method displays the ad on the web page, and then detects activation—for example, click-through—of the displayed ad. The method transmits information to an entity associated with the ad, such as an advertiser, upon detecting click-through or other activation of the ad. In one embodiment, the information transmitted includes information regarding the current cluster.

Abstract: The present invention provides systems and methods that utilize inductive current steering to improve logic circuit performance by mitigating propagation delays associated with conventional transistor current steering. The system and methods employ RF transformers, wherein energizing primary windings induce current in associated secondary windings. In one aspect, a single clock bus is employed to induce the current, which is routed via respective ends of the secondary winding to emitter leads of the transistors. This current and voltage is 180 degrees out-of-phase such that one transistor is “on” while the other is “off,” which generates a differential output. In another aspect, a differential clock signal is employed to induce the current in secondary windings and associated transistor emitters.

Abstract: Disclosed are immersion lithography methods involving using a base developer as an immersion lithography fluid. Consequently, it is unnecessary to contact a developer with an irradiated resist after the immersion lithography fluid is removed.