Abstract: A process for forming a uniform nanoporous dielectric film on a substrate. The process includes horizontally positioning a flat substrate within a cup; depositing a liquid alkoxysilane composition onto the substrate surface; covering the cup such that the substrate is enclosed therein; spinning the covered cup and spreading the alkoxysilane composition evenly on the substrate surface; exposing the alkoxysilane composition to water vapor and base vapor to thereby form a gel; and then curing the gel. The invention also provides an apparatus for spin depositing a liquid coating onto a substrate. The apparatus has a cylindrical cup with an open top section and removable cover which closes the top. A vapor injection port extends through the center of the cover. Suitable means hold a substrate centered within the cup and spin the cup.

Abstract: A process for increasing the etch resistance of photoresists, especially positive working 193 nm sensitive photoresists which are suitable for use in the production of microelectronic devices such as integrated circuits. A 193 nm photosensitive composition is coated onto a substrate, exposed to activating energy at a wavelength of 193 nm to decompose the polymer in the imagewise exposed areas; and developed to remove the exposed nonimage areas. Then the image areas are exposed to sufficient electron beam radiation to increase the resistance of the image areas to an etchant.

Abstract: The invention provides processes for the formation of structures in microelectronic devices such as integrated circuit devices. More particularly, the invention relates to the formation of vias, interconnect metallization and wiring lines using multiple low dielectric-constant inter-metal dielectrics. The processes use two or more dissimilar low-k dielectrics for the inter-metal dielectrics of Cu-based dual damascene backends of integrated circuits. The use of both organic and inorganic low-k dielectrics offers advantages due to the significantly different plasma etch characteristics of the two kinds of dielectrics. One dielectric serves as the etchstop in etching the other dielectric so that no additional etchstop layer is required. Exceptional performance is achieved due to the lower parasitic capacitance resulting from the use of low-k dielectrics.

Abstract: The invention pertains a bathymetric sonar system involving a single swept transmit beam projector system which compensates for ship attitude and positioning changes. A sonar transducer array has a matrix of acoustic projector elements arranged in a plurality of substantially parallel rows and a plurality of substantially parallel columns; and means for causing each of the projector elements to generate an acoustic signal at a frequency and phase independently from each other projector element. Preferably the transducer array is operated by causing the projector elements to generate an acoustic signal at a frequency and phase independently from each other projector element, at a frequency and phase which is initially the same as the frequency and phase of each other element in its column and such that the frequency and phase of the projector elements in each column is different from each other column. Thus a single swept beam is projected toward the ocean floor.

Abstract: An improved transducer arrangement for low frequency sonar projectors that convert electric signals to mechanically generated acoustic signals. In one embodiment the arrangement has both a convex flextensional transducer and a concave flextensional transducer. An open side of the convex transducer is attached to an open side of the concave transducer by an intermediate bulkhead which closes each of the attached open sides. An end plate is attached to another open side of the convex transducer and another end plate is attached to another open side of the concave transducer such that the end plates close the attached open sides. In another embodiment, transducer assembly has a convex transducer having end plates and a concave transducer having end plates. Either one of the endplates of the concave transducer is attached to one of the endplates of the convex transducer, or an endplate of the concave transducer is also an endplate of the concave transducer.

Abstract: A generally cylindrical hydrophone configuration provides compensation for longitudinal accelerations by placing four identical solid piezoelectric transducer elements along its axis with each transducer element being bonded to a head member, two of which are located generally centrally of the cylindrical housing and fastened thereto and two of which are located near the outside edges of the housing and having slight clearance therewith. Flexible polyurethane boots are clamped to the ends of the housing. The volumes between the centrally disposed and outer transducer head members and between the outer head members and the boots are filled with methyl silicon fluid. Each head member is electrically connected to one side of the electrical output, and the junction between the transducer members is connected to the opposite side, both sides being wired to an electrical contact plate located between the two centrally disposed transducer head members, this volume being filled with electrical potting material.

Abstract: This invention relates to positive working, peel apart, photopolymerizable sheet constructions which, upon exposure to an actinic radiation source through a screened image, can accurately reproduce said image. The construction is useful as a color proofing film which can be employed to accurately predict the image quality from a lithographic printing process. The method applies an adhesive to a temporary support and then laminates it to a receiver with removal of the temporary support. A photosensitive layer on a support is laminated to the adhesive, exposed, and peeled apart to form a positive image. Additional adhesive layers and photosensitive layers are similarly processed to provide a full color reproduction.

Abstract: A process for forming T-shaped metal contacts on a dielectric substrate. The process includes deposition of first and second photoresist layers onto a substrate; individually overall electron beam exposure of both layers; with subsequent imagewise UV exposure and development of both layers to form hollow cavities in the layers. By concentrating the electron beam radiation on the mid-point in the thickness of each photoresist layer, the radiation is distributed throughout each layer, resulting in solubility properties which lead to the formation of hollow cavities of a certain desired shape. In one embodiment of the invention, three-dimensional structures are formed in the photoresist layers by filling the hollow cavities with metal. Subsequent removal of unwanted portions of the photoresist layers produces a dielectric substrate having T-shaped metal contacts on its surface.

Abstract: An improved mechanical seal of the type useful to form a seal between a stationary housing and a rotatable shaft having a shaft axis extending through an opening in the housing. The mechanical seal has stationary components and rotatable components. The stationary components comprise a stationary seal element having a stationary seal surface and the rotatable components comprise a rotatable seal element having a rotatable seal surface. The stationary and rotatable seal surfaces have substantially equal and oblique, preferably, acute, angles to the shaft axis. The seal surfaces oppose each other and are forced together to form a seal. The seal can be secured in place by improved connector clips.

Abstract: Polymeric compounds of the formula: (D)n—M—(R1)m  (I) wherein (m) and (n) independently selected positive integers, preferably from about 1 to about 6 each; D is a residue of a biologically active moiety; M is a multifunctional linker/spacer moiety; and R1 is a polymer residue are disclosed. Methods of preparing the same and methods of treatment using the same are also included as part of the present invention.

Abstract: The invention pertains to a hopper loader apparatus for separating and forming an overlapping shingled stream of individual signatures of sheet materials from a vertically aligned, parallelepiped shaped stack of such signatures for subsequent handling operations. The hopper loader has a slippage resistant belt which engages a bottom edge of each signature and assists in preventing the signatures from slipping by keeping them upstanding. Preferably the slippage resistant belt has an array of projections extending upwardly from a belt surface which secures the signatures in place. This produces a smooth, regular, even signature stream. Individual signatures flow reliably, one-by-one off of the downward conveyor to another conveyor.

Abstract: A process for forming a photoresist image on a substrate and a process for forming metal contacts on a substrate are described. The process of forming a photoresist image includes depositing a positive working photoresist composition onto a metal layer which is on a substrate to thereby form a photoresist layer then imagewise exposing the photoresist layer to actinic radiation and developing said photoresist layer to form a plurality of cavities through the photoresist layer thereby revealing portions of the metal layer. Then the inventions provides for etching away the revealed portions of the metal layer followed by an overall exposing both the substrate and the remaining photoresist layer and remaining metal layer portions to sufficient electron beam radiation to render a part of the photoresist layer directly adjacent to the metal layer more soluble in a developer than the balance of the photoresist layer.

Abstract: A tractor rake attachment is disclosed that includes a rake platform, the rake platform having a plurality of tines secured to a rake platform with the tines having a length that extend perpendicular to the rake platform. The tines are approximately evenly spaced along the length of the rake platform and have a depth that permits elastic deformation of the tine when contacted by ta heavy rock. The tines on the rake platform may be forwardly adjusted to create a angle along the rake platform in relation to the movement of a tractor rake. The rake platform is capable of being attached to a tractor rake so that the horizontal length of the tractor rake is extended with the tines extending in a downward direction from the rake platform to the ground. A method for light and medium field grading also is disclosed.

Abstract: The invention pertains to sonar receive arrays. More particularly, the invention pertains to a process for calibrating the amplitude, position and phase angle of an array of underwater receive hydrophones with respect to one another. The process requires projecting an acoustic test signal at a known frequency from a towed underwater acoustic projector toward an array of towed, underwater, interconnected, receive hydrophones; detecting and determining the response of the receive hydrophones to said test signal by signal processing means; and calibrating at least one parameter for the operation of the receive hydrophones resulting from the response. Calibrated parameters include the amplitude, position and phase angle of the receive hydrophones relative to one another.

Abstract: A process for the formation of structures in microelectronic devices such as integrated circuit devices. Vias, interconnect metallization and wiring lines are formed using single and dual damascene techniques wherein dielectric layers are treated with a wide electron beam exposure.

Abstract: A process for the treatment of the surface of dielectric films to remove moisture and other contaminants. Such treatment is done by electron beam exposure in order to prepare the surface for a subsequent chemical vapor deposition of oxide, nitride or oxynitride layers. The films are useful in the manufacture of integrated circuits.

Abstract: The present invention is directed to methods of forming esters of tertiary alcohols. The methods include reacting a compound containing a tertiary alcohol with an acyl heteroaromatic ion-based compound of the formula: wherein R1 is an aromatic or aliphatic acid residue; Y is O or S; Z is CR2 or N; X is selected from the group consisting of wherein R2 and R3 are independently selected from the group consisting of H, C1-6 alkyls, C1-6 substituted alkyls, C1-6 heteroalkyls, C3-8 branched alkyls, C3-8 cycloalkyls, C1-6 substituted heteroalkyls, aryls, substituted aryls, C1-6 alkyl aralkyls, C1-6 heteroalkyl aralkyls, C3-8 branched alkyl aralkyls and C3-8 cycloalkyl aralkyls; and R2′ is the same as R2 except that R2′ is not H; in the presence of a lanthanideIII metal-based catalyst and a base.

Abstract: An electrostatic holding device for holding semiconductor wafers and similar materials during microelectronic device manufacturing operations. It has a circular, electrically conductive wafer support having a rounded periphery; an annular border region; and a flat, concentric, raised, central plateau having an electrically conductive top surface. The plateau has a tapered circumferential edge which extends down to the annular border region. A nonelectrically conductive coating is on the rounded periphery, the border region and the tapered edge which extends to, but does not cover, the conductive top surface of the central plateau such that an the coating is coplanar with the conductive top surface of the central plateau. A removable dielectric sheet overlies the top surface of the central plateau, the coating on the tapered edge and the coating on the border region.

Abstract: The invention relates to a process for the preparation of endo-nortropine using 8-benzyl-nortropan-3-one perchlorate, as well as the latter product. Endo-nortropine is the key product for the production of important azonia-spironortropanol esters, which are used as pharmaceuticals, particularly spasmolytics. There are three different synthesis methods for the preparation of said intermediate, which lead to different disadvantages. These problems are obviated by the present invention through the two-stage treatment of 8-benzyl-nortropan-3-one perchlorate with catalytically activated hydrogen, the starting product initially being prehydrogenated in aqueous suspension and at atmospheric pressure and ambient pressure with a palladium catalyst, at the end of the reaction the catalyst is recovered by filtration, the filtrate is passed over an anion exchanger and the now alkaline reacting solution is rendered turbulent at 1000 to 1500 r.p.m.

Abstract: A dry film coating composition for forming a coating suspension for film coating nutritional supplements, pharmaceutical tablets, and the like, comprising a dextrin and a detackifier.