Patents Assigned to Amtech Systems
  • Patent number: 8392137
    Abstract: A testing system and method for testing glass-mounted RFID tags such as tags mounted on vehicle windows. A testing carrier for use in a test chamber simulates the effect on the tag of the mounting glass. The test chamber and carrier are calibrated by first mounting the tag on the test carrier and making sensitivity measurements and then mounting the tag on glass that is representative of the actual production environment. Comparisons are made between the two measurements and calibration factors are derived to compensate for differences between the actual mounting glass and the test carrier. The test carrier is designed to provide uniform pressure against the tag to minimize any distortions that would alter the sensitivity of the tag.
    Type: Grant
    Filed: February 12, 2010
    Date of Patent: March 5, 2013
    Assignee: Amtech Systems, LLC
    Inventor: Tai Won Youn
  • Patent number: 8344886
    Abstract: An RFID tag for use in a vehicle for use in an electronic toll collecting system. The tag is capable of transmitting data to a tag interrogator indicating the occupancy status of the vehicle. In an embodiment, the tag has a user input and a visual and audible tag status indicator. The user input is used to change the occupancy status of the tag, wherein the occupancy status is a portion of a message sent by radio frequency to the interrogator when the vehicle passes through a toll area.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: January 1, 2013
    Assignee: Amtech Systems, LLC
    Inventors: Kelly Gravelle, Charles A. Johnson, Matthew K. Burnett, Dale L. Scott
  • Patent number: 8338211
    Abstract: Systems and methods of the present invention can be used to charge a charge-holding layer (such as a passivation layer and/or antireflective layer) of a solar cell with a positive or negative charge as desired. The charge-holding layer(s) of such a cell can include any suitable dielectric material capable of holding either a negative or a positive charge, and can be charged at any suitable point during manufacture of the cell, including during or after deposition of the passivation layer(s). A method according to one aspect of the invention includes disposing a solar cell in electrical communication with an electrode inside a chamber. The solar cell includes an emitter, a base, a first passivation layer adjacent the emitter, and a second passivation layer adjacent the base. Gas is injected into the chamber and a plasma (with photons having an energy level of at least about 3.1 eV) is generated using the gas.
    Type: Grant
    Filed: March 17, 2011
    Date of Patent: December 25, 2012
    Assignee: Amtech Systems, Inc.
    Inventor: Jeong-Mo Hwang
  • Publication number: 20120306627
    Abstract: A multi-mode, preferably dual mode, radio frequency identification (RFID) tag is adapted for automatic detection of whether a RFID reader located within communication range of the RFID tag is transmitting a continuous wave (CW) or modulated wave types of RF signal, and accordingly, mandating a response from the tag in read-only (RO) mode or read/write (R/W) mode, respectively. The tag includes means for designating one of the RO and R/W operating modes as a default mode of the tag, and for switching the tag from its default mode to its other operating mode, and vice versa, according to a rule for determining the frequency of occurrence of a selected event related to signal type of the reader. A device-implemented method of this automatic detection, and a method of fabricating the tag, are also disclosed.
    Type: Application
    Filed: May 10, 2012
    Publication date: December 6, 2012
    Applicant: Amtech Systems, LLC
    Inventors: Kelly Gravelle, Robert W. Tiernay, Dale L. Scott, Charles A. Johnson, Filip Weytjens, Matthew K. Burnett
  • Patent number: 8314687
    Abstract: A multi-protocol RFID interrogating system employs a synchronization technique (step-lock) for a backscatter RFID system that allows simultaneous operation of closely spaced interrogators. The multi-protocol RFID interrogating system can communicate with backscatter transponders having different output protocols and with active transponders including: Title 21 compliant RFID backscatter transponders; IT2000 RFID backscatter transponders that provide an extended mode capability beyond Title 21; EGO™ RFID backscatter transponders, SEGO™ RFID backscatter transponders; ATA, ISO, ANSI AAR compliant RFID backscatter transponders; and IAG compliant active technology transponders. The system implements a step-lock operation, whereby adjacent interrogators are synchronized to ensure that all downlinks operate within the same time frame and all uplinks operate within the same time frame, to eliminate downlink on uplink interference.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: November 20, 2012
    Assignee: Amtech System, LLC
    Inventors: Kelly Gravelle, Steven J. Catanach, Robert W. Tiernay, Joseph H. Kao, Michael Melville
  • Publication number: 20120280796
    Abstract: A method for interleaving time slots in a multi-antenna system for communication with RFID tags is disclosed. An example is shown for an eight antenna system. A first four antennas arranged side-by-side are sequentially energized to interrogate RFID transponders. A second set of four antennas arranged side-by-side, the first of which is adjacent to the last of the first set of antennas. A four-antenna sequence is performed for the first four antennas and a second four antenna sequence is performed for the second set of antennas. The first and second four antenna sequences are offset by only a marginal amount, sufficient to ensure that a transponder signal received four antennas away from an active antenna is not acknowledged because the receive window for the non-active antenna is delayed.
    Type: Application
    Filed: May 4, 2012
    Publication date: November 8, 2012
    Applicant: AMTECH SYSTEMS, LLC
    Inventors: Kelly Gravelle, Michael Melville, Karl Kelsey
  • Patent number: 8279048
    Abstract: An RFID tag having a non-volatile memory and a piezoelectric sensor. The piezoelectric sensor produces an electrical charge that momentarily supplies electrical power to the RFID tag when subjected to a mechanical force and the electrical power is sufficient to record data in the non-volatile memory. The piezoelectric sensor is affixed to an article such that an attempt to tamper with the article produces sufficient mechanical force on the piezoelectric sensor to record data evidencing the tampering in the non-volatile memory.
    Type: Grant
    Filed: September 29, 2009
    Date of Patent: October 2, 2012
    Assignee: Amtech Systems, LLC
    Inventors: Kelly Gravelle, Charles A. Johnson, Dale L. Scott
  • Publication number: 20120215594
    Abstract: A system carried by a vehicle for computing tolls using a global position satellite (GPS) signal receiver, a communications link, and compact toll lane information provided by a service center. Toll lane information is organized by travel monitoring point. Data for each point includes a latitude and longitude coordinate and either lane shape information or a coordinate offset from a similar lane. A driver interface module is used in conjunction with the OBU to allow selection of occupancy and to display toll information to the driver to allow for use in HOT lanes and to support congestion pricing models with zero or minimal infrastructure cost.
    Type: Application
    Filed: February 16, 2012
    Publication date: August 23, 2012
    Applicant: AMTECH SYSTEMS, LLC
    Inventor: Kelly Gravelle
  • Patent number: 8242890
    Abstract: A multi-protocol RFID interrogating system employs a synchronization technique (step-lock) for a backscatter RFID system that allows simultaneous operation of closely spaced interrogators. The multi-protocol RFID interrogating system can communicate with backscatter transponders having different output protocols and with active transponders including: Title 21 compliant RFID backscatter transponders; IT2000 RFID backscatter transponders that provide an extended mode capability beyond Title 21; EGO™ RFID backscatter transponders, SEGO™ RFID backscatter transponders; ATA, ISO, ANSI AAR compliant RFID backscatter transponders; and IAG compliant active technology transponders. The system implements a step-lock operation, whereby adjacent interrogators are synchronized to ensure that all downlinks operate within the same time frame and all uplinks operate within the same time frame, to eliminate downlink on uplink interference.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: August 14, 2012
    Assignee: Amtech Systems, LLC
    Inventors: Kelly Gravelle, Steven J. Catanach, Robert W. Tiernay, Joseph H. Kao, Michael Melville
  • Patent number: 8237565
    Abstract: When multiple readers for RF transponders have to be placed in close proximity, such as in adjacent lanes of a highway toll barrier, they can be set to operate at different frequencies. When signals from two adjacent ones of the readers interfere, the resulting signal includes interference terms whose frequencies equal the sum of the reader frequencies and the difference between the reader frequencies. To remove such interference terms while passing the desired terms, a tag includes a low-pass or other frequency-selective filter.
    Type: Grant
    Filed: July 1, 2010
    Date of Patent: August 7, 2012
    Assignee: Amtech Systems, LLC
    Inventor: Robert W. Tiernay
  • Patent number: 8228199
    Abstract: Systems, tags and methods for disabling transponders used in electronic toll collection or other RFID systems, wherein the transponders include an antenna and RFID circuitry. The transponders can be selectively disabled by positioning (e.g., pivotably moving) a disabling member having a metallic portion to an operative position over the antenna of the RFID system, whereupon the metallic portion is coupled to the antenna in such a manner as to disable the RFID circuitry so long as the disabling member is at the operative position. The RFID circuitry is arranged to be automatically enabled upon removal of the disabling member from the operative position (e.g., pivoting the disabling member back to an inoperative position).
    Type: Grant
    Filed: April 5, 2010
    Date of Patent: July 24, 2012
    Assignee: Amtech Systems, LLC
    Inventors: Scott Noakes, Kelly Gravelle
  • Patent number: 8198985
    Abstract: A multi-mode, preferably dual mode, radio frequency identification (RFID) tag is adapted for automatic detection of whether a RFID reader located within communication range of the RFID tag is transmitting a continuous wave (CW) or modulated wave types of RF signal, and accordingly, mandating a response from the tag in read-only (RO) mode or read/write (R/W) mode, respectively. The tag includes means for designating one of the RO and R/W operating modes as a default mode of the tag, and for switching the tag from its default mode to its other operating mode, and vice versa, according to a rule for determining the frequency of occurrence of a selected event related to signal type of the reader. A device-implemented method of this automatic detection, and a method of fabricating the tag, are also disclosed.
    Type: Grant
    Filed: May 31, 2005
    Date of Patent: June 12, 2012
    Assignee: Amtech Systems, LLC
    Inventors: Robert W. Tiernay, Dale L. Scott, Charles A. Johnson, Filip Weytjens, Matthew K. Burnett, Kelly Gravelle
  • Patent number: 8188908
    Abstract: Distance to a modulated backscatter tag is measured with a RFID reader that measures changes in phase with frequency of modulated backscattered RF signals. Measured distances are linked to a specific tag. The effects of other sources of reflected and interfering signals are mitigated. The techniques eliminate the need for high RF bandwidth used in time-of-flight methods, and may be used with linear, limiting or other types of amplifiers in the reader receiver. Unambiguous distance to a tag may be found using the derivative of phase with RF frequency of the modulated signal backscattered by a tag. The distance to a tag can be measured with an accuracy on the order of a centimeter. The techniques utilize the characteristics of cooperative backscatter tags (transponders, labels, etc.). New readers implement the techniques which may use unmodified tags.
    Type: Grant
    Filed: July 21, 2010
    Date of Patent: May 29, 2012
    Assignee: Amtech Systems, LLC
    Inventor: Jeremy A. Landt
  • Patent number: 8154405
    Abstract: In a protocol for preserving the privacy of communications between a RFID reader and a RFID tag, two distinct actions are taken. First, the reader and the tag must be mutually authenticated as being authorized participants in the communications. After that process is successfully completed, the authenticity of each authorized participant must be validated prior to each subsequent communication between reader and tag.
    Type: Grant
    Filed: October 1, 2008
    Date of Patent: April 10, 2012
    Assignee: Amtech Systems, LLC
    Inventors: Kelly Gravelle, Dale L. Scott, Zhenping Tan
  • Patent number: 6565304
    Abstract: An apparatus for assisting the loading of a plurality of wafer boats into a multi-level wafer boat loading system (1) includes a vertical elevator mechanism (10) attached to the wafer boat loading system (1). A vertically movable horizontal wafer boat platform (18B) is attached to a vertically movable carriage (31) included in the elevator mechanism and vertically movable along a linear track (30) therein. A control system (25) associated with the vertical elevator mechanism includes a processor for executing a stored program which stores information representing a plurality of elevation levels the plurality of cantilever paddles (5), respectively, and which responds to a selection signal corresponding to manual selection of one of the elevator levels to control a drive mechanism (22,27) which moves the wafer boat support platform (18B) from an initial position to the selected elevator level.
    Type: Grant
    Filed: May 16, 2001
    Date of Patent: May 20, 2003
    Assignee: Amtech Systems, Incorporated
    Inventors: John M. Martin, Arthur W. Harrison, Allen D. Edwards
  • Patent number: 6537010
    Abstract: An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats (24) onto/from a cantilever paddle includes a cantilever paddle (47-1) and a carriage (42-1) supporting the cantilever paddle First and second vertical translation mechanisms (34A,B) each include a stationary part (62,63) and a vertically moveable support (61). First and second horizontal translation mechanisms (50A,B) each have a base (86) supported by one of the vertically moveable supports and a horizontally moveable arm (51) supported by the base (86). A horizontal boat support assembly (102) supports the loaded wafer boats and has an end supported by a first horizontally moveable arm (51A) and another end supported by a second horizontally moveable arm (51B).
    Type: Grant
    Filed: March 19, 2001
    Date of Patent: March 25, 2003
    Assignee: Amtech Systems, Incorporated
    Inventors: John M. Martin, Arthur W. Harrison, Allen D. Edwards
  • Publication number: 20020154970
    Abstract: An apparatus for assisting the loading of a plurality of wafer boats into a multi-level wafer boat loading system (1) includes a vertical elevator mechanism (10) attached to the wafer boat loading system (1). A vertically movable horizontal wafer boat platform (181B) is attached to a vertically movable carriage (31) included in the elevator mechanism and vertically movable along a linear track (30 therein. A control system (25) associated with the vertical elevator mechanism includes a processor for executing a stored program which stores information representing a plurality of elevation levels the plurality of cantilever paddles (5), respectively, and which responds to a selection signal corresponding to manual selection of one of the elevator levels to control a drive mechanism (22,27) which moves the wafer boat support platform (18B) from an initial position to the selected elevator level.
    Type: Application
    Filed: May 16, 2001
    Publication date: October 24, 2002
    Applicant: Amtech Systems, Inc.
    Inventors: John M. Martin, Arthur W. Harrison, Allen D. Edwards
  • Patent number: 6352399
    Abstract: An apparatus for automatically and simultaneously loading a single long wafer boat or a plurality of wafer boats onto a cantilever paddle includes a stationary first track aligned with a first opening of a diffusion furnace and a first carriage moveable on the first track. The first carriage supports a cantilever paddle. A first vertical translation mechanism includes a first stationary part and a first vertically moveable support. A second vertical translation mechanism includes a second stationary part and a second vertically moveable support. A first horizontal translation mechanism includes a first base supported by the first vertically moveable support and a first horizontally moveable arm supported by the first base. A second horizontal translation mechanism includes a second base supported by the second vertically moveable support and a second horizontally moveable arm supported by the second base.
    Type: Grant
    Filed: July 7, 1999
    Date of Patent: March 5, 2002
    Assignee: Amtech Systems, Inc.
    Inventors: John M. Martin, Arthur W. Harrison
  • Patent number: 6143477
    Abstract: A method of ashing or cleaning a wafer, including introducing oxygen gas into a reaction chamber having therein a semiconductor wafer to be ashed or cleaned, producing light of wavelength less than 190 nanometers by means of a first excimer lamp, and directing the light into the oxygen gas, causing generation of ozone gas. Light of wavelength greater than 190 nanometers is produced by means of a second excimer lamp and directed that light into the ozone gas, causing generation of an oxygen radical having a high absorption coefficient. Gas including the oxygen radical is passed along a surface of the wafer, causing degeneration of organic material thereon.
    Type: Grant
    Filed: September 8, 1998
    Date of Patent: November 7, 2000
    Assignee: Amtech Systems, Inc.
    Inventor: Ji Hyo Rhieu
  • Patent number: 6061614
    Abstract: A method and apparatus for communicating between a host and a motor vehicle, the motor vehicle including an on board computer system having a bus for communicating with a plurality of motor vehicle systems. The apparatus includes an electronic tag having a transceiver for transmitting data to and receiving data from the host, a memory for storing bus requests and bus response data, a decoder for decoding requests from the host, a bus interface for reading data from and writing data to the bus and a conroller. The bus interface for extracting responses from the bus responsive to requests from the host. The responses may be stored in the memory. The controller is responsive to write requests from the host to transfer data to the bus interface and responsive to read requests from the host to transfer data stored in memory back to the host.
    Type: Grant
    Filed: October 17, 1997
    Date of Patent: May 9, 2000
    Assignee: Amtech Systems Corporation
    Inventors: Curtis L. Carrender, John Henry Linn, James Lujan, Frank Kenneth Wunderlin