Abstract: A micro-mechanical pressure transducer is disclosed in which a capacitive transducer structure is integrated with an inductor coil to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field on the transducer. The capacitive transducer structure comprises a conductive movable diaphragm, a fixed counter electrode, and a predetermined air gap between said diaphragm and electrode. The diaphragm deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer.

Abstract: A phased-array antenna system and other types of radio frequency (RF) devices and systems using microelectromechanical switches (“MEMS”) and low-temperature co-fired ceramic (“LTCC”) technology and a method of fabricating such phased-array antenna system and other types of radio frequency (RF) devices are disclosed. Each antenna or other type of device includes at least two multilayer ceramic modules and a MEMS device fabricated on one of the modules. Once fabrication of the MEMS device is completed, the two ceramic modules are bonded together, hermetically sealing the MEMS device, as well as allowing electrical connections between all device layers. The bottom ceramic module has also cavities at the backside for mounting integrated circuits. The internal layers are formed using conducting, resistive and high-k dielectric pastes available in standard LTCC fabrication and low-loss dielectric LTCC tape materials.

Abstract: A spatial light modulator is disclosed which includes an electro-optic wafer, such as lithium niobate (LiNbO3) or PLZT, formed as an asymmetric Fabry-Perot cavity with a totally reflecting dielectric mirror on its bottom face and a partially reflecting dielectric mirror on its top face. The electro-optic wafer is sandwiched between a transparent top electrode that forms a solid ground plane and a bottom electrode that is formed on a circuitry wafer and segmented into an array of electrode pads. Voltage source circuitry for each electrode is located immediately beneath the electrode in the circuitry wafer, which is bonded to the electro-optic wafer. Because the bottom electrode is segmented, a different voltage can be applied to each electrode so that the refractive index, and therefore the phase of an exiting light wave, can be spatially modulated.

Abstract: A phased-array antenna system and other types of radio frequency (RF) devices and systems using microelectromechanical switches (“MEMS”) and low-temperature co-fired ceramic (“LTCC”) technology and a method of fabricating such phased-array antenna system and other types of radio frequency (RF) devices are disclosed. Each antenna or other type of device includes at least two multilayer ceramic modules and a MEMS device fabricated on one of the modules. Once fabrication of the MEMS device is completed, the two ceramic modules are bonded together, hermetically sealing the MEMS device, as well as allowing electrical connections between all device layers. The bottom ceramic module has also cavities at the backside for mounting integrated circuits. The internal layers are formed using conducting, resistive and high-k dielectric pastes available in standard LTCC fabrication and low-loss dielectric LTCC tape materials.

Abstract: A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

Abstract: An electronic circuit for the direct conversion of a capacitive transducer signal to a digital delta-sigma bit stream is disclosed. The electronic circuit is comprised of two functional blocks, in which the variable transducer capacitance is first transformed and represented by a frequency modulated (FM) signal by a variable frequency oscillator, and subsequently converted to a digital delta-sigma representation using a frequency delta-sigma modulator. The electronic circuit eliminates any need for analog components in conjunction with the capacitive transducer, and hence simplifies the front-end circuit for applications where digital signal processing (DSP) is used. The output bit stream of the electronic circuit is similar to other analog to digital delta-sigma converters, and can therefore be processed using similar digital techniques.

Abstract: A variable capacitor device using MEMS or micromachining techniques wherein thin-films of materials are deposited, patterned and etched to form movable micromechanical elements on the surface of a substrate composed of either semiconductor, glass, metal, or ceramic material. In one embodiment of the present invention to achieve higher frequency performance as well as other benefits, the substrate is comprised of Low-Temperature Co-Fired Ceramics (LTCC). The variable capacitor is an electrostatically actuated micromechanical device and if fabricated on a LTCC multi-layered substrate material has continuous electrical connections through the layers. The same LTCC substrate material can also be used to enclose the device by selectively removing a portion of the upper substrate so as to form a cavity. The two substrates are then bonded together to enclose and protect the variable capacitor.

Abstract: A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

Abstract: A method of managing digital objects in a network is presented. The objects are stored at locations accessible in the network using a storage technique which renders the digital objects secure against unauthorized access. Pointer information which associates each digital object identifier with a pointer indicating the location of the stored digital object is also stored in the network. For each digital object validation information is stored, separately from the digital object, and is sufficient to permit a determination whether a purported instance of a digital object is identical to the original.

Abstract: A micro-mechanical pressure transducer is disclosed in which a capacitive transducer structure is integrated with an inductor coil to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field on the transducer. The capacitive transducer structure comprises a conductive movable diaphragm, a fixed counter electrode, and a predetermined air gap between said diaphragm and electrode. The diaphragm deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer.

Abstract: An electro-optic, phase-only spatial light modulator is disclosed which uses an electro-optic wafer, such as lithium niobate (LiNbO3) or lead-lanthanum-zirconate-titanate (PLZT). The electro-optic wafer is sandwiched between a transparent top electrode that forms a solid ground plane and a bottom electrode that is segmented into an array of electrode pads. Voltage source circuitry for each electrode is located immediately beneath the electrode. When a voltage is applied across the electrodes, an electrostatic field is generated between the conductors, and the refractive index of the electro-optic wafer changes slightly. The spatial light modulator can also include a totally reflecting dielectric mirror on the bottom face of the electro-optic wafer and a partially reflecting dielectric mirror deposited on the top face. Together, the mirrors and wafer form an asymmetric Fabry-Perot cavity.

Abstract: An optical cross-connect switch is disclosed which includes a plurality of optical input fibers, a plurality of optical output fibers and a plurality of the (1×N)-switches ganged together. Each of the switches includes a state selector, a lens for collimating light from a single one of the optical input fibers, a plurality of output coupling lenses, each of which corresponds to one of the optical output fibers, and a beam shaper for focusing light from the state selector onto a selected one of the coupling lenses for further focusing of the light onto the corresponding optical output fiber. Alternatively, the optical cross-connect switch can be a single an (L×K)-switch which includes a plurality of state selectors and a plurality of lenses for collimating light from the plurality of optical input fibers.

Abstract: Tasks can be done on a network of multiple computers interconnected by communication links. At each of the computers, Knowbot programs may be received and transmitted on the communication links, and may be stored and created; and execution of the tasks associated with the Knowbot programs may be advanced. Each Knowbot program includes a globally unique identifier; navigation information defining a route through the network; and information concerning a task to be done. Knowbot programs may interact with each other and with other network resources. Authenticated Knowbot service stations and Couriers may be used to protect data as well as control its application in the network environment according to stated terms and conditions.

Abstract: A method of managing digital objects in a network is presented. The objects are stored at locations accessible in the network using a storage technique which renders the digital objects secure against unauthorized access. Pointer information which associates each digital object identifier with a pointer indicating the location of the stored digital object is also stored in the network. For each digital object validation information is stored, separately from the digital object, and is sufficient to permit a determination whether a purported instance of a digital object is identical to the original.

Abstract: Tasks can be done on a network of multiple computers interconnected by communication links. At each of the computers, Knowbot programs may be received and transmitted on the communication links, and may be stored and created; and execution of the tasks associated with the Knowbot programs may be advanced. Each Knowbot program includes a globally unique identifier; navigation information defining a route through the network; and information concerning a task to be done. Knowbot programs may interact with each other and with other network resources. Authenticated Knowbot service stations and Couriers may be used to protect data as well as control its application in the network environment according to stated terms and conditions.

Abstract: A method of managing digital objects in a network is presented. The objects are stored at locations accessible in the network using a storage technique which renders the digital objects secure against unauthorized access. Pointer information which associates each digital object identifier with a pointer indicating the location of the stored digital object is also stored in the network. For each digital object validation information is stored, separately from the digital object, and is sufficient to permit a determination whether a purported instance of a digital object is identical to the original.

Abstract: An unconstrained pointing interface for natural human interaction with a display-based computer system includes a hand-manipulated pointer configured to permit it to be (1) aimed by line of sight to point at any arbitrary position within the user's field of view, including positions beyond the user's natural reach, and (2) swept along any arbitrary path and at any arbitrary speed within the user's natural capability. A detector detects emanations from at least some positions at which the pointer may be aimed; and circuitry identifies the locations of positions at which the user is aiming the pointer. The interface enables the user to point to a position within his field of view and beyond his reach, move his hand along any arbitrary path and at any arbitrary speed within the user's natural capability to point to another position, and so on, and to have the circuitry automatically identify the locations of the series of positions to which he has pointed.

Abstract: Methods of managing digital objects in a network are presented. Holders of rights in digital objects are enabled to control terns and conditions under which they are accessed by users in a network, or are granted to others.

Abstract: An unconstrained pointing interface for natural human interaction with a display-based computer system includes a hand-manipulated pointer configured to permit it to be (1) aimed by line of sight to point at any arbitrary position within the user's field of view, including positions beyond the user's natural reach, and (2) swept along any arbitrary path and at any arbitrary speed within the user's natural capability, A detector detects emanations from at least some positions at which the pointer may be aimed; and circuitry identifies the locations of positions at which the user is aiming the pointer. The interface enables the user to point to a position within his field of view and beyond his reach, move his hand along any arbitrary path and at any arbitrary speed within the user's natural capability to point to another position, and so on, and to have the circuitry automatically identify the locations of the series of positions to which he has pointed.