Abstract: An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storage 71 storing a self-identification information, and a communication processing unit 72 transmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storage 71 at different timings for each of the fluid control devices A.

Abstract: A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.

Abstract: The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.

Abstract: A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

Abstract: A fluid control device includes; upstream side and downstream side joint blocks defining a fluid flow path, and having engaging portions at a bottom surface side; a support member having a guide portion to which the engaging portions of the upstream side and downstream side joint blocks can be engaged; and a fluid device supported by the support member via the upstream side and the downstream side joint blocks; wherein the upstream side and the downstream side joint blocks are fixed to the guide portion by utilizing a reaction force against a bending force generated by the tightening force of fastening bolts to the upstream side and the downstream side joint blocks and the fluid device connected together, and the length of the engaging portions in the longitudinal direction of the joint blocks is formed shorter than the length of the joint blocks.

Abstract: A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.

Abstract: A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.

Abstract: To provide a valve that is easily assembled and has a low possibility of breakage of a coupled section even when the valve has to be downsized or subjected to a large load. A valve has a valve unit and a drive unit, is configured to include: a first recess that is a recess formed in either one of a second stem or a first stem and is formed with a groove at a predetermined position on an inner circumferential surface of the recess; a second recess formed in another one thereof; a stem pin accommodated in both of the recesses; an urging member that is accommodated in the first recess and urges the stem pin to the other side; a sidewall through-hole that penetrates a sidewall of the second recess horizontally; and a ball that enters the sidewall through-hole.

Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Abstract: A valve device comprising: a flow passage block in which a flow passage is formed; a diaphragm configured to open and close the flow passage; an actuator configured to push down the diaphragm via a diaphragm holder; a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator; a tubular adjusting screw threaded to the internal thread, the adjusting screw being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and an annular lock nut configured to lock the adjusting screw by being screwed into the internal thread.

Abstract: [Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability. [Solution] A casing 1 for covering devices 104,106,108 on a main body 101 of a fluid controller 100, the casing 1 is configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first part 2 provided with a fixing portion 2i for fixing to the main body 101, a second part 4 attached to the first part 2, and a third part 5 attachably and detachably provided at an upper partition higher than a predetermined height position of the casing 1.

Abstract: Provided is a closing plug capable of easily closing an open end of a flow passage without concern of scale. The closing plug includes: a gasket configured to come into contact with an annular projection formed in a step portion inside the open end of the flow passage of a flow passage block; a columnar pressing member formed by cutting out an inner side of a pressing surface so as to press a peripheral edge portion of the gasket; and a closing plug screw configured to be screwed into a female screw formed in an inner peripheral surface on an open end side from the step portion and press the pressing member toward the gasket by movement caused by screwing.

Abstract: A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

Abstract: A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient ?, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient ? determined on the basis of the output of the temperature sensor 22.

Abstract: A gas supply system 100 comprises: a first vaporization supply device 10A including a first vaporization section 12A having a heater, a first valve 14A, and a first supply pressure sensor 16A for measuring a gas pressure between the first vaporization section and the first valve; a second vaporization supply device 10B including a second vaporization section 12B having a heater, a second valve 14B, and a second supply pressure sensor 16B for measuring a gas pressure between the second vaporization section and the second valve; and a control circuit 20. The system is configured to flow a gas from the first vaporization section 10A and a gas from the second vaporization section 10B sequentially into a common flow path, by shifting timings of an opening period of the first valve 14A and an opening period of the second valve 14B.

Abstract: A pipe joint includes first and second sleeves having fluid flow paths communicating with each other; an annular gasket interposed between abutting end surfaces of the sleeves; a male screw member having a through hole into which the first sleeve is inserted; and a female screw member having a through hole into which the second sleeve is inserted, the sleeves being joined by screwing the male screw member with the female screw member, wherein the pipe joint has a leak port opened at a portion of the outer peripheral surface of the male screw member not covered by the female screw member and communicates with a gap between the male screw member and the first sleeve to detect a leak fluid leaked from gaps between the sleeves and the gasket.

Abstract: A fluid control device includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.

Abstract: A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.

Abstract: A cover component 3 is used for a pressure sensor 1 that is fixed to a mounting surface 5S of a body 5 with a flow path F1 formed therein, and that has protrudes protruding from the mounting surface 5S, the cover component comprising a hollow member 3a having an inner peripheral surface facing a side surface of the protruding portion of the pressure sensor 1, and a cover member 3b fixed to the hollow member 3a and covering the protruding portion of the pressure sensor 1.