Patents Assigned to Fujikin Incorporated
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Patent number: 11392148Abstract: A flow rate control system including a flow rate controller controlling a flow rate of a fluid supplied to a controlled object to keep a desired flow rate set value is provided, and includes a flow rate sensor, a pressure sensor measuring a pressure of a primary side of the flow rate controller, a PI calibration value determination unit determining a PI calibration value based on at least a physical property coefficient according to a physical property value of the fluid, a correction unit correcting an estimated flow rate, based on the PI calibration value and a measured value, and a drive control circuit adjusting an opening of a valve supplying the fluid to the controlled object based on the estimated value and controlling the flow rate of the fluid. A flow rate is accurately calculated regardless of types of a fluid in the pressure insensitive type flow rate controller.Type: GrantFiled: March 3, 2021Date of Patent: July 19, 2022Assignee: Fujikin IncorporatedInventors: Van Tu Nguyen, Masafumi Kitano
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Patent number: 11371627Abstract: A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis. A fluid control device 8 and a server 72 are configured to be able to communicate with each other through networks NW1 and 2. The fluid control device 8 includes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device 8.Type: GrantFiled: March 13, 2018Date of Patent: June 28, 2022Assignee: Fujikin IncorporatedInventors: Yuya Suzuki, Katsunori Komehana, Masahiko Ochiishi, Akihiro Harada, Ryutaro Tanno, Tsutomu Shinohara
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Publication number: 20220197316Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.Type: ApplicationFiled: April 16, 2020Publication date: June 23, 2022Applicant: FUJIKIN INCORPORATEDInventors: Kaoru HIRATA, Keisuke IDEGUCHI, Shinya OGAWA, Katsuyuki SUGITA, Masaaki NAGASE, Kouji NISHINO, Nobukazu IKEDA, Hiroyuki ITO
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Publication number: 20220196163Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.Type: ApplicationFiled: January 17, 2020Publication date: June 23, 2022Applicant: FUJIKIN INCORPORATEDInventors: Daihi TSUCHIGUCHI, Toshihide YOSHIDA, Ryutaro TANNO, Yuya SUZUKI, Kenta KONDO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
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Patent number: 11365830Abstract: A valve device can be compact, low cost and has a bleed function. A valve body defines an accommodation recess which opens at a surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, a detour passage for making the primary flow path and the secondary flow path communicate through the valve element, and a bleed hole for making the detour passage and the secondary flow path communicate through the accommodation recess.Type: GrantFiled: November 13, 2018Date of Patent: June 21, 2022Assignee: FUJIKIN INCORPORATEDInventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara
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Publication number: 20220186845Abstract: A first flow path member has a first sealing surface for supporting one end surface, in a central axis direction, of an annular seal member, and a second flow path member has a second seal surface including a flat surface for supporting a surface of a plate-like member, and a third seal surface for supporting an outer peripheral surface of the annular seal member, wherein: in the annular seal member, an other end surface of the annular seal member is pressed against the back surface of the plate-like member, the one end surface of the annular seal member is pressed against the first seal surface of the first flow path member, and the outer peripheral surface of the annular seal member is pressed against the third seal surface of the second flow path member; and the plate-like member is pressed by the other end surface of the annular seal member.Type: ApplicationFiled: January 21, 2020Publication date: June 16, 2022Applicant: FUJIKIN INCORPORATEDInventors: Toshiyuki INADA, Kazunari WATANABE, Kenji AIKAWA, Kohei SHIGYOU, Tomohiro NAKATA, Takahiro MATSUDA, Tsutomu SHINOHARA
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Publication number: 20220186844Abstract: To provide a diaphragm and a diaphragm valve which solve a problem of deterioration of air-tightness due to insufficient tightening of a bolt and damage to the diaphragm due to over-tightening of the bolt, as well as reducing variations in performance such as durability of the diaphragm and simplifying tightening work. A diaphragm is provided with a through hole having a diameter larger than a diameter through which a bolt can be fitly inserted. A bolt insertion cylinder made of metal through which the bolt can be inserted is fitted in the through hole. A height of the bolt insertion cylinder is equal to or less than a height of the through hole.Type: ApplicationFiled: March 25, 2020Publication date: June 16, 2022Applicant: FUJIKIN INCORPORATEDInventors: Shunji Obara, Keigo Kobayashi, Keisuke Ishibashi, Souta Hachiman, Yusei Horikawa, Taichi Kitano, Kazutaka Masuda
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Patent number: 11359730Abstract: A valve device includes: a valve device body including a valve seat; a diaphragm that is provided to cover a valve chamber; a stem; and a valve body portion that is inserted into a central portion of the diaphragm, and that is configured to open and close the fluid passage by approaching the valve seat and separating from the valve seat. The diaphragm includes a main diaphragm, and a support diaphragm positioned on an opposite side of the main diaphragm to the valve chamber side and provided in contact with the main diaphragm. A first terminal end portion on an inner peripheral side of the main diaphragm is fixed to the valve body portion. A second terminal end portion on an inner peripheral side of the support diaphragm is separated from the first terminal end portion on the inner peripheral side of the main diaphragm.Type: GrantFiled: March 25, 2021Date of Patent: June 14, 2022Assignee: FUJIKIN INCORPORATEDInventors: Nobuo Nakamura, Kenta Kondo, Tomohiro Nakata, Masahiko Nakazawa
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Publication number: 20220170849Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.Type: ApplicationFiled: March 31, 2020Publication date: June 2, 2022Applicant: FUJIKIN INCORPORATEDInventors: Masaaki NAGASE, Kazuteru TANAKA, Masahiko TAKIMOTO, Kouji NISHINO, Nobukazu IKEDA
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Publication number: 20220172969Abstract: A concentration measurement device 20 for measuring the concentration of the a gas flowing through a junction block 14 connected to a plurality of gas supply lines includes a light source 40 for generating light incident to a flow path formed in the junction block, a photodetector 44 for receiving light emitting from the flow path, and an arithmetic control circuit 46 for determining the concentration of the gas flowing through the flow path based on the output of the photodetector, translucent incident windows 26 and 23 for making light from the light source incident to the flow path and, at least one of the translucent emitting windows 28 and 23 for emitting light passing through the flow path being sealed and fixed to the junction block 14.Type: ApplicationFiled: March 18, 2020Publication date: June 2, 2022Applicant: FUJIKIN INCORPORATEDInventors: Masaaki NAGASE, Keiichi HASEGAWA, Kouji NISHINO, Nobukazu IKEDA
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Patent number: 11346457Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.Type: GrantFiled: January 28, 2021Date of Patent: May 31, 2022Assignee: FUJIKIN INCORPORATEDInventors: Ryousuke Dohi, Kaoru Hirata, Katsuyuki Sugita, Koji Kawada, Kouji Nishino, Nobukazu Ikeda
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Patent number: 11346461Abstract: To provide a manual valve device suitable for a miniaturized and integrated fluid control system, the manual valve device includes a casing having a tubular shape and incorporating a drive mechanism, an operation member for activating the drive mechanism, and a cam part that converts a force acting on the operation member into a driving force of the drive mechanism. The manual valve device further includes a protective cover provided on an upper end side of the casing and covering at least a portion of the operation member. The operation member includes an attaching part that allows removable attaching of an auxiliary tool for causing a force required for activation of the drive mechanism to act on the operation member. The protective cover is formed so as to allow access to the attaching part of the operation member by the auxiliary tool.Type: GrantFiled: September 4, 2018Date of Patent: May 31, 2022Assignee: FUJIKIN INCORPORATEDInventors: Kazunari Watanabe, Tomohiro Nakata, Toshiyuki Inada, Tsutomu Shinohara
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Patent number: 11346505Abstract: A fluid supply system includes: fluid lines, fluid controllers and joints, in which each of the fluid lines linearly extends in an extension direction that substantially perpendicularly intersects an alignment direction of the fluid lines, each of the fluid controllers is disposed in an aligned manner in the alignment direction with connection surfaces directed to the same direction, a diameter of the pipings is equal to or less than a surface width of the connection surfaces in the alignment direction, and diameters of the joints are equal to or greater than the surface width, and the pipings that are adjacent to each other in the alignment direction are positioned with the joints displaced from each other in the extension direction.Type: GrantFiled: October 3, 2019Date of Patent: May 31, 2022Assignee: FUJIKIN INCORPORATEDInventors: Haruhiko Kuriki, Hajime Nakagawa, Kenji Aikawa
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Publication number: 20220163399Abstract: Provided is a temperature sensor attachment structure capable of reliably fixing a temperature sensor and being retrofitted to a standard component. Provided is an attachment structure of a temperature sensor to be attached to flow path blocks or a fluid control device of a fluid control apparatus including the plurality of flow path blocks each of which includes a fluid flow path therein and on at least one surface of which has an opening portion of the fluid flow path, and the fluid control device placed on the flow path blocks. The attachment structure includes a rectangular temperature sensor attachment piece, and a pair of clamping pieces extending from opposite sides of the attachment piece facing each other.Type: ApplicationFiled: March 23, 2020Publication date: May 26, 2022Applicant: FUJIKIN INCORPORATEDInventors: Hidehiro Doya, Takayuki Suzuki, Yusuke Shibata
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Patent number: 11340636Abstract: To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V1, and V2 communicating with each other fluid-tightly.Type: GrantFiled: October 5, 2018Date of Patent: May 24, 2022Assignee: Fujikin IncorporatedInventors: Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda, Katsunori Komehana, Masahiko Ochiishi, Tsutomu Shinohara
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Patent number: 11339881Abstract: Provided is a valve device in which influence of a physical impact on a valve element is further reduced. Valve device includes a valve seat disposed around an opening connected to a flow path formed in a valve body, a diaphragm for opening and closing flow path by moving between a contact position and a non-contact position with respect to the valve seat, a presser adapter that contacts a peripheral portion of the diaphragm, a casing that incorporates an actuator for actuating the diaphragm and is fixed on the valve body by being screwed into a screw hole formed in the valve body, and an adapter fixing ring that is screwed into the screw hole and thereby fixed in the valve body while pressing the presser adapter and the diaphragm.Type: GrantFiled: February 19, 2019Date of Patent: May 24, 2022Assignee: FUJIKIN INCORPORATEDInventors: Kazunari Watanabe, Kohei Shigyou, Yohei Sawada, Tomohiro Nakata, Tsutomu Shinohara
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Patent number: 11326742Abstract: Provided is a valve for high-pressure gas, wherein a sheet member is provided inside a through hole formed in a valve body of the valve, wherein the sheet member constitutes a channel for high-pressure gas inside the through hole, wherein the sheet member is fixed inside the through hole by a pressing member, wherein an end opening of the through hole is closed by a lid member, wherein a gasket is provided at a peripheral part of the end opening of the through hole, wherein the gasket is sandwiched between the lid member and the valve body, wherein the lid member is pressed toward the valve body by a plug, and wherein a bearing is provided between the plug and the lid member.Type: GrantFiled: February 7, 2018Date of Patent: May 10, 2022Assignee: FUJIKIN INCORPORATEDInventors: Yasumasa Yanagida, Koji Hiramatsu, Tadayuki Yakushijin
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Patent number: 11326921Abstract: The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve.Type: GrantFiled: February 8, 2018Date of Patent: May 10, 2022Assignee: FUJIKIN INCORPORATEDInventors: Masaaki Nagase, Yohei Sawada, Kouji Nishino, Nobukazu Ikeda
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Patent number: 11322372Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.Type: GrantFiled: July 31, 2018Date of Patent: May 3, 2022Assignee: FUJIKIN INCORPORATEDInventors: Toshihide Yoshida, Yukio Minami, Tsutomu Shinohara
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Patent number: 11320056Abstract: The present invention provides a miniaturized valve device capable of dramatically increasing the degree of freedom in arranging a flow path of a valve body while securing a necessary flow rate. The valve device includes a valve seat support provided in an accommodation recess and having a support surface with which a sealing surface of a valve seat abuts and supports a pressing force from the sealing surface; a diaphragm provided in the accommodation recess so as to abut and be separable from a seating surface of the valve seat and seals the opening side of the accommodation recess; the valve seat support having sealing surfaces which cooperates with a part of the inner wall surface of the accommodation recess to bock the communication between a primary flow path and a secondary flow path, and a detour passage that connects the primary flow path and a flow passage of the valve seat.Type: GrantFiled: October 22, 2018Date of Patent: May 3, 2022Assignee: FUJIKIN INCORPORATEDInventors: Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda, Tsutomu Shinohara