Patents Assigned to GLOBALFOUNDRIES Singapore Pte. Ltd.
  • Patent number: 11844292
    Abstract: The disclosed subject matter relates generally to structures, memory devices and a method of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices with an electrode having tapered sides. The present disclosure provides a memory device including a first electrode having a tapered shape and including a tapered side, a top surface, and a bottom surface, in which the bottom surface has a larger surface area than the top surface, a resistive layer on and conforming to at least the tapered side of the first electrode, and a second electrode laterally adjacent to the tapered side of the first electrode, the second electrode including a top surface and a side surface abutting the resistive layer, in which the side surface forms an acute angle with the top surface.
    Type: Grant
    Filed: June 24, 2021
    Date of Patent: December 12, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 11839166
    Abstract: A resistive random access memory (RRAM) device may be provided, including: a base layer, a vertical electrode stack arranged over the base layer, where the vertical electrode stack may include alternating mask elements and first electrodes, and each first electrode may include an extended portion extending beyond at least one side surface of at least one mask element adjoining the first electrode, a switching layer arranged along the extended portion of each first electrode and along the at least one side surface of the at least one mask element adjoining the first electrode, and a second electrode including a surface in contact with the switching layer. The RRAM device may have a 3D structure.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: December 5, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 11832538
    Abstract: Structures for a resistive memory element and methods of forming a structure for a resistive memory element. A resistive memory element has a first electrode, a second electrode partially embedded in the first electrode, a third electrode, and a switching layer positioned between the first electrode and the third electrode. The second electrode includes a tip positioned in the first electrode adjacent to the switching layer and a sidewall that tapers to the tip.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: November 28, 2023
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Curtis Chun-I Hsieh, Juan Boon Tan, Calvin Lee
  • Patent number: 11824125
    Abstract: An electrostatic discharge (ESD) protection device is provided. The ESD protection device includes a substrate, an active region, a first terminal region, and a second terminal region. The substrate includes dopants having a first dopant conductivity. The active region is arranged over the substrate and has an upper surface. The first terminal region and the second terminal region are arranged in the active region laterally spaced apart from each other. The first terminal region and the second terminal region each include a well region having dopants of the first dopant conductivity and a first doped region arranged in the well region. The first doped region includes dopants having a second dopant conductivity.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Sagar Premnath Karalkar, James Jerry Joseph, Jie Zeng, Milova Paul, Kyong Jin Hwang
  • Patent number: 11821924
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to an on-chip current sensor. The on-chip current sensor includes: a vertical Hall sensor; and a current carrying conductor in a first wiring layer above the vertical Hall sensor.
    Type: Grant
    Filed: March 2, 2022
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Yongshun Sun
  • Patent number: 11823889
    Abstract: A sensor may be provided, including a substrate having a first semiconductor layer, a second semiconductor layer, and a buried insulator layer arranged between the first semiconductor layer and the second semiconductor layer. The sensor may further include a photodiode arranged in the first semiconductor layer; and a quenching resistive element electrically connected in series with the photodiode. The quenching resistive element is arranged in the second semiconductor layer, and the quenching resistive element is arranged over the photodiode but separated from the photodiode by the buried insulator layer.
    Type: Grant
    Filed: May 11, 2022
    Date of Patent: November 21, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 11818969
    Abstract: The disclosed subject matter relates generally to memory devices and a method of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including a first electrode having tapered sides that converge at a top of the first electrode, a dielectric layer disposed on and conforming to the tapered sides of the first electrode, a resistive layer in contact with the top of the first electrode and the dielectric layer, and a second electrode disposed on the resistive layer.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: November 14, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Jianxun Sun, Juan Boon Tan, Tupei Chen
  • Patent number: 11810982
    Abstract: A nonvolatile memory device is provided. The nonvolatile memory device comprises an n-doped source, an n-doped drain, and a doped region in a first p-well in a substrate. A floating gate may be arranged over the first p-well, whereby the doped region may be arranged at least partially under the floating gate.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: November 7, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yongshun Sun, Shyue Seng Tan, Eng Huat Toh, Xinshu Cai
  • Patent number: 11811390
    Abstract: According to various embodiments, there is provided a resonator device that includes a first interdigital transducer and a second interdigital transducer that is electrically connected to the first interdigital transducer. Both the first interdigital transducer and the second interdigital transducer are configured to resonate at a common frequency. At least one of an electrode width and an electrode pitch of the first interdigital transducer is different from the respective electrode width and/or electrode pitch of the second interdigital transducer such that spurious peaks of the resonator device are lower in amplitude as compared to spurious peaks of each of the first interdigital transducer and the second interdigital transducer.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: November 7, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: You Qian, Humberto Campanella Pineda, Rakesh Kumar
  • Patent number: 11793004
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including a first electrode, a dielectric cap above the first electrode, a second electrode laterally adjacent to the first electrode, in which an upper surface of the second electrode is substantially coplanar with an upper surface of the dielectric cap, and a resistive layer between the first electrode and the second electrode. An edge of the first electrode is electrically coupled to an edge of the second electrode by at least the resistive layer.
    Type: Grant
    Filed: August 16, 2020
    Date of Patent: October 17, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 11791379
    Abstract: A structure includes a galvanic isolation including a horizontal portion including a first redistribution layer (RDL) electrode in a first insulator layer, and a second RDL electrode in the first insulator layer laterally spaced from the first RDL electrode. An isolation break includes a trench defined in the first insulator layer between the first RDL electrode and the second RDL electrode, and at least one second insulator layer in the trench. The first insulator layer and the second insulator layer(s) are between the first RDL electrode and the second RDL electrode. The isolation may separate, for example, voltage domains having different voltage levels. A related method is also disclosed. The isolation may also include a vertical portion using the first RDL electrode and another electrode in a metal layer separated from the first RDL electrode by a plurality of interconnect dielectric layers.
    Type: Grant
    Filed: December 16, 2021
    Date of Patent: October 17, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE LTD
    Inventors: Bong Woong Mun, Wanbing Yi, Juan Boon Tan, Jeoung Mo Koo
  • Patent number: 11791083
    Abstract: The present disclosure relates to integrated circuits, and more particularly, a tunnel magneto-resistive (TMR) sensor with perpendicular magnetic tunneling junction (p-MTJ) structures and methods of manufacture and operation. The structure includes: a first magnetic tunneling junction (MTJ) structure on a first level; a second MTJ structure on a same wiring level as the first MTJ structure; and at least one metal line between the first MTJ structure and the second MTJ structure.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: October 17, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng-Huat Toh, Hemant M. Dixit, Vinayak Bharat Naik, Kazutaka Yamane
  • Patent number: 11784196
    Abstract: Structures for a single-photon avalanche diode and methods of forming a structure for a single-photon avalanche diode. The structure includes a semiconductor substrate having a top surface, a semiconductor layer on the top surface of the semiconductor substrate, a light-absorbing layer on a portion of the semiconductor layer, and a doped region in the portion of the semiconductor layer. The doped region is positioned in the portion of the semiconductor layer adjacent to the light-absorbing layer.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: October 10, 2023
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh, Kiok Boone Elgin Quek, Kien Seen Daniel Chong, Jing Hua Michelle Tng
  • Patent number: 11774402
    Abstract: According to various embodiments, there is provided a sensor device that includes: a substrate and two semiconductor structures. Each semiconductor structure includes a source region and a drain region at least partially disposed within the substrate, a channel region between the source region and the drain region, and a gate region. A first semiconductor structure of the two semiconductor structures further includes a sensing element electrically connected to the first gate structure. The sensing element is configured to receive a solution. The drain regions of the two semiconductor structures are electrically coupled. The source regions of the two semiconductor structures are also electrically coupled. A mobility of charge carriers of the channel region of a second semiconductor structure of the two semiconductor structures is lower than a mobility of charge carriers of the channel region of the first semiconductor structure.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: October 3, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Bin Liu, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 11776844
    Abstract: The embodiments herein relate to contact via structures of semiconductor devices and methods of forming the same. A semiconductor device is provided. The semiconductor device includes a substrate, a conductive feature over the substrate, and a contact via structure over and electrically coupling to the conductive feature. The contact via structure has a concave profile.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: October 3, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Yung Fu Chong, Rui Tze Toh, Fangyue Liu
  • Patent number: 11764273
    Abstract: The present disclosure generally relates to semiconductor structures for capacitive isolation, and structures incorporating the same. More particularly, the present disclosure relates to capacitive isolation structures for high voltage applications. The present disclosure also relates to methods of forming structures for capacitive isolation and the structures incorporating the same. The disclosed semiconductor structures may enable a smaller device footprint and reduced dimensions of components on an IC chip, whilst ensuring galvanic isolation between circuits.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: September 19, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Bong Woong Mun, Jeoung Mo Koo
  • Patent number: 11762042
    Abstract: A magnetic field sensor may include a semiconductor structure having a planar surface, and first, second, and third sensing devices. The semiconductor structure may include a semiconductor member having a two-dimensional electron gas therein, and an insulator member disposed on the semiconductor member. The first sensing device may be configured to sense magnetic field along a first axis parallel to the planar surface. The second sensing device may be configured to sense magnetic field along a second axis parallel to the planar surface, and orthogonal to the first axis. The third sensing device may be configured to sense a magnetic field along a third axis normal to the planar surface. Each of the first, second, and third sensing devices may be formed in the semiconductor structure and may include electrodes that extend from the insulator member to the two-dimensional electron gas.
    Type: Grant
    Filed: November 27, 2020
    Date of Patent: September 19, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh, Yongshun Sun
  • Patent number: 11761983
    Abstract: The present disclosure provides a wafer probe card including: a non-magnetic printed circuit board (PCB) having a first side and a second side opposite the first side, the first side configured to face a magnet; a plurality of connection structures provided on the first side of the non-magnetic PCB; and a Hall sensor unit fixedly provided on the first side of the non-magnetic PCB, the Hall sensor electrically connected to at least one of the plurality of connection structures.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: September 19, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Guoquan Teo, Meng Yew Seah, Yongshun Sun, Eng Huat Toh
  • Patent number: 11749672
    Abstract: A device includes a first region, a second region disposed on the first region, a third region and a fourth region abutting the third region disposed in the second region, a fifth region disposed in the third region and coupled to a collector disposed above, and a sixth region disposed in the fourth region and coupled to an emitter disposed above. A first isolation is disposed between the collector and the emitter. A seventh region is disposed in the fifth region and coupled to the collector is spaced apart from the first isolation. The first region, the third region, the fifth region, the collector and the emitter have a first conductivity type different from a second conductivity type that the second region, the fourth region, the sixth region and the seventh region have.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: September 5, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Prantik Mahajan, Aloysius Priartanto Herlambang, Kyong Jin Hwang, Robert John Gauthier, Jr.
  • Patent number: 11751483
    Abstract: According to various embodiments, a spin diode device may include a magnetic tunnel junction stack. The magnetic tunnel junction stack may include a lower magnetic layer, a tunnel barrier layer over the lower magnetic layer, and an upper magnetic layer over the tunnel barrier layer. The lower magnetic layer may include a lower magnetic film. The tunnel barrier layer comprising an insulating material. The upper magnetic layer may include an upper magnetic film. Each of the lower magnetic film and the upper magnetic film may have perpendicular magnetic anisotropy.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: September 5, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Wai Cheung Law, Grayson Dao Hwee Wong, Kazutaka Yamane, Chim Seng Seet, Wen Siang Lew