Patents Assigned to ICT Integrated Circuit Testing Gesellschaft
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Publication number: 20140191127Abstract: A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.Type: ApplicationFiled: March 11, 2014Publication date: July 10, 2014Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbHInventor: Stefan Lanio
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Publication number: 20140175277Abstract: A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the secondary beam; a detection element for detecting the secondary beam particles, and three deflection elements, wherein at least a first deflector is provided between the beam bender and the focusing lens, at least a second deflector is provided between the focusing lens and the detection element, at least a third deflector is provided between the beam splitter and the detection element.Type: ApplicationFiled: January 4, 2013Publication date: June 26, 2014Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventor: Stefan Lanio
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Patent number: 8735847Abstract: A method of operating a focused ion beam device having a gas field ion source is described. According to some embodiments, the method includes emitting an ion beam from a gas field ion source, providing an ion beam column ion beam energy in the ion beam column which is higher than the final beam energy, decelerating the ion beam for providing a final beam energy on impingement of the ion beam on the specimen of 1 keV to 4 keV, and imaging the specimen.Type: GrantFiled: November 25, 2008Date of Patent: May 27, 2014Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventors: Helmut Banzhof, Juergen Frosien, Dieter Winkler
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Patent number: 8723117Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.Type: GrantFiled: July 6, 2012Date of Patent: May 13, 2014Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventors: Stefan Lanio, Gerald Schönecker, Dieter Winkler
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Patent number: 8723134Abstract: A correction device for a charged particle beam device for decreasing, correcting or inverting (that is adjusting) the spherical aberration of a charged particle beam is described. The correction principle is similar to that of common multipole-Correctors. But unlike common devices of that kind this new correction device gets along entirely with plane apertures having specially shaped holes in order to supply the multipoles required for correction and is therefore predestined for miniaturization and the use in multi column devices.Type: GrantFiled: October 28, 2010Date of Patent: May 13, 2014Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventor: Roland Janzen
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Patent number: 8674300Abstract: A method and a device for stabilizing the emission current of an emitter of a charged particle beam device are provided. In the method, the emitter is operated under predetermined operation parameters including at least one voltage with a predetermined value. The method includes determining a first value of the emission current under the predetermined operation parameters and flash cleaning the emitter while a first electric field is applied to the emitter. The first electric field is generated by the at least one voltage having a first value of the at least one voltage, wherein the first value of the at least one voltage is provided in dependence of the determined first value of the emission current.Type: GrantFiled: October 22, 2010Date of Patent: March 18, 2014Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterprüftechnik mbHInventor: Pavel Adamec
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Patent number: 8618500Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap, a particle optics configured for separating the signal beam in a first portion of the signal beam and in at least one second portion of the signal beam, configured for focusing the first portion of the signal beam, and configured for deflecting and focusing the at least one second portion of the signal beam, wherein the particle optics includes a first electrode and at least one second electrode. Therein, the first electrode is an inner electrode and the at least one second electrode is provided radially outward of the first electrode.Type: GrantFiled: July 6, 2012Date of Patent: December 31, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventor: Pavel Adamec
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Publication number: 20130327951Abstract: A condenser lens arrangement for an electron beam system is described. The condenser lens arrangement includes a magnetic condenser lens adapted for generating a magnetic condenser lens field, the condenser lens having a symmetry axis, and a magnetic deflector adapted for generating a magnetic deflector field. The deflector is configured so that the superposition of the magnetic condenser lens field and the magnetic deflector field results in an optical axis of the condenser lens arrangement being movable relative to the symmetry axis. Further, an electron beam optical system including a condenser lens arrangement and a method for moving a condenser lens are described.Type: ApplicationFiled: September 17, 2012Publication date: December 12, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbHInventor: Jürgen FROSIEN
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Publication number: 20130320228Abstract: A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.Type: ApplicationFiled: July 6, 2012Publication date: December 5, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventor: Stefan Lanio
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Publication number: 20130306863Abstract: A deflector system for fast magnetic deflection of a charged particle beam is described. The deflector system includes a tube for separating the beam from the magnetic deflector coil arrangement, the tube having a middle section, at least a first end section, and a second end section, wherein a wall thickness of the middle section is lower than a wall thickness of at least one of the first end section and the second end section.Type: ApplicationFiled: May 16, 2013Publication date: November 21, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventors: Pavel ADAMEC, Carlo SALVESEN
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Patent number: 8563927Abstract: A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 ?cm to about 1012 ?cm.Type: GrantFiled: August 2, 2011Date of Patent: October 22, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventors: Dieter Winkler, Stefan Lanio
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Publication number: 20130270439Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap, a particle optics configured for separating the signal beam in a first portion of the signal beam and in at least one second portion of the signal beam, configured for focusing the first portion of the signal beam, and configured for deflecting and focusing the at least one second portion of the signal beam, wherein the particle optics includes a first electrode and at least one second electrode. Therein, the first electrode is an inner electrode and the at least one second electrode is provided radially outward of the first electrode.Type: ApplicationFiled: July 6, 2012Publication date: October 17, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventor: Pavel Adamec
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Publication number: 20130270438Abstract: A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.Type: ApplicationFiled: July 6, 2012Publication date: October 17, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventors: Stefan LANIO, Gerald Schönecker, Dieter Winkler
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Patent number: 8530837Abstract: A charged particle beam device for inspecting a specimen includes a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; a retarding field device adapted to accelerate secondary charged particles starting from the specimen, a first detector device having a central opening, includes at least two azimuthal detector segments for detecting secondary particles, wherein the objective lens device is adapted such that particles with different starting angles from the specimen exhibit crossovers at substantially the same distance from the specimen between the objective lens and the detector device, and an aperture located between the objective lens and the crossovers, having an opening which is equal to or smaller than the central opening in the detector device.Type: GrantFiled: August 5, 2011Date of Patent: September 10, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventor: Pavel Adamec
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Publication number: 20130214155Abstract: A retarding field scanning electron microscope is described. The microscope includes a scanning deflection assembly configured for scanning an electron beam over a specimen, one or more controllers in communication with the scanning deflection assembly for controlling the electron beam scanning pattern, and a combined magnetic-electrostatic objective lens configured for focusing the electron beam including an electrostatic lens portion. The electrostatic lens portion includes a first electrode with a high potential bias, and a second electrode disposed between the first electrode and the specimen plane with a potential bias lower than the first electrode, wherein the second electrode is configured for providing a retarding field. The microscope further includes a voltage supply connected to the second electrode for biasing the second electrode and being in communication with the controllers, wherein the controllers synchronize a variation of the potential of the second electrode with the scanning pattern.Type: ApplicationFiled: February 27, 2012Publication date: August 22, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbHInventors: Dieter Winkler, Igor Petrov
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Patent number: 8502163Abstract: A valve unit configured for a charged particle beam device having a beam path 2 is described. The valve unit includes a vacuum sealed valve housing 102 configured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portion 103 for having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing element 122 configured for a second movement, wherein the second movement is different from the first movement.Type: GrantFiled: November 15, 2011Date of Patent: August 6, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventor: Thomas Jasinski
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Patent number: 8481958Abstract: A lens system for a plurality of charged particle beams comprises a lens body with a first pole piece, a second pole piece and a plurality of lens openings for the respective charged particle beams; a common excitation coil arranged around the plurality of lens openings for providing a respective first magnetic flux to the lens openings; and a compensation coil arranged between the lens openings for providing a respective second magnetic flux to at least some of the lens openings so as to compensate for an asymmetry of the first magnetic flux.Type: GrantFiled: August 13, 2010Date of Patent: July 9, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbHInventor: Stefan Lanio
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Patent number: 8445846Abstract: The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.Type: GrantFiled: December 13, 2004Date of Patent: May 21, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventor: Juergen Frosien
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Publication number: 20130118586Abstract: A valve unit configured for a charged particle beam device having a beam path 2 is described. The valve unit includes a vacuum sealed valve housing 102 configured for a pressure difference between the inside of the valve housing and the outside of the valve housing, wherein the housing provides a beam path portion 103 for having a charged particle beam pass therethrough along the beam path, a valve positioning unit adapted for selectively providing a first movement of the valve housing such that the beam path portion is selectively moved into and out of the beam path, and at least one sealing element 122 configured for a second movement, wherein the second movement is different from the first movement.Type: ApplicationFiled: November 15, 2011Publication date: May 16, 2013Applicant: ICT Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik mbHInventor: Thomas JASINSKI
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Patent number: 8378299Abstract: A column for a charged particle beam device is described. The column includes a charged particle emitter for emitting a primary charged particle beam as one source of the primary charged particle beam; a biprism adapted for acting on the primary charged particle beam so that two virtual sources are generated; and a charged particle beam optics adapted to focus the charged particle beam simultaneously on two positions of a specimen corresponding to images of the two virtual sources.Type: GrantFiled: March 10, 2011Date of Patent: February 19, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik MBHInventor: Jürgen Frosien