Patents Assigned to Leybold-Heraeus GmbH
  • Patent number: 4808373
    Abstract: A multiple-substance alloy used as a target in a cathode sputtering apparatus, and having a gold content most preferably in the range of 94-98 percent by weight, is disclosed. The alloy further contains non-gold alloys of aluminum, copper and preferably an element of the group of Co, Ni, Ga, Ti, In, Cd, Sn, Fe and Pd.
    Type: Grant
    Filed: October 20, 1986
    Date of Patent: February 28, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Dieter Hoffman, Wolf-Dieter Munz, G. A. Hoist Siewert, Horst Dietrich
  • Patent number: 4806765
    Abstract: The disclosure relates to a method and apparatus for checking the signal path in a measuring system of the type having a collector for charged particles and an amplifier connected to its output to form a voltage or current signal. To permit sensitivity tests with currents on the order of 10.sup.-12 A and less, it is proposed that a capacitive current, produced by means of a influencing electrode situated in the vicinity of the charge collector, be fed into the charge collector. An electrode already present in the measuring system can be used as the influencing electrode.
    Type: Grant
    Filed: October 9, 1986
    Date of Patent: February 21, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventor: Raymond Heinen
  • Patent number: 4803398
    Abstract: An electron gun with one directly heatable initial cathode (2), one indirectly heatable second blocking cathode (3) and one focusing electrode (17). The focusing electrode (17) presents an initial centering region (18) and, by means of supporting braces, the blocking cathode (3) is fixed concentrically in a carrier ring (19) presenting a second centering region complementary to the first centering region (18). This permits the blocking cathode (3) to be introduced into the focusing electrode from the back by means of the carrier ring (19), and the carrier ring (19) is secured by means of a locking ring (24).
    Type: Grant
    Filed: July 3, 1986
    Date of Patent: February 7, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Reinhardt Kraft, Horst Ranke
  • Patent number: 4799046
    Abstract: To monitor the winding temperature of a coil, preferably the magnet coil of a magnetic valve, it is proposed to use as the monitored magnitude the resistance related to the temperature of the winding. For this purpose the winding is supplied during the measurement time with a constant or predeterminable voltage or current and the voltage or current related to the temperature of the winding is used as the magnitude to be measured.
    Type: Grant
    Filed: January 30, 1987
    Date of Patent: January 17, 1989
    Assignee: Leybold-heraeus GmbH
    Inventor: Raymond Heinen
  • Patent number: 4798663
    Abstract: Sputtering apparatus for the reactive coating of substrates with hard substances, which has a housing (1) with a feed line (3, 4) for a reaction gas a nobble gas, a magnetron (6) as well as at least one mounting (9) for the substrates, the mounting (9) being positionable in front of the sputtering surface and between an ionization system with at least two electrodes (7, 8), of which the one electrode (8) is operable as an electron emitter and the other electrode (7) is at a positive potential with respect to the emitter electrode, and the substrate mounting (9) itself is at a negative voltage in relation to the ground.
    Type: Grant
    Filed: September 30, 1986
    Date of Patent: January 17, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Gunther Herklotz, Hans Eligehausen
  • Patent number: 4798521
    Abstract: A system for regulating pressure in a container. The system includes a membrane pressure regulator with a reference pressure chamber containing a reference pressure, and a vacuum pump connected to the container via the membrane pressure regulator. The system further includes a gas inlet valve connected to the reference pressure chamber for increasing the reference pressure; a gas outlet valve connected to the reference pressure chamber for decreasing the reference pressure; and a regulator connected to the gas inlet valve and the gas outlet valve for actuating the valves. The regulator includes a device for generating a desired pressure value for the container and a measuring member connected for providing an indication of the pressure in at least one of the reference pressure chamber and the container.
    Type: Grant
    Filed: May 4, 1987
    Date of Patent: January 17, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Lothar Schmidt, Hans-Joachim Schumbert
  • Patent number: 4797062
    Abstract: A device for moving a gas at a subatmospheric pressure with a screwthread-like device on at least one of the facing surfaces of a rotor spacedly surrounded axially by a relatively-rotatable stator insulates the stator from a housing for the device to prevent thermal variation of the space between the rotor and stator and, thus, keeping the gas-moving action constant.
    Type: Grant
    Filed: October 20, 1987
    Date of Patent: January 10, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventors: Ludger Deters, Heinrich Englander, Hans-Peter Kabelitz, Gunter Schutz
  • Patent number: 4794784
    Abstract: A leak detecting apparatus includes a detector arranged for sensing a gas emanating through a specimen to be tested for leaks; a leak simulator having an outlet emitting a gas of a known flow rate; and a valve for selectively connecting the outlet to the detector during a calibration thereof and disconnecting the outlet from the detector during a leak detecting operation thereof. The valve comprises a fast-switching 3/2-way valve including a movable valve member having first and second positions. In the first position the movable valve member allows communication through the valve solely between the outlet of the leak simulator and an input of the detector and in the second position allows communication through the valve solely between the outlet of the leak simulator and the atmosphere.
    Type: Grant
    Filed: April 23, 1987
    Date of Patent: January 3, 1989
    Assignee: Leybold-Heraeus GmbH
    Inventor: Werner G. Bley
  • Patent number: 4794330
    Abstract: A method and circuit for measuring and displaying a parameter, in which the parameter is sensed by means of a sensor which supplies an output voltage representative of the value of the parameter, the output voltage is compared with a comparison voltage associated with the sensor response characteristic, and a display is produced on the basis of the result of the comparing step. The comparison is effected by supplying the output voltage from the sensor to a first input of a comparator, supplying the comparison voltage to a second input of the comparator, and varying the comparison voltage between successive values extending over the output voltage range of the sensor.
    Type: Grant
    Filed: February 3, 1987
    Date of Patent: December 27, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans-Hermann Klein, Zoltan Szocs
  • Patent number: 4793911
    Abstract: In an apparatus for the production of coatings with a uniform thickness profile on substrates by cathode sputtering, a substrate carriage held and guided between wheels is provided, which can be moved through the coating chamber, and which has on its side facing the cathode rotatably mounted substrate disks whose axes of rotation are each disposed transversely of the plane of movement of the substrate carriage. On the side of the substrate carriage facing away from the cathode, motor-driven shafts equipped with permanent magnets are journaled in the coating chamber with their longitudinal axes extending in a plane parallel to the plane of movement of the substrate carriage, and they produce a disk current in rotor disks which are affixed co-rotationally to the substrate disks. As a result of the disk current, the rotor disks, and with them the substrate disks, are set in rotation as they pass by the shafts.
    Type: Grant
    Filed: November 12, 1987
    Date of Patent: December 27, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Guenther Kemmerer, Hans Wolf
  • Patent number: 4791017
    Abstract: An underlayer of at least one a carbonitride of titanium, zirconium, hafnium or vanadium or hafnium nitride may be under a surface layer at least containing gold or on a still-undermore decorative article, and preferably both. It has a brilliance approximating that of gold so that, when appropriately color matched to the surface layer, it disguises spots of the surface layer worn away in use of the article. The underlayer and surface layer may be deposited in a cathode vaporization process from corresponding metallic cathode targets in appropriate neutral or reactive atmospheres.
    Type: Grant
    Filed: December 31, 1986
    Date of Patent: December 13, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Dieter Hofmann, Klaus-Jurgen Heimbach, Helmut Petersein, Wolf-Dieter Munz
  • Patent number: 4787023
    Abstract: A power supply apparatus, in which the three phases of an alternating-current main are connected each through rectifier elements connected in antiparallel to the primary winding of a three-phase transformer. The secondary windings of this transformer are connected through rectifiers to a load device, such as an electron beam gun or other such device which produces short-circuits while in operation. Measuring sensors are provided on the primary AC side which, in the presence of an excess current on the primary AC side, block controlled rectifier elements. The blocking takes place very rapidly because GTO thyristors are used as rectifier elements. The decay of the magnetic energy in the transformer is achieved by the fact that the primary side of this transformer is connected in delta.
    Type: Grant
    Filed: June 8, 1987
    Date of Patent: November 22, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventor: Friedrich-Werner Thomas
  • Patent number: 4779449
    Abstract: Leak detector operating according to the countercurrent principle is used in a leak detection method and includes a first high vacuum pump having an inlet which is connected to an inlet of the leak detector, a second high vacuum pump having an inlet which is connected to a mass spectrometer, and a first roughing pump having an inlet which is connected to the outlets of the first and second high vacuum pump respectively. In order, on the one hand, to detect particularly large leaks and, on the other hand, avoid overloads due to high test gas concentrations, a second roughing pump is provided having an inlet which may be selectably connected to one of the inlet of the leak detector via a conduit equipped with a control valve and to the inlet of the first roughing pump by way of a conduit equipped with a choke.
    Type: Grant
    Filed: October 15, 1987
    Date of Patent: October 25, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Werner G. Bley, Gunter Reich
  • Patent number: 4780042
    Abstract: A tilting mechanism for precisely controlling the pouring of metal from a melting crucible is disclosed. The mechanism utilizes a pressure roller journalled in an adjustable bearing mount to clearance-free urge a rack against a pinion to tilt the crucible. At least one boom is disposed on the adjustable bearing mount to pivot the hydraulic cylinder in a parallel direction relative to the tilting shaft.
    Type: Grant
    Filed: June 2, 1987
    Date of Patent: October 25, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Wolfgang Reuter, Oskar Tippmann
  • Patent number: 4777062
    Abstract: A method and apparatus are disclosed for the reactive vapor deposition of metal compounds onto a substrate. At least one metal is evaporated from an elongated evaporation crucible in an atmosphere consisting of a reaction gas at a pressure of no more than 10.sup.-1 mbar. The metal is evaporated by means of an electron beam having an acceleration voltage of at least 20 kv. The invention solves the problem of providing stable an repeatable operating conditions, even with an evaporation crucible of considerable length.
    Type: Grant
    Filed: November 21, 1986
    Date of Patent: October 11, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventor: Albert Feuerstein
  • Patent number: 4775981
    Abstract: In a melting furnace with weight-related control of the consumable electrode, the electrode mounting is disposed in a separate pressure chamber which has an inverted bottle-shaped configuration. The downwardly extending neck-like portion is passed sealingly through an opening in the cover plate of the melting chamber. The pressure chamber is suspended from a crossbeam which can be driven vertically by means of spindles. On the upper end of the pressure chamber there is provided a bellows whose upper edge is joined to the upper, tubular portion of the electrode holding rod, while a solid rod holding a current-carrying tube extends coaxially through the tubular portion and is hung from a frame which suspends the electrode holding rod and which is supported on the crossbeam by a sensor.
    Type: Grant
    Filed: November 2, 1987
    Date of Patent: October 4, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Heinz Kohnert, Rudolf Randa, Otto W. Stenzel
  • Patent number: 4772848
    Abstract: A paramagnetic measuring instrument comprises a magnetic circuit, formed from ferromagnetic material and having pole ends defining a discontinuity, and a gas measuring chamber disposed in the discontinuity between the pole ends. The measuring chamber includes a frame shaped outer part formed from nonmagnetic material and having a central opening extending between the pole ends; two ferromagnetic pole shoes each respectively disposed adjacent a separate one of the pole ends and extending into the opening of the outer part; two distribution channels disposed in the outer part on opposite sides of the measuring gap for supplying a measuring gas and a comparison gas, respectively, to the measuring gap; and inlet and outlet gas lines for supplying the measuring gas and the comparison gas, respectively, and removing the mixture formed from the measuring and comparison gases.
    Type: Grant
    Filed: February 5, 1987
    Date of Patent: September 20, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventor: Heinz Hummel
  • Patent number: 4773079
    Abstract: Process for melting down and degassing lumpy material by means of inductive heating and under subatmospheric pressure in a melting crucible. For the purpose of shortening the duration of the process, scavenging gas and/or reaction gas is introduced into the bottom region of the melting crucible during at least 50% of the duration of the process until the material is melted down completely.
    Type: Grant
    Filed: August 15, 1986
    Date of Patent: September 20, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Gerhard Bruckmann, Johann Kemmer, Felix Muller, Detley Schlebusch, Ulrich Hensgen
  • Patent number: 4769533
    Abstract: The invention relates to a circuit arrangement for a position sensitive radiation detector which produces a current or voltage signal (U.sub.Y) that depends exclusively on the coordinates x and y of the point of incidence of electromagnetic radiation on the EMR sensitive surface of a lateral diode (1). For this purpose, the circuit arrangement has integrators (4, 5), in which the voltages (U.sub.1, U.sub.2) are formed, which are proportional to the integral over time of the output currents (I.sub.1, I.sub.2) of the lateral diode (1). The difference between the voltages (U.sub.1, U.sub.2) is used as a signal, which depends exclusively on the coordinates at that particular time, at which the arithmetic mean of these voltages (U.sub.1, U.sub.2) has reached a preselected, constant value.
    Type: Grant
    Filed: August 17, 1987
    Date of Patent: September 6, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventors: Martin Groschl, Gerd Pfersmann
  • Patent number: 4767123
    Abstract: A piston-ring system has two, equal-radius, coaxial, axially-contiguous sealing rings, each ring having a split circumferential offset from the split in the other ring, each split being substantially Z-shaped in a plane normal to the axis of the rings to have a substantially-circumferential, overlappable middle portion. Each ring is urged, at least at the middle portion of its split, radially.
    Type: Grant
    Filed: August 28, 1986
    Date of Patent: August 30, 1988
    Assignee: Leybold-Heraeus GmbH
    Inventor: Gerhard Kiese