Abstract: Device for the plasma treatment of substrates (7) in a high frequency-excited plasma discharge between two electrodes (3, 8), supplied by a high-frequency source (6). The first electrode is constructed as a hollow anode (3) and the second electrode (8), which carries the substrate (7), is deposited in front of the hollow space (10) of the hollow anode or can be passed by this. Moreover, the hollow anode (3) has an edge (9), which is drawn out in the direction of the second electrode (8) and which, relative to the second electrode, forms a gap s.sub.1 all around that does not exceed 10 mm in width. In order to form the electrode so that the gap width is not a critical feature, projections (12) are disposed in the hollow space (10) of the hollow anode (3), said projections increasing the internal surface area (11) of the hollow anode (3). Preferably, these projections (12) are constructed as rib structures, which may also assume a honeycomb form.

Abstract: Process and equipment for separating molten metals with a distillation part (1) and a condenser part. The metal vessel (12) of the distillation part (1) is tiltable about at least one horizontal articulated axle (15) and is connected to a drive mechanism (18) for generating periodic tilting motions. In this way, it is possible to keep the melt in motion by means of a rocking motion of the melt vessel and to improve the distillation effect and reduce the distillation time.

Abstract: Transporting device for vacuum coating installations with several stations and with roller systems (3, 4) for the guidance and advance of essentially two-dimensional substrate holders (1) in a vertical position along a given transporting path through the stations. To avoid interference with the coating process by falling layer material, the substrate holders (1) are guided exclusively in the area of their lower edge (2) by roller systems (3, 4). In a preferred example of the operation, guide rollers are disposed in pairs in the area of the lower edge (2) of the substrate holders (1), the substrate holder (1) being held between said guide rollers. The guide rollers (5, 6) are rotatable about vertical axes A1, A2.

Abstract: A method for producing a transparent protective coating on a plastic optical substrate surface is disclosed. In particular, a substrate is positioned between two electrodes on the cathode in a reaction chamber. Once positioned, a noble gas is introduced into the chamber and the surface of the plastic optical substrate is bombarded. A monomeric organic compound of either siloxane or silazane is introduced into the reaction chamber and a bias voltage of a value in the range of 80 to 500 volts is obtained to polymerize the compound on the substrate surface. Following the beginning of this polymerization, oxygen is introduced into the reaction chamber in an amount of about 5 times the amount of the monomeric organic compound to form a mixture with the compound.

Abstract: The invention relates to a cryopump having a casing (1), a gas inlet opening (8) to which a chamber (30) can be attached through a valve (31), a vacuum pump (18) connected through a valve (16) to the casing, a two-stage refrigerator (4) in the casing as cold source, and pumping surfaces (7, 9, 12, 13) which, on both of the refrigeration stages (5, 11) of the refrigerator, are equipped with an electrical heating means (23, 24). To achieve a great shortening of the time required for regeneration and start-up it is proposed that a sensor (41) be provided to monitor the pressure within the pump casing, and that a control unit (28) be present by which the operation of the cryopump can be monitored and controlled on the basis of the signals supplied by the sensor.

Abstract: Disclosed is a system for separating impurities from a hydrogen-free fluorinated lubricant. The lubricant is passed through a filter apparatus containing an adsorbing material. The lubricant is then passed into a degasser unit to remove volatile impurities from the lubricant. The degassing unit has an area of closed suction. A pressure measuring device measures the pressure in the closed area and, based on this measurement, a control apparatus controls the degassing unit. A monitoring unit monitors the quality of the filtered lubricant.

Abstract: Disclosed is an apparatus for cleaning sulphur and nitrogen containing flue gases by adding gaseous reagents and by a reaction in a reaction chamber which the reactants pass through in the axial direction and are exposed to at least one electorn beam. The apparatus includes at least one reaction chamber and at least one electron beam source from which the electron beam is admitted into the reaction chamber through at least one pressure step zone. The electron beam source is structurally combined with the reaction chamber in such a manner that the axis of the pressure step stage runs parallel to the axis of the reaction chamber and that the electron beam can be rotationally deflected about this axis to traverse each surface element of a flow cross section of the reaction chamber running perpendicular to the axis at at least one position in the flow path.

Abstract: Lifting mechanism for casting molds in precision founding furnaces with a melting facility disposed in a melting chamber and a transfer chamber disposed below the melting chamber. The lifting mechanism has a mold table centrally disposed below the casting mold with a lifting rod and a vertical guiding mechanism. The driving mechanism for the lifting rod comprises a rapid driving mechanism and a precision driving mechanism which is connected in series with the rapid driving mechanism. At the vertical guiding mechanism, a carriage is guided, which can be moved by the rapid driving mechanism into at least two specifiable positions. The precision driving mechanism is mounted on the carriage and can be raised and lowered together with said carriage and is connected to the lifting rod of the mold table.

Abstract: A magnetron sputtering cathode for vacuum coating apparatus has a circular target plate and at least one magnet system disposed in back of it which forms at least one endless tunnel of magnetic lines of force over the target plate. In the marginal area of the target plate there is disposed a first magnet system for the production of a first magnetic tunnel substantially concentric with the axis of rotation, and between the axis of rotation and the first magnet system there is an off-center second magnet system which produces a second magnetic tunnel extending over only a sector of the target plate. When the two magnet systems are rotated together the elements of the surface of the target plate are exposed to the product of the time of stay times the intensity such that the target plate is ablated more uniformly in the middle area and more strongly at the margin, so that a substrate field placed opposite the target plate is uniformly coated.

Abstract: A compensation device for the influence of the weight of a power feed line on a weight measurement device determining the weight of an electrode and/or the melting rate in an electro-slag remelting process, in a vacuum arc furnace or the like. When an x-y device is adjusted, a weight jump occurs due to the forces of the power cable or the forces of the bellows, which has a disturbing effect on the rate definition. This weight jump can be prevented by means of mechanical devices, or can be made so small that it no longer constitutes a disturbance. However, the expenditure for this is disproportionately high. The invention is more cost efficient, since hardware or software means suffice. The weight function G=f(t) is extrapolated and compared with the actually measured weight G'=f(t). The magnitude of the difference between the two is stored and later added as a correction value.

Abstract: A method and apparatus are disclosed for producing rolls or coils of film of insulating material which has been conductively coated, in a vacuum, by vaporizing conductive material in direct electron beam bombardment and condensing the vapor on the film surface. According to the invention, the film is subjected to a plasma treatment after coating and before the film is wound in a coil.

Abstract: A crystal holder for apparatus for pulling a crystal from a melt in a crucible with a reelable pulling member fastened to the crystal holder has thermal insulation between the fastener for the reelable pulling member and a clamping device for the crystal. The thermal insulation preferably comprises a tie rod between sections of the crystal holder, the tie rod having a cross section sufficiently smaller than the sections for insulation therebetween, an insulating spacer about the tie rod, and radiation shields about the spacer, the radiation shields having diameters no longer than the sections of the crystal holder. Foil insulation spaced about the crystal holder at the crystal clamp may also be provided. The insulation appreciably extends the life of the pulling member.

Abstract: In a sputtering cathode on the magnetron principle with a target consisting of at least one piece and composed of the material to be sputtered, there is disposed in back of the target a magnet system having a plurality of magnet units of alternately different polarity. These form at least two endless magnetic tunnels of arching lines of force situated one within the other. The poles of the magnet units that face away from the target are joined together by a magnet yoke of soft-magnetic material. To solve the problem of being able to deposit coatings of uniform thickness with only one source of power per cathode, provision is made such that the strength of at least one magnetic field forming a magnetic tunnel can be varied relative to the strength of at least one additional magnetic field forming an additional magnetic tunnel.

Abstract: Metal particles are remelted in a fusion zone by electron beam bombardment and formed in a continuous casting mould. Furthermore,(a) the metal particles are evenly distributed over the horizontally positioned floor of a fusion ladle,(b) the metal particles are joined together into a plate-shaped structure by means of the electron beam, whereafter(c) the floor of the fusion ladle is moved into a position inclined in relation to the horizontal,(d) the electron beam is guided upwards over the sloping, plate-shaped particle structure so that this is firstly preheated and fused directly thereafter, while(e) the molten metal running over the lower part of the floor is simultaneously kept liquid by electron beam bombardment, whereafter(f) the electron beam is guided back downwards over the sloping floor of the fusion ladle, and(g) the floor of the fusion ladle is returned to the horizontal starting position and is once again charged with metal particles according to feature (a).

Abstract: A measuring head for a vacuum gauge. An essentially cylindrical housing encloses a measuring cell which is sealed in a vacuum tight manner against the surrounding atmosphere and is connectable with an evacuatable cavity. A measuring filament for producing an electrical signal corresponding to the pressure in the measuring cell is disposed in the measuring cell. The measuring filament is disposed approximately perpendicularly to the axial direction of the housing.

Abstract: A conduction-responsive meter head has a device having electrical conduction responsive to a condition such as pressure to be metered. The device communicates with the condition to provide its electrical-conduction response to a bridge electrically including the device. A power supply has two terminals on the meter head for providing electrical power to the bridge. The measurement signal from the bridge is provided, however, to a third terminal by a lead from the bridge.

Abstract: In a mounting device for electrically heated, spirally wound wire cathodes in electron guns, two mounting posts joined together by an insulator are configured as sector-shaped sections of a hollow cylinder, and have each a circumferential groove on its end remote from the insulator. The surfaces defining the grooves are parts of common circular and cylindrical surfaces, and the mounting ends of the cathodes are of a configuration approximately complementary to that of the grooves in the mounting posts. The mounting ends therefore lie in a spring-biased and form-fitting manner in the circumferential grooves.

Abstract: Method for the electroslag refining of metals of which at least 50 weight-percent are in the form of at least one current-carrying consumable electrode, especially one having alloy components with an affinity for oxygen, wherein the metals are remelted to an ingot through a molten bath of slag. To achieve the object of preventing oxidation, freckling, rings and white spots and at the same time produce a degassing, the following measures are undertaken: (a) the refining process is performed at a subatmospheric pressure, (b) the slag is an at least 80 weight-percent oxidic slag of oxides whose boiling points are above 2000.degree. C., and (c) the slag is heated by means of alternating current.

Abstract: Apparatus for measuring the angular distribution of charged particles scattered by a sample surface, having a source for the production of a primary particle beam and a deflection system for the deflection of the scattered particles onto the entry orifice of a detector connected to the deflection system, useful, for example, for the study of crystal surfaces by the so-called LEED technique. On the side of the deflection system opposite the sample not only a detector but also a particle source is disposed such that the primary beam also passes through the deflection system. The scannable range of the apparatus for determining the angular distribution of scattered electrons resulting from diffraction is considerably greater than that of the prior art.

Abstract: A vaporization arrangement for coating substrates disposed in an areal region, or past through an areal region, comprises a rectangular vaporization crucible with a crucible rim, as well as plurality of electron guns each having an X-Y deflecting system. The electron guns are disposed on one side of the drucible axis separately from the crucible in such a manner that their beam axis extend parallel to one another and are directed on a plane passing vertically through the longitudinal axis of the crucible. The arrangement further comprises means for deflecting the electron means onto the surface of the contents of the crucible. Such means include an alternating serial arrangement of linear coils, on the side of the crucible opposite to the electron guns, and pole plates disposed both between the linear coils and at their ends.