Patents Assigned to MEMS Optical Inc.
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Patent number: 7701652Abstract: A mounting process/device for mounting and alignment of micro optical electro-mechanical systems (MOEMS) elements and/or devices. The mounting process/device can be obtained by attaching at least one optical element onto a mounting system, which contains an embedded optical element. The attached optical element(s) are aligned with respect to the embedded optical element.Type: GrantFiled: September 22, 2003Date of Patent: April 20, 2010Assignee: MEMS Optical, Inc.Inventor: John S. Harchanko
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Patent number: 7177236Abstract: A slider system have been developed to aid in the spacing between read/write heads and the storage medium, and a grating antenna amplifier has been developed to improve illumination spot size and polarization characteristics. The grating antenna can be attached to a grayscale slider to obtain a distance between the illumination spot and antenna that lies in the near field region.Type: GrantFiled: December 13, 2002Date of Patent: February 13, 2007Assignee: MEMS Optical, Inc.Inventors: John Harchanko, Michele Banish
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Patent number: 7145721Abstract: An anti-reflective structure is formed on a surface to transmit incident light with minimal losses. The anti-reflective surface has a plurality of protrusions having a feature size smaller than the wavelength of incident light. The protrusions increase in height in either a sloped linear manner or in a curvilinear manner, and the protrusions repeat across the surface in at least one dimension to transmit the incident light. Gray scale lithography may be used to produce these patterns of protrusions in photoresist layers. High fidelity transfer of the protrusion patterns into the surfaces is accomplished by utilizing, for example, an electron cyclotron resonance plasma. Transmission values at such patterned surfaces maybe as high as 99.3%.Type: GrantFiled: November 2, 2001Date of Patent: December 5, 2006Assignee: Mems Optical, Inc.Inventors: Michele Banish, Rodney L. Clark
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Patent number: 7070278Abstract: A lenslet array having variously shaped and sized lenslets, where the lenslets are rotated and/or tilted, reducing gap images in an image formed by pixels/subpixels, where the pixel/subpixels have gaps between each other forming the gap images.Type: GrantFiled: February 27, 2004Date of Patent: July 4, 2006Assignee: Mems Optical, Inc.Inventor: Joseph Larry Pezzaniti
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Patent number: 7017351Abstract: A MEMS based thermoacoustic cryo-cooler for thermal management of cryogenic electronic devices. The cryogenic cooling system can be integrated directly into a cryogenic electronic device. A vertical comb-drive provides an acoustic source through a driving plate to a resonant tube. By exciting a standing wave within the resonant tube, a temperature difference develops across a stack in the tube, thereby enabling heat exchange between heat exchangers. A tapered resonant tube improves the efficiency of the cooling system, compared with a simple cylinder configuration, leading to reduced harmonics and strong standing waves.Type: GrantFiled: November 21, 2003Date of Patent: March 28, 2006Assignee: Mems Optical, Inc.Inventors: Zhili Hao, Mark Fowler, Jay A. Hammer, Michael Whitley, David R. Brown
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Patent number: 7009789Abstract: An optical device is formed of an array of micro-wedges where each micro-wedge is different in size and shape from adjacent micro-wedges. Each micro-wedge of the array directs light in a predetermined direction toward a particular sub-region of an angular pattern. The positions of the micro-wedges in the device may be essentially random with respect to the corresponding positions of the sub-regions. The device causes the output light to fill a large angular spread with homogenized light with clear boundaries and edges. The device employs refraction or reflection, and the device operates efficiently over a broad wavelength band.Type: GrantFiled: February 22, 2000Date of Patent: March 7, 2006Assignee: Mems Optical, Inc.Inventor: David R. Brown
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Patent number: 6974216Abstract: A lenslet array having lenslets where the lenslets are variously shaped, and/or rotated and/or tilted, reducing gap images in an image formed by pixels/subpixels, where the pixel/subpixels have gaps between each other forming the gap images.Type: GrantFiled: January 29, 2004Date of Patent: December 13, 2005Assignee: Mems Optical, Inc.Inventor: Joseph Larry Pezzaniti
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Off-axis diffractive beam shapers and splitters for reducing sensitivity to manufacturing tolerances
Patent number: 6922286Abstract: A diffractive element used in conjunction with a grating to move a desired order beam off-axis, thereby reducing interference by undesired orders. Use of the off-axis grating allows a more uniform beam in the presence of manufacturing defects, such as etch depth errors. The diffractive element used with the off-axis grating may include a beam shaper, a one-dimensional beam splitter, or a two-dimensional beam splitter.Type: GrantFiled: April 19, 2004Date of Patent: July 26, 2005Assignee: Mems Optical, Inc.Inventor: David Renick Brown -
Patent number: 6909553Abstract: A multi-aperture beam integrator system/method for producing an polygon or other complex optical pattern on an image plane, which can be continuously varied in size, aspect ratio, or shape, is described. The integrator/method uses optical array elements having various phase functions, which can be combined to create optical patterns. Varying the location of the optical array elements with respect to each other and/or moving individual unit cells contained within the optical array elements can create continuously varying optical patterns at a desired location.Type: GrantFiled: August 5, 2002Date of Patent: June 21, 2005Assignee: Mems Optical, Inc.Inventor: Daniel Brown
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Patent number: 6891502Abstract: An antenna formation device/method has been developed to create variable shaped antennas using predetermined interference patterns to expose and develop a photoresist layer that is etched on a substrate to form the structure corresponding to the desired variable shaped antenna.Type: GrantFiled: January 10, 2003Date of Patent: May 10, 2005Assignee: MEMS Optical, Inc.Inventor: John Harchanko
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Patent number: 6888679Abstract: A beam integrator system, which integrates multiple beams into fewer beams of increased intensity by using a combination of optical elements and lenses.Type: GrantFiled: November 20, 2003Date of Patent: May 3, 2005Assignee: Mems Optical, Inc.Inventor: Daniel M. Brown
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Patent number: 6881358Abstract: A mold apparatus is arranged to produce molded optical elements. The apparatus includes a first mold unit for defining mold cavities and flow passageways, and a second mold unit having a patterned surface for sealing against the first unit. The patterned mold surface may be formed with a plurality of optical patterns, and mold pins may be used to complete the mold cavities. The patterned surface may be formed on a flat metal puck. The puck may be replaced by another puck insert so that the apparatus can be used to produce products having different optical characteristics. Other parts of the apparatus may be changed out to produce molded optical elements of various sizes and shapes. A variety of techniques are described for forming micro-refractive, diffractive and/or other patterns in the metal puck surface.Type: GrantFiled: July 6, 1999Date of Patent: April 19, 2005Assignee: MEMS Optical Inc.Inventors: Rodney L. Clark, John P. Rauseo, Gregg T. Borek
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Patent number: 6875695Abstract: A master wafer is replicated by creating a mold by plating a nickel electroform on a surface of a silicon wafer. Thereafter, a child wafer is prepared with a layer of photoresist or similar material that is compatible with plasma-etching techniques. Thereafter, the mold shape is transferred to the photoresist through compression molding, thereafter the child wafer is etched.Type: GrantFiled: April 5, 2002Date of Patent: April 5, 2005Assignee: Mems Optical Inc.Inventors: John S. Harchanko, Michele Banish
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Patent number: 6861363Abstract: Multi-levels are etched into silicon. The levels are etched through a combination of crosslinking photoresist, multiple photoresist patterning and development, wet etching and/or dry-etching. RIE, DRIE, and other etch techniques can be used during different steps. The multilevel structure may thereby be produced at commercially acceptable production rates allowing the method of the present application to be used in volume production of multilevel structures.Type: GrantFiled: August 2, 2002Date of Patent: March 1, 2005Assignee: Mems Optical, Inc.Inventors: John S. Harchanko, Michael Whitley
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Patent number: 6859240Abstract: An autostereoscopic display and method of displaying multidimensional images involves a first lenticular array preferably of cylindrical lenses positioned between a viewer and a pixel array, and a second lenticular array also preferably of cylindrical lenses positioned between the first lenticular array and the viewer. The pixel array includes several pixel groups that project images through corresponding groups of first lenses within the first lenticular array. A pitch of the lenses within the second lenticular array differs from a pitch of the lenses in the first lens groups within the first lenticular array. The display can be manufactured or retrofit with the first and second lenticular arrays.Type: GrantFiled: January 27, 2000Date of Patent: February 22, 2005Assignee: MEMS Optical Inc.Inventors: Daniel M. Brown, Peter Erbach
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Patent number: 6825985Abstract: A display and method of displaying multidimensional images on an autostereoscopic display includes establishing a lenslet array to include a plurality of lens elements. There is an interlacing of a plurality of multiple images on the display with a fanning of the multiple images out into an angular array. The method establishes a plurality of views in a vertical and horizontal direction. A mapping of a plurality of views onto a plurality of pixels makes up the display and a three dimensional image is generated from the fanned out multiple images.Type: GrantFiled: July 15, 2002Date of Patent: November 30, 2004Assignee: MEMS Optical, Inc.Inventors: Daniel M. Brown, Peter Scott Erbach, Joseph Larry Pezzaniti, Takahisa Minamitani
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Patent number: 6760508Abstract: A method and apparatus for optical switching is described wherein a first optical input/output port and plurality of second optical input/output ports are coupled using an optical guiding assembly. An optical signal may thereby be movably directed between the first input/output port and a selected one of the second optical input/output ports. The optical guiding assembly includes a optical micro-element assembly and an actuator assembly which moveably directs the microlens assembly to a predetermined position corresponding to the selected one of the input/output ports. The actuator assembly includes a comb drive and the optical micro-element assembly includes an etched lens, a ball lens, a mirror, or the like.Type: GrantFiled: December 26, 2001Date of Patent: July 6, 2004Assignee: Mems Optical, Inc.Inventors: John R. Karpinsky, Daniel M. Brown, Rodney L. Clark
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Off-axis diffractive beam shapers and splitters for reducing sensitivity to manufacturing tolerances
Patent number: 6731432Abstract: A diffractive element used in conjunction with a grating to move a desired order beam off-axis, thereby reducing interference by undesired orders. Use of the off-axis grating allows a more uniform beam in the presence of manufacturing defects, such as etch depth errors. The diffractive element used with the off-axis grating may include a beam shaper, a one-dimensional beam splitter, or a two-dimensional beam splitter.Type: GrantFiled: June 16, 2000Date of Patent: May 4, 2004Assignee: Mem Optical, Inc.Inventor: David Renick Brown -
Patent number: 6517751Abstract: A method for the replication of diffractive optical elements using audio/video disc manufacturing equipment and processes. The audio/video disc manufacturing process and mold mastering tooling create diffractive optical elements using a mold plate. The diffractive optic design and photomasks are first fabricated then replicated using compact disc industry mold mastering techniques. The surface relief pattern is produced centered in the plate using ion milling or refractive ion etching photolithographic fabrication techniques. Once patterned, the mold master plate is punched into a circular form consistent with standard compact or video disc mold bases—typically eight inches for a compact disc. After molding, each element can be cut out of the disc using blade, shear, waterjet or laser cutting.Type: GrantFiled: August 17, 1999Date of Patent: February 11, 2003Assignee: Mems Optical, Inc.Inventor: Gregory Hambright
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Publication number: 20020109894Abstract: A deformable mirror includes a vertical comb actuator having a reflective surface attached thereto. The vertical comb drive includes stationary elements interspersed with moving elements. When a potential difference is provided between these elements, the moving elements are pulled downward, thereby deforming the reflective surface. The vertical comb drive typically includes a plurality of actuators, which are individually electrically addressed. Each actuator may be an array of interspersed elements or a cavity and corresponding tooth. Springs support the moving elements and bias the reflective surface in an original position. The vertical comb drive provides a large stroke and substantially linear voltage-versus-displacement curve throughout the stroke.Type: ApplicationFiled: April 16, 2002Publication date: August 15, 2002Applicant: MEMS OPTICAL, INC.Inventors: Rodney L. Clark, Jay A. Hammer, John R. Karpinsky