Abstract: A diffractive having a grating period that exhibits significant polarization selectivity is used as a polarizing beamsplitter for obliquely incident polarized light. The grating is preferably a subwavelength of the illuminating beam and is preferably designed to substantially transmit transverse magnetic mode (TM) polarized light and to substantially reflect transverse electric mode (TE) polarized light at certain wavelengths or angles of incidence. Due to ease of manufacture, the polarizing beamsplitter may be integrated along with other optical elements, such as a subwavelength retarder, to form a polarization beam router, a dichroic beam combiner, a beam splitter on a curved surface, or an optical pickup using an optical beam splitter and router.

Abstract: A deformable mirror includes a vertical comb actuator having a reflective surface attached thereto. The vertical comb drive includes stationary elements interspersed with moving elements. When a potential difference is provided between these elements, the moving elements are pulled downward, thereby deforming the reflective surface. The vertical comb drive typically includes a plurality of actuators, which are individually electrically addressed. Each actuator may be an array of interspersed elements or a cavity and corresponding tooth. Springs support the moving elements and bias the reflective surface in an original position. The vertical comb drive provides a large stroke and substantially linear voltage-versus-displacement curve throughout the stroke.

Abstract: A projection eyepiece and method for aligning pattern areas on a substrate surface having a micro-optical device on an opposite surface side of the substrate is disclosed. The projection eyepiece enables projection of a reticle image onto a first surface of a substrate, enabling receipt of a reflection of that reticle image from a micro-optical device located on a second and opposing surface of the substrate, and enabling comparison of the projected and received image to determine alignment of the point of incidence on the first surface with the micro-optical device of the second surface. The projection eyepiece therefore determines alignment of pattern areas on opposing substrate surfaces by comparing a projected reticle image to a reflection of that projected reticle image.

Abstract: An apparatus for controlling light includes a non-transparent surface for blocking incident light, an array of first lenses for focusing the incident light upon the non-transparent surface, an array of shutters corresponding to the array of first lenses and positioned on the non-transparent surface for controlling passage of the incident light through the non-transparent surface, and an array of second lenses corresponding to the array of shutters for collimating the incident light passing through the shutters. The shutters are separated from the first lenses by a distance equal to a focal distance of the first lenses such that the incident light is focused by the first lenses onto the shutters. As such, the shutters may be opened and closed to control the intensity of the incident light passing therethrough.

Abstract: A micro-electromagnetic device having a three dimensional structure is formed using laser chemical vapor deposition on a conductive surface. Arrays of electromagnetic devices may be formed. Various techniques for facilitating deposition on the conductive surface may be used. A helical antenna for use in the THz region may be formed in accordance with the laser chemical vapor deposition. The antenna is preferably formed on a bolometer.

Abstract: A structure and method for circularizing and collimating incident light involves a substrate having first and second opposing surfaces, a first anamorphic surface positioned on the first surface and a second anamorphic microlens positioned on the second surface, the first and second surfaces being separated by a distance defined by the distance required for the first anamorphic microlens to circularize the incident light. A single microlens structure used to circularize and collimate incident light is manufactured by identifying aligned portions on opposing surfaces of a substrate, and forming microlenses on each of the aligned portions of the opposing substrate surfaces identified. The microlenses formed on the opposing substrate surfaces are fabricated from a high-index material such as GaP.

Abstract: An apparatus for controlling light includes a non-transparent surface for blocking incident light, an array of first lenses for focusing the incident light upon the non-transparent surface, an array of shutters corresponding to the array of first lenses and positioned on the non-transparent surface for controlling passage of the incident light through the non-transparent surface, and an array of second lenses corresponding to the array of shutters for collimating the incident light passing through the shutters. The shutters are separated from the first lenses by a distance equal to a focal distance of the first lenses such that the incident light is focused by the first lenses onto the shutters. As such, the shutters may be opened and closed to control the intensity of the incident light passing therethrough.

Abstract: A system and method for achieving alignment of a mask and substrate focuses a first image (e.g., a reticle) on a first position of a first substrate surface, and determines whether the first position is aligned with a second position on an opposing second substrate surface based on a second image formed based on light from a micro-optical device located on the second surface which collects light from a first image focused thereon. To determine whether the first and second positions are aligned, the first image and the second image are projected on an image plane and compared, the first and second positions being aligned when the first image and the second image are coincident on the image plane. A mask and/or alignment pattern may be formed on the opposing substrate surfaces, and used to generate aligned optics on those surfaces. As such, precise alignment between optics on opposing surfaces of a substrate can be achieved.

Abstract: An apparatus for controlling light includes a non-transparent surface for blocking incident light, an array of first lenses for focusing the incident light upon the non-transparent surface, an array of shutters corresponding to the array of first lenses and positioned on the non-transparent surface for controlling passage of the incident light through the non-transparent surface, and an array of second lenses corresponding to the array of shutters for collimating the incident light passing through the shutters. The shutters are separated from the first lenses by a distance equal to a focal distance of the first lenses such that the incident light is focused by the first lenses onto the shutters. As such, the shutters may be opened and closed to control the intensity of the incident light passing therethrough.

Abstract: A compact wavefront sensor includes an array of microlenses supported above a microchip. The microchip includes an array of gratings and photodetectors, which correspond to a particular microlens. Light incident on a grating will be diffracted back towards the array of microlenses, where it is focussed onto a corresponding photodetector. The photodetector receives light from gratings adjacent thereto, and detects a resulting interference therebetween. The detected interference is then used to reconstruct the wavefront. The detected interference can also be used to correct wavefronts by controlling a modulating element reflecting the wavefront.

Abstract: A method for the replication of diffractive optical elements using audio/video disc manufacturing equipment and processes. The audio/video disc manufacturing process and mold mastering tooling create diffractive optical elements using a mold plate. The diffractive optic design and photomasks are first fabricated then replicated using compact disc industry mold mastering techniques. The surface relief pattern is produced centered in the plate using ion milling or refractive ion etching photolithographic fabrication techniques. Once patterned, the mold master plate is punched into a circular form consistent with standard compact or video disc mold bases--typically eight inches for a compact disc. After molding, each element can be cut out of the disc using blade, shear, waterjet or laser cutting.