Abstract: A locking mechanism of a linear motor travel slider, includes: a serration member having a teeth portion and disposed on one of the bed and the travel slider extending in a slider-traveling-direction; a bracket supported by the other of the bed and the travel slider; an actuator supported by the other of the bed and the travel slider; a locking member supported by the actuator having a teeth portion engageable with the teeth portion of the serration member; and a controller for controlling the actuator to retain the lock member in an unlocked position when the linear motor is energized and for stopping the actuator when the linear motor is in a stop state due to a power failure. The locking member includes an urging member for making the locking member engage with the serration member while the actuator is in a stop state.

Abstract: The method for detecting any clamping malfunction of the work within the machine tool which clamps both ends of the work with clamping mechanisms 23, 24 of a pair of headstocks 19, 29, and processes the work by spinning the work through synchronous rotation of main spindles 21, 22 of the pair of headstocks by servomotors 33, 34, wherein, after clamping the both ends of the work 27 with the clamping mechanisms 23, 24 of the respective headstocks 19, 20, and while both the servomotors 33, 34 of the headstocks are in a servo-ON state, a command for a minute angle ? rotation is given to the servomotor 34 of only one of the headstocks, and at this point, any malfunction in clamping is determined when a current or torque generated within the servomotor of one or the other of the headstocks is smaller than a predetermined value.

Abstract: A pneumatically static balancer for a machine tool counterbalances or lightens a gravitational load generated by an own weight of a vertically moving driven member. The pneumatically static balancer includes a pneumatic cylinder supporting the driven member and allowed to move vertically, a pneumatically static bearing having a piston inserted into the pneumatic cylinder, the pneumatic static bearing being formed by feeding compressed air, which is in an interior of the pneumatic cylinder, into a small clearance formed between the pneumatic cylinder and the piston, a cylinder rod connected to an upper end of the piston and a saddle supporting a leading end portion of the cylinder rod.

Abstract: A main spindle apparatus has a main spindle having a through hole, a main spindle head rotatably supporting the main spindle therein, a tool holder clamp unit including an unit main body having a tool mounting hole to which a tool holder is mounted, a clamp mechanism for clamping the tool holder and a bias mechanism for biasing the clamp mechanism in a clamping state and a clamp release mechanism provided on the main spindle head side and releasing the clamping state of the clamp mechanism by operating the bias mechanism, wherein the tool holder clamp unit is mounted on the though hole of the main spindle so that the tool holder clamp unit is detachable from front side of the main spindle.

Abstract: A reference block 30 attached to a housing 20a is moved together with a main spindle 20 to a measurement start position A1, and the reference block 30 is so moved in a Z-axis direction as to across air injected from an air injection nozzle 25, so that a thermal displacement of the main spindle 20 is calculated based on change in pressure measured in the movement. The outer circumference of a tool mounted on the main spindle 20 is brought close to a leading end face of the air injection nozzle 25, and the air is injected to the outer circumference of the tool while rotating the tool at a predetermined position, and the air pressure is measured so that the rotational deflection of the tool is calculated based on the change in the measured pressure.

Abstract: A control device 40 controls the grinding processing at a processing portion of a work W so as to shift to the last precision grinding step from a rough grinding step through a middle grinding step and a finishing grinding step. When the grinding in each step is carried out, two processing portions are measured, and then, it is determined whether or not one or both measurement values attain to a predetermined value that has been determined in advance when each step is finished. When a processing time difference t is generated between the processing portions, by increasing or decreasing the feeding amount per unit time in a next step, the processing time difference is eliminated. Thereby, the finishing grinding step just before the last steps of the both processing portions are simultaneously finished.

Abstract: In a state of separating a front end face of an air injecting nozzle 23 from a worked work W by a predetermined interval h, the air injecting nozzle 23 is moved at a constant speed in an X axis direction, injects air from an injecting hole 27a of a nozzle main body 27 and is moved to pass centers O1, O2 of worked holes Wb, Wc of the work W. A variation in a pressure is measured by a pressure measuring unit 30. X axis coordinates of the centers O1, O2 of the holes Wb, Wc, a hole diameter E and a center interval distance D1 are calculated based on coordinates of center points T1, T2 of inclined portions Ld, Lu of a curve Lx of the pressure relative to the measured X axis coordinate.

Abstract: A machine tool has a support table provided on an upper surface of a bed to support a work, a Z-axis saddle, a machining unit mounted on the Z-axis saddle and provided with a machining head, a compartment cover arranged on the bed to compartment a region and a machine region, an opening window provided on the compartment cover to permit the machining head to go in and out therethrough, and a seal member in the form of a closed ring to be mounted on an inner peripheral edge of the opening window of the compartment cover, wherein an entire periphery of an outer peripheral surface of the machining head is brought into sliding contact with an inner peripheral edge of the seal member in a state, in which the machining head is moved into the machining region from a tool exchange position within the machine region.

Abstract: A machine tool control apparatus includes: a control program storage unit that stores control programs for performing standard running control. The control program storage unit includes a basic data memory that sets a control program for performing standard running, and a variable data memory that temporarily alters part of the control program to set a control program for performing temporary running. The machine tool control apparatus further includes a parameter check unit that checks whether a basic parameter stored in the basic data memory and a variable parameter stored in the variable data memory are “matched”; and a temporary running confirmation operation unit that enables the standard running when a parameter check result from the parameter check unit is “match” and that enables the temporary running by performing a temporary running confirmation operation while disenabling the standard running when the parameter check result is “mismatch”.

Abstract: A finishing grindstone member (20) is fixed to a spindle (10) by a bolt. In the spindle (10), there is formed a tool mounting portion (25) into which a rough grindstone member can be mounted. Into the tool mounting portion (25), there can be mounted not only the rough grindstone member but also a cover member (36). After a silicone wafer is roughly ground using the rough grindstone member, when finish grinding the silicone wafer using the finishing grindstone member (20), the cover member (36) is mounted onto the tool mounting portion (25) to thereby prevent the tool mounting portion (25) from being soiled.

Abstract: A laser beam machining apparatus forms blind holes at predetermined intervals in a workpiece by intermittently irradiating a laser beam from a laser nozzle to the workpiece while the laser nozzle and the workpiece being moved relatively. During the time the workpiece is subjected to machining, the electrostatic capacity between the support member and the laser nozzle is detected by an electrostatic capacity sensor while the workpiece made of conductive material is supported on the support member. The irradiation output power is controlled by a control unit which operates to vary the number of output pulses from the laser nozzle each time one hole is formed according to the result detected in response to variation in the thickness of the workpiece.

Abstract: A machining controlling apparatus numerically controls a wheel spindle stock and a spindle apparatus, and performs the machining operation of a workpiece by a grinding wheel. When a power failure has been detected by a power-failure detecting unit, a grinding machine is stopped after the grinding wheel is retreated from the workpiece within a very short period until the controlling operation by the machining controlling apparatus becomes impossible.

Abstract: A laser beam machining apparatus forms blind holes at predetermined intervals in a workpiece by intermittently irradiating a laser beam from a laser nozzle to the workpiece while the laser nozzle and the workpiece being moved relatively. During the time the workpiece is subjected to machining, the electrostatic capacity between the support member and the laser nozzle is detected by an electrostatic capacity sensor while the workpiece made of conductive material is supported on the support member. The irradiation output power is controlled by a control unit which operates to vary the number of output pulses from the laser nozzle each time one hole is formed according to the result detected in response to variation in the thickness of the workpiece.

Abstract: Chamfering C1 is performed along the edge of a notch groove by the center 01 of a grindstone 5. Change to grindstone center 02 is performed to perform chamfering C2 along the edge of the notch groove. Similarly, chamfering C3, C4 and C5 are formed. A grindstone having a large diameter can be employed. Only control of the diameter of the grindstone is required to maintain the shape. Satisfactory surface roughness can be realized. It is possible to improve surface roughness of a notch groove of a wafer and realize high efficiency.

Abstract: A lubricant supply apparatus 1 includes a tank holder portion 3 and a lubricant tank portion 2. In case where a tool holder clamp device 62 provided on a spindle shaft 61 pushes against an abutting member 35 disposed in the lubricant supply apparatus 1, lubricant filled in a pressure chamber 11 formed in the lubricant supply apparatus 1 can be jetted out from injection holes 39, —formed in the abutting member 35. The thus jetted-out lubricant is supplied to the tool holder clamp device 62.

Abstract: A machining controlling apparatus numerically controls a wheel spindle stock and a spindle apparatus, and performs the machining operation of a workpiece by a grinding wheel. When a power failure has been detected by a power-failure detecting unit, a grinding machine is stopped after the grinding wheel is retreated from the workpiece within a very short period until the controlling operation by the machining controlling apparatus becomes impossible.