Abstract: A surveying instrument in which the azimuth angle setting device is incorporated has a collimating telescope which is rotatable around at least a vertical axis. The azimuth angle setting device comprises horizontal angle detection means for producing an electrical signal corresponding to at least a horizontal angle around which the collimating telescope rotates, input means for entering a coordinate, memory means for storing the horizontal angle signal produced by the horizontal angle detection means and the input coordinate entered by the input means, and processing means for calculating a direction of magnetic north based on the coordinate of a measurement point at which the surveying instrument is mounted, entered to the memory means by the input means and a coordinate of a target to be collimated by the collimating telescope.

Abstract: The present invention relates to a camera in which photographing lens means is moved along an optical axis thereof between an extended position and a withdrawn position, a lens system of the lens means being protected by protective cover means moved by cover operating means, and being moved by lens operating means, motion of the protecting cover means and the lens system being controlled by control means.

Abstract: A device for boosting power supply voltage is provided with a transformer having a secondary winding which generates an elevated voltage when the power supply current is supplied to the primary winding, whereby the voltage generated in the secondary winding is supplied to a load while voltages corresponding to the inverse electromotive force generated in the primary winding are supplied to another load.

Abstract: An automatic focus detection camera includes means for driving a photo-taking lens to obtain the in-focus state, operating means operated from an initial state to a first operating state and subsequently to a second operating state, and means for controlling the drive means so as to continuously effect the in-focus driving of the photo-taking lens, for example, for a predetermined time when the operating means is in the initial state. The control means further drives the photo-taking lens until the in-focus state is obtained when the operating means is operated to the first operating state, and controls the drive means so as to restrain the photo-taking lens at that position when the in-focus state is obtained.

Abstract: A spectacle frame comprises a pair of plastic rim members suitable for containing individual lenses therein and formed in an open ring-like shape, each of the rim members having at the ends of the open ring thereof a pair of coupling portions in which the rim members are closed by the coupling portions being coupled to each other, a pair of temple members, and fastening means provided to fasten the coupling portions to each of the rim members. The fastening means includes a metal member having one end provided with an internal thread and the other end provided with a hinge piece coupled to one of the pair of temple members, a portion of the metal member including the one end being embedded in one of the coupling portions, and a male screw threadably engaged with the internal thread through the other of the coupling portions.

Abstract: A projection exposure apparatus comprises a wafer stage for supporting a wafer thereon and two-dimensionally moving the wafer along an image plane substantially perpendicular to an optical axis of a projection optical system, first position detecting means for measuring a two-dimensional position of the wafer stage to detect its coordinates with respect to the optical axis of the wafer, a reticle stage for holding different original patterns such that the patterns do not overlap each other and that predetermined central exposure points of the original image patterns are located at predetermined intervals, and for two-dimensionally moving the reticles at a stroke given such that the optical axis of projection passes all central exposure points of the different original patterns, and second position detecting means for detecting a two-dimensional position of the reticle stage according to a coordinate system determined by the first detecting means and a coordinate system having its axes along the same direction

Abstract: A surface displacement sensor is so designed that a stop or aperture for controlling an angle of opening is disposed at the position of a pupil of a detection optical system in which a slit image is focused on the surface to be detected and the light rays reflected from the surface to be detected are collected to re-focus the slit image on the light receiving surface of the sensor. When the height position of the surface to be detected is detected by such stop for controlling the angle of opening, the deviation of the distribution of intensity of light which tends to occur in the widthwise direction of the slit through which passes the light beam which in turn focuses a slit image, can be positively decreased by limiting the angle of opening N.A. in the widthwise direction of the slit for passing the light beam to focus a slit image to be narrow and consequently the degree of detection accuracy can be improved.

Abstract: An apparatus for measuring dimensions of a micropattern has a photoelectric sensor for scanning an enlarged image of a pattern and detects the positions of the leading and trailing edges by use of a predetermined slice level from a photoelectric signal which is derived by this sensor, thereby detecting the interval between those edges. The slice level is corrected in accordance with the interval between the edges to be measured. An amount of correction is stored as a predetermined table. A determination is made by an interval discriminating section to see if the correction needs to be performed or not.

Abstract: A multi-wavelength optical apparatus for laser processing, alignment and observation employs dichroic mirrors, which, by virtue of their wavelength characteristics, affect a processing laser beam differently from alignment and observation light. A projection optical system and a dichroic mirror form first and second images of an aperture on an object disposed on a movable stage from processing light and alignment light, respectively. The position of the second image relative to a reference is determined and automatically provides the position of the first image relative to the reference. The apparatus is used to repair microdefects in semiconductor circuit elements, for example.

Abstract: An apparatus for controlling a focal point of a photographing optical system of a camera is so designed that an overshooting amount of the photographing optical system from a braking timing of a driving means under the control of a driving controlling means is always monitored, and at the same time the overshooting amount is fed back to speed control of the driving means or control for determining a timing of the generation of a brake signal. The apparatus is capable of always and properly stopping the photographing optical system within a focus zone.

Abstract: A pattern position detecting apparatus using a laser beam which is used for the recognition of an edge position, line width, etc., of a circuit pattern on a semiconductor wafer used in the fabrication of semiconductor devices. The apparatus includes an optical system for condensing a short-wave energy beam into a tiny spot and projecting it onto a sample, means for moving the sample and the spot relative to each other, first detecting means for receiving at least one of a reflection from a pattern and a scattering from a pattern edge, second detecting means for detecting a luminescence emitted from a pattern portion hit by the spot, and means for determining the position of the pattern in accordance with the detection information from the first and second detecting means and the scanning information of the spot.

Abstract: A surface acoustic wave motor utilizing ultrasonic vibration has an elastic member and piezoelectric elements for vibrating the elastic member. The motor is provided with a monitor voltage detecting circuit for detecting a monitor voltage generated by the vibration, from a portion of the piezoelectric elements not receiving the input voltage, and a frequency control circuit for controlling the input power supply frequency in such a manner that the monitor voltage assumes a predetermined value lower than a maximum monitor voltage obtained at the resonance frequency of the stator consisting of the elastic member and piezoelectric elements, in a frequency range higher than the resonance frequency.

Abstract: A solid state image pick-up device in which a light-receiving portion of MOS diode structure for accumulating therein charges corresponding to the intensity of light is formed on a substrate includes discharging means for discharging the accumulated charges into the substrate, and control means for controlling the discharging means in accordance with the exposure time of the solid state image pick-up device.

Abstract: A method of detecting a registration diversion between a mask and a wafer prior to a main exposure. This method detects relative diversions between marks on the wafer and latent images of marks on the mask formed on a photosensitive layer of the wafer. The latent images of the marks on the mask are preliminarily formed on the photosensitive layer of the wafer by an exposure energy beam prior to the main exposure.

Abstract: Apparatus for detecting the edge of a pattern on an object surface is disclosed. The apparatus includes a light source for emitting a collimated light beam, a condensing optical system for forming an elongated light spot of the collimated light beam on the object surface, an image-forming optical system for forming an image of the elongated light spot by focusing the reflected light from the object surface, a detector for forming an output signal corresponding to the reflected light from the spot image, an image rotator and a driving member. The elongated light spot is formed by means of slit. The direction of the slit is changed by the driving member to change the direction of the elongated light spot on the object surface. The driving member also drives the image rotator so as to keep the direction of the reflected spot image unchanged irrespective of the change of the direction of the slit.

Abstract: A projection exposure apparatus of the type which employs an alignment light of the same wavelength as an exposure light and includes an optical system subjected to correction of chromatic aberration for the exposure light so as to simultaneously observe an alignment area on a reticle and an alignment area on a photosensitive substrate to bring the reticle and the photosensitive substrate into alignment. The apparatus includes light source means for emitting light of a wavelength different from that of the exposure light and capable of sensitizing the photosensitive substrate, and optical means for introducing the light source means into the optical system to project it on to the alignment area on the photosensitive substrate through the alignment area on the reticle.

Abstract: A dry cell accommodating device includes a dry cell chamber, a cover and a dry cell holder. When a plurality of larger dry cells, for instance, size "AA" dry cells are accommodated, they are fitted into the interior of the dry cell chamber without any necessity for the dry cell holder. When a plurality of smaller dry cells, for instance, size "AAA" dry cells are accommodated, they are first held by means of the dry cell holder and the latter is then fitted into the dry cell chamber together with the dry cells. The device is provided with a mechanism for inhibiting an occurrence of incorrect fitting of the dry cell holder. The mechanism comprises a plurality of projections on the bottom of the dry cell chamber and a plurality of recesses formed at the lower part of the dry cell holder to be fitted over the projections when the dry cell holder is oriented in the correct direction. Further, the device is provided with another mechanism for inhibiting incorrect fitting of smaller dry cells.