Patents Assigned to Shin-Etsu Quartz Products Co., Ltd.
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Publication number: 20200399160Abstract: A mold for manufacturing a quartz glass crucible by a rotary molding method, having a plurality of grooves that are concentric with respect to a mold rotation axis in at least a straight body portion of an inner surface of the mold, wherein the plurality of concentric grooves are non-penetrating grooves that do not penetrate the mold. This provides a mold for manufacturing a quartz glass crucible by a rotary molding method, having an inner surface made so that it is difficult for quartz powder to slide down when forming a quartz powder compact.Type: ApplicationFiled: December 4, 2018Publication date: December 24, 2020Applicant: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventors: Jiro SAWAZAKI, Yasuo OHAMA, Katsumi TANIGUCHI
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Publication number: 20200369549Abstract: A carbon electrode used for an arc discharge for manufacturing a quartz glass crucible, wherein at least one of a concave pattern and a convex pattern is formed on a surface of the carbon electrode in at least a range of 50 mm to 130 mm in a longitudinal direction of the carbon electrode from an end portion where the arc discharge takes place. Consequently, a carbon electrode that can suppress agglomeration of silica fume on the carbon electrode while manufacturing a quartz glass crucible is provided.Type: ApplicationFiled: January 17, 2019Publication date: November 26, 2020Applicant: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventor: Kazuki TOMOKUNI
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Patent number: 10843954Abstract: Provided is a method for producing a synthetic opaque quartz glass where flame processing can be performed in high purity with a simple way and even a large sized one can be produced, and the synthetic opaque quartz glass. A method for producing a synthetic opaque quartz glass which comprises the step of heating and burning a quartz glass porous body under a pressure of from 0.15 MPa to 1000 MPa at a temperature of from 1200 ° C. The quartz glass porous body is prepared by depositing quartz glass particles which are produced by hydrolyzing a silicon compound with an oxyhydrogen flame.Type: GrantFiled: December 4, 2007Date of Patent: November 24, 2020Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventors: Tatsuhiro Sato, Nobumasa Yoshida, Katsuhide Orikasa, Makoto Tanaka
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Publication number: 20200270162Abstract: One aspect is a method for producing a hollow porous quartz glass base material, and a method for producing a synthetic quartz glass cylinder, wherein even when the hollow porous quartz glass base material (soot body) is produced in large weight and high bulk density, the ease of target extraction is maintained and target extraction is performed stably, and a large weight soot body can be produced.Type: ApplicationFiled: December 28, 2017Publication date: August 27, 2020Applicants: Shin-Etsu Quartz Products Co., Ltd., Heraeus Quarzglas GmbH & Co. KGInventors: Kotaro SUMI, Hikari KUWAHARA
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Patent number: 10323334Abstract: The present invention is a method for producing a quartz glass crucible for pulling a single crystal silicon from a silicon melt held therein, including the steps of: producing a quartz glass crucible having an outer layer including an opaque quartz glass containing bubbles therein and an inner layer including a transparent quartz glass containing substantially no bubbles; roughening a region of an inner surface of the produced quartz glass crucible, the region being in contact with the silicon melt when holding the silicon melt; and heating the quartz glass crucible having the roughened inner surface to crystallize a surface of the roughened region. This can produce a quartz glass crucible for pulling a single crystal silicon which can suppress generation of a brown ring on the inner surface of the crucible during pulling the single crystal silicon and can suppress crystallinity disorder of the single crystal silicon.Type: GrantFiled: June 1, 2015Date of Patent: June 18, 2019Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventor: Yuji Baba
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Publication number: 20180305236Abstract: One aspect is a process to producing a synthetic quartz glass, including an annealing treatment that includes: putting a synthetic quartz glass as a parent material into a heat treatment furnace; elevating a temperature in the heat treatment furnace to a prescribed keeping temperature that is equal to or higher than the annealing point; keeping the keeping temperature; annealing the synthetic quartz glass; and taking the synthetic quartz glass out of the heat treatment furnace. The process includes determining an annealing rate v [° C./h] of the annealing step based on a value of S/V [mm2/mm3], wherein S [mm2] is the surface area of the synthetic quartz glass as a parent material and V [mm3] is the volume thereof and a target birefringence Re [nm/cm] for the synthetic quartz glass after the annealing, and the annealing step is performed at the determined annealing rate v.Type: ApplicationFiled: April 23, 2018Publication date: October 25, 2018Applicants: Shin-Etsu Quartz Products Co., Ltd., Heraeus Quarzglas GmbH & Co. KGInventor: Manabu UTSUMI
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Patent number: 10104768Abstract: Provided are a sizing agent for quartz glass fibers capable of suppressing charging of quartz glass fibers, and suppressing generation of fluff in a production process for quartz glass fibers and a weaving process for a quartz glass cloth, a quartz glass fiber or a quartz glass yarn having applied thereonto the sizing agent, a quartz glass cloth, a prepreg for a printed circuit board, and a product using the quartz glass fiber. The sizing agent for quartz glass fibers includes an aqueous solution containing: a cationic vinyl acetate copolymer emulsion in which a cationic vinyl acetate copolymer having a weight average molecular weight of from 5,000 to 500,000 is dispersed in water; and starch, in which emulsion particles of the cationic vinyl acetate copolymer emulsion have a 50% diameter on a volume basis of from 0.1 ?m to 5 ?m.Type: GrantFiled: June 9, 2016Date of Patent: October 16, 2018Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventor: Yuya Yokosawa
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Publication number: 20170175291Abstract: The present invention is a method for producing a quartz glass crucible for pulling a single crystal silicon from a silicon melt held therein, including the steps of: producing a quartz glass crucible having an outer layer including an opaque quartz glass containing bubbles therein and an inner layer including a transparent quartz glass containing substantially no bubbles; roughening a region of an inner surface of the produced quartz glass crucible, the region being in contact with the silicon melt when holding the silicon melt; and heating the quartz glass crucible having the roughened inner surface to crystallize a surface of the roughened region. This can produce a quartz glass crucible for pulling a single crystal silicon which can suppress generation of a brown ring on the inner surface of the crucible during pulling the single crystal silicon and can suppress crystallinity disorder of the single crystal silicon.Type: ApplicationFiled: June 1, 2015Publication date: June 22, 2017Applicant: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventor: Yuji BABA
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Patent number: 9409812Abstract: [Problem] The provision of a synthetic quartz glass heat treatment method that can, by a single heat treatment, and without particular limitations on the OH group concentration distribution of the starting material, regulate the birefringence fast axis direction in the synthetic quartz glass after it has been heat-treated. [Means of overcoming the problem] A heat treatment method for synthetic quartz glass whereby columnar synthetic quartz glass having two opposing end faces and a lateral face is heat-treated covered with thermal insulator; wherein said heat treatment is performed using as end face thermal insulator which covers said two end faces, and as lateral face thermal insulator which covers said lateral face, thermal insulators that differ in at least either type or thickness to afford different thermal insulation effects such that the birefringence fast axis direction of said synthetic quartz glass is regulated.Type: GrantFiled: July 18, 2013Date of Patent: August 9, 2016Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., Ltd.Inventor: Shigeo Harada
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Patent number: 9403620Abstract: A silica container contains a substrate having a rotational symmetry, containing mainly a silica, and gaseous bubbles in a peripheral part of the substrate; a transparent silica glass in an inner peripheral part of the substrate; and an inner layer, formed on an inner surface of the substrate and containing a transparent silica glass; wherein the substrate contains Li, Na, and K in a total concentration of 50 or less ppm by weight; the substrate has a linear light transmittance of 91.8% to 93.2% at a light wavelength of 600 nm; the inner layer contains Li, Na, and K in a total concentration of 100 or less ppb by weight and at least one of Ca, Sr, and Ba in a total concentration of 50 to 2000 ppm by weight; and the inner layer has a linear light transmittance of 91.8% to 93.2% at a light wavelength of 600 nm.Type: GrantFiled: April 12, 2013Date of Patent: August 2, 2016Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventors: Shigeru Yamagata, Tomomi Usui
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Patent number: 9382640Abstract: The present invention provides a single-crystal silicon pulling silica container including an outer layer made of opaque silica glass containing gaseous bubbles and an inner layer made of transparent silica glass that does not substantially contain the gaseous bubbles; the container also including: a bottom portion, a curved portion, and a straight body portion, wherein continuous grooves are formed on a surface of the inner layer from at least part of the bottom portion to at least part of the straight body portion through the curved portion. As a result, there are provided the single-crystal silicon pulling silica container that can reduce defects called voids or pinholes in the pulled single-crystal silicon and a method for manufacturing such a silica container.Type: GrantFiled: October 2, 2012Date of Patent: July 5, 2016Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventor: Shigeru Yamagata
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Patent number: 9376761Abstract: The present invention is directed to a single-crystal silicon pulling silica container, the silica container including a straight body portion, a curved portion, and a bottom portion, wherein the OH group concentration in the straight body portion is 30 to 300 ppm by mass, the OH group concentration in the bottom portion is 30 ppm by mass or less, and the difference in the OH group concentration between the straight body portion and the bottom portion is 30 ppm by mass or more. As a result, a low-cost single-crystal silicon pulling silica container, the silica container that can reduce cavity defects called voids and pinholes in pulled single crystal silicon, is provided.Type: GrantFiled: November 8, 2012Date of Patent: June 28, 2016Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventor: Shigeru Yamagata
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Patent number: 9216923Abstract: A mold for making a fused silica crucible includes a cylindrical can having an interior bore. A graphite insert is received in the bore and has an upper surface adapted to form the lower surface of the crucible while the interior bore of the can forms the side wall of the crucible. Silica grain is deposited in the mold while it rotates. Bores formed in the can above the insert and in the insert draw air through the silica during fusion.Type: GrantFiled: July 25, 2011Date of Patent: December 22, 2015Assignee: Shin-Etsu Quartz Products Co., Ltd.Inventors: Katsuhiko Kemmochi, Larry Baer, Carl Hagstrom
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Publication number: 20150353417Abstract: Provided are a quartz glass member for wavelength conversion that is high in environmental resistance, heat resistance, durability, and color rendering property, can be manufactured by a low temperature process, and can efficiently convert a wavelength, and a method of manufacturing the same. The quartz glass member for wavelength conversion includes: a quartz glass base material; and a quartz glass surface layer film formed on a surface of the quartz glass base material, in which: the quartz glass surface layer film is obtained by applying, onto the surface of the quartz glass base material, a polysilazane-containing solution containing fluorescent material particles having an average particle diameter of from 0.Type: ApplicationFiled: December 25, 2014Publication date: December 10, 2015Applicant: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventors: Tatsuya Mori, Tatsuhiro Sato, Akira Fujinoki
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Patent number: 9145325Abstract: A method for producing a silica container having a rotational symmetry includes forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.Type: GrantFiled: June 13, 2014Date of Patent: September 29, 2015Assignee: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventors: Shigeru Yamagata, Tomomi Usui
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Patent number: 9067823Abstract: It is an object of the invention to provide a synthetic silica glass for a cladding of a core from a fiber laser. The refractive index should be low and there should be no foaming foreign substances. This object is achieved by a synthetic silica glass for an optical element, which contains paramagnetic E? defect centers in an amount that is sufficient to set the absorption coefficient at 215 nm is in the range between 0.001 cm?1 and 2 cm?1; it contains paramagnetic oxygen defect centers in an amount that is sufficient to set the absorption coefficient at 250 nm is in the range between 0.001 cm?1 and 2 cm?1; the OH group concentration is 5 wtppm or less; the viscosity at 1100° C. is in the range between 1×1013.5 poise and 1×1015.5; the total content of metallic elements of Group 3 and Group 13 of the periodic table is 50.000 wtppm or less; and the relative refractive index difference of said synthetic silica glass is in the range between +0.Type: GrantFiled: April 20, 2011Date of Patent: June 30, 2015Assignees: Heraeus Quarzglas GmbH & Co. KG, Shin-Etsu Quartz Products Co., LtdInventors: Tatsuhiro Sato, Tomoichi Kumata
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Patent number: 9051203Abstract: Provided in a facile manner are a black synthetic quartz glass with a transparent layer, which meets demands for various shapes, has a black portion satisfying required light shield property and emissivity in an infrared region, keeps a purity equivalent to that of a synthetic quartz glass in terms of metal impurities, has a high-temperature viscosity characteristic comparable to that of a natural quartz glass, can be subjected to high-temperature processing such as welding, does not release carbon from its surface, and is free of bubbles and foreign matter in the transparent layer and the black quartz glass, and at an interface between the transparent layer and the black quartz glass, and a production method therefor.Type: GrantFiled: September 13, 2012Date of Patent: June 9, 2015Assignee: Shin-Etsu Quartz Products Co., Ltd.Inventors: Hiroyuki Watanabe, Takayuki Imaizumi, Tatsuhiro Sato
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Patent number: 8915097Abstract: Producing a silica container includes forming a powder mixture by adding an Al compound or a crystal nucleating agent into a first powdered raw material; preliminarily molding to an intended shape by feeding the powder mixture to an inner wall of an outer frame while rotating the outer frame having aspiration holes; forming a silica substrate; and forming a transparent silica glass layer on an inner surface of the silica substrate, wherein the preliminarily molded article is degassed by aspiration from a peripheral side and heated from inside the preliminarily molded article at high temperature making a peripheral part of the preliminarily molded article to a sintered body while an inner part to a fused glass body, and a second powdered raw material having a higher silica purity than the first powdered raw material is spread from inside the silica substrate and heated from the inside at high temperature.Type: GrantFiled: March 12, 2013Date of Patent: December 23, 2014Assignee: Shin-Etsu Quartz Products Co., LtdInventors: Shigeru Yamagata, Tomomi Usui
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Patent number: 8915096Abstract: A method for producing a silica container includes forming a preliminarily molded substrate, wherein a first powdered raw material is fed to an inner wall of an outer frame having aspiration holes while rotating the outer frame; forming a preliminarily molded intermediate layer, wherein a second powdered raw material added with an aluminum compound or a crystal nucleating agent as an additive is fed to an inner wall of the preliminarily molded substrate; and forming an inner layer, wherein the preliminarily molded substrate and the preliminarily molded intermediate layer are degassed by aspiration from a peripheral side with heating from an inside forming a substrate and an intermediate layer, and a third powdered raw material having a high silica purity is spread from inside the substrate having the formed intermediate layer with heating from the inside forming an inner layer on an inner surface of the intermediate layer.Type: GrantFiled: March 11, 2013Date of Patent: December 23, 2014Assignee: Shin-Etsu Quartz Products Co., Ltd.Inventors: Shigeru Yamagata, Tomomi Usui
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Publication number: 20140290308Abstract: A method for producing a silica container having a rotational symmetry includes forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.Type: ApplicationFiled: June 13, 2014Publication date: October 2, 2014Applicant: SHIN-ETSU QUARTZ PRODUCTS CO., LTD.Inventors: Shigeru YAMAGATA, Tomomi USUI