Abstract: The present invention provides a vacuum chamber capable of simplifying the structure of the arrangement of a cooling passage. The vacuum chamber of the present invention includes a plurality of wall members, the plurality of the wall members are connected to each other to construct a chamber main body by connection portions where connection surfaces each of which is part of a surface of each wall member are hermetically connected to each other, and at least part of the connection portions are built-in gap type connection portions each of which has a gap extending along the corresponding connection surfaces inside the connection surfaces and in which peripheries of the connection surfaces are hermetically connected to each other by welding.

Abstract: A sheet plasma film forming apparatus (100) of the present invention includes: a plasma gun (40) which can emit source plasma (22) in a transport direction; a sheet plasma converting chamber (20) including a transport space (21) extending in the transport direction; a pair of first magnetic field generating means (24A, 24B) disposed so as to sandwich the transport space (21) such that same poles thereof face each other; a film forming chamber (30) including a film forming space (31) which communicates with the transport space (21); and a pair of second magnetic field generating means (32, 33) disposed so as to sandwich the film forming space such that different poles thereof face each other, wherein: while moving in the transport space (21), the source plasma (22) is converted by a magnetic field of the pair of first magnetic field generating means (24A, 24B) into sheet-shaped plasma spreading along a main surface S including a center; and while moving in the film forming space (31), the sheet-shaped plasma 2

Abstract: An example impeller includes: an impeller body in which an internal channel is formed, the internal channel extending inside the impeller body in a direction of a rotation axis spirally about the rotation axis to connect an inlet and an outlet; and at least one centrifugal vane provided in the impeller body. The internal channel including the inlet and the outlet has a predetermined passage diameter. An external channel is formed so as to continue to the outlet and go around the circumferential surface of the impeller body, the external channel being defined by the centrifugal vane and being recessed inward in the radial direction from the circumferential surface of the impeller body. At least a part in a flow direction of the external channel has a channel width in the direction of the rotation axis smaller than the width of the outlet.

Abstract: Provided are a magnet structure and the like capable of changing a magnetic force line distribution on a surface of a target to thereby achieve wide erosion of a target, using a simple drive mechanism. A magnet structure (110) comprises a main magnet (10, 13) disposed at a reverse surface (20B) side of a target (20) to produce a main magnetic force line reaching an obverse surface (20A) of the target, an adjustment magnet (11) disposed at the reverse surface (20B) side of the target (20) to produce an adjustment magnetic force line for changing a magnetic flux density distribution produced by the main magnetic force line, a magnetic path (21A, 21B, 24) of the adjustment magnetic force line which is disposed at the reverse surface (20B) side of the target 20, and a magnetic field adjustment means (12, 14) configured to be able to change strength of the adjustment magnetic force line passing through inside of the magnetic path (21A, 21B, 24).

Abstract: In an ultra-low temperature freezer (R) using refrigerant mixture in which plural kinds of refrigerants having different boiling points are mixed, in order to ensure the flow rate of liquid refrigerant into a supercooler (31) and enhance the cooling efficiency of a cryocoil (32), the ultra-low temperature freezer (R) comprises: a main refrigerant circuit (38) provided with the cryocoil (32) and a capillary tube (29); and a sub refrigerant circuit (39) that is connected at the upstream end to the upstream end of the main refrigerant circuit (38) to branch off therefrom and provided with a capillary tube (28), and the ultra-low temperature freezer (R) is configured so that the sub refrigerant circuit (39) is lower in height than the main refrigerant circuit (38).

Abstract: A plasma film deposition system increases plasma density and improves sputtering efficiency by not generating a corner of a sheet plasma and can be operated safely by preventing occurrence of the corner in sheet plasma. The system comprises: a plasma gun capable of discharging source plasma toward a transport direction; a sheet plasma deformation chamber; a pair of magnetic field generating means provided such that same polarities thereof face each other; a film deposition chamber; and a forming magnet coil provided upstream of the pair of magnetic field generating means in the transport direction. The magnetic field generating means and the forming magnet coil generate a magnetic field whose magnetic flux densities in the transport direction are substantially constant at portions of a transport center and their vicinity portions, the portions corresponding to the forming magnet coil and the magnetic field generating means.

Abstract: A boarding bridge includes a rotunda connected to a terminal building and rotatable around a vertical axis thereof; an extendable tunnel section connected to the rotunda at one end thereof; and a cab connected to the other end of the tunnel section and rotatable around a vertical axis thereof. The tunnel section is structured to extend generally parallel to a fuselage of an aircraft when the cab is attached to the aircraft. The cab includes a floor extending in a direction generally perpendicular to the tunnel section, and a gangplank which is arranged to be projectable forward from a portion of the floor, and by projecting forward, defines a path connecting the floor and a hatch of the aircraft.

Abstract: A vibrating bowl and the like are provided which are capable of accurately counting the number of objects to be fed. The vibrating bowl (10) includes: a concave portion (10a) capable of storing therein collectivity of objects (15) to be fed; a feed passage (20) capable of feeding the objects (15) within the concave portion (10a) by vibrating the objects (15); and a step portion (26) configured to cause the objects to be ejected outside of the concave portion (10a) in a direction substantially perpendicular and downwardly oblique to a feed direction in which those objects (15) which are present in the vicinity of a termination of the feed passage (20) are fed.

Abstract: A method for manufacturing a structural component includes a first step of attaching at least one conductive member to a surface of a base material made of a composite material and a second step of forming the base material by conducting electricity to part or the whole of the conductive member to generate heat and/or making an assembly of the structural component by conducting electricity to part or the whole of the conductive member to generate heat. Part or the whole of the conductive member contained in the structural component produced in the first and second steps serves as a member giving to the aircraft at least one of a lightning strike protection function, an anti-icing and deicing function and an electromagnetic interference shielding function.

Abstract: A movable trailing edge is composed of a main body including a structural frame member in which a spar and a rib intersect with each other, and a first outer plate that covers the main body. The first outer plate is placed on and cover the structural frame member, a rotating probe is pressed against the first outer plate from the obverse side thereof to friction stir weld the first outer plate and the side end face of the structural frame member. Joint parts are arranged in a dotted pattern.

Abstract: An arc evaporation source and a vacuum deposition system capable of properly collecting an evaporated material emitted from a cathode in vacuum arc discharge are provided. An arc evaporation source (100) includes a first electrode and a second electrode (14A, 14B) disposed so as to face each other with a gap (G) therebetween. The first and second electrodes (14A, 14B) are configured such that at least one of the first and second electrodes (14A, 14B) is operable as a cathode, and the other one of the first and second electrodes (14A, 14B) is operable to collect an evaporated material emitted from the cathode, based on a vacuum arc discharge occurring between the cathode and an anode.

Abstract: A film forming apparatus which can perform a film forming process to a base material while the base material is being mounted on a die for a molding process. The film forming apparatus is provided with a cylinder-shaped frame body (1h) having one end closed with a bottom part and the other end opened, a target (1a) arranged on an inner plane of the bottom part, and a port (3b) formed to penetrate a wall part of the frame body (1h).

Abstract: A seal-feeding station includes a seal receiver (21) for receiving a waterproof seal (20) fed through a seal feeding tube (16) and a seal keeper (23) for keeping the waterproof seal (20) transferred from the seal receiver (21) in an electric-wire insertion position. The seal receiver (21) includes a slider board (27) which is supported slidably between a standby position and a transfer position and includes an acceptance hole (27b) in which the waterproof seal (20) is fit in when the slider board (27) is in the standby position, and a push pin (38) which is movable forward and backward, is located so as to face the acceptance hole (27b) of the slider board (27) when the slider board (27) is in the transfer position, and moves forward to push the waterproof seal (20) fit in the acceptance hole (27b) and transfer the waterproof seal (20) to the seal keeper (23).

Abstract: An electric-wire guide unit is provided with a fixed roller and a movable roller that is supported movably toward and away from the fixed roller, and holds an electric wire from both of the sides of the electric wire in cooperation with the fixed roller. An electric-wire nozzle unit is provided with a fixed nozzle guide and a movable nozzle guide that is slidably placed, and forms a nozzle opening through which the electric wire is inserted, in cooperation with the fixed nozzle guide. A link mechanism, which couples the movable roller and the movable nozzle guide so as to be interlocked, is prepared. An tension spring, which presses the movable roller in an approaching direction toward the fixed roller, is attached. In accordance with the size of the diameter of the electric wire to be held between the movable roller and the fixed roller, the movable nozzle guide is slide-operated through the link mechanism so that the nozzle opening is size-adjusted.

Abstract: A film deposition method and film deposition system for depositing a halogen compound film, capable of depositing such a film while suppressing abuse that occurs due to deficiency of a halogen element even if the halogen element is dissociated from a film material. The halogen compound film is deposited through a process including: evaporating a film material comprising a halogen compound by means of an evaporation source 3; ionizing the evaporated film material with a radio frequency power outputted from a radio frequency power supply unit 11 and supplied through a substrate holder 2; and causing the ionized film material deposit on the substrate 5. A bias voltage outputted from a bias power supply unit 12 and applied to the substrate holder 2 causes halogen ions dissociated from ions of the halogen compound to be incorporated into the film being deposited on the substrate 5.

Abstract: A vacuum film deposition method comprises the steps of mounting a substrate on a substrate holder (6a) that is disposed in a vacuum chamber (1) and is provided with a passage (7f), (7g), and (7j) in which predetermined heat medium flows; maintaining an inside of the vacuum chamber substantially in vacuum state; evaporating evaporation materials from two or more evaporation sources in the inside of the vacuum chamber; and diffusing the evaporated evaporation materials in the inside of the vacuum chamber in a predetermined order; and depositing the diffused evaporation materials on a deposition surface of the substrate, thereby forming a multi-layered film made of the evaporation materials on the deposition surface of the substrate; wherein an antifreezing fluid is used as the predetermined heat medium flowing in the passage of the substrate holder.

Abstract: The present invention provides film formation systems and film formation methods. A high frequency (HF) electric power supply (11) applies a high frequency voltage to a cathode (5) which is provided, at its rear surface, with a permanent magnet (10), thereby to generate a reactive-mode plasma, and film formation by plasma polymerization is performed by the use of the generated reactive-mode plasma. The pressure of a plasma source gas in a vacuum chamber (1) is regulated, thereby to generate not a reactive-mode plasma but a metallic-mode plasma. The cathode (5) as a target is subjected to sputtering by the generated metallic-mode plasma, and film formation by magnetron sputtering is carried out.

Abstract: Disclosed is an optical system that has superior optical characteristic and wear resistance and can be formed at low temperatures. An optical system 101 for adjusting visible light transmittance to have a desired value comprises fluoride 103, and at least part of the optical system has a crystal grain diameter of 3 nm to 10 nm. The fluoride 103 has a specific surface area of 1 m2/g to 5 m2/g.