Patents Assigned to Vanguard International Semiconductor Corporation
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Publication number: 20230231002Abstract: A semiconductor device includes a substrate, a first well region, a second well region, an isolation region, a first resistor segment and a second resistor segment. The substrate includes a region having a first conductivity type. The first and the second well regions are disposed in the region of the substrate. The isolation region is disposed on the first and the second well regions. The first and the second resistor segments are electrically connected to each other and disposed on the isolation region. Moreover, the first and the second well regions are disposed directly under the first and the second resistor segments, respectively. The first and the second well regions do not overlap with each other in a vertical projection direction and have a second conductivity type that is opposite to the first conductivity type.Type: ApplicationFiled: January 19, 2022Publication date: July 20, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Yu-Jui Chang, Chien-Hsien Song, Kai-Chuan Kan
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Publication number: 20230207682Abstract: A semiconductor device, including: a substrate having a first conductive type, an epitaxial layer disposed on the substrate, a doped region disposed in the epitaxial layer, and a gate electrode disposed through the doped region and extending into the epitaxial layer. The epitaxial layer has the first conductive type, and the doped region has a second conductive type different from the first conductive type. The gate electrode includes a first structure having a first dimension, and a second structure above the first structure. The second structure includes a main portion and a protruding portion below the main portion, wherein the main portion has a second dimension larger than the first dimension, and the protruding portion has the first dimension.Type: ApplicationFiled: December 23, 2021Publication date: June 29, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Syed-Sarwar IMAM, Chia-Hao LEE
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Publication number: 20230198250Abstract: An electrostatic discharge (ESD) protection circuit including a detection circuit, a voltage-divider element, and a discharge element is provided. The detection circuit is coupled between a first power line and a second power line. In response to an ESD event, the detection circuit enables a turn-on signal. The voltage-divider element is coupled between the first power line and a third power line and receives the turn-on signal. The discharge element is coupled between the second and third power lines. In response to the turn-on signal being enabled, the first discharge element discharges an ESD current.Type: ApplicationFiled: December 16, 2021Publication date: June 22, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Yeh-Ning JOU, Chieh-Yao CHUANG, Hsien-Feng LIAO, Ting-Yu CHANG, Chih-Hsuan LIN, Chang-Min LIN, Shao-Chang HUANG, Ching-Ho LI
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Publication number: 20230197126Abstract: A storage device including a cell array and a disturb-free circuit is provided. The cell array includes a first cell and a second cell. The first cell is coupled to a first conductive line and a specific conductive line. The second cell is coupled to a second conductive line and the specific conductive line. The disturb-free circuit performs a first write operation on the first cell and performs a verification operation on the second cell. The verification operation determines whether data stored in the second cell is disturbed by the first write operation. In response to the data stored in the second cell being disturbed by the first write operation, the disturb-free circuit performs a second write operation.Type: ApplicationFiled: December 17, 2021Publication date: June 22, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Po-Yuan TANG, Yang-Sen YEH, Hsuan-Chi SU
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Patent number: 11682713Abstract: A method of fabricating a semiconductor structure includes forming a GaN-based semiconductor layer on a substrate, forming a silicon-containing insulating layer on the GaN-based semiconductor layer, forming a recess in the silicon-containing insulating layer in a first etching step, wherein the first etching step is performed by using a fluorine-containing etchant and applying a first bias power, and enlarging the recess to extend into the GaN-based semiconductor layer in a second etching step, wherein the second etching step is performed by using the same fluorine-containing etchant as the first etching step and applying a second bias power that is greater than the first bias power. In addition, a method of fabricating a high electron mobility transistor is provided.Type: GrantFiled: August 6, 2021Date of Patent: June 20, 2023Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Yung-Fung Lin, Yu-Chieh Chou
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Publication number: 20230187505Abstract: A semiconductor structure includes a substrate, a buffer layer, a channel layer, a barrier layer, a doped compound semiconductor layer, and a composite blocking layer. The buffer layer is on the substrate. The channel layer is on the buffer layer. The barrier layer is on the channel layer. The doped compound semiconductor layer is on the barrier layer. The composite blocking layer is on the doped compound semiconductor layer, the composite blocking layer and the barrier layer include the same Group III element, and the atomic percent of the same Group III element in the composite blocking layer increases with the distance from the doped compound semiconductor layer.Type: ApplicationFiled: December 9, 2021Publication date: June 15, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Chih-Yen CHEN, Franky Juanda LUMBANTORUAN, Tuan-Wei WANG, Juin-Yang CHEN
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Patent number: 11677002Abstract: A semiconductor structure includes a substrate, a channel layer, a barrier layer, a source structure, a drain structure, a doped compound semiconductor layer, a dielectric layer, and a gate structure. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer. The source structure and the drain structure are disposed on opposite sides of the barrier layer. The doped compound semiconductor layer is disposed on the barrier layer. The doped compound semiconductor layer has a first side adjacent to the source structure and a second side adjacent to the drain structure. The doped compound semiconductor layer has at least one opening exposing at least a portion of the barrier layer. The dielectric layer is disposed on the doped compound semiconductor layer and the barrier layer. The gate structure is disposed on the doped compound semiconductor layer.Type: GrantFiled: September 16, 2020Date of Patent: June 13, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Shin-Cheng Lin, Chih-Hung Lin, Po-Heng Lin
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Patent number: 11670708Abstract: A semiconductor device is provided, including a substrate, a seed layer on the substrate, an epitaxial layer on the seed layer, an electrode structure on the epitaxial layer and an electric field modulation structure. The electrode structure includes a gate structure, a source structure and a drain structure, wherein the source structure and the drain structure are positioned on opposite sides of the gate structure. The electric field modulation structure includes an electric connection structure and a conductive layer electrically connected to the electric connection structure. The conductive layer is positioned between the gate structure and the drain structure. The electric connection structure is electrically connected to the source structure and the drain structure.Type: GrantFiled: September 25, 2020Date of Patent: June 6, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Shin-Cheng Lin, Chih-Yen Chen, Chia-Ching Huang
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Patent number: 11670505Abstract: A semiconductor substrate is provided. The semiconductor substrate includes a ceramic base, a seed layer, and a nucleation layer. The ceramic base has a front surface and a back surface, and the front surface is a non-flat surface. The seed layer is disposed on the front surface of the ceramic substrate. The nucleation layer is disposed on the seed layer.Type: GrantFiled: August 28, 2020Date of Patent: June 6, 2023Assignee: Vanguard International Semiconductor CorporationInventor: Chih-Yen Chen
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Publication number: 20230170389Abstract: A high electron mobility transistor includes a substrate, a compound semiconductor stacked layer, a cap layer, a gate electrode, a source electrode, a drain electrode, and a buried electrode and/or a conductive structure. The substrate has an active area. The cap layer is disposed on the compound semiconductor stacked layer. The gate electrode is disposed on the cap layer and extends along a first direction. The source electrode and the drain electrode are disposed on the compound semiconductor stacked layer, respectively on two sides of the gate electrode, and arranged along a second direction, where the first direction is perpendicular to the second direction. The conductive structure and/or the buried electrode passes through the compound semiconductor stacked layer and surrounds or lies in the active area, where the conductive structure and/or the buried electrode has a constant electric potential or is grounded.Type: ApplicationFiled: November 30, 2021Publication date: June 1, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Shin-Cheng Lin, Chia-Ching Huang
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Publication number: 20230172068Abstract: A method of fabricating a semiconductor substrate includes the following steps. A first wafer is provided and a first surface of the first wafer is etched to form a plurality of cavities. A second wafer is formed on the first surface, where forming the second wafer includes the following steps: providing a core substrate; forming a first insulating layer on the core substrate; and depositing a polysilicon layer on the first insulating layer and the core substrate. In addition, the polysilicon layer is bonded with the first wafer to cover the cavities, where the polysilicon layer is disposed between the first insulating layer and the first wafer. In addition, a semiconductor substrate and MEMS devices using the semiconductor substrate are also provided.Type: ApplicationFiled: December 1, 2021Publication date: June 1, 2023Applicant: Vanguard International Semiconductor CorporationInventors: RAKESH CHAND, MUNIANDY SHUNMUGAM, RAMACHANDRAMURTHY PRADEEP YELEHANKA
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Patent number: 11664430Abstract: A semiconductor device includes a compound semiconductor layer disposed on a substrate, a protection layer disposed on the compound semiconductor layer, and a source electrode, a drain electrode and a gate electrode penetrating the protection layer and on the compound semiconductor layer, wherein the gate electrode is disposed between the source electrode and the drain electrode. The semiconductor device also includes a plurality of field plates disposed over the protection layer and between the gate electrode and the drain electrode, wherein the plurality of field plates are separated from each other.Type: GrantFiled: May 6, 2021Date of Patent: May 30, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Hsin-Chih Lin, Chang-Xiang Hung, Chia-Ching Huang, Yung-Hao Lin, Chia-Hao Lee
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Publication number: 20230155375Abstract: An electronic device including a first transistor, a second transistor, a third transistor, and a resistance element is provided. The first transistor includes a first gate and is coupled between a first electrode and a second electrode. The second transistor includes a second gate, a third electrode, and a fourth electrode. The second gate is coupled to the second electrode. The third electrode is coupled to a control electrode. The third transistor includes a third gate, a fifth electrode, and a sixth electrode. The third gate is coupled to the control electrode. The fifth electrode is coupled to the fourth electrode. The sixth electrode is coupled to the second electrode. The resistance element is coupled between the third electrode and the first gate.Type: ApplicationFiled: November 16, 2021Publication date: May 18, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Jian-Hsing LEE, Yeh-Jen HUANG, Li-Yang HONG, Hwa-Chyi CHIOU
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Patent number: 11652477Abstract: A voltage tracking circuit is provided and includes first and second P-type transistors and a voltage reducing circuit. The drain of the first P-type transistor is coupled to a first voltage terminal. The voltage reducing circuit is coupled between the first voltage terminal and the gate of the first P-type transistor. The voltage reducing circuit reduces a first voltage at the first voltage terminal by a modulation voltage to generate a control voltage and provides the control voltage to the gate of the first P-type transistor. The gate of the second P-type transistor is coupled to the first voltage terminal, and the drain thereof is coupled to a second voltage terminal. The source of the first P-type transistor and the source of the second P-type transistor are coupled to the output terminal of the voltage tracking circuit. The output voltage is generated at the output terminal.Type: GrantFiled: June 24, 2021Date of Patent: May 16, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Shao-Chang Huang, Ching-Ho Li, Kai-Chieh Hsu, Chun-Chih Chen
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Patent number: 11637139Abstract: A semiconductor device is provided. The semiconductor device includes a substrate and a light-collimating layer. The substrate has a plurality of pixels. The light-collimating layer is disposed on the substrate, and the light-collimating layer includes a transparent material layer, a first light-shielding layer, a second light-shielding layer and a plurality of transparent pillars. The transparent material layer covers the pixels. The first light-shielding layer is disposed on the substrate and the first light-shielding layer has a plurality of holes corresponding to the pixels. The second light-shielding layer is disposed on the first light-shielding layer. The transparent pillars are disposed in the second light-shielding layer.Type: GrantFiled: April 13, 2022Date of Patent: April 25, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Chung-Ren Lao, Chih-Cherng Liao, Shih-Hao Liu, Wu-Hsi Lu, Ming-Cheng Lo, Wei-Lun Chung, Chih-Wei Lin
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Patent number: 11631663Abstract: A control circuit applied in a specific element and including a first transistor and an electrostatic discharge (ESD) protection circuit is provided. The specific element has a III-V semiconductor material and includes a control electrode, a first electrode and a second electrode. The first transistor is coupled between the first electrode and the second electrode and has the III-V semiconductor material. The ESD protection circuit is coupled to the control electrode, the first transistor and the second electrode. In response to an ESD event, the ESD protection circuit provides a discharge path to release the ESD current from the control electrode to the second electrode.Type: GrantFiled: April 23, 2020Date of Patent: April 18, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Jian-Hsing Lee, Yeh-Jen Huang, Wen-Hsin Lin, Chun-Jung Chiu, Hwa-Chyi Chiou
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Publication number: 20230105036Abstract: A semiconductor device includes a first metal layer, a second metal layer, and an inter-metal dielectric layer disposed between the first metal layer and the second metal layer. The inter-metal dielectric layer includes: a first dielectric layer disposed on the first metal layer and in direct contact with the first metal layer, wherein the first dielectric layer has a stress value less than 0; a second dielectric layer disposed on the first dielectric layer, wherein the second dielectric layer has a stress value greater than 0; and a third dielectric layer disposed on the second dielectric layer, wherein the third dielectric layer has a stress value less than 0. A thickness of the third dielectric layer is greater than a thickness of the second dielectric layer, and the thickness of the second dielectric layer is greater than a thickness of the first dielectric layer.Type: ApplicationFiled: September 17, 2021Publication date: April 6, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Kai-Chun CHEN, Shih-Ming TSENG, Hsing-Chao LIU, Hsiao-Ying YANG
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Patent number: 11621287Abstract: An optical sensor device and a method for forming the same are provided, including forming a curable transparent material on a substrate, wherein the substrate has a plurality of optical sensor units therein; providing a transparent template, which has a plurality of concaves; imprinting the curable transparent material with the transparent template to form a plurality of convexes corresponding to the plurality of concaves; and curing the curable transparent material to form a transparent layer having a micro-lens array. The step of curing the curable transparent material includes adhering the transparent template to the curable transparent material to act as a cover plate for the optical sensor device.Type: GrantFiled: April 16, 2020Date of Patent: April 4, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Hsin-Hui Lee, Han-Liang Tseng, Hsueh-Jung Lin
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Publication number: 20230100115Abstract: A semiconductor device includes a substrate, a gate dielectric layer, a gate electrode, a field plate, a source electrode and a drain electrode. The gate dielectric layer is disposed on the substrate and includes a first portion having a first thickness, a second portion having a second thickness, and a third portion having a third thickness. The first, second and third thicknesses are different from each other, and the first thickness is smaller than the second and third thicknesses. The gate electrode is disposed on the first portion of the gate dielectric layer. The field plate is separated from and electrically coupled to the gate electrode, and is disposed on the second and third portions of the gate dielectric layer. The source and drain electrodes are disposed on the sides of the gate electrode and the field plate, respectively.Type: ApplicationFiled: September 29, 2021Publication date: March 30, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Syed-Sarwar Imam, Chia-Hao Lee, Chih-Hung Lin, Kun-Han Lin
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Patent number: 11610836Abstract: A method for fabricating a semiconductor device is provided and includes the following steps: providing a substrate; forming a lower electrode on the substrate; forming at least one sub-dielectric layer on the lower electrode; patterning the dielectric layer to form an intermediate dielectric layer, where the intermediate dielectric layer exposes a portion of the at least one sub-dielectric layer; forming a hole by etching the portion of the at least one sub-dielectric layer not covered by the intermediate dielectric layer; filling at least one plug into the hole; and forming an upper electrode on the intermediate dielectric layer.Type: GrantFiled: October 25, 2021Date of Patent: March 21, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Chi-Hua Yu, Shih-Tsung Kung, Wen-Chun Chung, Yi-Hong Hong