Patents Assigned to Vanguard International Semiconductor Corporation
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Publication number: 20230083337Abstract: A method for manufacturing a package structure includes providing a carrier board; providing at least one die having a top surface, a bottom surface, and a side surface on the carrier board; and forming a protective layer to cover at least a portion of the side surface of the die. The die includes a substrate, a semiconductor layer, a gate structure, a source structure and a drain structure, at least one dielectric layer, and at least one pad. The semiconductor layer is disposed on the substrate. The gate structure is disposed on the semiconductor layer. The source and the drain structures are disposed on opposite sides of the gate structure. The dielectric layer covers the gate, source, and drain structures. The pad is disposed on the dielectric layer and penetrates through the dielectric layer to electrically contact with the gate, source or drain structure.Type: ApplicationFiled: September 10, 2021Publication date: March 16, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei YU, Guang-Yuan JIANG, Cheng-Yi HSIEH, Wei-Chan CHANG, Chang-Sheng LIN
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Publication number: 20230078296Abstract: A semiconductor structure, including a substrate, a first well, a second well, a first doped region, a second doped region, a first gate structure, a first insulating layer, and a first field plate structure. The first and second wells are disposed in the substrate. The first doped region is disposed in the first well. The second doped region is disposed in the second well. The first gate structure is disposed between the first and second doped regions. The first insulating layer covers a portion of the first well and a portion of the first gate structure. The first field plate structure is disposed on the first insulating layer, and it partially overlaps the first gate structure. Wherein the first field plate structure is segmented into a first partial field plate and a second partial field plate separated from each other along a first direction.Type: ApplicationFiled: September 16, 2021Publication date: March 16, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Shao-Chang HUANG, Kai-Chieh HSU, Chun-Chih CHEN, Chih-Hsuan LIN
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Publication number: 20230070031Abstract: A semiconductor structure includes a buffer layer, a channel layer, a barrier layer, a doped compound semiconductor layer, and a composition gradient layer. The buffer layer is disposed on a substrate, the channel layer is disposed on the buffer layer, the barrier layer is disposed on the channel layer, the doped compound semiconductor layer is disposed on the barrier layer, and the composition gradient layer is disposed between the barrier layer and the doped compound semiconductor layer. The barrier layer and the composition gradient layer include a same group III element and a same group V element, and the atomic percentage of the same group III element in the composition gradient layer is gradually increased in the direction from the barrier layer to the doped compound semiconductor layer. A high electron mobility transistor and a fabrication method thereof are also provided.Type: ApplicationFiled: September 3, 2021Publication date: March 9, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Tuan-Wei Wang, Franky Juanda Lumbantoruan, Chun-Yang Chen
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Publication number: 20230066042Abstract: A semiconductor structure includes a superlattice structure, an electrical isolation layer, a channel layer, and a composition gradient layer. The superlattice structure is disposed on a substrate, the electrical isolation layer is disposed on the superlattice structure, the channel layer is disposed on the electrical isolation layer, and the composition gradient layer is disposed between the electrical isolation layer and the superlattice structure. The composition gradient layer and the superlattice structure include a same group III element, and the atomic percentage of the same group III element in the composition gradient layer is gradually decreased in the direction from the superlattice structure to the electrical isolation layer. In addition, a high electron mobility transistor including the semiconductor structure is also provided.Type: ApplicationFiled: September 1, 2021Publication date: March 2, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Chih-Yen Chen, Franky Juanda Lumbantoruan
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Publication number: 20230058295Abstract: A semiconductor structure includes a ceramic substrate, a first bonding layer, a second bonding layer, a cavity, and a semiconductor layer. The ceramic substrate includes holes on its surface. The first bonding layer is disposed on the surface of the ceramic substrate, and the second bonding layer is bonded to the first bonding layer. The cavity is disposed above the hole and enclosed by the first bonding layer and the second bonding layer. The semiconductor layer extends over the cavity and is disposed along the surface of the second bonding layer.Type: ApplicationFiled: August 22, 2021Publication date: February 23, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Yang Du, Yung-Fong Lin, Tsung-Hsiang Lin, Yu-Chieh Chou, Cheng-Tao Chou, Yi-Chun Lu, Chun-Hsu Chen
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Patent number: 11588036Abstract: A chip structure includes a substrate, a bottom conductive layer, a semiconductor layer, an interlayer dielectric layer, at least one electrode, and at least one top electrode. The substrate includes in order a core layer and a composite material. The bottom conductive layer is disposed on the bottom surface of the core layer, the semiconductor layer is disposed on the substrate, and an interlayer dielectric layer is disposed on the semiconductor layer. The at least one electrode is disposed between the semiconductor layer and the interlayer dielectric layer, and the at least one top electrode is disposed on the interlayer dielectric layer and electrically coupled to the at least one electrode.Type: GrantFiled: November 11, 2020Date of Patent: February 21, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Hsiu-Mei Yu, Cheng-Yi Hsieh, Wei-Chan Chang, Chang-Sheng Lin, Chun-Yi Wu
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Patent number: 11574997Abstract: A semiconductor structure including a substrate, a first well, a second well, a first doped region, a second doped region, a gate electrode, an insulating layer, a field plate, and a tunable circuit is provided. The first and second wells are formed on the substrate. The first doped region is formed in the first well. The second doped region is formed in the second well. The gate electrode is disposed over the substrate. The gate electrode, the first doped region, and the second doped region constitute a transistor. The insulating layer is disposed on the substrate and overlaps the gate electrode. The field plate overlaps the insulating layer and the gate electrode. The tunable circuit provides either a first short-circuit path between the field plate and the gate electrode, or a second short-circuit path between the field plate and the first doped region.Type: GrantFiled: August 2, 2021Date of Patent: February 7, 2023Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Shao-Chang Huang, Li-Fan Chen, Ching-Ho Li, Gong-Kai Lin, Chieh-Yao Chuang
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Publication number: 20230034420Abstract: A semiconductor structure including a substrate, a first well, a second well, a first doped region, a second doped region, a gate electrode, an insulating layer, a field plate, and a tunable circuit is provided. The first and second wells are formed on the substrate. The first doped region is formed in the first well. The second doped region is formed in the second well. The gate electrode is disposed over the substrate. The gate electrode, the first doped region, and the second doped region constitute a transistor. The insulating layer is disposed on the substrate and overlaps the gate electrode. The field plate overlaps the insulating layer and the gate electrode. The tunable circuit provides either a first short-circuit path between the field plate and the gate electrode, or a second short-circuit path between the field plate and the first doped region.Type: ApplicationFiled: August 2, 2021Publication date: February 2, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Shao-Chang HUANG, Li-Fan CHEN, Ching-Ho LI, Gong-Kai LIN, Chieh-Yao CHUANG
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Patent number: 11569224Abstract: A semiconductor device including a substrate, a seed layer, a buffer layer, a channel layer, a barrier layer, a gate structure, a first source/drain structure, a second source/drain structure, and a contact is provided. The seed layer is disposed on the substrate. The buffer layer is disposed on the seed layer. The channel layer is disposed on the buffer layer. The barrier layer is disposed on the channel layer. The gate structure is disposed on the barrier layer. The first and second source/drain structures are disposed on opposite sides of the gate structure. The contact contacts the first source/drain structure. The distance between the gate structure and the contact is between 0.5 micrometers and 30 micrometers.Type: GrantFiled: December 14, 2020Date of Patent: January 31, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Yeh-Jen Huang, Wen-Hsin Lin, Chun-Jung Chiu, Shin-Cheng Lin, Jian-Hsing Lee
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Patent number: 11569657Abstract: The protection circuit includes a detection circuit and a discharge circuit. The detection circuit is coupled to first and second power bonding pads and detects whether an ESD event or an EOS event occurs at the first power bonding pad. The detection circuit controls a detection voltage on a detection node according to a detection result. The first and second power bonding pads belong to different power domains. The discharge circuit is coupled to the detection node and the first power pad. In response to the ESD event occurring at the first power bonding pad, the discharge circuit provides a discharge path between the first power bonding pad and a ground terminal according to the detection voltage. In response to the EOS event occurring at the first power bonding pad, the detection circuit activates a second discharge path between the first power bonding pad and the ground terminal.Type: GrantFiled: November 4, 2021Date of Patent: January 31, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Shao-Chang Huang, Ching-Ho Li, Hsien-Feng Liao, Chieh-Yao Chuang, Yeh-Ning Jou
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Patent number: 11569121Abstract: Methods of forming semiconductor devices are provided. The methods include: forming a trench in a substrate, wherein the trench includes a defect protruding from a bottom surface of the trench; forming a flowable material on the substrate to at least partially cover the defect; performing an etching process to reduce the height of the defect; and removing the flowable material.Type: GrantFiled: May 26, 2021Date of Patent: January 31, 2023Assignee: Vanguard International Semiconductor CorporationInventors: I-Ping Lee, Kwang-Ming Lin, Chih-Cherng Liao, Ya-Huei Kuo, Pei-Yu Chang, Ya-Ting Chang, Tsung-Hsiung Lee, Zheng-Xian Wu, Kai-Chuan Kan, Yu-Jui Chang, Yow-Shiuan Liu
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Publication number: 20230024109Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a first doped region formed in the substrate, a second doped region formed in the substrate and surrounding the first doped region, and a plurality of strip third doped regions formed in the substrate and located underneath the first doped region and the second doped region. In addition, the first doped region has a doping type which is the opposite of that of the second doped region. The strip third doped region has a doping type which is the same as that of the second doped region.Type: ApplicationFiled: October 6, 2022Publication date: January 26, 2023Applicant: Vanguard International Semiconductor CorporationInventors: Shih-Chieh CHIEN, Chia-Hao LEE, Din-Ru YANG, Chia-Shen LIU
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Patent number: 11552171Abstract: A substrate structure and a method for fabricating a semiconductor structure including the substrate structure are provided. The substrate structure includes a substrate, a bow adjustment layer, and a silicon layer. The bow adjustment layer is on the top surface of the substrate. The silicon layer is on the bow adjustment layer. The substrate structure has a total bow value, and the total vow value is from ?20 ?m to ?40 ?m.Type: GrantFiled: October 14, 2021Date of Patent: January 10, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Yung-Fong Lin, Cheng-Tao Chou
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Patent number: 11552188Abstract: A semiconductor structure includes a substrate, a semiconductor epitaxial layer, a semiconductor barrier layer, a first semiconductor device, a doped isolation region, and at least one isolation pillar. The substrate includes a core layer and a composite material layer, the semiconductor epitaxial layer is disposed on the substrate, and the semiconductor barrier layer is disposed on the semiconductor epitaxial layer. The first semiconductor device is disposed on the substrate, where the first semiconductor device includes a first semiconductor cap layer disposed on the semiconductor barrier layer. The doped isolation region is disposed at one side of the first semiconductor device. At least a portion of the isolation pillar is disposed in the doped isolation region, and the isolation pillar surrounds at least a portion of the first semiconductor device and penetrates the composite material layer.Type: GrantFiled: November 24, 2020Date of Patent: January 10, 2023Assignee: Vanguard International Semiconductor CorporationInventors: Yu-Chieh Chou, Tsung-Hsiang Lin
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Patent number: 11545567Abstract: A semiconductor device includes a substrate, a channel layer, a barrier layer, a compound semiconductor layer, a source/drain pair, a fluorinated region, and a gate. The channel layer is disposed over the substrate. The barrier layer is disposed over the channel layer. The compound semiconductor layer is disposed over the barrier layer. The source/drain pair is disposed over the substrate, wherein the source and the drain are located on opposite sides of the compound semiconductor layer. The fluorinated region is disposed in the compound semiconductor layer. The gate is disposed on the compound semiconductor layer.Type: GrantFiled: August 19, 2020Date of Patent: January 3, 2023Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventor: Chih-Yen Chen
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Patent number: 11545481Abstract: An electrostatic discharge protection device includes a first well region, a second well region, a first doped region, and a first heavily doped region. The first well region and the second well region are disposed in a semiconductor substrate. The first doped region is disposed in the first well region and the second well region. The first heavily doped region is disposed in the first doped region in the first well region. The first well region and the first doped region have a first conductivity type, and the second well region and the first heavily doped region have a second conductivity type that is the opposite of the first conductivity type.Type: GrantFiled: April 2, 2019Date of Patent: January 3, 2023Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Yeh-Ning Jou, Hsien-Feng Liao, Jia-Rong Yeh
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Publication number: 20220415828Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a gate disposed on the semiconductor substrate. The semiconductor device structure also includes a source doped region and a drain doped region on two opposite sides of the gate. The semiconductor device structure further includes a source protective circuit and a drain protective circuit. From a side perspective view, a first drain conductive element of the source protective circuit partially overlaps a first source conductive element of the drain protective circuit.Type: ApplicationFiled: August 29, 2022Publication date: December 29, 2022Applicant: Vanguard International Semiconductor CorporationInventors: Jian-Hsing LEE, Shao-Chang HUANG, Chih-Hsuan LIN, Yu-Kai WANG, Karuna NIDHI, Hwa-Chyi CHIOU
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Publication number: 20220416778Abstract: A voltage tracking circuit is provided and includes first and second P-type transistors and a voltage reducing circuit. The drain of the first P-type transistor is coupled to a first voltage terminal. The voltage reducing circuit is coupled between the first voltage terminal and the gate of the first P-type transistor. The voltage reducing circuit reduces a first voltage at the first voltage terminal by a modulation voltage to generate a control voltage and provides the control voltage to the gate of the first P-type transistor. The gate of the second P-type transistor is coupled to the first voltage terminal, and the drain thereof is coupled to a second voltage terminal. The source of the first P-type transistor and the source of the second P-type transistor are coupled to the output terminal of the voltage tracking circuit. The output voltage is generated at the output terminal.Type: ApplicationFiled: June 24, 2021Publication date: December 29, 2022Applicant: Vanguard International Semiconductor CorporationInventors: Shao-Chang HUANG, Ching-Ho LI, Kai-Chieh HSU, Chun-Chih CHEN
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Patent number: 11538840Abstract: A semiconductor device includes a conductive substrate and an encapsulation structure. The conductive substrate has a plurality of pixels. The encapsulation structure is disposed on the conductive substrate and includes at least one light-collimating unit. The light-collimating unit includes a transparent substrate and a patterned light-shielding layer. The patterned light-shielding layer is disposed on the transparent substrate. The patterned light-shielding layer has a plurality of holes disposed to correspond to the pixels.Type: GrantFiled: August 15, 2019Date of Patent: December 27, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Wu-Hsi Lu, Chung-Ren Lao, Chih-Cherng Liao, Shih-Hao Liu, Ming-Cheng Lo, Wei-Lun Chung
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Patent number: 11527606Abstract: A semiconductor device is provided. The semiconductor device includes a substrate; a buffer layer on the substrate; a channel layer on the buffer layer; a barrier layer on the channel layer; a doped compound semiconductor layer on a portion of the barrier layer; an un-doped first capping layer on the doped compound semiconductor layer; a gate structure on the un-doped first capping layer; and source/drain structures on opposite sides of the gate structure. There is a channel region in the channel layer that is adjacent to the interface between the channel layer and the barrier layer.Type: GrantFiled: August 26, 2020Date of Patent: December 13, 2022Assignee: Vanguard International Semiconductor CorporationInventors: Yu-Chieh Chou, Tsung-Hsiang Lin