Abstract: An exhaust gas heater system for an exhaust system of an internal combustion engine includes a housing and a heating element. The housing includes an outer peripheral wall disposed about a central axis and defining an interior hollow space configured to receive exhaust gas from an exhaust pipe of the exhaust system such that the exhaust gas flows through the interior hollow space. The heating element is positioned within the hollow space and including a first end and a second end. The heating element forms a zig-zag shape extending in a radial direction relative to the central axis.

Abstract: A method of predicting temperature of at least one location in a fluid flow system that has a heating system for heating fluid. The method includes obtaining a mass flow rate of fluid flow of the fluid flow system, obtaining at least one of a fluid outlet temperature and a fluid inlet temperature of a heater of the heating system, obtaining power provided to the heater, and calculating temperature at the at least one location based on a model of the fluid flow system and the obtained mass flow rate, fluid outlet temperature, and fluid inlet temperature.

Abstract: A control system for operating a heater includes a controller configured to determine an operational power level based on a measured performance characteristic of the heater, a power set-point, and a power control algorithm, determine a bake-out power level based on a measured leakage current at the heater, a leakage current threshold, and a moisture control algorithm, and select a power level to be applied to the heater. The selected power level is the lower power level from among the operational power level and the bake-out power level.

Abstract: A heater includes an aluminum nitride (AlN) substrate and a heating layer. The heating layer is made from a molybdenum material and is bonded to the AlN substrate via transient liquid phase bonding. The heater can also include a routing layer and a plurality of first conductive vias connecting the heating layer to the routing layer. The routing layer and the plurality of first conductive vias can be made from the molybdenum material and at least one of the routing layer and the plurality of first conductive vias are bonded to the AlN substrate via a transient liquid phase bond. A plurality of second conductive vias connecting the routing layer to a surface of the AlN substrate can be included and the plurality of second conductive vias are made of the molybdenum material and can be bonded to the AlN substrate via a transient liquid phase bond.

Abstract: A modular heater assembly includes resistive heaters disposed along sections of a fluid conduit system, insulation members around the resistive heaters, and at least one insulation block around a fitting. The fitting is configured to join at least two adjacent sections of the fluid conduit system and defines an exterior geometric profile. The insulation block includes a central recess extending axially in a direction of one of the at least two adjacent sections and defining an internal geometric profile substantially matching the external geometric profile of the fitting, and a peripheral aperture. The peripheral aperture is open to the central recess, defines an internal geometric profile substantially matching an external geometric profile of another of the at least two adjacent sections, extends through a sidewall of the insulation block, and is axially aligned with the another of the at least two adjacent sections.

Abstract: A method for controlling a heated process of an electric heater includes obtaining a setpoint variable indicating a target temperature of the heater. The method includes identifying an energy profile for the heater based on the setpoint variable. The energy profile provides a defined magnitude of initial electrical energy to be applied to the heater to have a temperature of the heated process reach the target temperature. The method includes obtaining a process variable indicating a performance characteristic of the heated process. The method includes providing electrical energy to the heater based on at least one of the energy profile and the process variable.

Abstract: A heater includes a flow guide and electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis and defines perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid. The first longitudinal length is less than a full longitudinal length of the geometric helicoid. The electrical resistance heating elements extend through the perforations. For each electrical resistance heating element, a length of that electrical resistance heating element and a pitch of the geometric helicoid at a distal end of that electrical resistance heating element are such that the distal end of that electrical resistance heating element is a distance X from the geometric helicoid at the distal end of that electrical resistance heating element. The distance X is less than or equal to 40% of the pitch at the distal end of that electrical resistance heating element.

Abstract: A flow-through heater assembly includes a housing and a heater. The housing includes an inlet, an outlet, and a bore extending between the inlet and the outlet. The heater is disposed within the housing and extends between the inlet and the outlet. The heater includes at least one opening proximate the inlet and at least one opening proximate the outlet. The heater defines an anfractuous path from the inlet to the outlet, and the openings in the heater are in fluid communication with the bore of the housing.

Abstract: An exhaust gas heater system for an exhaust system of an internal combustion engine includes a housing and a heating element. The housing includes an outer peripheral wall disposed about a central axis and defining an interior hollow space configured to receive exhaust gas from an exhaust pipe of the exhaust system such that the exhaust gas flows through the interior hollow space. The heating element is positioned within the hollow space and including a first end and a second end. The heating element forms a zig-zag shape extending in a radial direction relative to the central axis.

Abstract: A heater includes a flow guide and a plurality of electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis of the heater assembly. The flow guide defines a predetermined pattern of perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid, the longitudinal direction being parallel to the longitudinal axis. The plurality of electrical resistance heating elements extend through the perforations. At least one electrical resistance heating element of the plurality of electrical resistance heating elements has a first region with a first watt density and a second region with a second watt density. The second region is located farther in the longitudinal direction than the first region. The second watt density is less than the first watt density.

Abstract: A control system for controlling an operation of a resistive heater includes a dielectric parameter determination module, a prediction module, and a heater operation control module. The dielectric parameter determination module determines a material property of a dielectric material of the resistive heater when the resistive heater is in an active mode. The prediction module predicts a life expectancy of the resistive heater based on the material property of the dielectric material. The heater operation control module changes operation of the resistive heater based on the material property and the life expectancy.

Abstract: A method of providing power, via a plurality of power control systems, includes forming, by at least two power control systems from among the plurality of power control systems, a power network and defining, by each power control system of the power network, a power allocation schedule for a power cycle using a dynamic load scheduling model. The power allocation schedule identifies one or more designated power control systems from among the at least two of the power control systems to provide power to a load during the power cycle. For at least portion of the power cycle, the method includes providing power to the load by the one or more designated power control systems of the power network based on the power allocation schedule.

Abstract: A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.

Abstract: A heater system includes a heater bundle. The heater bundle includes a plurality of heater assemblies. Each heater assembly includes a plurality of heater units and an insulating material, and each heater unit defines at least one independently controlled heating zone. The heater bundle includes power conductors electrically connected to each of the independently controlled heating zones in each of the heater units. The heater bundle includes a power supply device configured to modulate power to each of the independently controlled heater zones of the heater units through the power conductors. A voltage is selectively supplied to each of the independently controlled heating zones such that a reduced number of independently controlled heating zones receives the voltage at a time or at least a subset of the independently controlled heating zones receive a reduced voltage at all times.

Abstract: A modular unit includes a carrier member defining a receiving space for receiving a fluid conduit, a heating element disposed on a surface of the carrier member, and a thermal insulation jacket surrounding the carrier member. The thermal insulation jacket includes an upper portion and a lower portion. The upper and lower portions of the thermal insulation jacket have mating features for securing the upper and lower portions together.

Abstract: A method of detecting a leak-induced abnormal condition in a semiconductor processing system comprising a subsystem. The method includes determining a performance characteristic of the semiconductor processing system. The method includes determining the leak-induced abnormal condition is present within the subsystem, wherein the determination of the presence of the leak-induced abnormal condition is based on the performance characteristic and a temperature characteristic of the subsystem. The method also includes performing a corrective action based on the determination of the presence of the leak-induced abnormal condition.

Abstract: A heater for use in fluid immersion heating includes a plurality of resistive heating elements, and a plurality sets of power pins electrically connected to the plurality of heating elements. Each set of power pins includes a first power pin made of a first conductive material, and a second power pin made of a second conductive material that is dissimilar from the first conductive material of the first power pin. The first power pin is electrically connected to the second power pin to form a junction. The second power pin is electrically connected to the corresponding resistive heating element. The junctions between the first power pins and the second power pins are disposed at different heights in order to sense a level of the fluid.

Abstract: A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

Abstract: A sensor assembly includes a housing that defines an interior space. The sensor assembly includes a sensor connected to the housing at the aperture. The sensor assembly includes a wireless power source disposed within the interior space. The sensor assembly includes electronics disposed within the interior space and configured to receive power from the wireless power source. The electronics include a communication board and a sensor connector, and the sensor is configured to transmit data to the communication board via the sensor connector.

Abstract: A heater assembly includes a flow guide and a plurality of electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis of the heater assembly. The flow guide defines a predetermined pattern of perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid. The longitudinal direction is parallel to the longitudinal axis. The geometric helicoid has a first pitch at a first zone along the longitudinal axis and a second pitch at a second zone along the longitudinal axis. The second pitch is shorter than the first pitch. The electrical resistance heating elements extend through the perforations.