Abstract: An electrical interconnect for use in connecting layers of a multi-layer heater includes a shaped body having a lower end portion and an upper end portion. The lower end portion has a smaller contact area than a contact area of the upper end portion, and the contact area of the lower end portion is proximate a heating layer and the contact area of the upper end portion is proximate a routing layer.

Abstract: A heater system includes an integrated heater device and a control system. The integrated heater device includes a thermocouple for measuring temperature and one or more multiportion resistive elements that are operable as heaters to create a temperature differential between the fluid and air to detect the fluid, and as sensors to measure a fluid level. The control device operates the integrated heater device as a sensor or heater based on one or more performance characteristics of the heater system and self-calibrates the heater device.

Abstract: A method of controlling temperature of a heater including a resistive heating element includes measuring a voltage count and a current count based on data from an analog-digital converter (ADC) circuit of a sensor circuit, where the sensor circuit is electrically coupled to the heater. The method includes selecting one or more dynamic gain levels of the ADC from among a plurality of dynamic gain levels based on a shift gain correlation, determining a resistance of the resistive heating element based on the voltage count, the current count, and the one or more dynamic gain levels, and controlling power to the heater based on the resistance.

Abstract: A method includes providing thermal energy to a component, determining a thermal response of the component in response to providing the thermal energy, and determining a thermal characteristic of the component based on a reference thermal response and the thermal response. The method includes predicting a surface condition of the component based on the thermal characteristic and a predictive analytic model, where the predictive analytic model correlates the thermal characteristic of the component to an estimated surface condition of the component.

Abstract: A heater system is provided. The system includes a resistive element with a temperature coefficient of resistance (TCR) of at least about 1,000 ppm such that the resistive element functions as a heater and as a temperature sensor and the resistive element is a material having greater than about 95% nickel. The system also includes a heater control module including a two-wire controller with a power control module that is configured to periodically compare a measured resistance value of the resistive element against a reference temperature to adjust for resistance drift over time during operation such that a temperature drift of the resistive element is less than about 1% over a temperature range of about 500° C.-1,000° C.

Abstract: A wireless sensor assembly incudes a housing, a wireless power source, a wireless communication component, and firmware. The housing defines a first aperture for receiving an external sensor and a second aperture defining a communication port configured to receive a wire harness. The wireless communications component and the firmware are powered by the wireless power source. The wireless communications component is configured to be in electrical communication with the external sensor and transmit data from the external sensor to an external device. The firmware is configured to manage a rate of data transmittal from the wireless communications component to the external device. The wireless power source, the wireless communications component, and the firmware are mounted within the same housing. The data from the external sensor is transmitted from the external sensor wirelessly through the wireless communications component or through the wire harness to the external device for processing.

Abstract: A temperature sensing system includes an outer casing, a thermocouple including a thermocouple junction, and a reference sensor. The thermocouple and the reference sensor are received within the outer casing. The reference sensor is disposed proximate an end of the thermocouple opposing the thermocouple junction and is configured to provide a reference temperature based on which a temperature measured by the thermocouple is determined.

Abstract: A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

Abstract: A heater includes a flow guide and electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis and defines perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid. The first longitudinal length is less than a full longitudinal length of the geometric helicoid. The electrical resistance heating elements extend through the perforations. For each electrical resistance heating element, a length of that electrical resistance heating element and a pitch of the geometric helicoid at a distal end of that electrical resistance heating element are such that the distal end of that electrical resistance heating element is a distance X from the geometric helicoid at the distal end of that electrical resistance heating element. The distance X is less than or equal to 40% of the pitch at the distal end of that electrical resistance heating element.

Abstract: A heater includes a flow guide and a plurality of electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis of the heater assembly. The flow guide defines a predetermined pattern of perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid, the longitudinal direction being parallel to the longitudinal axis. The plurality of electrical resistance heating elements extend through the perforations. At least one electrical resistance heating element of the plurality of electrical resistance heating elements has a first region with a first watt density and a second region with a second watt density. The second region is located farther in the longitudinal direction than the first region. The second watt density is less than the first watt density.

Abstract: A heating apparatus for a fluid flow system having a container body includes a heater element and a strip. The heater element is within the container body and includes an electrical resistance element, a sheath, and an insulating material. The sheath extends along a predefined path through the container body and surrounds the electrical resistance element along the predefined path. The insulating material is disposed about the electrical resistance element between the electrical resistance element and the sheath. The insulating material electrically insulates the electrical resistance element from the sheath. The strip is disposed inside the container body and defines a tortuous geometry that follows the predefined path. The strip defines a plurality of openings at discrete locations along the strip. The heater element extends through the plurality of openings and is configured to contact the strip at the discrete locations.

Abstract: A standoff assembly for use in terminating a plurality of resistive heaters disposed within a fluid vessel includes a pressure adapter plate, an electrical enclosure adapter plate, and a plurality of conduits. An end portion of each of the resistive heating elements extends through the pressure adapter plate. The electrical enclosure adapter plate is spaced apart from the pressure adapter plate to define a dry volume therebetween. The conduits are secured to the pressure adapter plate and the electrical enclosure adapter plate. Each conduit is aligned concentrically with each of the resistive heating elements. An electrical termination portion of each resistive heating element is disposed within the conduit.

Abstract: A method of manufacturing a support pedestal for use in semiconductor processing includes applying a protective layer on a conductive member of the support pedestal with an atomic layer deposition (ALD) process. The support pedestal has a support plate bonded to a tubular shaft. The support plate has a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, and the tubular shaft defines an internal chamber. The ALD process introducing first precursors into the chamber of the tubular shaft to form a first monolayer on the conductive member, and introducing second precursors into the chamber of the tubular shaft to form a second monolayer on the first monolayer.

Abstract: A heater includes a first power pin and a second power pin made of dissimilar materials, and a resistive heating element made of a material different from those of the first and second power pins. The resistive heating element includes a first end electrically and directly connected to the first power pin to form a first thermocouple junction and a second end and electrically and directly connected to the second power pin to form a second thermocouple junction. The first and second power pins perform a dual function of supplying power to the resistive heating element and detecting changes in voltage at the first and second thermocouple junctions without interrupting the power supplied to the resistive heating element.

Abstract: A method of providing power via a plurality of power control systems forming a power network is provided. Each power control system includes a power controller and a power switch operable by the power controller. The method includes defining, by each power controller of the power network, a power allocation schedule for a power cycle using a dynamic load scheduling model based on a members list of the power network. The power cycle is divided into a plurality of power units, and the power allocation schedule identifies one or more designated power control systems from among the plurality of power control systems to provide power to a load during each of the power units. For the power cycle, the method includes providing power to the load by the one or more designated power control systems during a respective power unit based on the power allocation schedule.

Abstract: In combination with a pipe (213), a clamp (201) is provided which supports the pipe in a fixed position with respect to a substrate. The clamp includes first (203) and second (205) bands, wherein each of the first and second bands has an arcuate portion (209) and first and second terminal portions (211), and wherein the arcuate portions of the first and second bands are disposed in opposing relation around the surface of the pipe. A first fastener (207) extends through the first terminal portions of the first and second bands, and a second fastener extends through the second terminal portions of the first and second bands. A thermal insulator (233) is disposed between the first fastener and the first terminal portions of the first and second bands, and between the second fastener and the second terminal portions of the first and second bands.

Abstract: A control system for controlling an adjustable output voltage provided to a heater includes a controller configured to determine an input parameter based on an electrical characteristic of the heater, where the heater includes a resistive heating element that is operable to emit heat and as a sensor. The controller is further configured to determine an output voltage for the heater based on the input parameter and a desired setpoint, and to transmit a signal to a power converter to generate the output voltage. The desired setpoint is based on an operational state of the heater, and the input parameter includes data indicative of a temperature of the resistive heating element that is determined based on the electrical characteristic.

Abstract: A heater assembly and method of controlling the heater assembly is provided. The heater assembly includes a resistive heater and a substrate, and the resistive heater comprises a plurality of heating zones disposed along a perimeter of the substrate. Each of the plurality of heating zones are independently controllable such that azimuthal temperature control of the heater assembly is provided. The plurality of resistive heating elements may be connected in series and have a common ground electrical lead. In the alternative, the plurality of resistive heating elements may each have a ground electrical lead and be isolated from each other.

Abstract: A heater assembly includes a flow guide and a plurality of electrical resistance heating elements. The flow guide defines a continuous geometric helicoid disposed about a longitudinal axis of the heater assembly. The flow guide defines a predetermined pattern of perforations that extend in a longitudinal direction through a first longitudinal length of the geometric helicoid. The longitudinal direction is parallel to the longitudinal axis. The geometric helicoid has a first pitch at a first zone along the longitudinal axis and a second pitch at a second zone along the longitudinal axis. The second pitch is shorter than the first pitch. The electrical resistance heating elements extend through the perforations.

Abstract: The present disclosure is directed toward a control system for controlling a heater system. The control system includes a plurality of zone control circuits, at least two auxiliary controllers, and a primary controller. The zone control circuits are operable to provide power to a plurality of heater zones of the heater system and to sense performance characteristics of the zones. The auxiliary controllers are coupled to the plurality of zone control circuits to control power to the plurality of zones and to monitor operation of the heater zones based on the performance characteristics. The primary controller is coupled to the auxiliary controllers and is configured to provide an operation set-point for each of the heater zones based on the performance characteristics. The auxiliary controllers operate the zone control circuits to supply power to the heater system based on the operation set-point.