Patents Examined by Adam S Bowen
  • Patent number: 11744060
    Abstract: A memory device is provided. The memory device includes a plurality of memory cells. Each memory cell includes a latch circuit formed of N-type field effect transistors (NFETs) and P-type field effect transistors (PFETs). The NFETs are formed at a surface of a semiconductor substrate, and the PFETs are disposed at an elevated level over the NFETs.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: August 29, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huai-Ying Huang, Yu-Ming Lin
  • Patent number: 11737284
    Abstract: A magnetoresistive random access memory (MRAM) cell includes a bottom electrode, a magnetic tunnel junction structure, a bipolar tunnel junction selector; and a top electrode. The tunnel junction selector includes a MgO tunnel barrier layer and provides a bipolar function for putting the MTJ structure in parallel or anti-parallel mode.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Mauricio Manfrini, Hon-Sum Philip Wong
  • Patent number: 11735550
    Abstract: Various embodiments of the present disclosure are directed towards a semiconductor structure including a bond bump disposed on an upper surface of an upper conductive structure. The upper conductive structure overlies a substrate. A buffer layer is disposed along the upper surface of the upper conductive structure. The bond bump comprises a sidewall having a straight sidewall segment overlying a curved sidewall segment.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: August 22, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Sheng Chu, Chern-Yow Hsu
  • Patent number: 11737255
    Abstract: A semiconductor device includes a first memory cell and a dummy region adjacent to the first memory cell. The first memory cell includes a first transistor. The dummy region includes a cut-off transistor. The cut-off transistor has a first terminal electrically coupled to a second terminal of the first transistor. The cut-off transistor has a third terminal electrically coupled to ground.
    Type: Grant
    Filed: February 21, 2022
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Chih-Chuan Yang
  • Patent number: 11735521
    Abstract: Embodiments herein may describe techniques for an integrated circuit including a MOSFET having a source area, a channel area, a gate electrode, and a drain area. The channel area may include a first channel region with a dopant of a first concentration next to the source area, and a second channel region with the dopant of a second concentration higher than the first concentration next to the drain area. A source electrode may be in contact with the source area, a gate oxide layer above the channel area, and the gate electrode above the gate oxide layer. A first resistance exists between the source electrode and the gate electrode. A second resistance exists between the source electrode, the gate electrode, and a path through the gate oxide layer to couple the source electrode and the gate electrode after a programming operation is performed. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: August 22, 2023
    Assignee: Intel Corporation
    Inventors: Yu-Lin Chao, Sarvesh H. Kulkarni, Vincent E. Dorgan, Uddalak Bhattacharya
  • Patent number: 11735513
    Abstract: The present disclosure relates to an integrated chip including a semiconductor device. The semiconductor device includes a first source/drain structure, a second source/drain structure, a stack of channel structures, and a gate structure. The stack of channel structures and the gate structure are between the first and second source/drain structures. The gate structure surrounds the stack of channel structures. A first conductive wire overlies and is spaced from the semiconductor device. The first conductive wire includes a first stack of conductive layers. A first conductive contact extends through a dielectric layer from the first conductive wire to the first source/drain structure. The first conductive contact is on a back-side of the first source/drain structure.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: August 22, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shin-Yi Yang, Ming-Han Lee, Shau-Lin Shue
  • Patent number: 11728294
    Abstract: A package substrate is disclosed. The package substrate includes a die package in the package substrate located at least partially underneath a location of a power delivery interface in a die that is coupled to the surface of the package substrate. Connection terminals are accessible on a surface of the die package to provide connection to the die that is coupled to the surface of the package substrate. Metal-insulator-metal layers inside the die package are coupled to the connection terminals.
    Type: Grant
    Filed: November 3, 2021
    Date of Patent: August 15, 2023
    Assignee: Intel Corporation
    Inventors: Andrew Collins, Sujit Sharan, Jianyong Xie
  • Patent number: 11721593
    Abstract: The present disclosure describes a method of forming a semiconductor device having epitaxial structures with optimized dimensions. The method includes forming first and second fin structures on a substrate, forming a spacer layer on the first and second fin structures, forming a first spacer structure adjacent to the first fin structure, and forming a first epitaxial structure adjacent to the first spacer structure. The first and second fin structures are separated by an isolation layer. The first spacer structure has a first height above the isolation layer. The method further includes forming a second spacer structure adjacent to the second fin structure and forming a second epitaxial structure adjacent to the second spacer structure. The second spacer structure has a second height above the isolation layer greater than the first height. The second epitaxial structure includes a type of dopant different from the first epitaxial structure.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: August 8, 2023
    Assignee: Tiawan Semiconductor Manufacturing Co., Ltd.
    Inventor: Shahaji B. More
  • Patent number: 11721687
    Abstract: A semiconductor structure includes a substrate having a first well of a first conductivity type and a second well of a second conductivity type. From a top view, the first well includes first and seconds edges extending along a first direction. The second edge has multiple turns, resulting in the first well having a protruding section and a recessed section. The semiconductor structure further includes a first source/drain feature over the protruding section and a second source/drain feature over a main body of the first well. The first source/drain feature is of the first conductivity type. The second source/drain feature is of the second conductivity type. The first and the second source/drain features are generally aligned along a second direction perpendicular to the first direction from the top view.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yung Feng Chang, Chun-Chia Hsu, Tung-Heng Hsieh, Bao-Ru Young
  • Patent number: 11710740
    Abstract: A semiconductor structure includes at least two field effect transistors. A gate strip including a plurality of gate dielectrics and a gate electrode strip can be formed over a plurality of semiconductor active regions. Source/drain implantation is conducted using the gate strip as a mask. The gate strip is divided into gate electrodes after the implantation.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: July 25, 2023
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Takahito Fujita, Hiroyuki Ogawa, Kiyokazu Shishido
  • Patent number: 11710742
    Abstract: A semiconductor structure includes an isolation structure, a source or drain region over the isolation structure, a channel layer connecting to the source or drain region, a gate structure over the isolation structure and engaging the channel layer, an isolating layer below the channel layer and the gate structure, a dielectric cap below the isolating layer, and a contact structure having a first portion and a second portion. The first portion of the contact structure extends through the isolation structure, and the second portion of the contact structure extends from the first portion of the contact structure, through the dielectric cap and the isolating layer, and to the source or drain region. The first portion of the contact structure is below the second portion and wider than the second portion.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: July 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Yuan Chen, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11688637
    Abstract: Wrap-around contact structures for semiconductor fins, and methods of fabricating wrap-around contact structures for semiconductor fins, are described. In an example, an integrated circuit structure includes a semiconductor fin having a first portion protruding through a trench isolation region. A gate structure is over a top and along sidewalls of the first portion of the semiconductor fin. A source or drain region is at a first side of the gate structure, the source or drain region including an epitaxial structure on a second portion of the semiconductor fin. The epitaxial structure has substantially vertical sidewalls in alignment with the second portion of the semiconductor fin. A conductive contact structure is along sidewalls of the second portion of the semiconductor fin and along the substantially vertical sidewalls of the epitaxial structure.
    Type: Grant
    Filed: December 3, 2021
    Date of Patent: June 27, 2023
    Assignee: Intel Corporation
    Inventor: Rishabh Mehandru
  • Patent number: 11688807
    Abstract: In an embodiment, a device includes a first fin extending from a substrate. The device also includes a first gate stack over and along sidewalls of the first fin. The device also includes a first gate spacer disposed along a sidewall of the first gate stack. The device also includes and a first source/drain region in the first fin and adjacent the first gate spacer, the first source/drain region including a first epitaxial layer on the first fin, the first epitaxial layer having a first dopant concentration of boron. The device also includes and a second epitaxial layer on the first epitaxial layer, the second epitaxial layer having a second dopant concentration of boron, the second dopant concentration being greater than the first dopant concentration.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Tai Chang, Han-Yu Tang, Ming-Hua Yu, Yee-Chia Yeo
  • Patent number: 11688792
    Abstract: Dual self-aligned gate endcap (SAGE) architectures, and methods of fabricating dual self-aligned gate endcap (SAGE) architectures, are described. In an example, an integrated circuit structure includes a first semiconductor fin having a cut along a length of the first semiconductor fin. A second semiconductor fin is parallel with the first semiconductor fin. A first gate endcap isolation structure is between the first semiconductor fin and the second semiconductor fin. A second gate endcap isolation structure is in a location of the cut along the length of the first semiconductor fin.
    Type: Grant
    Filed: November 15, 2021
    Date of Patent: June 27, 2023
    Assignee: Intel Corporation
    Inventors: Sairam Subramanian, Walid M. Hafez, Sridhar Govindaraju, Mark Liu, Szuya S. Liao, Chia-Hong Jan, Nick Lindert, Christopher Kenyon
  • Patent number: 11676967
    Abstract: Disclosed is a semiconductor device comprising a substrate, a plurality of active patterns that protrude from the substrate, a device isolation layer between the active patterns, and a passivation layer that covers a top surface of the device isolation layer and exposes upper portions of the active patterns. The device isolation layer includes a plurality of first isolation parts adjacent to facing sidewalls of the active patterns, and a second isolation part between the first isolation parts. A top surface of the second isolation part is located at a lower level than that of top surfaces of the first isolation parts.
    Type: Grant
    Filed: May 20, 2022
    Date of Patent: June 13, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Guyoung Cho, Subin Shin, Donghyun Roh, Byung-Suk Jung, Sangjin Hyun
  • Patent number: 11676868
    Abstract: Techniques described herein enable respective (different) types of metal silicide layers to be formed for p-type source/drain regions and n-type source/drain regions in a selective manner. For example, a p-type metal silicide layer may be selectively formed over a p-type source/drain region (e.g., such that the p-type metal silicide layer is not formed over the n-type source/drain region) and an n-type metal silicide layer may be formed over the n-type source/drain region (which may be selective or non-selective). This provides a low Schottky barrier height between the p-type metal silicide layer and the p-type source/drain region, as well as a low Schottky barrier height between the n-type metal silicide layer and the n-type source/drain region. This reduces the contact resistance for both p-type source/drain regions and n-type source/drain regions.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: June 13, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Yip Loh, Yan-Ming Tsai, Yi-Ning Tai, Raghunath Putikam, Hung-Yi Huang, Hung-Hsu Chen, Chih-Wei Chang
  • Patent number: 11678489
    Abstract: A three-dimensional flash memory device including a lower and upper word line stack; a cell channel structure; and a dummy channel structure, wherein the cell channel structure includes a lower cell channel structure; an upper cell channel structure; and a cell channel enlarged portion between the lower and upper cell channel structures and having a width greater than that of the lower cell channel structure, wherein the dummy channel structure includes a lower dummy channel structure; an upper dummy channel structure; and a dummy channel enlarged portion between the lower and upper dummy channel structures, the dummy channel enlarged portion having a width greater than that of the lower dummy channel structure, wherein a difference between the width of the dummy channel enlarged portion and the lower dummy channel structure is greater than a difference between the width of the cell channel enlarged portion and the lower cell channel structure.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: June 13, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Jisung Cheon
  • Patent number: 11670568
    Abstract: A semiconductor device including a semiconductor chip having a first surface and a second surface opposite to the first surface, a first heat dissipation member on the second surface of the semiconductor chip, the first heat dissipation member having a vertical thermal conductivity in a direction perpendicular to the second surface, and a horizontal thermal conductivity in a direction parallel to the second surface, the first vertical thermal conductivity being smaller than the first horizontal thermal conductivity, and a second heat dissipation member comprising a vertical pattern penetrating the first heat dissipation member, the second heat dissipation member having a vertical thermal conductivity that is greater than the vertical thermal conductivity of the first heat dissipation member may be provided.
    Type: Grant
    Filed: September 23, 2020
    Date of Patent: June 6, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seonho Lee, Jinsu Kim, Junwoo Myung, Yongjin Park, Jaekul Lee
  • Patent number: 11670638
    Abstract: A semiconductor device includes a plurality of active fins extending in a first direction, and spaced apart from each other in a second direction, the plurality of active fins having upper surfaces of different respective heights, a gate structure extending in the second across the plurality of active fins, a device isolation film on the substrate, a source/drain region on the plurality of active fins, and including an epitaxial layer on the plurality of active fins, an insulating spacer on an upper surface of the device isolation film and having a lateral asymmetry with respect to a center line of the source/drain region in a cross section taken along the second direction, an interlayer insulating region on the device isolation film and on the gate structure and the source/drain region, and a contact structure in the interlayer insulating region and electrically connected to the source/drain region.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: June 6, 2023
    Inventors: Yang Xu, Hyunkwan Yu, Namkyu Cho, Dongmyoung Kim, Kanghun Moon, Sanggil Lee, Sihyung Lee
  • Patent number: 11658074
    Abstract: The present disclosure provides a fabrication method that includes providing a workpiece having a semiconductor substrate that includes a first circuit area and a second circuit area; forming a first active region in the first circuit area and a second active region on the second circuit area; forming first stacks with a first gate spacing on the first active region and second gate stacks with a second gate spacing on the second active region, the second gate spacing being different from the first gate spacing; performing an ion implantation to introduce a doping species to the first active region; performing an etching process, thereby recessing both first source/drain regions of the first active region with a first etch rate and second source/drain regions of the second active region; and epitaxially growing first source/drain features within the first source/drain regions and second source/drain features within the second source/drain regions.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw