Patents Examined by Andrew H. Lee
  • Patent number: 6967722
    Abstract: The tilt-compensated interferometers of the present invention are novel variations of Michelson's interferometer that use tilt- and shear-compensation to provide excellent photometric accuracy even when there are imperfections in the scanning motion used to produce variation of path difference. The tilt-compensation mechanism of the present invention consists of antiparallel reflections from a beamsplitter element and a roof reflector element, which elements are held rigidly in alignment. Several particularly useful embodiments of the invention are described. Other advantages of the present invention include photometric stability and reduced cost because manual alignment is not required. This interferometer has applications in spectrometry, spectral imaging and metrology.
    Type: Grant
    Filed: October 21, 2002
    Date of Patent: November 22, 2005
    Inventor: Christopher J. Manning
  • Patent number: 6961128
    Abstract: An apparatus for detecting cross-talk and method therefore, wherein a first and a second output signal from a wavelength selective device are directed to be coincident upon a photodetector. A homodyne beat signal results from the coincidence of the first and the second output signal and the homodyne beat signal is used to measure wavelength drift.
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: November 1, 2005
    Assignee: Agilent Technologies, Inc.
    Inventor: Christopher Anthony Park
  • Patent number: 6956655
    Abstract: Systems and methods for characterizing and compensating non-cyclic errors in interferometers and interferometer components are disclosed.
    Type: Grant
    Filed: February 12, 2003
    Date of Patent: October 18, 2005
    Assignee: Zygo Corporation
    Inventor: Henry A. Hill
  • Patent number: 6956657
    Abstract: A method for accurately synthesizing a full-aperture data map from a series of overlapped sub-aperture data maps. In addition to conventional alignment uncertainties, a generalized compensation framework corrects a variety of errors, including compensators that are independent in each sub-aperture. Another class of compensators (interlocked) include coefficients that are the same across all the sub-apertures. A constrained least-squares optimization routine maximizes data consistency in sub-aperture overlap regions. The stitching algorithm includes constraints representative of the accuracies of the hardware to ensure that the results are within meaningful bounds. The constraints also enable the computation of estimates of uncertainties in the final results. The method therefore automatically calibrates the system, provides a full-aperture surface map, and an estimate of residual uncertainties.
    Type: Grant
    Filed: November 25, 2002
    Date of Patent: October 18, 2005
    Assignee: QED Technologies, Inc.
    Inventors: Donald Golini, Greg Forbes, Paul Murphy
  • Patent number: 6950193
    Abstract: A system for determining at least one condition of a substrate includes an optical waveguide for transmitting light from a light source. The optical waveguide can be embedded in the substrate and operatively coupled to an interferometric system. The interferometric system is operatively coupled to a processor. The interferometric system provides the processor with information relating to transmissions through the wave guide, which are indicative of substrate conditions and/or operations being performed relative to the substrate.
    Type: Grant
    Filed: September 25, 2002
    Date of Patent: September 27, 2005
    Assignee: Rockwell Automation Technologies, Inc.
    Inventor: Frederick M. Discenzo
  • Patent number: 6950195
    Abstract: In an interference measuring device, which includes: a coherent beam generating source; a sample to be measured; a lens system for forming an image of the sample to be measured on an observing plane; an interference element for splitting a coherent beam into two systems, and forming an interference image on the observing plane or a plane equivalent thereto; an image pickup element for picking up the interference image on the observing plane; and a calculating device having functions of capturing and storing the interference image converted to electric signals by the image pickup element, and determining the phase distribution changed by the sample to be measured from the interference image by calculation, wherein a means for removing the phase change distribution due to the interference element is provided.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: September 27, 2005
    Assignees: Hitachi, Ltd., Japan Science and Technology Agency
    Inventors: Junji Endo, Jun Chen
  • Patent number: 6947149
    Abstract: While a ferrule held by a clamping apparatus is rotated by a predetermined angle, respective interference fringe images of a spherical leading end part of the ferrule are obtained at three or more rotational positions. Respective interference fringe center positions are obtained in thus obtained three or more interference fringe images. The center position of a circle passing near each of the interference fringe center positions is calculated and defined as a measured center position. Relative distance information between the measured center position and a position corresponding to the rotational center position of the spherical leading end part of the ferrule or the relative distance information and relative directional information thereof are outputted as an inclination error adjustment value for the axis of the ferrule.
    Type: Grant
    Filed: May 12, 2003
    Date of Patent: September 20, 2005
    Assignee: Fujinon Corporation
    Inventors: Fumio Kobayashi, Zongtao Ge, Kunihiko Tanaka
  • Patent number: 6943895
    Abstract: The interferometric measuring device (1) for measuring the shape of a surface of an object (O) has a radiation source (LQ), a beam splitter (ST) producing an object beam (OS) guided along an object light path to the object (O) and a reference beam (RS) guided along a reference light path to a reflective reference plane (RSP), an image recorder (BA) that records interfering radiation reflected by the object (O) and the reference plane (RSP) and an associated evaluation device (E) to determine the surface shape. A favorable adaptability and operation are achieved by arrangement of a fixed lens system (SO) that produces a fixed intermediate image (SZB) in the object light path and a movable lens system (BO) that is movable in a direction of its optical axis for depth scanning. The image recorder (BA) has pixels arranged next to each other on an extended planar surface.
    Type: Grant
    Filed: March 29, 2001
    Date of Patent: September 13, 2005
    Assignee: Robert Bosch GmbH
    Inventors: Friedrich Prinzhausen, Michael Lindner
  • Patent number: 6943870
    Abstract: A deformation measuring method using electronic speckle pattern interferometry comprises the steps of subtracting an average intensity from the intensity in a time domain at each point of a speckle pattern image so as to compute the cosine component of intensity; subjecting the cosine component to Hilbert transform in a temporal domain so as to compute the sine component of intensity; determining the arctangent of the ratio between thus computed sine and cosine components so as to determine an object phase; carrying out an unwrapping operation; and outputting three-dimensional deformation distribution data in a displayable mode.
    Type: Grant
    Filed: January 2, 2003
    Date of Patent: September 13, 2005
    Assignee: President of Saitama University
    Inventors: Satoru Toyooka, Hirofumi Kadono
  • Patent number: 6943890
    Abstract: A compact interferometer includes a substrate having opposing faces and a suppression feature on one of the faces of the substrate. The suppression feature suppresses higher order reflections inside the substrate. The suppression feature may be an absorptive coating. The interferometer produces high throughput, high contrast signals when receiving light at normal or near normal incidence.
    Type: Grant
    Filed: September 5, 2002
    Date of Patent: September 13, 2005
    Assignee: Digital Optics Corporation
    Inventor: Robert Te Kolste
  • Patent number: 6940588
    Abstract: A system for determining response characteristics, insertion loss and group delay, of an optical component by applying a sweeping wavelength optical signal that is modulated with an RF signal, measuring the insertion loss and group delay at a series of wavelengths and correlating the measurements to wavelengths. A method for synthesis of an effective modulation frequency in determining the group delay response characteristics of an optical component by obtaining a series of measurements over a sample optical spectrum using a given modulation frequency and calculating a weighted average of the group delays in the series of measurements giving a result substantially equivalent to a measurement taken using a modulation frequency equal to the effective modulation frequency.
    Type: Grant
    Filed: January 31, 2003
    Date of Patent: September 6, 2005
    Assignee: JDS Uniphase Inc.
    Inventors: Shane H. Woodside, Yi Liang, Thomas Friessnegg, Paul Colbourne
  • Patent number: 6940601
    Abstract: The present invention provides a method and apparatus for obtaining a measure of the chromatic dispersion of a fibre bragg grating, the method comprising: disposing the grating in a reflection arm of an interferometer; inputting probe laser light into the interferometer; stepping the wavelength of the light across the reflection bandwidth of the grating, while at each step modulating the wavelength by a wavelength modulation less than the size of the respective step, and thereby producing a resulting phase modulation; and demodulating the phase modulation and determining therefrom a measure of the chromatic dispersion.
    Type: Grant
    Filed: March 23, 2001
    Date of Patent: September 6, 2005
    Assignee: Defence Science and Technology Organisation
    Inventors: Mark Andrew Englund, Eric Carl Magi
  • Patent number: 6940630
    Abstract: A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.
    Type: Grant
    Filed: April 29, 2004
    Date of Patent: September 6, 2005
    Assignee: University of Florida Research Foundation, Inc.
    Inventor: Huikai Xie
  • Patent number: 6940605
    Abstract: Both the optical distance of the detected-light light path and the optical distance of the reference-light light path are simultaneously varied according to respective specified patterns, so that differences are created between the period of variation in the intensity of the required signal component (in the interference signals) and the periods of variation in the intensities of the coherent noise components. When the modulation scanning procedure is performed, the phase difference between the detected light and reference light in a specified state is determined as shape information for the above-mentioned detected surface on the basis of the interference signals output from the light-receiving element. As a result, it is possible to securely reduce the effects of coherent noise components generated as a result of the interference of specified noise light that has passed through at least portions of the detected-light light path and reference-light light path with the detected light or reference light.
    Type: Grant
    Filed: May 18, 2001
    Date of Patent: September 6, 2005
    Assignee: Nikon Corporation
    Inventors: Jun Kawakami, Hisashi Shiozawa
  • Patent number: 6937346
    Abstract: A wavemeter for determining a wavelength of an incident optical beam comprises four optical components, each being arranged in the incident optical beam or in a part of it, providing a path with a respective effective optical length, and generating a respective optical beam with a respective optical power depending on the wavelength of the incident optical beam. The optical powers oscillate periodically with increasing wavelength, and a phase shift of approximately pi/2 is provided between two respective pairs of the four optical components. Respective power detectors are provided, each detecting a respective one of the optical powers. A wavelength allocator is provided for allocating a wavelength to the incident optical beam based on the wavelength dependencies of the detected first, second, third, and fourth optical powers.
    Type: Grant
    Filed: April 29, 2002
    Date of Patent: August 30, 2005
    Assignee: Agilent Technologies, Inc.
    Inventors: Bernd Nebendahl, Andreas Schmidt, Matthias Jaeger
  • Patent number: 6937343
    Abstract: A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.
    Type: Grant
    Filed: August 29, 2002
    Date of Patent: August 30, 2005
    Assignee: Applied Materials, Israel, Ltd.
    Inventor: Haim Feldman
  • Patent number: 6924899
    Abstract: A wavefront tilt measurement system for measuring the wavefront tilt of light passing through transmitting or receiving optical systems, the optical systems including a primary aperture and internal optical elements defining an optical system focal plane. A light source emits light at the optical system focal plane towards the internal optical elements such that light from the light source emerges from the primary aperture. A plurality of tilt sensors are disposed adjacent to the primary aperture to receive light emerging from the primary aperture. Each tilt sensor includes a sensor focal plane and a plurality of detector elements. Each tilt sensor generates at the focal plane a plurality of overlapping regions of zero and first order images of light emerging from the primary aperture. The measured intensity of light in the overlapping regions is used to determine the wavefront tilt of light emerging from the primary aperture.
    Type: Grant
    Filed: May 31, 2002
    Date of Patent: August 2, 2005
    Assignee: Optical Physics Company
    Inventors: Richard A. Hutchin, Oberdan W. Otto
  • Patent number: 6922250
    Abstract: The invention is directed to the detection and imaging of the internal geometry of the eye, particularly of the important components for imaging in the eye such as the cornea, lens, vitreous body and retinal surface, by multichannel short coherence interferometry. A method and arrangement for obtaining topograms and tomograms of the eye structure by many simultaneously recorded interferometric depth scans through transversely adjacent points in the pupil using spatially coherent or spatially partially coherent light sources. The depth scan is carried out by changing the optical length of the interferometer measurement arm by means of a retroreflector. By continuously displacing the retroreflector, the z-position of the light-reemitting point in the eye can be determined by means of the occurring interference. It is possible to record depth scans simultaneously through the use of spatially coherent or spatially partially coherent light beams comprising a plurality of partial beams.
    Type: Grant
    Filed: August 28, 2002
    Date of Patent: July 26, 2005
    Assignee: Carl Zeiss Meditec AG
    Inventor: Adolf Friedrich Fercher
  • Patent number: 6922252
    Abstract: The present invention relates generally to high-temperature vessels lined with refractory material. More specifically, the present invention relates to a method for implementation of tracking and contouring systems, automated collection of data, and processing of the measured data in either a stationary or a mobile configuration to accurately determine profiles of localized refractory thickness and/or bath height of molten material in the high-temperature vessel using the tracking system to fix the position of the contouring system with respect to the vessel.
    Type: Grant
    Filed: September 19, 2002
    Date of Patent: July 26, 2005
    Assignee: Process Matrix, LLC
    Inventors: Thomas L. Harvill, Michel P. Bonin, Soren T. Jensen
  • Patent number: 6919963
    Abstract: A laser wavelength locking control loop apparatus comprising a wavelength selective device and a photodetector, coupled to a feedback controller circuit. Electromagnetic radiation emitted by the laser device is provided to the wavelength selective device which provides a first output signal at a first wavelength and a second output signal at a second wavelength. The first and second output signals are directed to the photodetector so as to coincide when incident thereupon. A beat signal results from the coincidence of the first and second output signals and this is used to measure wavelength drift.
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: July 19, 2005
    Assignee: Agilent Technologies, Inc.
    Inventor: Christopher Anthony Park