Patents Examined by Anthony Quash
  • Patent number: 7034293
    Abstract: A linear ion trap includes four electrodes and operates with an asymmetrical trapping field in which the center of the trapping field is displaced from a geometrical center of the trap structure. The asymmetrical trapping field can include a main AC potential providing a quadrupole component and an additional AC potential. The main AC potential is applied between opposing pairs of electrodes and the additional AC potential is applied across one pair of electrodes. The additional AC potential can add a dipole component for rendering the trapping field asymmetrical. The additional AC potential can also add a hexapole component used for nonlinear resonance. A supplementary AC potential can be applied across the same pair of electrodes as the additional AC potential to enhance resonant excitation. The operating point for ejection can be set such that a pure resonance condition can be used to increase the amplitude of ion oscillation preferentially in one direction.
    Type: Grant
    Filed: May 26, 2004
    Date of Patent: April 25, 2006
    Assignee: Varian, Inc.
    Inventor: Gregory J. Wells
  • Patent number: 7030388
    Abstract: The present invention relates to an illuminant, etc., having a high response speed and a high luminous intensity. The illuminant comprises a substrate and a nitride semiconductor layer provided on one surface of the substrate. The nitride semiconductor layer emits fluorescence in response to incidence of electrons. At least part of the emitted fluorescence passes through the substrate, and then exits from the other surface of the substrate. Generation of the fluorescence is caused by incidence of electrons onto a quantum well structure of the nitride semiconductor layer and recombination of pairs of electrons and holes generated due to electron incidence, and the response speed of fluorescence generation is on the order of nanoseconds or less. Also, the luminous intensity of the fluorescence becomes equivalent to that of a conventional P47 fluorescent substance.
    Type: Grant
    Filed: October 7, 2003
    Date of Patent: April 18, 2006
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Yasufumi Takagi, Minoru Niigaki, Shoichi Uchiyama, Minoru Kondo, Itaru Mizuno
  • Patent number: 7026630
    Abstract: A UV sterilization system with autocleaning structure comprises scrubbing collars, at least one cleaning liquid box and at least one sliding bar. Said cleaning means further comprises at least one towing bar, at least one sliding bar and at least one supporting bar. The boxes are vertically mounted on or fixed to the supporting bar(s) to form together with the supporting bar(s) a rectangular shape. A cleaning liquid addition port and a cleaning liquid drain port are respectively provided at the top and close to the bottom of each cleaning liquid box. Said cleaning liquid addition port is connected with a cleaning liquid supply pipe and the cleaning liquid drain port is closed by a detachable sealing member. Several sets of holes with the same diameter for scrubbing collars are provided on the opposite sides of each box with each set at the same height. Each UV lamp is separately installed within a protective sleeve passing through the scrubbing collars.
    Type: Grant
    Filed: September 15, 2004
    Date of Patent: April 11, 2006
    Assignee: Fujian Newland Entech Co., Ltd.
    Inventors: Jian Chen, Xiang Yang Yao
  • Patent number: 7012249
    Abstract: Disclosed is an apparatus for examining and inspecting at least one sample in order to determine characteristics of the sample having the a support for receiving a compact disc, the compact disc having deposited on a surface thereof at least one sample, inspection means for effecting a physical change in at least one sample, the inspection means positioned for registration with the surface of the compact disc bearing at least one sample; and a traversal mechanism adapted for reciprocating movement, to move the sample in and out of the path of the inspection means.
    Type: Grant
    Filed: August 23, 2004
    Date of Patent: March 14, 2006
    Assignee: The Rockefeller University
    Inventors: Andrew Krutchinsky, Brian Chait
  • Patent number: 7009187
    Abstract: A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications.
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: March 7, 2006
    Assignee: FEI Company
    Inventors: Robert L. Gerlach, Mark W. Utlaut, Trevor Dingle, Marek Uncovsky
  • Patent number: 7009176
    Abstract: Systems and components for use in ion transfer in a mass spectrometer. The components include a body having an orifice through which ions can pass, wherein at least a portion of the body comprises titanium metal. Alternatively, the components can include an ion guide into which ions can pass, wherein at least a portion of the ion guide comprises titanium metal. The system has a source of ions for generating ions and a body having an orifice through which ions can pass, wherein at least a portion of the body comprises titanium metal.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: March 7, 2006
    Assignee: Thermo Finnigan LLC
    Inventor: Rohan Thakur
  • Patent number: 7005634
    Abstract: An ionization apparatus according to the present invention has a mechanism for causing metal ions emitted from an ion emitter to attach to an introduced target gas so as to generate ions of the sample gas and emits the ions of the sample gas to a mass spectrometer. The mass spectrometer has a zone in which one or both of an electric field and magnetic field are formed. As the electrode for causing the generation of cleaning plasma in the ionization zone generating the ions of the sample gas, the ion emitter is used. The ion emitter causes the generation of plasma in connection with a hollow vessel and removes deposits on components facing the ionization zone by the plasma. The plasma cleaning process is performed consecutively at a suitable timing after the ionization process. Due to the above configuration, deteriorated performance in ionization can be restored in a short time, a memory effect can be prevented, and accurate mass spectrometry becomes possible.
    Type: Grant
    Filed: March 22, 2002
    Date of Patent: February 28, 2006
    Assignee: Anelva Corporation
    Inventors: Yoshiro Shiokawa, Megumi Nakamura, Tohru Sasaki, Toshihiro Fujii
  • Patent number: 7002168
    Abstract: A dense plasma focus radiation source for generating EUV radiation using Lithium vapor and including a coaxially disposed anode and cathode. The invention includes methods and apparatuses for enhancing the efficiency of EUV radiation production, for protecting, cooling and extending the life of the anode and cathode, for protecting and shielding collecting optics from debris and pressure disturbances in the discharge chamber, and for feeding Lithium into the discharge chamber.
    Type: Grant
    Filed: May 21, 2003
    Date of Patent: February 21, 2006
    Assignee: Cymer, Inc.
    Inventors: Jonah Jacob, Joseph A. Mangano, James Moran, Alexander Bykanov, Rodney Petr, Mordechai Rokni
  • Patent number: 7002167
    Abstract: A charged-particle beam writer which draws a pattern on a specimen with a charged-particle beam generated from a single particle generator by both of a VSB strategy and a scan-projection strategy, the charged-particle beam writer comprising a data creating unit configured to create pattern data representing a state where a first-type figure drawn by the VSB strategy and a second-type figure drawn by the scan-projection strategy are arranged on the specimen, a computing unit configured to calculate, on the basis of the pattern data, the amount of correction for correcting the drawing dimensions of the first-type figure on the specimen and the drawing dimensions of the second-type figure on the specimen, and a control unit configured to control the dose of beam at each position on the specimen on the basis of the calculated amount of correction.
    Type: Grant
    Filed: September 22, 2003
    Date of Patent: February 21, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Munehiro Ogasawara
  • Patent number: 6989532
    Abstract: The present invention provides a mass spectrometer including an ion source for atomizing a liquid sample into ionized droplets and spraying ions in a predetermined direction. According to the present invention, the ion source includes a gas transport pipe and a liquid supply pipe; the gas transport pipe has an ejection port at its front end and a gas supply passage for sending an assist gas to the ejection port; the inner surface of the gas supply passage has a tapered section located in proximity to the ejection port, where the diameter of the tapered section decreases toward the ejection port; the liquid supply pipe is inserted into the gas supply passage so that the front end of the liquid supply pipe is located in proximity to the ejection port; three or more spheres having the same size are inserted between the inner surface of the gas supply passage and the outer surface of the liquid supply pipe; and a pressing mechanism is used to press the spheres onto the tapered section.
    Type: Grant
    Filed: March 9, 2005
    Date of Patent: January 24, 2006
    Assignee: Shimadzu Corporation
    Inventor: Takahiro Harada
  • Patent number: 6989535
    Abstract: To provide an atomic force microscopy which allows the measurement of the configuration of a surface being measured by using the phenomenon observed between the surface being measured and a probe approaching thereto at very fine distance. By selecting the material of the tip surface of said probe such that the surface energy of said probe tip becomes less than the interface energy between the tip surface and the surface being measured, thereby the surface configuration of soft body, or soft fouling adhered to the body surface can be measured. A method of measuring the surface configuration and a method of producing magnetic recording medium using the same are also provided.
    Type: Grant
    Filed: December 4, 2002
    Date of Patent: January 24, 2006
    Assignee: Hitachi, Ltd.
    Inventors: Hiroshi Tani, Yoko Ogawa, Masanori Inoue, Takaaki Shirakura, Koji Sonoda
  • Patent number: 6984834
    Abstract: The present invention provides a radiation source module for use in a fluid treatment system. In one embodiment, the module comprises: a substantially elongate first support member having a longitudinal first axis; and a first pair of radiation source assemblies extending from the first support member, each radiation source assembly comprising a radiation source; wherein the first pair of radiation source assemblies is oriented such that a second axis extending through a center point of each radiation source assembly is disposed at an angle with respect to the first axis.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: January 10, 2006
    Assignee: Trojan Technologies Inc.
    Inventors: James C. Alexander, Michael A. Plaisier, Michael P. Sarchese
  • Patent number: 6982420
    Abstract: Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
    Type: Grant
    Filed: November 25, 2003
    Date of Patent: January 3, 2006
    Assignees: Hitachi Science Systems Ltd., Hitachi High-Technologies Corp.
    Inventors: Eiko Nakazawa, Isao Nagaoki
  • Patent number: 6982418
    Abstract: The present invention provides a standard test device used for testing a hole of a semiconductor device. The standard test device has a structure which comprises: at least a dummy film on a base surface; at least an insulating layer which has at least one opening penetrating through the insulating layer, so that a part of a top surface of the at least dummy film is shown through the at least one opening, wherein the at least dummy film has a predetermined constant thickness at least around the at least one opening. The standard test device makes it easily possible to determine or measure a thickness of a residual film on a bottom of the contact hole.
    Type: Grant
    Filed: June 16, 2004
    Date of Patent: January 3, 2006
    Assignee: Fab Solutions, Inc.
    Inventor: Keizo Yamada
  • Patent number: 6979823
    Abstract: An electron beam (area beam) having a fixed area is irradiated onto the surface of a semiconductor sample, and reflected electrons from the sample surface are imaged by the imaging lens, and images of a plurality of regions of the surface of the semiconductor sample are obtained and stored in the image storage unit, and the stored images of the plurality of regions are compared with each other, and the existence of a defect in the regions and the defect position are measured. By doing this, in an apparatus for testing a pattern defect of the same design, foreign substances, and residuals on a wafer in the manufacturing process of a semiconductor apparatus by an electron beam, speeding-up of the test can be realized.
    Type: Grant
    Filed: June 14, 2004
    Date of Patent: December 27, 2005
    Assignee: Hitachi, Ltd.
    Inventors: Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji, Katsuya Sugiyama, Katsuhiro Kuroda, Kaoru Umemura, Yasutsugu Usami
  • Patent number: 6977371
    Abstract: A mass spectrometer is disclosed having a gas collision cell. An AC or RF ion guide comprising a plurality of ring electrodes which preferably have the same internal diameter is provided within the gas collision cell. The ion guide extends upstream and/or downstream of the gas collision cell so that ions may be continuously radially confined as they pass from a vacuum chamber maintained at a relatively low pressure, through an inlet differential pumping aperture to the gas collision cell, through the gas collision cell and then out of the gas collision cell through an outlet differential pumping aperture.
    Type: Grant
    Filed: June 10, 2003
    Date of Patent: December 20, 2005
    Assignee: Micromass UK Limited
    Inventors: Robert Harold Bateman, Kevin Giles
  • Patent number: 6967327
    Abstract: The present invention provides a standard test device used for testing a hole of a semiconductor device. The standard test device has a structure which comprises: at least a dummy film on a base surface; at least an insulating layer which has at least one opening penetrating through the insulating layer, so that a part of a top surface of the at least dummy film is shown through the at least one opening, wherein the at least dummy film has a predetermined constant thickness at least around the at least one opening. The standard test device makes it easily possible to determine or measure a thickness of a residual film on a bottom of the contact hole.
    Type: Grant
    Filed: June 8, 2004
    Date of Patent: November 22, 2005
    Assignee: Fab Solutions, Inc.
    Inventor: Keizo Yamada
  • Patent number: 6960776
    Abstract: The present invention is directed to an infrared light assembly (10, 30, 80, 90). A preferred embodiment of the light assembly (10, 30, 80, 90) may be used on aircraft or other vehicles for landing, taxi mode, or search operations. The light assembly (10, 30, 80, 90) preferably only requires about 10 to 20 watts of power. The light assembly (10, 30, 80, 90) may include a housing (12, 32, 82), a base (14, 34, 50), an IR diode (16, 36, 60), and an aspheric lens (18, 38). The base (14, 34, 50) is preferably connected to the bottom portion (22) of the housing(12, 32, 82), and the aspheric lens (18, 38) is preferably connected to the top portion (24) of the housing (12, 32, 82). The IR diode (16, 36, 60) may be mounted on the base (14, 34, 50). The housing (12, 32, 82) and the base (14, 34, 50) preferably have high thermal conductivity, and they preferably act as heat sinks.
    Type: Grant
    Filed: November 2, 2001
    Date of Patent: November 1, 2005
    Assignee: Honeywell International Inc.
    Inventor: Nicolo F. Machi
  • Patent number: 6949752
    Abstract: Disclosed is an electron beam apparatus and method which can retain the state that minimizes the amount of water content contained at a gap between a high-voltage cable and a high-voltage introduction insulator to thereby prevent creation of high-voltage discharge and current leakage. The apparatus comprises a means for applying a high voltage to an acceleration electrode while eliminating electron release from an electron source and for detecting a change in an emission current corresponding to a change in an acceleration voltage at this time. In addition, the apparatus comprises a means for issuing a cautionary notice or warning when the change of this emission current exceeds a prespecified value. Further, the apparatus comprises a means for letting a dry gas flow in a gap portion between the electron gun's high-voltage cable and the high-voltage introduction insulator to thereby dehumidify said gap portion.
    Type: Grant
    Filed: November 18, 2002
    Date of Patent: September 27, 2005
    Assignees: Hitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.
    Inventors: Akimitsu Okura, Masashi Kimura, Kenichi Hirane, Yoshihiko Nakayama
  • Patent number: 6946653
    Abstract: Laser desorption/ionization tandem mass spectrometer instruments that include immediate post source collisional cooling are presented, as are analytical methods that employ such instruments to achieve increased sensitivity and ion yield. Also presented are laser desorption/ionization mass spectrometry methods that improve sensitivity and relative ion yield by combining affinity capture probes with matrices having low melting point energy absorbing molecules combined with alkali metal scavengers.
    Type: Grant
    Filed: June 26, 2002
    Date of Patent: September 20, 2005
    Assignee: Ciphergen Biosystems, Inc.
    Inventors: Scot R. Weinberger, Pete Tornatore