Patents Examined by David C Spalla
  • Patent number: 11984361
    Abstract: A semiconductor device includes a substrate, a plurality of nanosheets, a plurality of source/drain (S/D) features, and a gate stack. The substrate includes a first fin and a second fin. The first fin has a first width less than a second width of the second fin. The plurality of nanosheets is disposed on the first fin and the second fin. The plurality of source/drain (S/D) features are located on the first fin and the second fin and abutting the plurality of nanosheets. A bottom surface of the plurality of source/drain (S/D) features on the first fin is equal to or lower than a bottom surface of the plurality of source/drain (S/D) features on the second fin. The gate stack wraps each of the plurality of nanosheets.
    Type: Grant
    Filed: February 10, 2023
    Date of Patent: May 14, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Lo-Heng Chang, Chih-Hao Wang, Kuo-Cheng Chiang, Jung-Hung Chang, Pei-Hsun Wang
  • Patent number: 11978832
    Abstract: A light emitting diode (LED) package includes a substrate, at least one micro LED chip, a black material layer, and a transparent material layer. The substrate has a width ranging from 100 micrometers to 1000 micrometers. The at least one micro LED chip is electrically mounted on a top surface of the substrate and has a width ranging from 1 micrometer to 100 micrometers. The black material layer covers the top surface of the substrate to expose the at least one micro LED chip. The transparent material layer covers the at least one micro LED chip and the black material layer.
    Type: Grant
    Filed: February 21, 2023
    Date of Patent: May 7, 2024
    Assignee: Lextar Electronics Corporation
    Inventors: Te-Chung Wang, Shiou-Yi Kuo
  • Patent number: 11973111
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, an active pattern extending in a first horizontal direction on the substrate, a gate electrode extending in a second horizontal direction different from the first horizontal direction on the active pattern, a source/drain region on at least one side of the gate electrode, a source/drain contact extending into the source/drain region and including a filling layer and a barrier layer along a sidewall of the filling layer, and a silicide layer between the source/drain region and the filling layer, the silicide layer including a first sidewall in contact with the filling layer and a second sidewall in contact with the source/drain region, wherein the barrier layer is not between the filling layer and the source/drain region.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: April 30, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Mun Hyeon Kim, Kern Rim, Dae Won Ha
  • Patent number: 11973122
    Abstract: Embodiments utilize a two layer inner spacer structure during formation of the inner spacers of a nano-FET device. The materials of the first inner spacer layer and second inner spacer layer can be selected to have a mismatch in their coefficients of thermal expansion (CTE). As the structure cools after deposition, the inner spacer layer which has a larger CTE will exhibit compressive stress on the other inner spacer layer, however, because the two layers have a common interface, the layer with the smaller CTE will exhibit a counter acting tensile stress.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: April 30, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: I-Hsieh Wong, Wei-Yang Lee, Chia-Pin Lin
  • Patent number: 11973077
    Abstract: A device includes a transistor, a backside via, and a pair of sidewall spacers. The transistor includes a gate structure, a channel layer surrounded by the gate structure, and a first source/drain structure and a second source/drain structure connected to the channel layer. The backside via is under and connected to the first source/drain structure and includes a first portion, a second portion between the first portion and the first source/drain structure, and a third portion tapering from the first portion to the second portion in a cross-sectional view. The pair of sidewall spacers are on opposite sidewalls of the second portion of the backside via but not on opposite sidewalls of the first portion of the backside via.
    Type: Grant
    Filed: April 21, 2023
    Date of Patent: April 30, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wang-Chun Huang, Hou-Yu Chen, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11967633
    Abstract: A method for forming at least one doped region of a transistor includes providing a stack having an insulating layer, an active layer, and a gate pattern having a first lateral flank and removing a first portion of the active layer not overlaid by the gate pattern and extending down to the gate pattern, at the edge of a second portion of the active layer overlaid by the gate pattern, so as to expose an edge of the second portion. The edge extends substantially in a continuation of the lateral flank of the gate pattern. The method also includes forming a first spacer having an L shape and having a basal portion in contact with the insulating layer and a lateral portion in contact with the lateral flank; forming a second spacer on the first spacer; removing the basal portion of the first spacer by selective etching with respect to the second spacer, so as to expose the edge of the second portion; and forming the doped region by epitaxy from the exposed edge.
    Type: Grant
    Filed: November 18, 2021
    Date of Patent: April 23, 2024
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Shay Reboh
  • Patent number: 11968853
    Abstract: This disclosure relates to an organic electroluminescent structure and a display device. The organic electroluminescent structure includes a base substrate; a passivation protective layer provided at a side of the base substrate, in which the passivation protective layer is provided with a plurality of inner cutting portions arranged at intervals at a side facing away from the base substrate, each of the inner cutting portions has a first surface towards the base substrate and a second surface away from the base substrate, an orthographic projection of the first surface on the base substrate is within an orthographic projection of the second surface on the base substrate, and a groove is provided between two adjacent inner cutting portions and is formed as an inner cutting structure; an anode layer including a plurality of anodes arranged at intervals; an organic light-emitting functional layer having a hole injection layer.
    Type: Grant
    Filed: August 12, 2022
    Date of Patent: April 23, 2024
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Li Liu, Pengcheng Lu, Shengji Yang, Kui Zhang
  • Patent number: 11961899
    Abstract: A semiconductor device includes a gate structure extending along a first lateral direction. The semiconductor device includes a source/drain structure disposed on one side of the gate structure along a second lateral direction, the second lateral direction perpendicular to the first lateral direction. The semiconductor device includes an air gap disposed between the gate structure and the source/drain structure along the second lateral direction, wherein the air gap is disposed over the source/drain structure.
    Type: Grant
    Filed: January 23, 2023
    Date of Patent: April 16, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yao Lin, Hsiao Wen Lee, Yu-Shan Cheng, Chao-Cheng Chen
  • Patent number: 11955516
    Abstract: A semiconductor device includes first and second active patterns, a field insulating film between the first and second active patterns, a first gate structure intersecting the first active pattern and including a first gate electrode and a first gate spacer, a second gate structure intersecting the second active pattern and including a second gate electrode and a second gate spacer, a gate separation structure on the field insulating film between the first and second gate structures, the gate separation structure including a gate separation filling film on a gate separation liner, and a connecting spacer between the gate separation structure and the field insulating film, the connecting spacer protruding from a top surface of the field insulating film, and the gate separation liner contacting the connecting spacer and extending along a top surface and sidewalls of the connecting spacer and along the top surface of the field insulating film.
    Type: Grant
    Filed: January 27, 2023
    Date of Patent: April 9, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ho-Jun Kim, Woong Sik Nam, Mirco Cantoro
  • Patent number: 11955550
    Abstract: Semiconductor devices is provided. The semiconductor structure includes a semiconductor substrate having a middle region and an edge region adjacent to the middle region, a plurality of first fins formed on the middle region of the semiconductor substrate, a plurality of second fins formed on the edge region of the semiconductor substrate, a first adjustment layer formed on sidewall surfaces of the plurality of first fins and on the middle region of the semiconductor substrate, and an isolation structure formed on the semiconductor substrate and with a top surface lower top surfaces of the plurality of first fins and the plurality of second fins.
    Type: Grant
    Filed: May 5, 2021
    Date of Patent: April 9, 2024
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Fei Zhou
  • Patent number: 11948942
    Abstract: An integrated circuit device includes a fin-type active area along a first horizontal direction on a substrate, a device isolation layer on opposite sidewalls of the fin-type active area, a gate structure along a second horizontal direction crossing the first horizontal direction, the gate structure being on the fin-type active area and on the device isolation layer, and a source/drain area on the fin-type active area, the source/drain area being adjacent to the gate structure, and including an outer blocking layer, an inner blocking layer, and a main body layer sequentially stacked on the fin-type active area, and each of the outer blocking layer and the main body layer including a Si1?xGex layer, where x?0, and the inner blocking layer including a Si layer.
    Type: Grant
    Filed: March 16, 2023
    Date of Patent: April 2, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Minhee Choi, Keunhwi Cho, Myunggil Kang, Seokhoon Kim, Dongwon Kim, Pankwi Park, Dongsuk Shin
  • Patent number: 11950413
    Abstract: An integrated circuit device includes a plurality of metal gates each having a metal electrode and a high-? dielectric and a plurality of polysilicon gates each having a polysilicon electrode and conventional (non high-?) dielectrics. The polysilicon gates may have adaptations for operation as high voltage gates including thick dielectric layers and area greater than one ?m2. Polysilicon gates with these adaptations may be operative with gate voltages of 10 V or higher and may be used in embedded memory devices.
    Type: Grant
    Filed: December 13, 2022
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Te-Hsin Chiu
  • Patent number: 11950411
    Abstract: A semiconductor device includes a plurality of first nanostructures extending along a first lateral direction. The semiconductor device includes a first epitaxial structure and second epitaxial structure respectively coupled to ends of each of the plurality of first nanostructures along the first lateral direction. The semiconductor device includes a dielectric fin structure disposed immediately next to a sidewall of each of the plurality of first nanostructures facing a second lateral direction perpendicular to the first lateral direction. The semiconductor device includes a first gate structure wrapping around each of the plurality of first nanostructures except for the sidewalls of the first nanostructures. The semiconductor device includes a metal structure disposed above the first gate structure and coupled to one of the first or second epitaxial structure.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Sheng Chang, Chia-En Huang
  • Patent number: 11942548
    Abstract: A multi-gate semiconductor device is formed that provides a first fin element extending from a substrate. A gate structure extends over a channel region of the first fin element. The channel region of the first fin element includes a plurality of channel semiconductor layers each surrounded by a portion of the gate structure. A source/drain region of the first fin element is adjacent the gate structure. The source/drain region includes a first semiconductor layer, a dielectric layer over the first semiconductor layer, and a second semiconductor layer over the dielectric layer.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: March 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Ching, Ching-Wei Tsai, Carlos H. Diaz, Chih-Hao Wang, Wai-Yi Lien, Ying-Keung Leung
  • Patent number: 11935951
    Abstract: The present disclosure provides a semiconductor device structure in accordance with some embodiments. In some embodiments, the semiconductor device structure includes a semiconductor substrate of a first semiconductor material and having first recesses. The semiconductor device structure further includes a first gate stack formed on the semiconductor substrate and being adjacent the first recesses. In some examples, a passivation material layer of a second semiconductor material is formed in the first recesses. In some embodiments, first source and drain (S/D) features of a third semiconductor material are formed in the first recesses and are separated from the semiconductor substrate by the passivation material layer. In some cases, the passivation material layer is free of chlorine.
    Type: Grant
    Filed: November 7, 2022
    Date of Patent: March 19, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun Hsiung Tsai, Yuan-Ko Hwang
  • Patent number: 11935954
    Abstract: A semiconductor device structure includes a fin structure formed over a substrate. The structure also includes nanostructures formed over the fin structure. The structure also includes a gate structure wrapped around the nanostructures. The structure also includes a first inner spacer formed beside the gate structure. The structure also includes a second inner spacer formed beside the first inner spacer. The structure also includes spacer layers formed over opposite sides of the gate structure above the nanostructures. The structure also includes source/drain epitaxial structures formed over opposite sides of the fin structure. The second inner spacer is partially embedded in the source/drain epitaxial structures.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: March 19, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Bwo-Ning Chen, Xusheng Wu, Chang-Miao Liu, Chien-Tai Chan
  • Patent number: 11935958
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first stacked nanostructure and a second stacked nanostructure formed over a substrate. The semiconductor device structure includes a first gate structure formed over the first stacked nanostructure, and the first gate structure includes a first portion of a gate dielectric layer and a first portion of a filling layer. The semiconductor device structure includes a second gate structure formed over the second stacked nanostructure, and the second gate structure includes a second portion of the gate dielectric layer and a second portion of the filling layer. The semiconductor device structure includes a first isolation layer between the first gate structure and the second gate structure, wherein the first isolation layer has an extending portion which is formed in a recess between the gate dielectric layer and the filling layer.
    Type: Grant
    Filed: March 27, 2023
    Date of Patent: March 19, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Wei-Sheng Yun, Tung-Ying Lee
  • Patent number: 11929422
    Abstract: The structure of a semiconductor device with passivation layers on active regions of FET devices and a method of fabricating the semiconductor device are disclosed. The semiconductor device includes a substrate, first and second source/drain (S/D) regions disposed on the substrate, nanostructured channel regions disposed between the first and second S/D regions, a passivation layer, and a nanosheet (NS) structure wrapped around the nanostructured channel regions. Each of the S/D regions have a stack of first and second semiconductor layers arranged in an alternating configuration and an epitaxial region disposed on the stack of first and second semiconductor layers.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: March 12, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Yi Peng, Ching-Hua Lee, Song-Bor Lee
  • Patent number: 11923433
    Abstract: A method for manufacturing a semiconductor device includes forming a first dielectric layer over a semiconductor fin. The method includes forming a second dielectric layer over the first dielectric layer. The method includes exposing a portion of the first dielectric layer. The method includes oxidizing a surface of the second dielectric layer while limiting oxidation on the exposed portion of the first dielectric layer.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Liang Pan, Yungtzu Chen, Chung-Chieh Lee, Yung-Chang Hsu, Chia-Yang Hung, Po-Chuan Wang, Guan-Xuan Chen, Huan-Just Lin
  • Patent number: 11908867
    Abstract: There is provided a semiconductor device having enhanced operation performance by utilizing a cut region where a gate cut is implemented. There is provided a semiconductor device comprising a first active pattern, a second active pattern, a third active pattern, and a fourth active pattern, all of which extend in parallel in a first direction, and are arranged along a second direction intersecting the first direction; a first gate electrode extended in the second direction on the first to fourth active patterns a first cut region extended in the first direction between the first active pattern and the second active pattern to cut the first gate electrode and a second cut region extended in the first direction between the third active pattern and the fourth active pattern to cut the first gate electrode, wherein one or more first dimensional features related to the first cut region is different from one or more second dimensional features related to the second cut region.
    Type: Grant
    Filed: January 20, 2023
    Date of Patent: February 20, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Myoung-Sun Lee, Keun Hwi Cho