Abstract: An apparatus and method for drying substrates. The inventive apparatus comprises: an object support member for supporting at least one substrate in a process tank having one or more support sections comprising capillary material. The inventive method is a method of removing liquid from a wet substrate in a process tank comprising contacting the wet substrate with capillary material. In another aspect, the invention is a method of drying at least one substrate having a surface in a process tank comprising: submerging the substrate in a liquid having a liquid level; supporting the submerged substrates in the process tank; supplying a drying vapor above the liquid level; lowering the liquid level or raising the substrate so that the liquid level is below the substrate, thereby removing a major portion of liquid from the substrate surface; and removing remaining liquid from the substrate surface with capillary material.

Abstract: A fuel cell system and method of operation in which the fuel cell system has a fuel cell unit with anode and cathode, a media flow path for supplying substantially pure hydrogen to the anode, a media flow path for the cathode, an anode exhaust-gas flow path and a cathode exhaust-gas flow path. A fan for supplying air to the cathode is provided in the flow path of the cathode, and a catalytic burner is arranged in the cathode exhaust-gas flow path. The anode exhaust-gas flow path opens into the catalytic burner and/or into the cathode exhaust-gas flow path upstream of the catalytic burner. The combined, catalytically converted fuel cell exhaust-gas flow is passed into an expansion machine.

Abstract: A current-collecting structure in a fuel cell system includes conductive separators, current-collecting plates pressed toward the conductive separators, a plurality of good conductors dispersed between the conductive separators and the current-collecting plates and adapted to be deformed under the pressing to come into close contact with the conductive separators and the current-collecting plates, and a conductive binder. The conductive binder fills vacant spaces among the good conductors, the conductive separators and the current-collecting plates. The current-collecting structure in a fuel cell system provides a decreased contact resistance between the conductive separator and the current-collecting plate.

Abstract: The invention is a reversible fuel cell power plant (10). A reactant switch-over assembly (48) is secured between a reducing fluid fuel source (30), an oxygen containing oxidant source (24), and first and second flow fields (20) (22) of a fuel cell (12). The switch-over assembly (48) first directs a reducing fluid fuel stream to flow into the first flow field (20) while it simultaneously directs the oxygen containing oxidant stream to flow into the second flow field (22). Then, after a first half of a useful life span of the fuel cell (12) but before a final one quarter of the useful life span, the switch-over assembly (48) directs the reducing fluid fuel stream to flow into the second flow field (22) while it simultaneously directs the oxygen containing oxidant stream to flow into the first flow field (20).

Abstract: This invention relates to a vibrating abrasive cleaning apparatus and method which is powered by at least one electric motor specially fabricated to the cleaning container assembly mounted on a rigid square tubing frame on one side by compression springs, on the opposite side by tension springs. The compression springs and tension springs have a different spring rate which produces better rolling of the media and therefore, faster circulation and cleaning. The specially fabricated electric motor attached to the cleaning container provides for enhanced oscillation and much greater cleaning capabilities thereby reducing the cleaning time. The entire vibrating assembly sits on a base and has a lid operated by a cable and counterweight for ease in loading the container for oscillation of the parts.

Abstract: A method and associated structure for increasing the rate at which a chromium volume is etched when the chromium body is contacted by an acid solution such as hydrochloric acid. The etch rate is increased by a metallic or steel body in continuous electrical contact with the chromium volume, both of which are in continuous contact with the acid solution. At a temperature between about 21° C. and about 52° C., and a hydrochloric acid concentration (molarity) between about 1.2 M and about 2.4 M, the etch rate is at least a factor of about two greater than an etch rate that would occur in an absence of the steel body. In one embodiment, the chromium volume is a chromium layer that rests upon a conductive layer that includes a metal such as copper, wherein the acid solution is not in contact with the conductive layer.

Abstract: A cleaning apparatus of an electronic component of the present invention comprises: means for supplying cleaning water to an object to be cleaned such as alumina titanium carbide wafer, a sponge member for contacting with the object to be cleaned to clean a surface thereof, means for moving the object to be cleaned and the sponge member relative to each other, and means for adjusting the resistivity value of the cleaning water to 10M? or less. Using this apparatus, the object to be cleaned is cleaned using the sponge member while supplying, to the object to be cleaned, cleaning water having the resistivity value of 10M? or less. In this case, the cleaning degree is enhanced by soaking the object to be cleaned in the water having the resistivity value of 10M? or less before cleaning, and by using a dummy substrate.

Abstract: A fuel cell system having partial and/or total redundancy of at least one operational component, such as a redundancy of fuel cell stacks and/or fuel processors. In some embodiments, the fuel cell system includes a plurality of fuel cell stacks adapted to deliver the same maximum rated power output as a comparative fuel cell system having only a single fuel cell stack. In some embodiments, the fuel cell system includes a plurality of fuel cell stacks adapted to deliver more than the maximum rated power output of the comparative fuel cell system. In some embodiments, the fuel cell system includes a plurality of fuel cell stacks having at least n+1 (or total) redundancy compared to a fuel cell system having only a single fuel cell stack. In some embodiments, the fuel cell system includes a control system and/or structure adapted to limit the applied load to the system.

Abstract: The invention relates to a stack of polymeric membrane fuel cells, wherein the removal of the heat generated by the production of electric energy and the humidification of the ion exchange membranes used as electrolytes are obtained by the direct injection of a water flow coming from a single hydraulic circuit. The stack thus produced is more compact, less expensive and easier to operate.

Abstract: A fuel reforming apparatus for a polymer electrolyte membrane fuel cell, characterized in that each of a reformer, a carbon monoxide converter, a carbon monoxide selective oxidizing reactor, a cooling device for cooling the inlet port of the carbon monoxide converter, and a cooling device for cooling the inlet gas of the carbon monoxide selective oxidizing reactor is formed cylindrical, the reformer is arranged in the center, the carbon monoxide converter is arranged on the outer circumferential portion of the reformer, and the carbon monoxide selective oxidizing reactor is arranged on the outer circumferential portion of the carbon monoxide converter so as to make reformer, transformer and reactor integral.

Abstract: This invention provides fluid-dispensing devices attachable to an air-intake system of an internal combustion engine for introducing an engine cleaner composition into the air intake system. The invention also provides methods of cleaning internal combustion engines using the fluid-dispensing devices.

Abstract: An apparatus for preparing a wafer is provided. The apparatus includes a wafer backside plate and a central shaft. The wafer backside plate has a top surface that includes a cylindrical edge lip, which defines a central aperture. The central shaft is designed to fit within the central aperture. The wafer backside plate is designed to automatically slide between an up position during rotational wager processing and a down position when the wafer is not in rotational wafer processing. A gap defined between the top surface of the wafer backside plate and the wafer is less when the wafer backside plate is in the up position than when the wafer backside plate is in the down position.

Abstract: This invention relates to a method of heating an insulating layer, such as is found in semiconductor devices, in which a formation has been etched through a layer of resist comprising reactive etching the resist, inhibiting absorption of or removing water vapour and/or oxygen at the exposed surfaces of the etched formation and filling the formation with conductive metal in the absence of said water vapour and/or oxygen.

Abstract: Apparatus and methods for regulating methanol concentration in a direct methanol fuel cell system without the need for a methanol concentration sensor. One or more operating characteristics of the fuel cell, such as the potential across the load, open circuit potential, potential at the anode proximate to the end of the fuel flow path or short circuit current of the fuel cell, are used to actively control the methanol concentration.

Abstract: An efficient residential dishwasher is disclosed. The residential dishwasher comprises a washing chamber, a rack within the washing chamber for holding dishes, a water tank for holding hot water to be used to clean dishes located on the rack, and at least one spray head within the washing chamber for cleaning dishes on the rack. After hot water has been delivered from the water tank to the washing chamber, the spray head sprays hot water to the dishes on the rack for the purpose of cleaning. The water tank will be filled with water from a fresh water line in response to a cooking apparatus being turned on.

Abstract: A workpiece, in which a lead is laid on top of a three-dimensional porous metal body, is placed between an ultrasonic horn and an anvil with a lead portion facing the ultrasonic horn. A support is raised so that the lead portion of the workpiece is pressed between the ultrasonic horn and the anvil. While being rotated around a central shaft with a motor, the ultrasonic horn vibrates at a frequency of 20 kHz in the shaft direction. Thus, the workpiece is advanced continuously, so that the lead is bonded ultrasonically to the three-dimensional porous metal body (i.e., metal-to-metal bonding is established). It is possible to provide a battery electrode that can be produced continuously at a lower running cost, reduce the faulty welding with a current collecting plate, and prevent short-circuits.

Abstract: In a method of cleaning process residues formed on surfaces in a substrate processing chamber, a sacrificial substrate comprising a sacrificial material is placed in the chamber, a sputtering gas is introduced into the chamber, and the sputtering gas is energized to sputter the sacrificial material from the substrate. The sputtered sacrificial material reacts with residues on the chamber surfaces to clean them. In one version, the sacrificial substrate comprises a silicon-containing material that when sputtered deposits silicon on the chamber walls that reacts with and cleans fluorine-containing species that are left behind by a chamber cleaning process.

Abstract: A rechargeable electrochemical cell system is provided. The system includes a plurality of cells, wherein each cell is comprised of a first electrode, a second electrode, and a third electrode electrically isolated from the second electrode. The cell system may be discharged upon application of a load across a discharge circuit, which is formed from the first electrodes and the second electrodes. The cell may be recharged upon application of a voltage across a recharging circuit, which is formed of at least one of the first electrodes and at least one of the third electrodes.

Abstract: A membrane-electrode assembly for electrochemical cells such as proton exchange membrane fuel cells and direct methanol fuel cells operating at ambient conditions are activated first by exposing them at a temperature higher than ambient temperature and with the gaseous reactants back-pressurized. The performance of the membrane-electrode assemblies, especially those whose electrodes are of low catalyst loadings made using supported catalysts, improves dramatically after the activation.

Abstract: A method and apparatus for removing minute particles from a surface of a sample are provided that prevent redeposition of the particles onto the surface. By combining thermophoresis with laser assisted particle removal (LAPR), the methods and apparatus remove minute particles (for example, micrometer and nanometer sizes) and assure that they will not redeposit.