Abstract: The present invention relates to an apparatus and a method for transferring substrates into and from a vacuum chamber in a lithography apparatus. The load lock system comprises: a load lock chamber provided with an opening for allowing passage of a substrate in and out of the load lock chamber, and a transfer apparatus comprising a sub-frame at least partially arranged in the load lock chamber, an arm which is, with a proximal end thereof, connected to the sub-frame, and a substrate receiving unit which is connected to a distal end of the arm. The arm comprises at least three hinging arm parts, wherein a first and a second arm part are hingedly connected to the sub-frame with a proximal end thereof. A third arm part is hingedly connected to the distal ends of the first and second arm parts. The arm parts are arranged to form a four-bar linkage.

Abstract: Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.

Abstract: The present invention provides a method for emptying a reactor containing at least one bed of spent catalyst particles, wherein the reactor comprises at least one dump tube that opens into the reactor. The method comprising the steps of: (a) causing a portion of the bed of spent catalyst particles to flow out of the reactor via the dump tube; and (b) extracting the remainder of the spent catalyst particles from the reactor by driving the remainder of the spent catalyst particles toward the opening of the dump tube using a removable device comprising at least one flexible extraction sleeve introduced into the reactor via the said dump tube and connected to an extraction system situated outside the reactor, the sleeve being provided on its external surface with protuberances and being able to move, inside the reactor, translationally and rotationally with respect to the dump tube.

Abstract: The present invention provides a method for emptying a reactor containing at least one bed of spent catalyst particles, wherein the reactor comprises at least one dump tube that opens into the reactor. The method comprises the steps of: (a) causing a portion of the bed of spent catalyst particles to flow out of the reactor via the dump tube; and (b) expelling the remainder of the spent catalyst particles from the reactor by driving the remainder of the spent catalyst particles toward the opening of the dump tube using a removable device comprising at least one rotary brush fixed to the end of an articulated arm introduced into the reactor via the dump tube.

Abstract: The present invention relates to a three-mast order picker, belonging to the technical field of manned elevation equipment. The three-mast order picker comprises a chassis, a hydraulic elevation assembly, a sprocket elevation assembly and a picker platform, the hydraulic elevation assembly comprises a fixed mast, a hydraulic cylinder and a movable mast, and the sprocket elevation assembly comprises a sprocket and a chain. The fixed mast is erected and fixed on the chassis, and the knockout rod of the hydraulic cylinder is connected to the movable mast to drive the movable mast; one end of the chain is connected to the fixed mast and the other end is connected to the second movable mast so that the second movable mast is raised and lowered by the raising and lowering of the movable mast and with the assistance of the sprocket and the chain.

Abstract: The present invention relates to an order picker with a wiring mechanism, belonging to the technical field of manned elevation equipment. The order picker with a wiring mechanism comprises a stationary part, an elevation mechanism and an elevation part, wherein the wire suitable for transmitting signals is connected between the stationary part and the elevation part. It also comprises a wire accumulator which acts on the wire in such a way that the wire is always tensioned between the stationary part and the elevation part; when the elevation part is raised, the wire accumulator starts to pay out the wire, and when the elevation part is lowered, the wire accumulator starts to stow the wire. The present invention adopts a wire accumulator structure which can avoid the wires which come from the chassis being nipped during elevation of the elevation structure.

Abstract: A system for assembling and dispensing an order made up of one or more individually packaged items from a plurality of different individually packaged items includes a storage module containing one or more packages of each of the items, and a conveyor having selectively assignable spaces configured to receive the packaged items associated with a particular order and to transport the packaged items to a processing location. A pick device is movable relative to the storage module and is configured to retrieve a package from the storage module. A transfer station adjacent the conveyor receives one or more of the packaged items from the pick device and an actuator associated with the transfer station moves the packaged items from the transfer station to the conveyor when the assigned space associated with the order is in the registration with the transfer station.

Abstract: A pick up and delivery system for use with mobile robots which have a body with a horizontal upper surface and at least one vertical side. The robot has at least one shelf, each of which contains a stop bar containing a retaining device. The system further uses multiple stations, each of which contain at least one pallet retaining surface to contain at least two pallets. The pallet retaining surfaces are provided with a holding device at the pick up area and a holding device at the delivery area. Pallets are used to retain the items being transferred with each of the pallets having a securing device that interacts with the holding device and retaining device. The strength of the holding device at the pick up area is less than the holding device at the delivery area, with the robot's retaining device having a strength between the strength of the holding devices. The mobile robot picks up a pallet from a first station, and delivers the pallet to a second station.

Abstract: A method and apparatus for preventing substrate damage in a factory interface. In one embodiment, a method for preventing substrate damage in a factory interface includes the steps of receiving an indicia of potential substrate damage, and automatically preventing substrates from moving out of a substrate storage cassette in response to the received indicia. The indicia may be a seismic warning signal, among others. In another embodiment, a method for preventing substrate damage in a factory interface includes the steps of moving a pod door in a first direction to a position spaced-apart and adjacent a pod, and moving the pod door laterally in a second direction to close the pod. The lateral closing motion of the pod door urges substrates, which may be misaligned in the pod, into a predefined position within the pod.

Abstract: A valve circuit, including a first and second circuit portion, for hydraulically controlling a loading dock vehicle restraint. The first circuit portion permits raising and lowering of the vehicle restraint. The second circuit portion permits extension and retraction of the vehicle restraint. Preferably, the first and second circuit portion are separate and are configured on the same valve block.

Abstract: A storage and retrieval unit comprises a supporting carriage which is movable along a rack aisle on at least one substantially horizontal supporting rail by a drive. A vertically adjustable lifting platform is suspended from the supporting carriage via at least three traction devices. In order to prevent the lifting platform from being laterally deflected or starting to oscillate during accelerations of the supporting carriage, a stabilizing device is provided. The latter comprises at least three traction devices fastened to the sides of the lifting platform which are opposite in the direction of travel. At least two traction devices run to at least two fastening points arranged in the region of one end of the aisle; at least one further traction device runs to a fastening point arranged in the region of the other end of the aisle. The effective length of each traction device between the lifting platform and the fastening point can be changed by a drive.

Abstract: In combination, a vehicle including a body having a floor and generally upright walls and a material ejection system for the vehicle including a generally flexible floor mounted adjacent to and generally covering the floor of the vehicle when in extended position. A flexible floor drive roller is rotatably mounted generally adjacent the rearward end of the vehicle and is connected to the flexible floor drive roller and a drive device such as an hydraulic cylinder is operatively connected to the flexible floor drive roller for rotating the flexible floor drive roller to wrap the flexible floor on the flexible floor drive roller. Finally, the operative connection between the drive means and the flexible floor drive roller includes at least one flexible member in tension which transfers torque to the flexible floor drive roller for rotating the flexible floor drive roller to wrap the flexible floor thereon.

Abstract: This is a cargo container overhead hoist operated by a highway truck to load or unload the container from the bed of the truck to an overhead hoist for holding the container. The hoist has parallel swing links that lift the container, and a latch to hold it lifted so the truck can be driven out from under, or released to be lowered onto the truck bed by movement of the truck.

Abstract: Methods and apparatus are provided that load goods into trailers. The apparatus facilitates the loading of goods into the trailer, and optimizes usage of storage space in the trailer.

Abstract: A lift dolly is provided for lifting and transporting stand-mounted power tools and the like, with little effort. The dolly includes a pair of platforms and a wheel system having at least three castors extending downwardly from the platforms. The dolly is designed such that one step onto a latching or locking mechanism by the operator causes the wheel system to be forced downward relative to the stand thereby slightly lifting the power tool and stand off of the ground and enabling transport of same via the castors. Another step on the locking or latching mechanism disengages the wheel system and permits gravity to return the stand and tool firmly to the ground for use.

Abstract: A two-wheel vehicle foldable to have a width equivalent to the width of a license number plate can be contained in a door, side walls, or a rear wall of a four-wheel vehicle. Handles and steps of the two-wheel vehicle can be folded so that the vehicle width becomes equivalent to the width of the license number plate. Accordingly, containing space on the four-wheel vehicle at the time of mounting the two-wheel vehicle can be made to be small. As a result, vehicle compartment space of the four-wheel vehicle can be secured, and the two-wheel vehicle can be easily mounted onto the four-wheel vehicle.

Abstract: A rack for transporting personal pontoon watercraft. The rack has an anchor member which inserts in a standard trailer hitch receptacle and a support structure to which the watercraft is attached. Pivoting embodiments also have a pivot hinge which provides for the support structure to pivot between a down position for loading and an up position for transport, and a support brace which secures the rack in an up or transport position. The pivot hinge attaches the bottom end of the support structure to the rear end of the anchor member. The support structure includes one or more pairs of cradles into which the deck of the watercraft is slid which hold the watercraft in a vertical position for transport.

Abstract: A skate for a wheel assembly of a motor vehicle is used to maneuver the vehicle in confined spaces. The wheel skate has a U-shaped frame fitted to the wheel assembly by adjusting the width of the expandable/contractible frame until the unit is wide enough to position a plurality of rollers in engagement with opposing sides of the tire of the wheel assembly. A foot pedal lever is operated to contract the frame assembly and raise the tire clear of the garage floor. A locking knob drops into a hole in the frame assembly to lock the position of the frame assembly. A fork drives the frame assembly together. The locking knob does not move into the following hole until the fork is moved into another hole. The device is used in pairs which are attached to either the front or back wheels in order to swing one end of the vehicle around.

Abstract: Various methods and apparatus for handling a plurality of disks and repositioning them into pairs is provided. In one embodiment, a nest is configured to hold a cassette and includes a nest. The nest includes a curved surface with ribs or teeth extending therefrom which define a row of grooves. The grooves are dimensioned to hold a pair of disks in concentric contact merge orientation and the teeth facilitate movement of pairs of disks into the grooves.

Abstract: A system and method for handling and transporting moist bulk grain by-products include a rail car having an aluminum car body carried by a plurality of trucks for engaging rails. A flexible top cover, supported by a plurality of breakaway curved ribs, is positioned over an open top of the rail car to protect the moist bulk grain by-products carried therein. The car body has a front end and a rear end each having a wind screen for spoiling or deflecting the flow of air over the car as it moves to prevent the flexible top cover from being lost or damaged. The car may be emptied by a car inverter over a conveyor, such as a reciprocating floor which carries the moist grain by-products to a mixer, or transportation vehicles for distribution to customers or users of the grain by-products.