Abstract: A method for scaling a media storage library is provided, wherein the library comprises a plurality of media storage cells and at least one media picker robot. The method comprises connecting a new physical component to a section of the library. Examples of new components include additional robots, storage cell arrays, media players, as well as connecting a second adjacent library by means of a pass-through mechanism. Control software integrates this new physical component into the function of the library by auditing the content and function of the new component. During the connection and functional integration of the new component, the rest of the library continues its current operations. The method may further comprise defining at least one work zone within the library, wherein robots do not enter the work zone but continue to operate in other areas of the library.

Abstract: A tip-up trailer includes an ICC bumper that has been structurally enhanced to support the entire load of a loaded shipping container jointly with the rearward-most axle of the trailer. The bumper includes a rotatable bearing on a lower member, which permits the lower member to travel along the ground as the tipped-up trailer is lowered after loading. The method of the invention includes the initial step of connecting a container to a tip-up trailer with the doors of the container oriented towards the forward end of the trailer. The doors are opened and the forward end of the trailer is raised. The container is then loaded with bulk material. Once the container doors are closed, the forward end of the trailer is lowered while bearings on the bumper roll on the ground.

Abstract: A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box body or the lid member for defining a suction space sealed between the lid member and the box body under the condition that the lid member is mounted on the box body. Furthermore, intake/exhaust ports are provided for vacuum exhaust/release from the outside.

Abstract: A set of lift pins defines a storage location for a substrate in a substrate processing chamber. Each lift pin has an actuating mechanism including a translating mechanism that translates vertical actuation into horizontal motion. The actuating mechanism may include a base, a mechanism adapted to raise and lower the base, and a lever pivotally mounted on the base. The lift pin may be fixedly mounted on the lever. A stop may be adjacent the base and adapted to engage the lever to pivot the lever as the base is lowered.

Abstract: A vehicle including a combination body for selectively dumping and spreading materials. The vehicle includes, at least, a chassis and a body pivotably secured to the chassis at a hinge. The body is comprised of front and rear ends having upper and lower edges and first and second side walls having lower edges. A hoist is provided which extends between the body and the chassis for pivoting the body about the hinge.

Abstract: A vacuum treatment device, comprising a vacuum treatment chamber (1) etching a semiconductor wafer (W) as a body to be treated and a preliminary vacuum chamber (2) communicating with the vacuum treatment chamber (1), wherein a transfer arm (5) and first and second buffers (6, 7) for temporarily supporting the wafer (W) are installed in the preliminary vacuum chamber (2), the transfer arm (5) is provided with a flexible arm part (5a) and a support part (16) supporting the wafer (W), the arm part (5a) is extended and retracted by the rotations of a drive side swing arm (14) and a driven side swing arm (15) forming the arm (5a) so as to move the support part (16) straight forward and backward while maintaining it in its attitude, and the first and second buffers (6, 7) are disposed on the motion route of the support part (16) of the transfer arm (5).

Abstract: The invention provides a ramp system for transporting objects from a lower site to an upper site and vice versa while keeping the object in a generally horizontal, or upright, orientation when the object is moved up a variable incline. Two rails are provided between the upper and lower site, and a carriage is provided with wheels to allow it to move along the rails. A plurality of cables extend from the carriage to the upper site and to the lower site, the cables passing through pulleys affixed to the carriage, in an arrangement which causes the front portion of the carriage to be cantilevered over the rails, thus keeping a horizontal orientation notwithstanding the incline of the ramp. In a preferred embodiment, the system is implemented in a marine environment between a floating dock and a fixed pier.

Abstract: A substrate processing system having a transfer chamber having two processing chambers and two load lock chambers coupled thereto is generally provided. The transfer chamber includes a body having a first transfer area and a second transfer area defined therein on either side of a center axis. A first passage couples one of the load locks with the first transfer area and a second passage couples the other one of the load locks with the second transfer area. The first passage and the second passage form an acute angle about the center axis. A transfer platform is disposed between the first transfer area and the second transfer area. A first transfer robot and a second transfer robot are disposed in the first and second transfer areas, respectively. Each robot is adapted to transfer substrates between the load locks, the transfer platform and a processing chamber.

Abstract: A processing system for an object to be processed has a housing defining a closed space. The housing is provided with an opening through which an airtight carrying box is carried in and carried out. The carrying box hermetically contains the object to be processed. A lid operating mechanism for opening and closing the lid of the carrying box is disposed near the opening. A contamination preventing duct covers a space around the lid of the carrying box and supplies a clean gas of a high cleanliness therein at least when the lid of the carrying box is opened.

Abstract: A load carrying vehicle body with a chassis is provided which has a forward support and a rearward support, and which is able to accommodate a load. The rearward support includes a pair of support members each with at least one wheel mounted to one side of a support member. The support members are movable on the chassis between a first position at which the wheels are located within the tracking width of the vehicle and at which the wheels are aligned with the direction of travel of the vehicle, and a second position at which the wheels are displaced laterally from the tracking width to provide access to the rear of the chassis. A first lock is provided between the support members which is able to be interengaged when the support members are in the first position to maintain the wheels in the first position and to enable the support members to cooperate with each other in accommodating the stresses and load exerted thereon when in the first position.

Abstract: A storage medium cartridge that has a substantially rectangular housing with an aperture formed thereon is provided for use with a cartridge gripping assembly. The cartridge gripping assembly includes a gripping mechanism having a first end which releasably engages the aperture defined on the housing of the storage medium cartridge. The gripping mechanism further includes a second end that is dimensioned for coupling with a first end of a mechanized robotic arm for providing motion to the cartridge gripping assembly.

Abstract: A mobile ramp having sloped and horizontal platforms is presented for elevating a vehicle from the floor to provide easy access to the underside of the vehicle to service the same. The ramp is provided with wheels that are pivotably mounted to the frame of the ramp so that they can be extended to raise the ramp off the floor for ease of mobility. The wheels are also retractable to allow the ramp to be safely secured to the floor when it is in use. The retractable action of the wheels is mechanically responsive to the weight of a vehicle as it is wheeled on and off of the ramp, providing for a hands-free operation. While it is mobile, the ramp is further designed to be durable and simple to manufacture.

Abstract: A vehicle restraint includes a restraining member that rises to an operative position and lowers to a stored position to respectively engage and release an ICC bar of a truck parked at a loading dock. In moving to the lowered stored position, the restraining member also rotates off to its side, so as not to obstruct snow removal equipment or incoming vehicles having an especially low ICC bar or low ground clearance. In some embodiments, rotation of the restraining member is achieved by various actuators that apply a generally uniform torque. A resilient member, moves the restraining member upward to engage the ICC bar, and allows for vertical movement of the truck as it is being loaded or unloaded. Opposing the upward urging of the resilient member, a drive unit forcibly moves the restraining member downward when the truck is ready to be released.

Abstract: A safety plank assembly for mounting on a bottom of an elevator car in a traction-type elevator system includes a pair of parallel extending plank beams connected by a cross support member. A rope sheave is rotatably mounted at each of opposed ends of the plank beams to define a diagonal rope path through the assembly for underslung support of the elevator car. Traction weights and balancing weights can be attached to the beams and provision is made for mounting safety equipment.

Abstract: A portable tube holder apparatus and tube loading method facilitates safe and rapid loading of tubes containing electronic components into a machine. The tube holder has a tube guide sized to receive a plurality of tubes and a support to selectively hold the tubes in that guide. The holder can be loaded with a relatively large number of tubes at a workstation area and then used to safely transport the tubes to the machine without risk of the components falling out of the tubes. The support, which is preferably slidable, permits all of the tubes in the guide to be readily released into the machine's feeding system, enabling fast loading of the machine and also minimizing down-time for machines that cannot run while being loaded. The portable tube holder preferably has an interface designed to facilitate alignment of the tube holder's guide with the feeding system guide in the machine.

Abstract: The present invention provides a load lock having a vertically movable lid, an internal robot, and a wafer lifting mechanism and further provides a method of transferring wafers through a load lock directly to a process chamber. An atmospheric transfer robot shuttles wafers to and from the lifting mechanism while the lid is raised and the lifting mechanism then transfers wafers to and from the internal robot. The load lock is directly attached to a process chamber and communicates therewith via a slit valve which is selectively opened and closed. The internal robot is extended and retracted through the slit valve aperture in order to transfer a wafer to and from the process chamber. In one embodiment the lifting mechanism is comprised of vertically movable lift pins disposed through the bottom of the load lock. In another embodiment the lifting mechanism includes two pairs of lift forks disposed through the cover of the load lock.

Abstract: A horizontal door system is used in conjunction with an interfloor vertical transport system that penetrates an opening in a floor. The vertical transport system has vertical elements that define a fixed horizontal cross-section within the opening, and the door system includes a leading edge profile having a configuration matching the fixed horizontal cross-section of the vertical transport system. The door system is particularly suitable as a fire door system to seal upper and lower fire zones.

Abstract: A system is disclosed for allowing quick and easy installation, maintenance and removal of components within a piece of equipment which may be attached to a front end of processing tool or stand alone unit in a semiconductor processing fab. In a first embodiment, the system includes a translation assembly and a pair of tracks fixedly mounted in frame of the equipment. The translation assembly in this embodiment includes a trolley having four wheels which ride on a portion of each of the tracks. When a component is to be assembled into the piece of equipment, the component is first bolted to the trolley. The trolley and attached component may then be inserted into the frame. The wheels riding on the tracks allow the robot to be quickly and easily moved to its proper position within the equipment. Once properly located, jackscrews threaded through the trolley are rotated to raise the trolley wheels off of the tracks, and to level the trolley and component.

Abstract: A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.

Abstract: The present invention features a universal, low profile, expandable flow track system that can be drop-load mounted to almost any supporting frame or pallet rack. The flow track system of the invention features a flow track that mounts flush with its end supports, and is infinitely adjustable along both the horizontal axis and depth axis of the storage frame. The flow track is quickly assembled to, adjusted upon, and removed from, the storage frame.