Patents Examined by John M. Parker
  • Patent number: 11670594
    Abstract: Semiconductor structures and method of forming the same are provided. A semiconductor structure according to the present disclosure includes a contact feature in a dielectric layer, a passivation structure over the dielectric layer, a conductive feature over the passivation structure, a seed layer disposed between the conductive feature and the passivation structure, a protecting layer disposed along sidewalls of the conductive feature, and a passivation layer over the conductive feature and the protecting layer.
    Type: Grant
    Filed: May 5, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wen-Chun Wang, Tzy-Kuang Lee, Chih-Hsien Lin, Ching-Hung Kao, Yen-Yu Chen
  • Patent number: 11664312
    Abstract: A semiconductor device includes a first semiconductor chip that includes a first conductive pad whose top surface is exposed; and a second semiconductor chip that includes a second conductive pad whose top surface is exposed and in contact with at least a portion of the top surface of the first conductive pad. The first semiconductor chip may include a first diffusion barrier in contact with a bottom surface of the first conductive pad, and a second diffusion barrier in contact with a lateral surface of the first conductive pad, and the first diffusion barrier and the second diffusion barrier may include different materials from each other.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: May 30, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ju-Il Choi, Gyuho Kang, Seong-Hoon Bae, Dongjoon Oh, Chungsun Lee, Hyunsu Hwang
  • Patent number: 11658084
    Abstract: A semiconductor packaging structure includes a substrate, a wiring layer, a mask layer, and a sealing layer. The substrate has an effective region and a dummy region surrounding the effective region. The wiring layer is disposed on the effective and dummy regions, and is formed with a predetermined pattern including spaced-apart protrusions to define at least one cavity partially exposing the dummy region. The mask layer covers the wiring layer, and is formed with a through hole to communicate in space with the cavity. The through hole is smaller in size than the cavity, and cooperates with the cavity to form an accommodating space. The sealing layer covers the mask layer, and includes an engaging element filling the accommodating space and adhering to the substrate.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: May 23, 2023
    Assignee: Powertech Technology Inc.
    Inventors: Shun-Ming Yu, Han-Ming Chu
  • Patent number: 11658064
    Abstract: A method of forming a semiconductor device includes: forming a first conductive feature in a first dielectric layer disposed over a substrate; forming a metal cap layer over an upper surface of the first conductive feature distal from the substrate; selectively forming a dielectric cap layer over an upper surface of the first dielectric layer and laterally adjacent to the metal cap layer, wherein the metal cap layer is exposed by the dielectric cap layer; and forming an etch stop layer stack over the metal cap layer and the dielectric cap layer, wherein the etch stop layer stack comprises a plurality of etch stop layers.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chao-Chun Wang, Jen Hung Wang
  • Patent number: 11658121
    Abstract: A semiconductor device includes a semiconductor substrate; a first insulating film and a second insulating film provided above the semiconductor substrate; a low-k film provided between the first insulating film and the second insulating film; an element formation region in which elements included in an electric circuit are formed in the semiconductor substrate; a scribe region provided around the element formation region; a cut portion provided on the outer periphery of the scribe region; and a groove formed between the cut portion and the element formation region, wherein the groove penetrates through the low-k film.
    Type: Grant
    Filed: May 27, 2020
    Date of Patent: May 23, 2023
    Assignee: MICRON TECHNOLOGY, INC.
    Inventors: Shigeru Sugioka, Hidenori Yamaguchi, Noriaki Fujiki, Keizo Kawakita
  • Patent number: 11652025
    Abstract: In some embodiments, the present disclosure relates to an integrated chip (IC) including a conductive structure disposed within a dielectric structure along a first side of a semiconductor substrate, an insulating structure disposed along inner sidewalls of the semiconductor substrate, the inner sidewalls of the semiconductor substrate extending through the semiconductor substrate, a blocking layer disposed along inner sidewalls of the insulating structure, and a through-substrate via (TSV) comprising a first portion and a second portion, the first portion extending from a second side of the semiconductor substrate to a horizontally-extending surface of the insulating structure that protrudes outward from the inner sidewalls of the insulating structure, the second portion extending from the first portion to the conductive structure and has a maximum width less than that of the first portion.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: May 16, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Ling Shih, Ming Chyi Liu, Jiech-Fun Lu
  • Patent number: 11653535
    Abstract: A display panel includes a substrate including a transmissive area, a first non-display area surrounding the transmissive area, and a display area at least partially surrounding the first non-display area; display elements in the display area and each including a pixel electrode; scan lines in the display area, at least one of which extending through the first non-display area and detouring along an edge of the transmissive area; a connection line in the first non-display area and at least partially overlapping at least one of the scan lines, and on a first layer that is a same layer as the pixel electrode; a first line on a second layer different from the first layer; and a second line on a third layer different from the first layer and at an opposite side with respect to the first line.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: May 16, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Yujin Jeon, Daesuk Kim, Sukyoung Kim, Seungwoo Sung, Wonse Lee, Hyunji Cha
  • Patent number: 11637134
    Abstract: An array substrate and a method for manufacturing the same, and a display device are provided. The array substrate includes a base substrate and the array substrate includes a plurality of pixel units. In each of the plurality of pixel units, the array substrate includes a thin film transistor and a storage capacitor disposed above the base substrate, the storage capacitor includes a metal layer, an intermediate layer, and a reflective layer disposed in a stacked manner, the metal layer being adjacent to the base substrate. The array substrate further includes a common electrode layer disposed on a side of the storage capacitor facing away from the base substrate, the reflective layer is electrically connected to the common electrode layer, and the metal layer is electrically connected to an active layer of the thin film transistor.
    Type: Grant
    Filed: April 29, 2021
    Date of Patent: April 25, 2023
    Assignees: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Jinjin Xue, Dawei Shi, Feng Li, Lei Yao, Wentao Wang, Haifeng Xu, Lu Yang, Lin Hou, Jinfeng Wang, Mei Li, Yezhou Fang
  • Patent number: 11637205
    Abstract: A semiconductor device includes a channel pattern including a first semiconductor pattern and a second semiconductor pattern, which are sequentially stacked on a substrate, and a gate electrode that extends in a first direction and crosses the channel pattern. The gate electrode includes a first portion interposed between the substrate and the first semiconductor pattern and a second portion interposed between the first and second semiconductor patterns. A maximum width in a second direction of the first portion is greater than a maximum width in the second direction of the second portion, and a maximum length in the second direction of the second semiconductor pattern is less than a maximum length in the second direction of the first semiconductor pattern.
    Type: Grant
    Filed: January 4, 2021
    Date of Patent: April 25, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junggil Yang, Seungmin Song, Geumjong Bae, Dong Il Bae
  • Patent number: 11631608
    Abstract: Disclosed are support substrates, methods of fabricating semiconductor packages using the same, and methods of fabricating electronic devices using the same. The support substrate comprises a main body, and a plurality of first protrusions finely protruding from an upper surface of the main body. The main body and the first protrusions include the same material and are formed as a unitary structure. The first protrusions are spaced apart from each other in first and second directions intersecting each other, when viewed in plan.
    Type: Grant
    Filed: October 1, 2020
    Date of Patent: April 18, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kunsil Lee, Seung Hwan Lee
  • Patent number: 11626365
    Abstract: First and second wells are formed in a semiconductor substrate. First and second trenches in the first second wells, respectively, each extend vertically and include a central conductor insulated by a first insulating layer. A second insulating layer is formed on a top surface of the semiconductor substrate. The second insulating layer is selectively thinned over the second trench. A polysilicon layer is deposited on the second insulating layer and then lithographically patterned to form: a first polysilicon portion over the first well that is electrically connected to the central conductor of the first trench to form a first capacitor plate, a second capacitor plate formed by the first well; and a second polysilicon portion over the second well forming a floating gate electrode of a floating gate transistor of a memory cell having an access transistor whose control gate is formed by the central conductor of the second trench.
    Type: Grant
    Filed: April 9, 2021
    Date of Patent: April 11, 2023
    Assignees: STMicroelectronics (Rousset) SAS, STMicroelectronics (Crolles 2) SAS
    Inventors: Abderrezak Marzaki, Arnaud Regnier, Stephan Niel
  • Patent number: 11605578
    Abstract: A chip package assembly and a method for manufacturing the same are provided. A die is attached to one of pins located around a chip carrier, so that an electronic component such as a diode is packaged in the chip package assembly and is electrically connected in series with other dies inside the package, thereby improving the degree of integration of the chip package assembly, and reducing a volume of the external circuit.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: March 14, 2023
    Assignee: SILERGY SEMICONDUCTOR TECHNOLOGY (HANGZHOU) LTD
    Inventor: Shijie Chen
  • Patent number: 11587871
    Abstract: In one embodiment, a semiconductor device includes a first insulator, a plurality of interconnections provided in the first insulator. The device further includes a second insulator provided on the first insulator and the plurality of interconnections, and a conductor provided on a first interconnection among the plurality of interconnections and having a shape that is projected upwardly with respect to the first interconnection in the second insulator. The device further includes a plug provided on the first interconnection via the conductor. The device further includes a first pad provided above the plug and electrically connected to the plug, and a second pad provided on the first pad and electrically connected to the first pad.
    Type: Grant
    Filed: December 9, 2020
    Date of Patent: February 21, 2023
    Assignee: Kioxia Corporation
    Inventors: Kazutaka Suzuki, Kazuhiro Nakanishi, Kazuhiro Nojima
  • Patent number: 11587849
    Abstract: A device includes a substrate having a first-face and a second-face. An electrode is provided in a through hole that penetrates through the substrate between the first-face and the second-face. A first-insulator is provided in the substrate and protrudes in a radial direction from an opening end of the through hole on a side close to the second-face to a center of the through hole as viewed from above the first-face. A second-insulator protrudes in the radial direction from the first-insulator as viewed from above the first-face, is thinner than the first-insulator, and is in contact with the electrode. A third-insulator is provided between an inner wall of the through hole and the electrode, and includes a first-portion that is in contact with the first-insulator and a second-portion that is in contact with the inner wall of the through hole and is closer to the second-face than the first-portion.
    Type: Grant
    Filed: December 9, 2020
    Date of Patent: February 21, 2023
    Assignee: Kioxia Corporation
    Inventors: Ippei Kume, Kazuhiko Nakamura, Shinya Okuda
  • Patent number: 11581258
    Abstract: The present disclosure provides a semiconductor device structure with a manganese-containing interconnect structure and a method for forming the semiconductor device structure. The semiconductor device structure includes a first interconnect structure disposed in a semiconductor substrate, a dielectric layer disposed over the semiconductor substrate, and a second interconnect structure disposed in the dielectric layer and electrically connected to the first interconnect structure. The first interconnect structure includes a first conductive line, and a first manganese-containing layer disposed over the first conductive line. The second interconnect structure includes a second conductive line, and a second manganese-containing layer disposed between the second conductive line and the dielectric layer.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: February 14, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11581259
    Abstract: The present disclosure describes a method for the fabrication of ruthenium conductive structures over cobalt conductive structures. In some embodiments, the method includes forming a first opening in a dielectric layer to expose a first cobalt contact and filling the first opening with ruthenium metal to form a ruthenium contact on the first cobalt contact. The method also includes forming a second opening in the dielectric layer to expose a second cobalt contact and a gate structure and filling the second opening with tungsten to form a tungsten contact on the second cobalt contact and the gate structure. Further, the method includes forming a copper conductive structure on the ruthenium contact and the tungsten contact, where the copper from the copper conductive structure is in contact with the ruthenium metal from the ruthenium contact.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: February 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Wei Chang, Chien-Shun Liao, Sung-Li Wang, Shuen-Shin Liang, Shu-Lan Chang, Yi-Ying Liu, Chia-Hung Chu, Hsu-Kai Chang
  • Patent number: 11574899
    Abstract: The present disclosure provides a stretchable display device. The stretchable display device includes a lower substrate made of a stretchable insulating material and having an active area and a non-active area adjacent to the active area, a plurality of individual substrates spaced apart from each other and disposed in the active area of the lower substrate, pixels disposed on the plurality of individual substrates respectively, and a plurality of connecting lines disposed between the plurality of individual substrates on the lower substrate, and electrically connecting corresponding pads disposed within the plurality of individual substrates respectively. The modulus of the plurality of individual substrates is higher than the lower substrate.
    Type: Grant
    Filed: February 5, 2021
    Date of Patent: February 7, 2023
    Assignee: LG Display Co., Ltd.
    Inventors: Hyunju Jung, Eunah Kim
  • Patent number: 11574775
    Abstract: A dielectric powder includes a core-shell structure including a core region formed in an inner portion thereof and a shell region covering the core region. The core region includes barium titanate (BaTiO3) doped with a metal oxide, and the shell region is formed of a ferroelectric material.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: February 7, 2023
    Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Chang Hwa Park, Jin Woo Kim, Min Gi Sin, Byung Hyun Park, Chin Mo Kim
  • Patent number: 11575100
    Abstract: A display device includes a base substrate, a first transistor, a second transistor, an organic light emitting diode, and a capacitor electrically connected to the first thin film transistor. The first transistor includes a first semiconductor pattern below a first interlayer insulation layer and a first control electrode above the first interlayer insulation layer and below a second interlayer insulation layer. The second transistor includes a second control electrode above the first interlayer insulation layer and below the second interlayer insulation layer. A second semiconductor pattern is above the second interlayer insulation layer.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: February 7, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jaybum Kim, Eoksu Kim, Kyoungseok Son, Junhyung Lim, Jihun Lim
  • Patent number: 11569166
    Abstract: The present disclosure provides a semiconductor structure, including a substrate, a first metal line over the substrate and extending along a first direction, a protection layer lining a sidewall of the first metal line, a second metal line above the first metal line and extending along the first direction, and a third metal line above the second metal line, extending along a second direction perpendicular to the first direction.
    Type: Grant
    Filed: December 16, 2020
    Date of Patent: January 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Te-Hsin Chiu, Wei-An Lai, Meng-Hung Shen, Wei-Cheng Lin, Jiann-Tyng Tzeng, Kam-Tou Sio