Patents Examined by Joseph C Nicely
  • Patent number: 11690211
    Abstract: Described herein are IC devices that include TFT based memory arrays on both sides of a layer of logic devices. An example IC device includes a support structure (e.g., a substrate) on which one or more logic devices may be implemented. The IC device further includes a first memory cell on one side of the support structure, and a second memory cell on the other side of the support structure, where each of the first memory cell and the second memory cell includes a TFT as an access transistor. Providing TFT based memory cells on both sides of a layer of logic devices allows significantly increasing density of memory cells in a memory array having a given footprint area, or, conversely, significantly reducing the footprint area of the memory array with a given memory cell density.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: June 27, 2023
    Assignee: Intel Corporation
    Inventors: Wilfred Gomes, Mauro J. Kobrinsky, Conor P. Puls, Kevin Fischer, Bernhard Sell, Abhishek A. Sharma, Tahir Ghani
  • Patent number: 11688749
    Abstract: An image sensing device is provided to include a substrate, a photoelectric conversion region disposed in the substrate and configured to generate photocharges in response to incident light, a floating diffusion (FD) region disposed in the substrate and configured to store the photocharges generated in the photoelectric conversion region, and first and second transfer gates having portions disposed to overlap each other and configured to transmit the photocharges from the photoelectric conversion region to the floating diffusion (FD) region.
    Type: Grant
    Filed: August 24, 2021
    Date of Patent: June 27, 2023
    Assignee: SK hynix Inc.
    Inventor: Donghyun Woo
  • Patent number: 11682638
    Abstract: A method of forming a semiconductor structure is provided. A first inter-level dielectric (ILD) layer is formed overlying a molding layer. The first ILD layer is patterned to form a plurality of first openings. A first lower transmitter electrode and a first lower receiver electrode are formed by depositing a first metal material within the plurality of first openings. A first dielectric waveguide is formed overlying the first ILD layer, the first lower transmitter electrode and the first lower receiver electrode. A second ILD layer is formed overlying the first dielectric waveguide and includes a plurality of second openings. A second lower transmitter electrode and a second lower receiver electrode are formed by depositing a second metal material within the plurality of second openings. A second dielectric waveguide is formed overlying the second ILD layer, the second lower transmitter electrode and the second lower receiver electrode.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: June 20, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Wen-Shiang Liao, Huan-Neng Chen
  • Patent number: 11682710
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The method includes forming a first metal gate structure in a first dielectric layer. The method includes forming a second metal gate structure in the first dielectric layer, and the second metal gate structure includes a second metal electrode over a second gate dielectric layer. The method also includes forming a mask structure covering the first metal gate structure. The method includes etching a portion of the second gate dielectric layer and a portion of the second metal electrode of the second metal gate structure to form a first conductive portion extending above a top surface of the second gate dielectric layer. The method includes forming a metal layer over the first conductive portion, and the metal layer has a recess, and a top portion of the first conductive portion extends into the recess.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: June 20, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Ching Huang, Tsung-Yu Chiang
  • Patent number: 11670711
    Abstract: Embodiments relate to integrated circuit fabrication, and more particularly to a metal gate electrode. An exemplary structure for a semiconductor device comprises a substrate comprising a major surface; a first gate electrode on the major surface comprising a first layer of multi-layer material; a first dielectric material adjacent to one side of the first gate electrode; and a second dielectric material adjacent to the other 3 sides of the first gate electrode, wherein the first dielectric material and the second dielectric material collectively surround the first gate electrode.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jr-Jung Lin, Chih-Han Lin, Jin-Aun Ng, Ming-Ching Chang, Chao-Cheng Chen
  • Patent number: 11672129
    Abstract: A memory device according to an embodiment includes a first conductive layer; a second conductive layer; a ferroelectric layer provided between the first conductive layer and the second conductive layer and containing hafnium oxide; a paraelectric layer provided between the first conductive layer and the ferroelectric layer and containing a first oxide; and an oxide layer provided between the paraelectric layer and the ferroelectric layer and containing a second oxide having an oxygen area density lower than an oxygen area density of the first oxide.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: June 6, 2023
    Assignee: Kioxia Corporation
    Inventors: Shoichi Kabuyanagi, Yuuichi Kamimuta, Masumi Saitoh, Marina Yamaguchi
  • Patent number: 11668671
    Abstract: A biosensor includes a semiconductor layer having a first surface and a second surface opposite to the first surface, a FET device in the semiconductor layer, an isolation layer over the first surface of the semiconductor layer, a dielectric layer over the isolation layer and the first surface of the semiconductor layer, and a pair of first electrodes and a pair of second electrodes over the dielectric layer and separated from each other. The isolation layer has a rectangular opening substantially aligned with the FET device. The rectangular opening has pair of first sides and a pair of second sides. An extending direction of the pair of first sides is perpendicular to an extending direction of the pair of second sides. The pair of first electrodes is disposed over the pair of first sides, and the pair of second electrodes is disposed over the pair of second sides.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yi-Hsing Hsiao, Jui-Cheng Huang, Yu-Jie Huang
  • Patent number: 11665905
    Abstract: A three-dimensional (3D) memory device includes a substrate, an alternating conductive/dielectric stack disposed on the substrate, an epitaxial layer disposed on the substrate, a blocking layer disposed on the epitaxial layer and surrounded by the alternating conductive/dielectric stack, a trapping layer disposed on and surrounded by the blocking layer, a tunneling layer disposed on and surrounded by the trapping layer, and a semiconductor layer disposed on and in contact with the epitaxial layer and partially disposed on and surrounded by the tunneling layer.
    Type: Grant
    Filed: July 28, 2021
    Date of Patent: May 30, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Qiguang Wang, Lei Jin, An Zhang, Jianwei Lu
  • Patent number: 11664437
    Abstract: A semiconductor device includes a substrate with first and second areas, a first trench in the first area, and first and second PMOS transistors in the first area and the second area, respectively. The first transistor includes a first gate insulating layer, a first TiN layer on and contacting the first gate insulating layer, and a first gate electrode on and contacting the first TiN layer. The second transistor includes a second gate insulating layer, a second TiN layer on and contacting the second gate insulating layer, and a first TiAlC layer on and contacting the second TiN layer. The first gate insulating layer, the first TiN layer, and the first gate electrode are within the first trench. The first gate electrode does not include aluminum. A threshold voltage of the first transistor is smaller than a threshold voltage of the second transistor.
    Type: Grant
    Filed: March 22, 2021
    Date of Patent: May 30, 2023
    Inventors: Ju Youn Kim, Se Ki Hong
  • Patent number: 11658234
    Abstract: A transistor device includes a semiconductor epitaxial layer structure including a channel layer and a barrier layer on the channel layer, a source contact and a drain contact on the barrier layer, an insulating layer on the semiconductor layer between the source contact and the drain contact, and a gate contact on the insulating layer. The gate contact includes a central portion that extends through the insulating layer and contacts the barrier layer and a drain side wing that extends laterally from the central portion of the gate toward the drain contact by a distance ?D. The drain side wing of the gate contact is spaced apart from the barrier layer by a distance d1 that is equal to a thickness of the insulating layer. The distance ?D is less than about 0.3 ?m, and the distance d1 is less than about 80 nm.
    Type: Grant
    Filed: May 20, 2021
    Date of Patent: May 23, 2023
    Assignee: Wolfspeed, Inc.
    Inventors: Kyle Bothe, Terry Alcorn, Dan Namishia, Jia Guo, Matt King, Saptharishi Sriram, Jeremy Fisher, Fabian Radulescu, Scott Sheppard, Yueying Liu
  • Patent number: 11658228
    Abstract: A method for manufacturing semiconductor devices is provided. The method includes: providing a substrate structure comprising a semiconductor substrate and a trench insulator portion in the semiconductor substrate; forming a dummy gate on the semiconductor substrate; performing a first ion implantation into the semiconductor substrate to form a first doped region between the trench insulator portion and the dummy gate; and forming a first connecting member connecting the dummy gate with the first doped region.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: May 23, 2023
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Gang Qian, Yiming Miao, Yanlin Sun, Xubo Chen
  • Patent number: 11658218
    Abstract: Methods of forming and processing semiconductor devices are described. Certain embodiments related to electronic devices which comprise a dipole region having an interlayer dielectric, a high-? dielectric material, and a dipole layer. The dipole layer comprises one or more of titanium aluminum nitride (TiAlN), titanium tantalum nitride (TiTaN), titanium oxide (TiO), tantalum oxide (TaO), and titanium aluminum carbide (TiAlC).
    Type: Grant
    Filed: February 10, 2022
    Date of Patent: May 23, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Yongjing Lin, Karla M Bernal Ramos, Shih Chung Chen, Yixiong Yang, Lin Dong, Steven C. H. Hung, Srinivas Gandikota
  • Patent number: 11658225
    Abstract: A semiconductor device includes a fin structure disposed over a substrate. The semiconductor device includes a first interfacial layer straddling the fin structure. The semiconductor device includes a gate dielectric layer extending along sidewalls of the fin structure. The semiconductor device includes a second interfacial layer overlaying a top surface of the fin structure. The semiconductor device includes a gate structure straddling the fin structure. The first interfacial layer and the gate dielectric layer are disposed between the sidewalls of the fin structure and the gate structure.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Chi Pan, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Patent number: 11652100
    Abstract: A semiconductor device has a silicon film for a diode formed on a semiconductor substrate via an insulating film, and first and second wirings formed on an upper layer of the silicon film. The silicon film has a p-type silicon region and a plurality of n-type silicon regions, and each of the plurality of n-type silicon regions is surrounded by the p-type silicon region in a plan view. The p-type silicon region is electrically connected to the first wiring, and the plurality of n-type silicon regions are electrically connected to the second wiring.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: May 16, 2023
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Hiroyoshi Kudou, Taro Moriya, Satoshi Uchiya
  • Patent number: 11646368
    Abstract: According to one embodiment, a semiconductor device includes a supporter including a first surface, first, second, and third conductive parts, a semiconductor region, and an insulating part. A first direction from the first toward second conductive part is along the first surface. The semiconductor region includes first, second, and third partial regions. A second direction from the first toward second partial region is along the first surface and crosses the first direction. The third partial region is between the first partial region and the second conductive part in the first direction. The third partial region includes a counter surface facing the second conductive part. A direction from the counter surface toward the third conductive part is along the second direction. The insulating part includes an insulating region. At least a portion of the insulating region is between the counter surface and the third conductive part.
    Type: Grant
    Filed: March 1, 2021
    Date of Patent: May 9, 2023
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tomoaki Inokuchi, Hiro Gangi, Yusuke Kobayashi, Ryosuke Iijima
  • Patent number: 11646233
    Abstract: The present application provides a method for manufacturing a fin field-effect transistor, comprising steps of: forming a plurality of strip fins and dummy gates on a substrate, wherein side walls are formed on both sides of the dummy gate; forming a source or a drain on the plurality of strip fins; depositing an interlayer dielectric layer, and performing chemical mechanical planarization (CMP) on the interlayer dielectric layer to expose the top surfaces of the dummy gates; forming a single diffusion break in a single diffusion region; and replacing the dummy gates other than the dummy gate in the single diffusion region with metal gates.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: May 9, 2023
    Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
    Inventors: Tiancai Yan, Bingxun Su
  • Patent number: 11646344
    Abstract: A method for making a super junction device includes the following steps: step 1: forming a trench gate, in the forming process of the trench gate, a polysilicon gate being used to fill gate trenches and then first flattening being performed and the width of the gate trench at the leading-out position of the gate structure satisfies the requirement of forming contacts; and step 2: forming a super junction, in the forming process of the super junction, a second epitaxial layer being used to fill a super junction trench and then second flattening being performed. The method can realize an all flat process, can conveniently arrange the trench gate process before the forming process of the super junction, can decrease the thermal processes after the formation of the super junction, can save the mask and can decrease the process cost.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: May 9, 2023
    Assignee: Shanghai Huahong Grace Semiconductor Manufacturing Corporation
    Inventor: Hao Li
  • Patent number: 11640982
    Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor chip having a first main surface including an active region and a peripheral region surrounding the active region; a first trench formed in the active region; a first insulating film formed on an inner surface of the first trench; a first electrode formed in the first trench interfacing the first insulating film, and forming a channel in a portion of the semiconductor chip facing the first insulating film; a second trench formed in the peripheral region and having a width greater a width of the first trench; a second insulating film formed on an inner surface of the second trench; and a second electrode formed in the second trench interfacing the second insulating film and electrically coupled to the first electrode.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: May 2, 2023
    Assignee: ROHM CO., LTD.
    Inventors: Masatsugu Yutani, Yuki Shiraishi
  • Patent number: 11637120
    Abstract: A vertical semiconductor device includes a substrate, a cell array region and a pad region formed on the substrate, and gate patterns and respective insulation layers. The gate patterns may be stacked in a vertical direction perpendicular to an upper surface of the substrate. Each of the gate patterns may extend in a first direction parallel to the upper surface of the substrate on the cell array region and the pad region of the substrate. The gate patterns may include pads, respectively, at edge portions thereof in the first direction. The respective insulation layers may be between adjacent gate patterns in the vertical direction.
    Type: Grant
    Filed: March 30, 2022
    Date of Patent: April 25, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Manjoong Kim
  • Patent number: 11637067
    Abstract: A semiconductor device includes a substrate, a front side circuit disposed over a front surface of the substrate, and a backside power delivery circuit disposed over a back surface and including a back side power supply wiring coupled to a first potential. The front side circuit includes semiconductor fins and a first front side insulating layer covering bottom portions of the semiconductor fins, a plurality of buried power supply wirings embedded in the first front side insulating layer, the plurality of buried power supply wirings including a first buried power supply wiring and a second buried power supply wiring, and a power switch configured to electrically connect and disconnect the first buried power supply wiring and the second buried power supply wiring. The second buried power supply wiring is connected to the back side power supply wiring by a first through-silicon via passing through the substrate.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: April 25, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Gerben Doornbos