Patents Examined by Julia Slutsker
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Patent number: 11751417Abstract: A device comprising a first layer, a sealing layer and a resin layer stacked in that order and an organic layer arranged between the first layer and the sealing layer in a pixel region is provided. The first, sealing and resin layers have openings for exposing an electrode in a peripheral region. The sealing layer includes second and third layers each having a water permeability lower than the first layer, and a fourth layer arranged between the second layer and the third layer and having a defect density lower than the second layer. A step of the second layer arranged above the end of the opening of the first layer is covered with the fourth layer and a step of the third layer arranged above the end of the opening of the first layer is covered with the resin layer.Type: GrantFiled: April 23, 2021Date of Patent: September 5, 2023Assignee: CANON KABUSHIKI KAISHAInventors: Yojiro Matsuda, Masaki Kurihara, Daisuke Shimoyama, Hiroaki Naruse
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Patent number: 11749672Abstract: A device includes a first region, a second region disposed on the first region, a third region and a fourth region abutting the third region disposed in the second region, a fifth region disposed in the third region and coupled to a collector disposed above, and a sixth region disposed in the fourth region and coupled to an emitter disposed above. A first isolation is disposed between the collector and the emitter. A seventh region is disposed in the fifth region and coupled to the collector is spaced apart from the first isolation. The first region, the third region, the fifth region, the collector and the emitter have a first conductivity type different from a second conductivity type that the second region, the fourth region, the sixth region and the seventh region have.Type: GrantFiled: September 10, 2021Date of Patent: September 5, 2023Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Prantik Mahajan, Aloysius Priartanto Herlambang, Kyong Jin Hwang, Robert John Gauthier, Jr.
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Patent number: 11751397Abstract: In one embodiment, a semiconductor storage device includes a stacked body in which a plurality of conducting layers are stacked through a plurality of insulating layers in a first direction, a semiconductor layer penetrating the stacked body, extending in the first direction and including metal atoms, and a memory film including a first insulator, a charge storage layer and a second insulator that are provided between the stacked body and the semiconductor layer. The semiconductor layer surrounds a third insulator penetrating the stacked body and extending in the first direction, and at least one crystal grain in the semiconductor layer has a shape surrounding the third insulator.Type: GrantFiled: June 27, 2022Date of Patent: September 5, 2023Assignee: Kioxia CorporationInventors: Yuta Saito, Shinji Mori, Atsushi Takahashi, Toshiaki Yanase, Keiichi Sawa, Kazuhiro Matsuo, Hiroyuki Yamashita
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Patent number: 11735652Abstract: Field effect transistors having a ferroelectric or antiferroelectric gate dielectric structure are described. In an example, an integrated circuit structure includes a semiconductor channel structure includes a monocrystalline material. A gate dielectric is over the semiconductor channel structure. The gate dielectric includes a ferroelectric or antiferroelectric polycrystalline material layer. A gate electrode has a conductive layer on the ferroelectric or antiferroelectric polycrystalline material layer, the conductive layer including a metal. A first source or drain structure is at a first side of the gate electrode. A second source or drain structure is at a second side of the gate electrode opposite the first side.Type: GrantFiled: September 28, 2017Date of Patent: August 22, 2023Assignee: Intel CorporationInventors: Seiyon Kim, Uygar E. Avci, Joshua M. Howard, Ian A. Young, Daniel H. Morris
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Patent number: 11728360Abstract: An image sensor package may include a semiconductor wafer having a pixel array, a color filter array (CFA) formed over the pixel array, and one or more lenses formed over the CFA. A light block layer may couple over the semiconductor wafer around a perimeter of the lenses and an encapsulation layer may be coupled around the perimeter of the lenses and over the light block layer. The light block layer may form an opening providing access to the lenses. A mold compound layer may be coupled over the encapsulation layer and the light block layer. A temporary protection layer may be used to protect the one or more lenses from contamination during application of the mold compound and/or during processes occurring outside of a cleanroom environment.Type: GrantFiled: January 14, 2022Date of Patent: August 15, 2023Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Larry Duane Kinsman, Swarnal Borthakur, Marc Allen Sulfridge, Scott Donald Churchwell, Brian Vaartstra
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Patent number: 11729971Abstract: The present disclosure describes method and structure of a three-dimensional memory device. The memory device includes a substrate and a plurality of wordlines extending along a first direction over the substrate. The first direction is along the x direction. The plurality of wordlines form a staircase structure in a first region. A plurality of channels are formed in a second region and through the plurality of wordlines. The second region abuts the first region at a region boundary. The memory device also includes an insulating slit formed in the first and second regions and along the first direction. A first width of the insulating slit in the first region measured in a second direction is greater than a second width of the insulating slit in the second region measured in the second direction.Type: GrantFiled: December 20, 2021Date of Patent: August 15, 2023Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Qiang Xu, Zhiliang Xia, Ping Yan, Guangji Li, Zongliang Huo
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Patent number: 11721541Abstract: A method for forming a semiconductor arrangement is provided. The method includes forming a patterned photoresist over a top surface of a substrate. The method includes doping a first portion of the substrate using the patterned photoresist. The method includes removing the patterned photoresist using a gas comprising fluoride, wherein fluoride residue from the gas remains on the top surface of the substrate after removing the patterned photoresist. The method includes treating the substrate with nitrous oxide to remove the fluoride residue.Type: GrantFiled: March 3, 2021Date of Patent: August 8, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Ting-Jui Chen, Chen Chih-Fen, Jason Yu, Tung-Hsi Hsieh, Jiang-He Xie
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Patent number: 11705523Abstract: A field-effect transistor includes a substrate, a source electrode, a drain electrode, a gate electrode, a gate-insulating film, and an active layer. The active layer contains an oxide having a transmittance of 70% or more in the wavelength range of 400 to 800 nm. A light-shielding member is provided as a light-shielding structure for the active layer, for example, on the bottom face of the substrate.Type: GrantFiled: March 31, 2021Date of Patent: July 18, 2023Assignee: CANON KABUSHIKI KAISHAInventors: Ryo Hayashi, Masafumi Sano, Katsumi Abe, Hideya Kumomi, Kojiro Nishi
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Patent number: 11697889Abstract: A structure including a three-dimensionally stretchable single crystalline semiconductor membrane located on a substrate is provided. The structure is formed by providing a three-dimensional (3D) wavy silicon germanium alloy layer on a silicon handler substrate. A single crystalline semiconductor material membrane is then formed on a physically exposed surface of the 3D wavy silicon germanium alloy layer. A substrate is then formed on a physically exposed surface of the single crystalline semiconductor material membrane. The 3D wavy silicon germanium alloy layer and the silicon handler substrate are thereafter removed providing the structure.Type: GrantFiled: December 18, 2019Date of Patent: July 11, 2023Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Karthik Balakrishnan, Stephen W. Bedell, Pouya Hashemi, Bahman Hekmatshoartabari, Keith E. Fogel
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Patent number: 11698387Abstract: Provided is a physical quantity sensor including: a movable body; a base body; and a lid body, in which the movable body is accommodated in a space between the base body and the lid body, the space is sealed with a melt portion obtained by melting a through hole provided in the lid body, the lid body and the melt portion contain silicon, and the melt portion has a continuous curved surface having unevenness.Type: GrantFiled: September 14, 2021Date of Patent: July 11, 2023Inventor: Teruo Takizawa
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Patent number: 11699746Abstract: The present application teaches, among other innovations, power semiconductor devices in which breakdown initiation regions, on BOTH sides of a die, are located inside the emitter/collector regions, but laterally spaced away from insulated trenches which surround the emitter/collector regions. Preferably this is part of a symmetrically-bidirectional power device of the “B-TRAN” type. In one advantageous group of embodiments (but not all), the breakdown initiation regions are defined by dopant introduction through the bottom of trench portions which lie within the emitter/collector region. In one group of embodiments (but not all), these can advantageously be separated trench portions which are not continuous with the trench(es) surrounding the emitter/collector region(s).Type: GrantFiled: June 17, 2021Date of Patent: July 11, 2023Assignee: IDEAL POWER INC.Inventors: Richard A. Blanchard, William C. Alexander
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Patent number: 11688601Abstract: A method of forming a composite crystalline nitride structure is provided. The method includes depositing a first crystalline nitride layer on a substrate, patterning the first crystalline nitride layer to form a patterned crystalline nitride layer having a top surface and that includes undulations, annealing the patterned crystalline nitride layer at a temperature between 300° C. to 850° C. to form an annealed patterned crystalline nitride layer, and depositing a second crystalline nitride layer on the annealed patterned crystalline nitride layer. The second crystalline nitride layer is lattice-matched to the underlying annealed patterned crystalline nitride layer to within 2%, thereby forming the composite crystalline nitride structure.Type: GrantFiled: November 30, 2020Date of Patent: June 27, 2023Assignee: International Business Machines CorporationInventor: Aakash Pushp
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Patent number: 11683937Abstract: Methods, systems, and devices for on-die formation of single-crystal semiconductor structures are described. In some examples, a layer of semiconductor material may be deposited above one or more decks of memory cells and divided into a set of patches. A respective crystalline arrangement of each patch may be formed based on nearly or partially melting the semiconductor material, such that nucleation sites remain in the semiconductor material, from which respective crystalline arrangements may grow. Channel portions of transistors may be formed at least in part by doping regions of the crystalline arrangements of the semiconductor material. Accordingly, operation of the memory cells may be supported by lower circuitry (e.g., formed at least in part by doped portions of a crystalline semiconductor substrate), and upper circuitry (e.g., formed at least in part by doped portions of a semiconductor deposited over the memory cells and formed with a crystalline arrangement in-situ).Type: GrantFiled: August 9, 2021Date of Patent: June 20, 2023Assignee: Micron Technology, Inc.Inventors: Jeffery Brandt Hull, Anish A. Khandekar, Hung-Wei Liu, Sameer Chhajed
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Patent number: 11682578Abstract: Deep trench isolation structures for high voltage semiconductor-on-insulator devices are disclosed herein. An exemplary deep trench isolation structure surrounds an active region of a semiconductor-on-insulator substrate. The deep trench isolation structure includes a first insulator sidewall spacer, a second insulator sidewall spacer, and a multilayer silicon-comprising isolation structure disposed between the first insulator sidewall spacer and the second insulator sidewall spacer. The multilayer silicon-comprising isolation structure includes a top polysilicon portion disposed over a bottom silicon portion. The bottom polysilicon portion is formed by a selective deposition process, while the top polysilicon portion is formed by a non-selective deposition process. In some embodiments, the bottom silicon portion is doped with boron.Type: GrantFiled: April 16, 2021Date of Patent: June 20, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Hung Cheng, Yu-Chun Chang, Ching I Li, Ru-Liang Lee
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Patent number: 11677005Abstract: A semiconductor device includes: a substrate; and an n-type layer including a nitride semiconductor formed on the surface of the substrate. In the n-type layer, the concentration of donor impurities (excluding O) is 1×1015 cm?3 or more and 1×1020 cm?3 or less, the concentration of C impurities is 1×1016 cm?3 or less, the concentration of O impurities is 1×1016 cm?3 or less, the concentration of Ca impurities is 1×1016 cm?3 or less, and the sum total of the concentrations of the C impurities, the O impurities, and the Ca impurities is lower than the concentration of the donor impurities. Such a semiconductor device can be fabricated by using a halogen-free vapor phase epitaxy (HF-VPE) device.Type: GrantFiled: February 19, 2019Date of Patent: June 13, 2023Assignee: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHOInventors: Taishi Kimura, Daisuke Nakamura, Tetsuo Narita, Keita Kataoka
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Patent number: 11676850Abstract: A semiconductor device and method of manufacturing the same are provided. The semiconductor device includes a substrate and a first isolation structure which has a first corner. The semiconductor device also includes a first well region with a first conductive type. The semiconductor device includes further includes a gate structure over the first well region and covers a portion of the first corner of the first isolation structure. In addition, the semiconductor device includes a first doped region and a second doped region disposed on two opposites of the gate structure. Each of the first doped region and the second doped region has the first conductive type. The semiconductor device also includes a first counter-doped region in the first well region with a second conductive type different from the first conductive type. The first counter-doped region covers the first corner of the first isolation structure.Type: GrantFiled: May 28, 2021Date of Patent: June 13, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chia-Chen Chang, Yuan-Cheng Yang, Yun-Chi Wu
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Patent number: 11670505Abstract: A semiconductor substrate is provided. The semiconductor substrate includes a ceramic base, a seed layer, and a nucleation layer. The ceramic base has a front surface and a back surface, and the front surface is a non-flat surface. The seed layer is disposed on the front surface of the ceramic substrate. The nucleation layer is disposed on the seed layer.Type: GrantFiled: August 28, 2020Date of Patent: June 6, 2023Assignee: Vanguard International Semiconductor CorporationInventor: Chih-Yen Chen
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Patent number: 11670579Abstract: A method of manufacturing a semiconductor structure includes: forming an interconnect structure including a metallization layer over a substrate; depositing a first dielectric layer over the metallization layer; depositing a second dielectric layer over and separate from the first dielectric layer; depositing a third dielectric layer over the second dielectric layer, the third dielectric layer having a Young's modulus greater than that of the first and second dielectric layers; forming a capacitor structure over the third dielectric layer; and forming a conductive via extending through the capacitor structure and the first, second and third dielectric layers and electrically coupled to the metallization layer.Type: GrantFiled: January 5, 2021Date of Patent: June 6, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventor: Tung-Jiun Wu
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Patent number: 11658061Abstract: A method of fabricating a semiconductor substrate includes the following steps. A carrier substrate is provided, and a plasma treatment is performed on the surface of the carrier substrate. A polycrystalline semiconductor layer is formed on the surface of the carrier substrate. A rapid thermal treatment is then performed on the polycrystalline semiconductor layer. A buried dielectric layer is then formed on the polycrystalline semiconductor layer. Afterwards, a single crystalline semiconductor layer is formed on the buried dielectric layer.Type: GrantFiled: July 15, 2021Date of Patent: May 23, 2023Assignee: Wafer Works CorporationInventors: Ping-Hai Chiao, Wen-Chung Li
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Patent number: 11658213Abstract: Superlattices and methods of making them are disclosed herein. The superlattices are prepared by irradiating a sample to prepare an alternating superlattice of layers of a first material and a second material, wherein the ratio of the first deposition rate to the second deposition rate is between 1.0:2.0 and 2.0:1.0. The superlattice comprises a multiplicity of alternating layers, wherein the multiplicity of layers of the first material have a thickness between 0.1 nm and 50.0 nm or the multiplicity of layers of the second material have a thickness between 0.1 nm and 50.0.Type: GrantFiled: June 24, 2019Date of Patent: May 23, 2023Assignee: Northwestern UniversityInventors: Robert P. H. Chang, Woongkyu Lee