Abstract: Improved methods and apparatuses for removing residue from the interior surfaces of the deposition reactor are provided. The methods involve increasing availability of cleaning reagent radicals inside the deposition chamber by generating cleaning reagent radicals in a remote plasma generator and then further delivering in-situ plasma energy while the cleaning reagent mixture is introduced into the deposition chamber. Certain embodiments involve a multi-stage process including a stage in which the cleaning reagent mixture is introduced at a high pressure (e.g., about 0.6 Torr or more) and a stage the cleaning reagent mixture is introduced at a low pressure (e.g., about 0.6 Torr or less).

Abstract: Methods and apparatus are provided for cleaning jacks in portable electronic components. In one embodiment of the present invention, an adaptor plug is designed having a hollow shaft and the end of the plug is designed with holes that communication with the hollow shaft. The plug can be inserted into a jack, which can operate to open one or more switches within the jack, thereby freeing any debris that may have accumulated under the switches. Compressed air can then be applied down the hollow shaft and out the holes in the plug to displace the debris and clean the jack. In another embodiment, the end of the plug can be constructed such that it rotates about an axis to increase the likelihood that the jack will be cleaned.

Abstract: Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.

Abstract: A device for the breaking-apart of occlusions includes a stationary fitting, a hollow tube and a second fitting configured to reciprocate so as to cause the hollow tube to be compressed and expanded. The hollow tube is coupled on one side to the stationary fitting, and the stationary fitting provides access to a hollow portion of the hollow tube.

Abstract: A method and apparatus for processing a bevel edge is provided. A substrate is placed in a bevel processing chamber and a passivation layer is formed on the substrate only around a bevel region of the substrate using a passivation plasma confined in a peripheral region of the bevel processing chamber. The substrate may undergo a subsequent semiconductor process, during which the bevel edge region of the substrate is protected by the passivation layer. Alternatively, the passivation layer may be patterned using a patterning plasma formed in an outer peripheral region of the processing chamber, the patterning plasma being confined by increasing plasma confinement. The passivation layer on outer edge portion of the bevel region is removed, while the passivation layer on an inner portion of the bevel region is maintained. The bevel edge of the substrate may be cleaned using the patterned passivation layer as a protective mask.

Abstract: A system and method for control of water content in a strip bath. The method to control water content in a solvent bath used for cleaning of semiconductor parts in the back end of semiconductor manufacturing requires addition of water to replace evaporated water. This is done by periodically adjusting a conductivity setpoint at least in part based on the elapsed chemical bathlife and at least in part based on the number of semiconductor parts that have been processed in the bath. The conductivity of the strip bath solution is then continuously measured (as by using an electrodeless conductivity probe). Water is added (as by a DI water injection system) into the bath solution whenever the solvent conductivity falls below the conductivity set point.

Abstract: A teat cup cleaning device comprises a heating chamber provided with a discharge outlet that is closable by a valve and arranged for connection to a teat cup. A filling device is arranged for filling the heating chamber with an amount of cleaning liquid and retaining a given quantity of gas. The chamber is provided with a heating arrangement arranged to heat the contents of the heating chamber to a temperature T higher than the boiling point Tk of the cleaning liquid at ambient pressure. On operation of the valve superheated cleaning liquid is discharged to clean a teat cup.

Abstract: A method, system and device to use a dilute alkaline solution held at sub-critical temperature and pressure conditions to remove rapidly chloride ions from corroded iron artifacts.

Abstract: A carrier for supporting a substrate during processing by a meniscus fowled by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.

Abstract: A reticle is cleaned by vapor condensing on the active surface of the reticle. An embodiment includes positioning the reticle in a cleaning chamber having a bottom surface, with the active surface of the reticle facing the bottom surface of the cleaning chamber, and directing vapor at the active surface of the reticle. Embodiments further include filling a reservoir in a bottom portion of the cleaning chamber with liquid and directing vapor by heating the liquid. Embodiments further include cooling the reticle concurrently with heating the liquid. Embodiments further include rotating the reticle concurrently with heating the liquid and cooling the reticle. Embodiments further include emptying the reservoir and dry spinning the reticle, subsequent to cleaning the reticle.

Abstract: A transfer pick provided at a leading end of a transfer arm of a transfer device for transferring a substrate includes a substrate support surface for supporting the substrate thereon; a plurality of contact members protruded from the substrate support surface to contact with the substrate; and a voltage applying unit for charging the contact members with electricity. Further, the transfer pick has a self-cleaning function of removing particles adhered to the contact members by using repulsive force of an electric charge. In addition, a computer readable memory medium storing a computer executable control program, wherein the control program controls a substrate processing apparatus to perform the transfer pick cleaning method.

Abstract: A cleaning system is provided which includes a wash floor, a side trough adjacent the wash floor, which is positioned to receive waste from the wash floor and is attached to a filtering system. A method of using this cleaning system is also provided.

Abstract: A substrate cleaning method for cleaning and removing foreign materials adhered to a surface of a substrate includes heating the substrate to peel off the foreign materials from the surface of the substrate by a thermal stress, removing the foreign materials from the surface of the substrate by a temperature gradient created in a proximity of the surface of the substrate, and collecting the foreign materials removed from the surface of the substrate by a collecting unit facing the substrate.

Abstract: A modular recycling cleaning system comprising in combination: a pressure washing and control module, a vacuum motor assembly module, a reservoir module, an air/liquid separator module, a flexible hose system, a control system and a cleaning head, capable of being easily configured so as to function as any one of: a straight through pressure washer with cleaning liquid supplied from an external source; a straight through pressure washer with cleaning liquid supplied internally from an integral water reservoir; a recycling pressure washer with cleaning liquid being supplied and reused from an integral cleaning liquid reservoir replenished with cleaning liquid by means of a vacuum recovery system; a straight through pressure washer with recovery of contaminated cleaning liquid but without reuse; a conventional wet vacuum cleaning system or a conventional dry vacuum cleaning system. The appliance being capable of further configuration as a shampooing machine.

Abstract: Motor vehicle jumper cables comprising an integral wire brush mounted on an interior portion of the clamp assemblies is herein disclosed. The jumper cables with the wire brush are to be motioned to remove battery terminal corrosion, thereby providing for a better electrical connection. The device resembles a standard pair of jumper cables used to aid in jump-starting a motor vehicle with a dead battery and comprises a small wire brush located inside of each jaw area. The bristles are made of conductive steel or copper of a sufficient stiffness to clean any corrosion from the battery terminals as the clamps are being installed. Due to the conductive nature of the bristles, current will flow through the bristles as well as the clamp body, thus improving charging and starting ability.

Abstract: A cleaning bullet for use in a track can include a compressible body to clean the track, and a motorized device to propel the body through the track. In some embodiments, the motorized device includes wheels rotatably coupled to the device, a motor to drive the wheels, and a power source to supply power to the motor. Also, in some embodiments, one or more wheels engage an inner or outer surface of the track to move the motorized device along the track.

Abstract: Washing machine for screen that includes a closed washing chamber having internal nozzles for cleaning the screen. The nozzles are provided on a flushing frame enclosing the screen, and the flushing frame may be moved upwards and downwards within the chamber whereby the screen is flushed and cleaned. A method for cleaning the screen in the washing machine is also described.

Abstract: A floor tool including a handle, a mop head, and a fluid reservoir. The handle includes first and second opposite ends through which a longitudinal axis of the handle extends. The mop head is coupled to the second end of the handle. The fluid reservoir is coupled to and carried by the handle at a location between the first and second ends of the handle and has a center of mass offset from the longitudinal axis. A portion of the handle is offset from the longitudinal axis more the center of mass of the fluid reservoir. Additionally, the portion of the handle is located between the fluid reservoir and the first end of the handle such that the portion of the handle is located above the fluid reservoir.

Abstract: The present invention relates to the acidic cleaning in the beer industry, and more particularly an improved process for acidic cleaning of the various elements and vessels that are used in the preparation of beer and other related fermented beverages, said cleaning being carried out by using a formulation comprising at least one alkane sulphonic acid.

Abstract: A device for clearing obstructions from a medical tube, such as a chest tube, is disclosed in various embodiments. The device features a clearance member in the form of a loop. The loop desirably has a diameter that substantially corresponds to the inner diameter of the medical tube. Also desirably, the loop presents a substantially unobstructed pathway therethrough for the flow of material from a location in the medical tube distal to the loop to a location in the medical tube proximal to the loop regardless whether the clearance member is being translated or is at rest in the medical tube. Methods of utilizing such a device are also disclosed.