Patents Examined by Nilufa Rahim
  • Patent number: 11430894
    Abstract: Provided is a semiconductor device in which deterioration of electric characteristics which becomes more noticeable as the semiconductor device is miniaturized can be suppressed. The semiconductor device includes a first oxide film, an oxide semiconductor film over the first oxide film, a source electrode and a drain electrode in contact with the oxide semiconductor film, a second oxide film over the oxide semiconductor film, the source electrode, and the drain electrode, a gate insulating film over the second oxide film, and a gate electrode in contact with the gate insulating film. A top end portion of the oxide semiconductor film is curved when seen in a channel width direction.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: August 30, 2022
    Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Kazuya Hanaoka, Daisuke Matsubayashi, Yoshiyuki Kobayashi, Shunpei Yamazaki, Shinpei Matsuda
  • Patent number: 11424230
    Abstract: A pixel structure, a display device, and a method of manufacturing a pixel structure, the pixel structure including a base substrate; at least one first electrode arranged in an upper portion of the base substrate; at least one second electrode having a circular shape extending along a circumferential direction around the at least one first electrode; and a plurality of LED elements connected to the first and second electrodes.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: August 23, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Hyunmin Cho, Daehyun Kim, Hyundeok Im, Jonghyuk Kang, Jaebyung Park, Jooyeol Lee, Chio Cho, Sungjin Hong
  • Patent number: 11424307
    Abstract: The present disclosure is related to an organic light-emitting diode apparatus. The organic light-emitting diode apparatus may include a substrate and a plurality of pixels on a first side of the substrate. Each of the plurality of pixels may include a display region and a non-display region. The non-display region may be provided with a control circuit and a first color film, and the first color film may be between the control circuit and the substrate.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: August 23, 2022
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Zhen Song, Guoying Wang
  • Patent number: 11422475
    Abstract: Photolithography overlay errors are a source of patterning defects, which contribute to low wafer yield. An interconnect formation process that employs a patterning photolithography/etch process with self-aligned interconnects is disclosed herein. The interconnection formation process, among other things, improves a photolithography overlay (OVL) margin since alignment is accomplished on a wider pattern. In addition, the patterning photolithography/etch process supports multi-metal gap fill and low-k dielectric formation with voids.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: August 23, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tai-I Yang, Wei-Chen Chu, Hsiang-Wei Liu, Shau-Lin Shue, Li-Lin Su, Yung-Hsu Wu
  • Patent number: 11424229
    Abstract: A pixel structure, a display device, and a method of manufacturing a pixel structure, the pixel structure including a base substrate; at least one first electrode arranged in an upper portion of the base substrate; at least one second electrode having a circular shape extending along a circumferential direction around the at least one first electrode; and a plurality of LED elements connected to the first and second electrodes.
    Type: Grant
    Filed: March 12, 2019
    Date of Patent: August 23, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Hyunmin Cho, Daehyun Kim, Hyundeok Im, Jonghyuk Kang, Jaebyung Park, Jooyeol Lee, Chio Cho, Sungjin Hong
  • Patent number: 11424165
    Abstract: In a method for manufacturing a semiconductor device, a fin structure is formed over a substrate, an isolation insulating layer is formed over the substrate such that an upper portion of the fin structure protrudes from the isolation insulating layer, a first dielectric layer is formed on the upper portion of the fin structure, a cover layer is formed on the first dielectric layer, the cover layer is partially removed from an upper part of the upper portion of the fin structure with the first dielectric layer, the first dielectric layer is removed from the upper part of the upper portion of the fin structure, a second dielectric layer is formed on the upper part of the upper portion of the fin structure, and a gate electrode is formed on the second dielectric layer and the first dielectric layer disposed on an lower part of the upper portion of the fin structure.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: August 23, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jen-Chun Chou, Tung-Wen Cheng
  • Patent number: 11417735
    Abstract: A method for fabricating a semiconductor device is provided. The method includes providing a substrate, having a cell region and a logic region and including a first conductive layer as a top layer, wherein shallow trench isolation (STI) structures are disposed in the substrate at cell region and the logic region. A first dry etching process is performed to preliminarily etch the first conductive layer and the STI structures at the cell region. A wet etching process is performed over the substrate to etch the STI structures down to a preserved height. A control gate stack is formed on the first conductive layer at the cell region. A second dry etching process is performed on a portion of the first conductive layer to form a floating gate under the control gate stack at the cell region and remove the first conductive layer at the logic region.
    Type: Grant
    Filed: March 27, 2020
    Date of Patent: August 16, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zhuona Ma, Mengkai Zhu, Runshun Wang, Hua-Kuo Lee
  • Patent number: 11404592
    Abstract: PV layer sequences and corresponding production methods which can reliably provide a PV function with a long service life despite very low production costs. This is achieved by a reactive conditioning process of inorganic particles as part of a room-temperature printing method; the reactive surface conditioning process adjusts the PV activity in a precise manner, provides a kinetically controlled reaction product, and can ensure the desired PV activity even when using technically pure starting materials with 97% purity. In concrete embodiments, particles are printed in composite so as to form sub-sections on a support. Each sub-section has a reductively treated section and an oxidatively treated section, and the sections have PV activity with opposite signs. The sections can be cascaded in rows via upper-face contacts, and a precise light-dependent potential sum can be tapped via a PV measuring group.
    Type: Grant
    Filed: July 11, 2017
    Date of Patent: August 2, 2022
    Assignee: DYNAMIC SOLAR SYSTEMS AG
    Inventors: Daniel Linder, Patrick Linder
  • Patent number: 11404468
    Abstract: Various embodiments of the present application are directed towards an image sensor including a wavelength tunable narrow band filter, as well as methods for forming the image sensor. In some embodiments, the image sensor includes a substrate, a first photodetector, a second photodetector, and a filter. The first and second photodetectors neighbor in the substrate. The filter overlies the first and second photodetectors and includes a first distributed Bragg reflector (DBR), a second DBR, and a first interlayer between the first and second DBRs. A thickness of the first interlayer has a first thickness value overlying the first photodetector and a second thickness value overlying the second photodetector. In some embodiments, the filter is limited to a single interlayer. In other embodiments the filter further includes a second interlayer defining columnar structures embedded in the first interlayer and having a different refractive index than the first interlayer.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: August 2, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng Yu Huang, Chun-Hao Chuang, Kazuaki Hashimoto, Keng-Yu Chou, Wei-Chieh Chiang, Wen-Hau Wu, Chih-Kung Chang
  • Patent number: 11398569
    Abstract: A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; a plurality of connection paths, where the plurality of connection paths provide first connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, where the third layer includes crystalline silicon, and where the second level includes a plurality of capacitors.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: July 26, 2022
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Brian Cronquist
  • Patent number: 11393860
    Abstract: A solid-state imaging element includes an insulating film layer, a first light blocking film, and a wiring layer that are stacked on a second face of a semiconductor substrate, on a side opposite to a first face on which light is incident. The first light blocking film covers at least a formation region of a charge retention section and has a protrusion section protruding on a side of the semiconductor substrate in a part corresponding to a formation position of the second light blocking film. The second light blocking film has a first light blocking section between a photoelectric conversion section and the charge retention section that extends partway through the semiconductor substrate, a second light blocking section between a photoelectric conversion section and the charge retention section, and a third light blocking section covering a part of the first face.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: July 19, 2022
    Assignee: Sony Semiconductor Solutions Corporation
    Inventor: Naoyuki Sato
  • Patent number: 11387240
    Abstract: An integrated circuit structure in which a gate overlies channel region in an active area of a first transistor. The first transistor includes a channel region, a source region and a drain region. A conductive contact is coupled to the drain region of the first transistor. A second transistor that includes a channel region, a source region a drain region is adjacent to the first transistor. The gate of the second transistor is spaced from the gate of the first transistor. A conductive via passes through an insulation layer to electrically connect to the gate of the second transistor. An expanded conductive via overlays both the conductive contact and the conductive via to electrically connect the drain of the first transistor to the gate of the second transistor.
    Type: Grant
    Filed: April 21, 2020
    Date of Patent: July 12, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Kuan Lin, Chang-Ta Yang, Ping-Wei Wang, Kuo-Yi Chao, Mei-Yun Wang
  • Patent number: 11387138
    Abstract: Examples of a technique for forming a dielectric material for an integrated circuit are provided herein. In an example, an integrated circuit workpiece is received that includes a recess. A first dielectric precursor is deposited in the recess. The first dielectric precursor includes a non-semiconductor component. A second dielectric precursor is deposited in the recess on the first dielectric precursor, and an annealing process is performed such that a portion of the non-semiconductor component of the first dielectric precursor diffuses into the second dielectric precursor. The non-semiconductor component may include oxygen, and the annealing process may be performed in one of a vacuum or an inert gas environment.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: July 12, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Tang Peng, Shuen-Shin Liang, Keng-Chu Lin, Teng-Chun Tsai
  • Patent number: 11387347
    Abstract: A method of forming first and second fin field effect transistors (finFETs) on a substrate includes forming first and second fin structures of the first and second finFETs, respectively, on the substrate. The first and second fin structures have respective first and second vertical dimensions that are about equal to each other. The method further includes modifying the first fin structure such that the first vertical dimension of the first fin structure is smaller than the second vertical dimension of the second fin structure and depositing a dielectric layer on the modified first fin structure and the second fin structure. The method further includes forming a polysilicon structure on the dielectric layer and selectively forming a spacer on a sidewall of the polysilicon structure.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: July 12, 2022
    Inventors: Kuo-Cheng Chiang, Chih-Hao Wang, Shi Ning Ju
  • Patent number: 11380576
    Abstract: A multilayer composite structure and a method of preparing a multilayer composite structure are provided. The multilayer composite structure comprises a semiconductor handle substrate having a minimum bulk region resistivity of at least about 500 ohm-cm and an isolation region that impedes the transfer of charge carriers along the surface of the handle substrate and reduces parasitic coupling between RF devices.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: July 5, 2022
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Igor Peidous, Jeffrey L. Libbert
  • Patent number: 11373910
    Abstract: A method of forming a semiconductor device including a fin field effect transistor (FinFET), the method includes forming a first sacrificial layer over a source/drain structure of a FinFET structure and an isolation insulating layer. The first sacrificial layer is patterned, thereby forming an opening. A first liner layer is formed on the isolation insulating layer in a bottom of the opening and on at least side faces of the patterned first sacrificial layer. After the first liner layer is formed, forming a dielectric layer in the opening. After the dielectric layer is formed, removing the patterned first sacrificial layer, thereby forming a contact opening over the source/drain structure. A conductive layer is formed in the contact opening. The FinFET is an n-type FET, and the source/drain structure includes an epitaxial layer made of Si1-y-a-bGeaSnbM2y, wherein 0<a, 0<b, 0.01?(a+b)?0.1, 0.01?y?0.1, and M2 is P or As.
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: June 28, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yasutoshi Okuno, Cheng-Yi Peng, Ziwei Fang, I-Ming Chang, Akira Mineji, Yu-Ming Lin, Meng-Hsuan Hsiao
  • Patent number: 11362010
    Abstract: A package structure and a formation method of a package structure are provided. The method includes disposing a semiconductor die over a first surface of a redistribution structure. The method also includes forming a first protective layer to surround a portion of the semiconductor die. The method further includes disposing a device element over a second surface of the redistribution structure. The redistribution structure is between the device element and the semiconductor die. In addition, the method includes forming a second protective layer to surround a portion of the device element. The second protective layer is thicker than the first protective layer, and the second protective layer and the first protective layer have different coefficients of thermal expansion.
    Type: Grant
    Filed: October 16, 2019
    Date of Patent: June 14, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Meng-Liang Lin, Po-Hao Tsai, Po-Yao Chuang, Yi-Wen Wu, Techi Wong, Shin-Puu Jeng
  • Patent number: 11342322
    Abstract: Some embodiments relate to a three-dimensional (3D) integrated circuit (IC). The 3D IC includes a first IC die comprising a first semiconductor substrate, and a first interconnect structure over the first semiconductor substrate. The 3D IC also includes a second IC die comprising a second semiconductor substrate, and a second interconnect structure that separates the second semiconductor substrate from the first interconnect structure. A seal ring structure separates the first interconnect structure from the second interconnect structure and perimetrically surrounds a gas reservoir between the first IC die and second IC die. The seal ring structure includes a sidewall gas-vent opening structure configured to allow gas to pass between the gas reservoir and an ambient environment surrounding the 3D IC.
    Type: Grant
    Filed: July 20, 2020
    Date of Patent: May 24, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Ming Wu, Kuan-Liang Liu, Wen-De Wang, Yung-Lung Lin
  • Patent number: 11342223
    Abstract: A semiconductor device manufacturing method includes burying a void formed in a substrate with a polymer having a urea bond; forming an oxide film on the substrate; and desorbing a depolymerized polymer obtained by depolymerizing the polymer from the void through the oxide film.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: May 24, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Tatsuya Yamaguchi, Syuji Nozawa, Nagisa Sato
  • Patent number: 11335791
    Abstract: A method of fabricating a semiconductor device, including performing the following steps in the following sequence: providing a substrate including first and second gate regions separated by a trench formed in the substrate and growing a thin oxide layer on each of the first and second gate regions. The method further includes removing the thin oxide layer from the second gate region, and growing a thick oxide layer on the second gate region.
    Type: Grant
    Filed: May 21, 2019
    Date of Patent: May 17, 2022
    Assignee: X-FAB SARAWAK SDN. BHD.
    Inventors: Jerry Liew, Jee Chang Lai