Patents Examined by Phat X. Cao
  • Patent number: 11862619
    Abstract: Techniques for a patch to couple one or more surface dies to an interposer or motherboard are provided. In an example, the patch can include multiple embedded dies. In an example, a microelectronic device can be formed to include a patch on an interposer, where the patch can include multiple embedded dies and each die can have a different thickness.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: January 2, 2024
    Assignee: Intel Corporation
    Inventors: Srinivas Pietambaram, Robert Alan May, Kristof Darmawikarta, Hiroki Tanaka, Rahul N. Manepalli, Sri Ranga Sai Boyapati
  • Patent number: 11855028
    Abstract: A semiconductor device includes a substrate; an interconnect structure over the substrate; a first passivation layer over the interconnect structure; a first conductive pad, a second conductive pad, and a conductive line disposed over the first passivation layer and electrically coupled to conductive features of the interconnect structure; a conformal second passivation layer over and extending along upper surfaces and sidewalls of the first conductive pad, the second conductive pad, and the conductive line; a first conductive bump and a second conductive bump over the first conductive pad and the second conductive pad, respectively, where the first conductive bump and the second conductive bump extend through the conformal second passivation layer and are electrically coupled to the first conductive pad and the second conductive pad, respectively; and a dummy bump over the conductive line, where the dummy bump is separated from the conductive line by the conformal second passivation layer.
    Type: Grant
    Filed: May 21, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING
    Inventors: Ting-Li Yang, Po-Hao Tsai, Yi-Wen Wu, Sheng-Pin Yang, Hao-Chun Liu
  • Patent number: 11837544
    Abstract: The present disclosure describes a method for forming liner-free or barrier-free conductive structures. The method includes depositing an etch stop layer on a cobalt contact disposed on a substrate, depositing a dielectric on the etch stop layer, etching the dielectric and the etch stop layer to form an opening that exposes a top surface of the cobalt contact, and etching the exposed top surface of the cobalt contact to form a recess in the cobalt contact extending laterally under the etch stop layer. The method further includes depositing a ruthenium metal to substantially fill the recess and the opening, and annealing the ruthenium metal to form an oxide layer between the ruthenium metal and the dielectric.
    Type: Grant
    Filed: July 28, 2022
    Date of Patent: December 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsu-Kai Chang, Keng-Chu Lin, Sung-Li Wang, Shuen-Shin Liang, Chia-Hung Chu
  • Patent number: 11825658
    Abstract: A method of forming a microelectronic device comprises forming a microelectronic device structure. The microelectronic device structure comprises a semiconductive base structure, and a memory array region vertically overlying the semiconductive base structure and comprising memory cells. The microelectronic device structure is attached to a base structure. A portion of the semiconductive base structure is removed after attaching the microelectronic device structure to a base structure. A control logic region is formed vertically over a remaining portion of the semiconductive base structure. The control logic region comprises control logic devices in electrical communication with the memory cells of the memory array region. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: November 21, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Kunal R. Parekh
  • Patent number: 11825641
    Abstract: The invention discloses a pattern layout of an active region and a forming method thereof. The feature of the present invention is that in the sub-pattern unit, an appropriate active area pattern is designed according to the bit line pitch (BLP) and the word line pitch (WLP), the active area pattern is a stepped pattern formed by connecting a plurality of rectangular patterns in series, and the active area pattern is arranged along a first direction, the angle between the first direction and the horizontal direction is A. In addition, according to the angle A, the shortest distance (P) between adjacent stepped patterns, the length and width of sub-pattern units, etc., The positions of some stepped active area patterns are adjusted, so that the distance between multiple active area patterns can be consistent when being repeatedly arranged, thereby improving the uniformity of overall pattern distribution.
    Type: Grant
    Filed: May 4, 2021
    Date of Patent: November 21, 2023
    Inventor: Yifei Yan
  • Patent number: 11817325
    Abstract: A system substrate package, a system package, and methods of forming the same are described herein. The system substrate package includes an integrated substrate with multiple discrete interconnect structures. In embodiments the multiple discrete interconnect structures are placed and encapsulated and have a gap formed between the multiple discrete interconnect structures. The system substrate package reduces package warpage and mitigates board level reliability issues.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: November 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jiun Yi Wu, Chen-Hua Yu
  • Patent number: 11812607
    Abstract: A semiconductor device may include active pattern, a silicon liner, an insulation layer, an isolation pattern and a transistor. The active pattern may protrude from a substrate. The silicon liner having a crystalline structure may be formed conformally on surfaces of the active pattern and the substrate. The insulation layer may be formed on the silicon liner. The isolation pattern may be formed on the insulation layer to fill a trench adjacent to the active pattern. The transistor may include a gate structure and impurity regions. The gate structure may be disposed on the silicon liner, and the impurity regions may be formed at the silicon liner and the active pattern adjacent to both sides of the gate structure.
    Type: Grant
    Filed: March 3, 2022
    Date of Patent: November 7, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sungmi Yoon, Donghyun Im, Jooyub Kim, Juhyung We, Namhoon Lee, Chunhyung Chung
  • Patent number: 11810857
    Abstract: A structure includes a first conductive feature in a first dielectric layer; a second dielectric layer over the first dielectric layer; and a second conductive feature extending through the second dielectric layer to physically contact the first conductive feature, wherein the second conductive feature includes a metal adhesion layer over and physically contacting the first conductive feature; a barrier layer extending along sidewalls of the second dielectric layer; and a conductive filling material extending over the metal adhesion layer and the barrier layer, wherein a portion of the conductive filling material extends between the barrier layer and the metal adhesion layer.
    Type: Grant
    Filed: August 25, 2020
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Pang Kuo, Chih-Yi Chang, Ming-Hsiao Hsieh, Wei-Hsiang Chan, Ya-Lien Lee, Chien Chung Huang, Chun-Chieh Lin, Hung-Wen Su
  • Patent number: 11810896
    Abstract: A method and apparatus for substrate component layout and bonding for increased package capacity. According to certain embodiments, a wire-bonding finger strip is disposed between a flip-chip die and a NAND die stack to reduce a keep out zone (KOZ) required for an underfill material dispensed beneath the flip-chip die. To further inhibit the flow of the underfill material and further reduce the KOZ, a solder mask may be placed adjacent to the flip-chip. According to certain embodiments, there may be at least three sides of the flip-chip that may have such an adjacent solder mask placement. The three sides of the flip-chip according to such embodiments may be those non-adjacent to the wire-bonding finger strip.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: November 7, 2023
    Assignee: Western Digital Technologies, Inc.
    Inventors: Jiandi Du, Zengyu Zhou, Rui Yuan, Fen Yu, Hope Chiu
  • Patent number: 11804441
    Abstract: Disclosed herein are microelectronic structures including bridges, as well as related assemblies and methods. In some embodiments, a microelectronic structure may include a substrate including a first metal layer and a second metal layer; a cavity in the substrate, wherein a portion of the first metal layer in the substrate and a portion of the second metal layer in the substrate are exposed in the cavity; and a bridge component in the cavity, the bridge component includes a first conductive contact at a first face and a second conductive contacts at an opposing second face, wherein the second face of the bridge component is between the first face of the bridge component and a bottom surface of the cavity in the substrate, and wherein the second conductive contact is electrically coupled to the portion of the first metal layer in the cavity.
    Type: Grant
    Filed: June 16, 2020
    Date of Patent: October 31, 2023
    Assignee: Intel Corporation
    Inventors: Omkar G. Karhade, Nitin A. Deshpande, Mohit Bhatia, Debendra Mallik
  • Patent number: 11798852
    Abstract: Semiconductor devices and methods of forming a first layer cap at ends of layers of first channel material in a stack of alternating layers of first channel material and second channel material. A second layer cap is formed at ends of the layers of second channel material. The first layer caps are etched away in a first device region. The second layer caps are etched away in a second device region.
    Type: Grant
    Filed: February 3, 2022
    Date of Patent: October 24, 2023
    Assignee: Tessera LLC
    Inventors: Zhenxing Bi, Kangguo Cheng, Peng Xu, Wenyu Xu
  • Patent number: 11784087
    Abstract: A semiconductor structure and its manufacturing method are provided. The semiconductor structure includes a substrate having a trench. The semiconductor structure also includes an oxide layer conformally formed in the trench and a protective layer formed in the trench. Also, the protective layer is conformally formed on the oxide layer. The semiconductor structure further includes an insulating material layer in the trench, and the insulating material layer is formed above the protective layer, wherein a top surface of the insulating material layer is higher than a top surface of the protective layer.
    Type: Grant
    Filed: January 4, 2021
    Date of Patent: October 10, 2023
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Hao Chuan Chang, Kai Jen
  • Patent number: 11784091
    Abstract: A package structure and a formation method of a package structure are provided. The method includes forming a conductive structure over a carrier substrate and disposing a semiconductor die over the carrier substrate. The method also includes forming a protective layer to surround the conductive structure and the semiconductor die. The method further includes forming an insulating layer over the protective layer. The insulating layer has an opening exposing a portion of the conductive structure. In addition, the method includes forming a conductive layer over the insulating layer. The conductive layer fills the opening, and the conductive layer has a substantially planar top surface.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ling-Wei Li, Jung-Hua Chang, Cheng-Lin Huang
  • Patent number: 11776918
    Abstract: A semiconductor package having a stiffening structure is disclosed. The semiconductor package includes a substrate, an interposer on the substrate, and a first logic chip, a second logic chip, memory stacks and stiffening chips, all of which are on the interposer. The first logic chip and the second logic chip are adjacent to each other. Each memory stack is adjacent to a corresponding one of the first logic chip and the second logic chip. Each memory stack includes a plurality of stacked memory chips. Each stiffening chip is disposed between corresponding ones of the memory stacks, to be aligned and overlap with a boundary area between the first logic chip and the second logic chip.
    Type: Grant
    Filed: March 28, 2022
    Date of Patent: October 3, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Eunkyoung Choi, Suchang Lee, Yunseok Choi
  • Patent number: 11777024
    Abstract: A nitride semiconductor device includes an electron transit layer (103) that is formed of a nitride semiconductor, an electron supply layer (104) that is formed on the electron transit layer (103), that is formed of a nitride semiconductor whose composition is different from the electron transit layer (103) and that has a recess (109) which reaches the electron transit layer (103) from a surface, a thermal oxide film (111) that is formed on the surface of the electron transit layer (103) exposed within the recess (109), a gate insulating film (110) that is embedded within the recess (109) so as to be in contact with the thermal oxide film (111), a gate electrode (108) that is formed on the gate insulating film (110) and that is opposite to the electron transit layer (103) across the thermal oxide film (111) and the gate insulating film (110), and a source electrode (106) and a drain electrode (107) that are provided on the electron supply layer (104) at an interval such that the gate electrode (108) intervene
    Type: Grant
    Filed: March 25, 2021
    Date of Patent: October 3, 2023
    Assignee: ROHM CO., LTD.
    Inventors: Kenji Yamamoto, Tetsuya Fujiwara, Minoru Akutsu, Ken Nakahara, Norikazu Ito
  • Patent number: 11769674
    Abstract: A semiconductor interconnect structure and a fabricating method thereof are disclosed. The method comprises: providing a stacked structure comprising bonded multiple layers of wafer or die, each bonded layer comprises a substrate and a wiring layer, and the wiring layer comprises metal wires; vertically forming, in the stacked structure, a first blind hole having a first diameter and a first length and penetrating each bonded layer between adjacent metal wires, the first diameter is less than a space between the adjacent metal wires, and the first length is less than a height of the stacked structure; forming a second blind hole having a second diameter and the first length coaxially with the first blind hole, a sidewall of the second blind hole exposes the metal wires, and the second diameter is larger than the space between the adjacent metal wires; and filling a conductive material in the second blind hole.
    Type: Grant
    Filed: April 21, 2021
    Date of Patent: September 26, 2023
    Assignee: Changxin Memory Technologies, Inc.
    Inventor: Pingheng Wu
  • Patent number: 11764280
    Abstract: A method for fabricating a semiconductor component includes forming an interlayer dielectric (ILD) layer on a substrate, forming a trench in the interlayer dielectric layer, forming a metal gate in the trench, removing a portion of the metal gate protruding from the ILD layer, reacting a reducing gas with the metal gate, and removing a top portion of the metal gate.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Po-Chi Wu, Chai-Wei Chang, Jung-Jui Li, Ya-Lan Chang, Yi-Cheng Chao
  • Patent number: 11764179
    Abstract: The present disclosure provides a semiconductor device package. The semiconductor device package includes a conductive pillar having a first surface, a second surface, and a lateral surface extending between the first surface and the second surface. The lateral surface has a first part and a second part connected to the first part. The semiconductor device package also includes a barrier layer in contact with the first part of the lateral surface of the conductive pillar and an encapsulant in contact with the second part of the lateral surface of the conductive pillar. The semiconductor device package also includes a first flowable conductive material disposed on the first surface of the conductive pillar. A method of manufacturing a semiconductor device package is also disclosed.
    Type: Grant
    Filed: August 14, 2020
    Date of Patent: September 19, 2023
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventor: Zhi-Yuan Lin
  • Patent number: 11749526
    Abstract: A semiconductor substrate includes a first material layer made of a first material and including a plurality of protrusions, and a second material layer made of a second material different from the first material, filling spaces between the plurality of protrusions, and covering the plurality of protrusions. Each of the protrusions includes a tip and a plurality of facets converging at the tip, and adjacent facets of adjacent protrusions are in contact with each other.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: I-Sheng Chen, Tzu-Chiang Chen, Cheng-Hsien Wu
  • Patent number: 11749630
    Abstract: A semiconductor chip includes a back end of line (BEOL) structure on a first surface of the semiconductor substrate and including a conductive connection structure and an interlayer insulating layer covering the conductive connection structure, a conductive reinforcing layer arranged on the BEOL structure, a cover insulating layer covering the conductive reinforcing layer, an under bump metal (UBM) layer including a plurality of pad connection portions connected to the conductive reinforcing layer through openings in the cover insulating layer, and a plurality of first connection bumps arranged on the plurality of pad connection portions of the UBM layer, electrically connected to one another through the conductive reinforcing layer, and located to overlap the conductive reinforcing layer. The conductive reinforcing layer has a plate shape and extends parallel to the first surface of the semiconductor substrate.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: September 5, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Byungwook Kim, Ayoung Kim, Haeseong Jeong, Sangsu Ha