Patents Examined by Quinton A Brasfield
  • Patent number: 11222973
    Abstract: A technique is provided for effectively suppressing a forward voltage shift due to occurrence of a stacking fault. A semiconductor device relating to the present technique includes a first well region of a second conductivity type, a second well region of the second conductivity type which is so provided as to sandwich the whole of a plurality of first well regions in a plan view and has an area larger than that of each of the first well regions, a third well region of the second conductivity type which is so provided as to sandwich the second well region in a plan view and has an area larger than that of the second well region, and a dividing region of a first conductivity type provided between the second well region and the third well region, having an upper surface which is in contact with an insulator.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: January 11, 2022
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Shiro Hino, Koji Sadamatsu, Hideyuki Hatta, Yuichi Nagahisa, Kohei Ebihara
  • Patent number: 11217707
    Abstract: A Schottky device includes a silicon carbide (SiC) substrate of a first conductivity type, a drift layer of the first conductivity type, a trench, a barrier layer of a second conductivity type, an electrically conductive material that at least partially fills the trench and contacts the barrier layer, a first electrode, and a second electrode. The drift layer is formed of SiC and is situated onto the SiC substrate. The trench extends from the top surface of the drift layer towards the SiC substrate. The barrier layer contacts the drifting layer and covers a sidewall and a bottom wall of the trench. The first electrode forms a Schottky junction with the drift layer and forms a low resistivity contact with the barrier layer and the electrically conductive material. The second electrode forms an ohmic contact with the SiC substrate.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: January 4, 2022
    Inventors: Wing Chong Tony Chau, Wing Kit Cheung, Wai Tien Chan
  • Patent number: 11211389
    Abstract: Memory devices are provided. A memory device includes one or more adjacent memory cells on a substrate. A memory cell includes first dielectric layer on the substrate, floating gate, second dielectric layer, control gate layer, and first mask layer. The control gate layer has a first portion and a second portion thereon. A silicide layer is in the control gate layer and covers at least a sidewall of the second portion of the control gate layer. In a direction parallel to a surface of the substrate, the silicide layer has a size smaller than the first portion of the control gate layer or a size of the floating gate layer. A fourth dielectric layer is on the substrate and on the memory cell. The fourth dielectric layer contains an opening exposing a portion of the substrate between adjacent memory cells. A conductive structure is in the opening.
    Type: Grant
    Filed: May 3, 2019
    Date of Patent: December 28, 2021
    Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: Sheng Fen Chiu, Fansheng Kung
  • Patent number: 11201142
    Abstract: A semiconductor package includes a die, an insulation layer, a plurality of first electrical conductive vias, a plurality of second electrical conductive vias, a plurality of thermal conductive vias and a connecting pattern. The die includes a plurality of first pads and a plurality of second pads. The insulation layer is disposed on the die and includes a plurality of openings exposing the first pads and the second pads. The first electrical conductive vias and the second electrical conductive vias are disposed in the openings and contact the first pads and the second pads respectively. The thermal conductive vias are disposed on the insulation layer. The connecting pattern is disposed on the insulation layer and connects the first electrical conductive vias and the thermal conductive vias. The thermal conductive vias are connected to the first pads through the connecting pattern and the first electrical conductive vias.
    Type: Grant
    Filed: July 27, 2017
    Date of Patent: December 14, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Hsien Huang, Chi-Hsi Wu, Chen-Hua Yu, Der-Chyang Yeh, Hua-Wei Tseng, Ming-Chih Yew, Yi-Jen Lai, Ming-Shih Yeh
  • Patent number: 11195910
    Abstract: A semiconductor device is provided. The semiconductor device comprising a first fin pattern and a second fin pattern which are separated by a first isolation trench and extend in a first direction, a third fin pattern which is spaced apart from the first fin pattern in a second direction intersecting the first direction and extends in the first direction, a fourth fin pattern which is separated from the third fin pattern by a second isolation trench, a first gate structure which intersects the first fin pattern and has a portion extending along an upper surface of the first fin pattern, a second gate structure which intersects the second fin pattern and has a portion extending along an upper surface of the second fin pattern and a first element isolation structure which fills the second isolation trench and faces a short side of the first gate structure.
    Type: Grant
    Filed: December 10, 2018
    Date of Patent: December 7, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Young-Hun Kim, Jae Seok Yang, Hae Wang Lee
  • Patent number: 11183423
    Abstract: Semiconductor device structures having a liner layer in an interlayer dielectric structure are provided. In one example, a semiconductor device includes an active area on a substrate, the active area comprising a source/drain region, a gate structure over the active area, the source/drain region being proximate the gate structure, a spacer feature along a sidewall of the gate structure, a contact etching stop layer on the spacer feature, a liner oxide layer on the contact etching stop layer, and an interlayer dielectric layer on the liner oxide layer, wherein the liner oxide layer has an oxygen concentration level greater than the interlayer dielectric layer.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: November 23, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chun Ting Chou
  • Patent number: 11177300
    Abstract: A size reduction of an image pickup module by using resin molding, including a reduction in height, area, or the like thereof is achieved in an actual product. Provided is a module, including a substrate; a semiconductor component in which a first surface of a semiconductor device manufactured by chip-size packaging is provided and fixed along a plate-shaped translucent member, and a second surface of the semiconductor device is fixed with the second surface caused to face the substrate; a frame portion made of resin and formed on the substrate to surround the semiconductor component; and an interposition member which is made of resin and with which a gap between the semiconductor component and the substrate is filled. The interposition member is connected and fixed to the frame portion to be integrated therewith.
    Type: Grant
    Filed: March 2, 2016
    Date of Patent: November 16, 2021
    Assignee: SONY CORPORATION
    Inventors: Hirokazu Seki, Go Asayama, Kiyoharu Momosaki, Rei Takamori, Masakazu Baba
  • Patent number: 11177271
    Abstract: A device comprises an array of elevationally-extending transistors and a circuit structure adjacent and electrically coupled to the elevationally-extending transistors of the array. The circuit structure comprises a stair step structure comprising vertically-alternating tiers comprising conductive steps that are at least partially elevationally separated from one another by insulative material. Operative conductive vias individually extend elevationally through one of the conductive steps at least to a bottom of the vertically-alternating tiers and individually electrically couple to an electronic component below the vertically-alternating tiers. Dummy structures individually extend elevationally through one of the conductive steps at least to the bottom of the vertically-alternating tiers. Methods are also disclosed.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: November 16, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, Justin B. Dorhout, Indra V. Chary, Jun Fang, Matthew Park, Zhiqiang Xie, Scott D. Stull, Daniel Osterberg, Jason Reece, Jian Li
  • Patent number: 11171116
    Abstract: A semiconductor device includes a first substrate structure and a second substrate structure. The first substrate structure includes a base substrate, circuit elements disposed on the base substrate, a first substrate disposed on the circuit elements, first memory cells disposed on the first substrate and electrically connected to the circuit elements, first bit lines disposed on the first memory cells and connected to the first memory cells, and first bonding pads disposed on the first bit lines to be connected to the first bit lines, respectively. The second substrate structure is connected to the first substrate structure on the first substrate structure, and includes a second substrate, second memory cells disposed on the second substrate, second bit lines disposed on the second memory cells and connected to the second memory cells, and second bonding pads disposed on the second bit lines to be connected to the second bit lines, respectively.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: November 9, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Hyun Mog Park
  • Patent number: 11164832
    Abstract: Package structures and methods of forming package structures are discussed. A package structure, in accordance with some embodiments, includes an integrated circuit die, an encapsulant at least laterally encapsulating the integrated circuit die, a redistribution structure on the integrated circuit die and the encapsulant, a connector support metallization coupled to the redistribution structure, a dummy pattern, a second dielectric layer, and an external connector on the connector support metallization. The redistribution structure comprises a first dielectric layer having a first surface disposed distally from the encapsulant and the integrated circuit die. The dummy pattern is on the first surface of the first dielectric layer and around the connector support metallization. The second dielectric layer is on the first surface of the first dielectric layer and on at least a portion of the dummy pattern. The second dielectric layer does not contact the connector support metallization.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: November 2, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsien-Wei Chen, Li-Hsien Huang
  • Patent number: 11158740
    Abstract: A method includes forming a metal-oxide-semiconductor field-effect transistor (MOSFET). The Method includes performing an implantation to form a pre-amorphization implantation (PAI) region adjacent to a gate electrode of the MOSFET, forming a strained capping layer over the PAI region, and performing an annealing on the strained capping layer and the PAI region to form a dislocation plane. The dislocation plane is formed as a result of the annealing, with a tilt angle of the dislocation plane being smaller than about 65 degrees.
    Type: Grant
    Filed: April 18, 2019
    Date of Patent: October 26, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Wei-Yuan Lu
  • Patent number: 11152362
    Abstract: A fin field effect transistor (FinFET) device structure and method for forming the same are provided. The FinFET device structure includes a fin structure extending above a substrate, and the fin structure has a first portion and a second portion below the first portion, and the first portion and the second portion are made of different materials. The FinFET device structure includes an isolation structure formed on the substrate, and an interface between the first portion and the second portion of the fin structure is above a top surface of the isolation structure. The FinFET device structure includes a liner layer formed on sidewalls of the second portion of the fin structure.
    Type: Grant
    Filed: November 10, 2016
    Date of Patent: October 19, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Chieh Wang, Zheng-Yang Pan, Yi-Min Huang, Shih-Chieh Chang, Tsung-Lin Lee
  • Patent number: 11152323
    Abstract: Package structures and methods of forming package structures are discussed. A package structure, in accordance with some embodiments, includes an integrated circuit die, an encapsulant at least laterally encapsulating the integrated circuit die, a redistribution structure on the integrated circuit die and the encapsulant, a connector support metallization coupled to the redistribution structure, and an external connector on the connector support metallization. The redistribution structure includes a dielectric layer disposed distally from the encapsulant and the integrated circuit die. The connector support metallization has a first portion on a surface of the dielectric layer and has a second portion extending in an opening through the dielectric layer. The first portion of the connector support metallization has a sloped sidewall extending in a direction away from the surface of the dielectric layer.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: October 19, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chien-Yu Li, Hung-Jui Kuo, Li-Hsien Huang, Hsien-Wei Chen, Der-Chyang Yeh, Chung-Shi Liu, Shin-Puu Jeng
  • Patent number: 11145743
    Abstract: A method of forming a comb-shaped transistor device is provided. The method includes forming a stack of alternating sacrificial spacer segments and channel segments on a substrate. The method further includes forming channel sidewalls on opposite sides of the stack of alternating sacrificial spacer segments and channel segments, and dividing the stack of alternating sacrificial spacer segments and channel segments into alternating sacrificial spacer slabs and channel slabs, wherein the channel slabs and channel sidewalls form a pair of comb-like structures. The method further includes trimming the sacrificial spacer slabs and channel slabs to form a nanosheet column of sacrificial plates and channel plates, and forming source/drains on opposite sides of the sacrificial plates and channel plates.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: October 12, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: Kangguo Cheng
  • Patent number: 11121207
    Abstract: A method for forming trench capacitors includes forming a silicon nitride layer over a first region of a semiconductor surface doped a first type and over a second region doped a second type. A patterned photoresist layer is directly formed on the silicon nitride layer. An etch forms a plurality of deep trenches (DTs) within the first region. A liner oxide is formed that lines the DTs. The silicon nitride layer is etched forming an opening through the silicon nitride layer that is at least as large in area as the area of an opening in the semiconductor surface of the DT below the silicon nitride layer. The liner oxide is removed, a dielectric layer(s) on a surface of the DTs is formed, a top plate material layer is deposited to fill the DTs, and the top plate material layer is removed beyond the DT to form a top plate.
    Type: Grant
    Filed: November 10, 2016
    Date of Patent: September 14, 2021
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Binghua Hu, Abbas Ali, Sopa Chevacharoenkul, Jarvis Benjamin Jacobs
  • Patent number: 11117800
    Abstract: A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.
    Type: Grant
    Filed: April 5, 2019
    Date of Patent: September 14, 2021
    Assignee: HRL Laboratories, LLC
    Inventors: Deborah J. Kirby, Raviv Perahia, Hung Nguyen, Frederic P. Stratton, David T. Chang
  • Patent number: 11122216
    Abstract: A first pixel circuit has a plurality of photodiodes of different sizes. A second pixel circuit is connected to the first pixel circuit, and has a holding portion that holds a first optical signal and a second optical signal. The peripheral circuit drives and controls the second pixel circuit, and determines whether a voltage value of the first optical signal is equal to or greater than a predetermined value. When it is determined that the voltage value of the first optical signal is equal to or greater than the predetermined value, a signal obtained by adding the second optical signal to the first optical signal is set as an output signal. When it is determined that the voltage value of the first optical signal is less than the predetermined value, the first optical signal is set as an output signal.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: September 14, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Masaki Funaki
  • Patent number: 11101199
    Abstract: A power semiconductor device is such that a notch provided, along a longitudinal end face of an inner lead, in a region of a lead frame to which the inner lead is bonded. A resistor is disposed, adjacent to the inner lead, on the same side as the notch with respect to the inner lead, and a distance between the inner lead and the notch is set to be smaller than a distance between the inner lead and the resistor, and thereby the inner lead, even when shifted in position, comes into no contact with the resistor. Because of this, it is no more necessary that a space be provided around the inner lead taking into consideration a positional shift of the inner lead, and it is possible to secure the heat release area of power semiconductor chips accordingly, and thus to obtain the small-sized and high-powered power semiconductor device.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: August 24, 2021
    Assignee: Mitsubishi Electric Corporation
    Inventors: Saburo Tanaka, Tatsuya Fukase, Masaki Kato, Norio Emi
  • Patent number: 11094579
    Abstract: A method of forming a semiconductor structure includes depositing a mask layer over a substrate. The method includes etching the substrate to define a first opening. The method includes depositing a sacrificial material in the first opening. The method includes depositing a dielectric liner along sidewalls of the first opening, wherein a bottom surface of the dielectric liner contacts the sacrificial material. The method includes removing the sacrificial material. The method includes etching the substrate to enlarge the first opening to define a second opening. The second opening includes a first portion extending a first depth from the dielectric material in a first direction perpendicular to a top surface of the substrate, and a second portion extending in a second direction, parallel to the top surface of the substrate. The method includes removing the dielectric liner. The method includes filling the second opening with a dielectric material.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: August 17, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Bin Huang, Chien-Mao Chen, Yu-Hsuan Kuo, Shih-Kai Fan, Chia-Hung Lai, Kang-Min Kuo
  • Patent number: 11088244
    Abstract: Examples herein relate to devices having substrates with selective airgap regions for mitigating defects resulting from heteroepitaxial growth of device materials. An example device may include a first semiconductor layer disposed on a substrate. The first semiconductor layer may have a window cut through a face, where etching a selective airgap region on the substrate is enabled via the window. A second semiconductor layer may be heteroepitaxially grown on the face of the first semiconductor layer so that at least a portion of the second semiconductor layer is aligned over the selective air gap region.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: August 10, 2021
    Assignee: Hewlett Packard Enterprise Development LP
    Inventor: Di Liang