Patents Examined by Sang Y. Paik
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Electrode-embedded member and method for manufacturing same, electrostatic chuck, and ceramic heater
Patent number: 11869796Abstract: An electrode-embedded member 1 includes a ceramic-made substrate 2, an electrode 3, a connection member 4 containing at least one of tungsten and molybdenum and embedded in the substrate 2 in a state in which a first principal surface 4a faces the electrode 3 and is electrically connected to the electrode 3, and a hole portion 5 extending from an outer surface of the substrate 2 to a second principal surface 4b of the connection member 4. A buffer member 10 embedded in the substrate 2 contains at least a ceramic material forming the substrate 2 and a conductive material containing at least one of tungsten and molybdenum as a constituent element. The buffer member 10 covers at least part of an edge of the connection member 4.Type: GrantFiled: March 19, 2020Date of Patent: January 9, 2024Assignee: NITERRA CO., LTD.Inventor: Masaki Yabuhana -
Patent number: 11860240Abstract: Provided is an apparatus and method for protecting against unsafe electric current conditions. An example method includes accessing a selected operating mode for a heating element of the electric grill using at least one user input device of the electric grill, the heating element connected to a voltage line and a neutral line; measuring, using a temperature probe, a temperature of the heating element; estimating an ambient temperature at a location within a cook box of the electric grill spaced apart from the heating element, the estimation of the ambient temperature based on the measured temperature of the heating element; and using the estimated ambient temperature to determine when a target temperature corresponding to the selected operating mode is reached.Type: GrantFiled: August 25, 2022Date of Patent: January 2, 2024Assignee: Weber-Stephen Products LLCInventors: Eric Knappenberger, Julio C. Zuleta, Matthew Lerch, Jeffery C. Emmerich
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Patent number: 11864279Abstract: A system, a method, and a device for controlling a heating element in electronic articles, and more particularly for controlling a heating element in electronic cigarettes. In one embodiment A system for controlling a heater can comprise a power source, a memory configured to store programming, an MCU, a solution, a heater configured to heat the solution, and a sensor. The power source, the memory, the MCU, the heater, and the sensor can be electrically coupled. The MCU can receive signals from the sensor and control the heater, and the MCU can be configured to use programming stored in the memory to control the heater.Type: GrantFiled: February 6, 2019Date of Patent: January 2, 2024Assignee: Fontem Ventures B.V.Inventors: Ramon Alarcon, Michael Starman
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Patent number: 11862488Abstract: A substrate stage includes: a stage body having a substrate placing surface on which a substrate is placed in a processing apparatus that performs a processing on the substrate; and a thermocouple configured to detect a temperature near the substrate placing surface of the stage body. The thermocouple includes a temperature measuring unit formed by stacking a first metal film and a second metal film, on a surface on a side of the substrate placing surface of the stage body.Type: GrantFiled: April 7, 2020Date of Patent: January 2, 2024Assignee: Tokyo Electron LimitedInventors: Masamichi Hara, Yasuyuki Kagaya
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Patent number: 11856661Abstract: A heating element includes a flexible substrate, a layer of adhesive disposed on a surface of the substrate, and a continuous strand of electrically conductive wire disposed on the adhesive in a pattern of coil structures. Each coil structure includes a first coiled part and a second coiled part. The wire in the first coiled part forms a counterclockwise pattern from an outermost turn to an innermost turn of the first coiled part, and the second coiled part has an innermost turn beginning at an end of the innermost turn of the first coiled part. The wire in the second coiled part forms a clockwise pattern from the innermost turn of the second coiled part to an outermost turn. A connector segment of wire connects outermost turns of adjacent ones of the coil structures.Type: GrantFiled: February 24, 2021Date of Patent: December 26, 2023Assignee: AUTOMATED ASSEMBLY CORPORATIONInventors: David Neuman, Pat Connolly, Brian Backes
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Patent number: 11856659Abstract: A board-like structure includes a base body, an internal conductor, and a terminal member. The base body is an insulating member including an upper surface and a lower surface on an opposite side to the upper surface. The internal conductor runs along the upper surface and the lower surface inside the base body. The terminal member is at least partially located inside the base body, is exposed to an external portion of the base body at the lower surface, and is electrically connected to the internal conductor. The terminal member includes an insulating terminal base part and a conductor layer on a surfaces of the terminal base part.Type: GrantFiled: October 8, 2019Date of Patent: December 26, 2023Assignee: KYOCERA CorporationInventors: Yasunori Kawanabe, Yoshihiro Okawa
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Patent number: 11845145Abstract: An end effector for a laser machine tool is configured to direct a laser beam onto a working surface along an optical axis of propagation of the laser beam. The end effector includes a supporting body having a duct with an axis parallel to at least one portion of the optical axis of propagation of the laser beam, and a further duct configured to be coupled to the supporting body and to provide an outlet for the laser beam.Type: GrantFiled: April 19, 2021Date of Patent: December 19, 2023Assignee: Prima Industrie S.p.A.Inventors: Enrico Pisanu, Silvio Parise
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Patent number: 11839993Abstract: Discussed is an apparatus for notching an electrode sheet, the apparatus including a transfer unit having first and second transfer rollers provided on a bottom surface of the electrode sheet to transfer the electrode sheet at regular intervals, a jig unit provided below the electrode sheet, and supporting the bottom surface of the non-coating portion and a notching unit provided above the electrode sheet to notch the non-coating portion supported on the jig unit to provide the electrode tab, wherein the jig unit includes a rotation member provided between the first and second transfer rollers and rotated in a direction perpendicular to a transfer direction of the electrode sheet, two or more jigs provided on an outer circumferential surface of the rotation member to alternately support the non-coating portion disposed between the first and second transfer rollers when the rotation member is rotated.Type: GrantFiled: March 15, 2022Date of Patent: December 12, 2023Assignee: LG ENERGY SOLUTION, LTD.Inventors: Dong Hoon Kwak, Hyun Kyu Eom, Yang Ho Shin
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Patent number: 11839015Abstract: Consumables for cutting torches include a distributor, an electrode, and a nozzle. The distributor defines a plurality of ports that extend from an internal cavity of the distributor to an exterior surface of the distributor. The electrode is disposed within and irremovably, fixedly coupled to the distributor. The nozzle defines at least one set of passageways that direct gas into a gap defined between the electrode and the nozzle, the nozzle being irremovably, fixedly coupled to the distributor.Type: GrantFiled: February 4, 2021Date of Patent: December 5, 2023Assignee: The ESAB Group Inc.Inventors: Michael Nadler, Maximilian Dougherty, Kevin Horner-Richardson, Auston Maynard, Andrew J. Raymond
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Patent number: 11837480Abstract: Provided is a temperature controlling apparatus in which the accuracy of the temperature control of a processing target substrate is maintained high even when heaters are disconnected. The temperature controlling apparatus includes an electronic chuck, a plurality of heaters, and a controller. The heaters are embedded inside the electrostatic chuck in each divided region and connected to each other in parallel. The controller determines, for each divided region, whether a part of the heaters embedded in the divided region is disconnected, based on a total value of currents flowing through the heaters embedded in the divided region. When it is determined that a part of the heaters embedded in the divided region is disconnected, the controller controls a current flowing through each heater embedded in the divided region where a part of the heaters is disconnected to become larger than a current flowing through each heater when none of the heaters is disconnected.Type: GrantFiled: January 15, 2021Date of Patent: December 5, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Katsuyuki Koizumi, Kengo Kaneko
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Patent number: 11826851Abstract: A laser machining device comprises a movable stage which is controlled by a stage controller. A laser produces a beam for machining and the beam is scanned over the part using a laser scanner under control of the laser scanner. The scanner controller controls the stage controller to synchronize movements of the stage with movements of the scanner. The stage may carry the part to be machined or the scanner.Type: GrantFiled: June 26, 2017Date of Patent: November 28, 2023Assignees: ACS Motion Control Ltd., SCANLAB GmbHInventors: Boaz Kramer, Ze'ev Kirshenboim, Alexander Markus Dötlinger
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Patent number: 11828656Abstract: Embodiments of the present disclosure generally relate to apparatus for processing a substrate, and more specifically to reflector plates for rapid thermal processing. In an embodiment, a reflector plate assembly for processing a substrate is provided. The reflector plate assembly includes a reflector plate body, a plurality of sub-reflector plates disposed within the reflector plate body, and a plurality of pyrometers. A pyrometer of the plurality of pyrometers is coupled to an opening formed in a sub-reflector plate. Chambers including a reflector plate assembly are also described herein.Type: GrantFiled: November 20, 2020Date of Patent: November 28, 2023Assignee: APPLIED MATERIALS, INC.Inventor: Wolfgang R. Aderhold
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Patent number: 11832357Abstract: A method of forming a heater assembly of an e-vaping device includes bending a wire to form a first lobe and bending the wire to form a second lobe. The first lobe and the second lobe form a generally sinuously-shaped heater having a first set of lobes and a second set of lobe. A first apex of the first lobe is generally opposite a second apex of the second lobe. The method may also include curling the first set of lobes towards the second set of lobes to form a heater having a substantially tubular form. The heater defines an opening there through.Type: GrantFiled: June 22, 2022Date of Patent: November 28, 2023Assignee: Altria Client Services LLCInventors: Christopher S. Tucker, Charles Dendy, Nam Tran, David Alvarez, Patrick McElhinney
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Patent number: 11819959Abstract: A contact tip assembly with a preheating tip comprises a welding-type power source configured to provide welding-type current to a welding-type circuit, the welding-type circuit comprising a welding-type electrode and a first contact tip of a welding torch. The assembly also includes an electrode preheating circuit configured to provide preheating current through a portion of the welding-type electrode via a second contact tip of the welding torch, and a voltage sense circuit to monitor a voltage drop across the two contact tips, and the electrode preheating circuit adjusts at least one of the first current or the preheating current based on the voltage drop.Type: GrantFiled: December 22, 2020Date of Patent: November 21, 2023Assignee: Illinois Tool Works Inc.Inventors: James Lee Uecker, Jake Zwayer, Christopher Hsu
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Patent number: 11817334Abstract: A system of processing a substrate includes substrate-processing chambers; target components of temperature control disposed in the respective substrate-processing chambers; a chiller to supply a first temperature-controlling medium with a first flow rate and a second temperature-controlling medium with a second flow rate into the target components; flow controllers connected to the respective target components, each flow controller being configured to independently control a ratio of the first flow rate to the second flow rate to be fed into the corresponding target component from the chiller.Type: GrantFiled: February 11, 2021Date of Patent: November 14, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Haruka Kaneko, Takehiko Arita, Hayato Sakai
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Patent number: 11818813Abstract: A heater includes a plate-shaped part, one or more resistance heating element, a columnar part, and a plurality of relay conductors. The plate-shaped part has an insulation property and includes an upper surface on which a wafer is to be superimposed and a lower surface on an opposite side to the upper surface. The one or more resistance heating element is buried in the plate-shaped part. The columnar part has an insulation property and projects downward from the lower surface of the plate-shaped part. The plurality of relay conductors respectively include extension portions vertically extending inside the columnar part and are electrically connected to the one or more resistance heating elements.Type: GrantFiled: September 25, 2019Date of Patent: November 14, 2023Assignee: KYOCERA CorporationInventors: Yasunori Kawanabe, Yoshihiro Okawa
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Patent number: 11818810Abstract: A heater assembly having a backside purge gap formed between a top plate and a heater of the heater assembly, the top plate having a top plate wall. The top plate wall having an upper portion, a middle portion and a lower portion, the middle portion forming an incline relative to the top portion.Type: GrantFiled: March 26, 2021Date of Patent: November 14, 2023Assignee: APPLIED MATERIALS, INC.Inventors: Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja, Vijay D. Parkhe
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Patent number: 11810800Abstract: A substrate support includes a top plate portion having a surface on which a substrate is placed; a light irradiation mechanism including light-emitting elements, disposed to face the substrate and heating the substrate using light from the light-emitting elements; a channel-forming member transmitting the light from the light-emitting elements and is bonded to a rear surface of the top plate portion so as to be interposed between the top plate portion and the light irradiation mechanism, and a temperature adjustment part for adjusting a temperature of the channel-forming member by using light having a wavelength absorbed by a light-transmitting material or the channel-forming member.Type: GrantFiled: March 11, 2021Date of Patent: November 7, 2023Assignee: Tokyo Electron LimitedInventor: Hiroyuki Nakayama
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Patent number: 11812523Abstract: Apparatus, systems, and methods for processing workpieces are provided. In one example, the system includes a processing chamber. The system includes a workpiece support configured to support a workpiece within the processing chamber. The system includes a heat source configured to emit light toward the workpiece. The system includes a shutter disposed between the workpiece and the heat source. The shutter includes an electrochromic material configurable in a translucent state and an opaque state. When the electrochromic material is configured in the opaque state, the shutter reduces transmission of the light through the shutter, and when the electrochromic material is configured in the translucent state, the light at least partially passes through the shutter. The system includes a controller configured to control the shutter to reduce transmission of light through the shutter during a thermal treatment process.Type: GrantFiled: June 11, 2020Date of Patent: November 7, 2023Assignees: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD, MATTSON TECHNOLOGY, INC.Inventors: Michael X. Yang, Rolf Bremensdorfer
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Patent number: 11806808Abstract: A method for butt laser welding two metal sheets includes providing a first metal sheet and a second metal sheet and butt welding the metal sheets along a direction of welding. The butt welding step includes simultaneously generating a first front keyhole in the first metal sheet, generating a second front keyhole in the second metal sheet, and generating a back keyhole in the first and second metal sheets. The first and second front laser beams and the back laser beam are configured in such a manner that at each moment in time, a solid phase region and/or a liquid phase region of the metal sheets remains between the first front keyhole and the back keyhole and between the second front keyhole and the back keyhole.Type: GrantFiled: December 19, 2018Date of Patent: November 7, 2023Assignee: ARCELORMITTALInventor: René Vierstraete