Patents Examined by Tony Tran
  • Patent number: 11678477
    Abstract: Some embodiments include methods in which a pair of spaced-apart adjacent features is formed over a substrate. The features have silicon dioxide surfaces. Silicon nitride is deposited between the features. A first region of the silicon nitride is protected with a mask while a second region is not. The second region is removed to form an opening between the features. Some embodiments include semiconductor constructions that contain a pair of spaced-apart adjacent features. The features are lines extending along a first direction and are spaced from one another by a trench. Alternating plugs and intervening materials are within the trench, with the plugs and intervening materials alternating along the first direction. The intervening materials consist of silicon nitride, and the plugs have lateral peripheries that directly contact silicon dioxide of the features, and that directly contact silicon nitride of the intervening regions.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: June 13, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Mark Kiehlbauch
  • Patent number: 11676898
    Abstract: A method includes forming an insulating layer over a conductive feature; etching the insulating layer to expose a first surface of the conductive feature; covering the first surface of the conductive feature with a sacrificial material, wherein the sidewalls of the insulating layer are free of the sacrificial material; covering the sidewalls of the insulating layer with a barrier material, wherein the first surface of the conductive feature is free of the barrier material, wherein the barrier material includes tantalum nitride (TaN) doped with a transition metal; removing the sacrificial material; and covering the barrier material and the first surface of the conductive feature with a conductive material.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: June 13, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Pang Kuo, Huan-Yu Shih, Wen-Hsuan Chen, Cheng-Lun Tsai, Ya-Lien Lee, Cheng-Hui Weng, Chun-Chieh Lin, Hung-Wen Su, Yao-Min Liu
  • Patent number: 11670745
    Abstract: A method for producing optoelectronic semiconductor components may include applying optoelectronic semiconductor chips for generating radiation to a carrier, producing a potting around the semiconductor chips with a potting top side facing away from the carrier such that the semiconductor chips remain free of a reflective potting material. The potting has trenches between the semiconductor chips, and the trenches are arranged at a distance from the semiconductor chips; the trenches do not touch the semiconductor chips. The method may further include filling the trenches with a supporting material to form at least one supporting body and leaving the potting alongside the trenches free of the supporting material.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: June 6, 2023
    Assignee: Osram OLED GmbH
    Inventors: Klaus Reingruber, Andreas Reith, Tobias Gebuhr
  • Patent number: 11646226
    Abstract: A method for forming a metal nitride layer on a substrate includes exposing a substrate having features formed therein to a first deposition gas mixture including metal source material in a processing chamber to deposit metal source material in the features, supplying a first purge gas mixture into the processing chamber to remove excess metal source material and reaction byproducts from the processing chamber, exposing the substrate to a second deposition gas mixture including a nitride source compound in the processing chamber to form no more than one monolayer of metal nitride, supplying a second purge gas mixture into the processing chamber to remove excess nitride source compound and reaction byproducts from the processing chamber, and exposing the substrate to plasma using a microwave plasma source.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: May 9, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Wenyi Liu, Wei Tang, Srinivas Gandikota, Yixiong Yang, Yong Wu, Jianqiu Guo, Arkaprava Dan, Mandyam Sriram
  • Patent number: 11646360
    Abstract: Methods of forming a compact FDSOI OTP/MTP cell and a compact FinFET OTP/MTP cell and the resulting devices are provided. Embodiments include forming a SOI region or a fin over a BOX layer over a substrate; forming a first and a second gate stack, laterally separated, over respective portions of the SOI region or the fin; forming a first and a second liner along each first and second sidewall and of the first and the second gate stack, respectively, the second sidewall over respective portions of the SOI region or the fin; forming a spacer on each first and second liner; forming a S/D region in the SOI region or the fin between the first and the second gate stack; forming a CA over the S/D region; utilizing each gate of the first gate stack and the second gate stack as a WL; and connecting a BL to the CA.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: May 9, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Eng Huat Toh, Shyue Seng Tan, Elgin Kiok Boone Quek
  • Patent number: 11615954
    Abstract: A method for processing a substrate includes positioning a silicon substrate in a deposition chamber. One or more intermediate layers are deposited on a surface of the silicon. The one or more intermediate layers can include strontium, which combines with the silicon to form strontium silicide. Alternatively, the one or more intermediate layers comprise germanium. A layer of amorphous strontium titanate is deposited on the one or more intermediate layers in a transient environment in which oxygen pressure is reduced while temperature is increased. The substrate is then exposed to an oxidizing and annealing atmosphere that oxidizes the one or more intermediate layers and converts the layer of amorphous strontium titanate to crystalline strontium titanate.
    Type: Grant
    Filed: February 14, 2020
    Date of Patent: March 28, 2023
    Assignee: PSIQUANTUM, CORP.
    Inventor: Yong Liang
  • Patent number: 11615955
    Abstract: A method for forming a material having a Perovskite single crystal structure includes alternately growing, on a substrate, each of a plurality of first layers and each of a plurality of second layers having compositions different from the plurality of first layers and forming a material having a Perovskite single crystal structure by annealing the plurality of first layers and the plurality of second layers.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: March 28, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Bo-Yu Yang, Minghwei Hong, Jueinai Kwo, Yen-Hsun Lin, Keng-Yung Lin, Hsien-Wen Wan, Chao Kai Cheng, Kuan Chieh Lu
  • Patent number: 11616122
    Abstract: Provided herein are tapered nanowires that comprise germanium and gallium, as well as methods of forming the same. The described nanowires may also include one or more sections of a second semiconductor material. Methods of the disclosure may include vapor-liquid-solid epitaxy with a gallium catalyst. The described methods may also include depositing a gallium seed on a surface of a substrate by charging an area of the substrate using an electron beam, and directing a gallium ion beam across the surface of the substrate.
    Type: Grant
    Filed: October 26, 2020
    Date of Patent: March 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Martin Christopher Holland, Blandine Duriez
  • Patent number: 11600633
    Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack, a channel structure, a channel local contact, and a slit structure. The memory stack includes interleaved conductive layers and dielectric layers above the substrate. The channel structure extends vertically through the memory stack. The channel local contact is above and in contact with the channel structure. The slit structure extends vertically through the memory stack. The slit structure includes a contact including a first contact portion and a second contact portion above the first contact portion and having a different material of the first contact portion. An upper end of the second contact portion of the slit structure is flush with an upper end of the channel local contact.
    Type: Grant
    Filed: April 29, 2020
    Date of Patent: March 7, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Jianzhong Wu, Kun Zhang, Tingting Zhao, Rui Su, Zhongwang Sun, Wenxi Zhou, Zhiliang Xia
  • Patent number: 11600408
    Abstract: A method for improving current carrying capacity of a second-generation high-temperature superconducting tape, which includes: stretching the second-generation high-temperature superconducting tape in a high-temperature environment, and carrying out an oxygenation heat treatment on the stretched second-generation high-temperature superconducting tape The atmosphere of the high-temperature environment is oxygen, or an inert gas, or a mixture thereof, and a temperature of the high-temperature environment is 450-650° C.; and a strain for stretching ranges from 0.1% to 1%, and a time for stretching ranges from 1 minute to 100 hours. The method of the present invention is a post-processing technique for the second-generation high-temperature superconducting tape with a simple treatment process and a controllable result, and by stretching, current carrying capacity of the superconducting tape is improved and anisotropy of superconductivity is reduced.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: March 7, 2023
    Assignee: Shanghai Jiao Tong University
    Inventors: Yue Zhao, Jingyuan Chu, Zhijian Jin
  • Patent number: 11594557
    Abstract: A display panel includes a base substrate, a display area and a non-display area provided on the base substrate; a data line is provided in the display area and a detection line is provided in the non-display area on the base substrate; and the detection line is electrically connected to a data line and is formed by overlapping a plurality of wire segments. A method of manufacturing a display panel, and a display device are further disclosed.
    Type: Grant
    Filed: January 31, 2019
    Date of Patent: February 28, 2023
    Assignees: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Wenjun Liao, Taoran Zhang, Qiao Feng, Linxuan Li, Yanyang Shang
  • Patent number: 11569274
    Abstract: An array substrate includes a base substrate, a display region formed on the base substrate, and a non-display region formed on the base substrate around the display region. The non-display region includes a detection line that is provided on the base substrate, and a surface of the detection line away from the base substrate is provided in an undulating shape. A display device is further disclosed.
    Type: Grant
    Filed: January 31, 2019
    Date of Patent: January 31, 2023
    Assignees: CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Taoran Zhang, Da Zhou, Zailong Mo
  • Patent number: 11545604
    Abstract: In one example, a semiconductor device comprises a spacer substrate, a first lens substrate over the first spacer substrate, and a lens protector over the first lens dielectric adjacent to the first lens. The spacer substrate comprises a spacer dielectric, a spacer top terminal, a spacer bottom terminal, and a spacer via. The first lens substrate comprises a first lens dielectric, a first lens, a first lens top terminal, a first lens bottom terminal, and a first lens via. A first interconnect is coupled with the spacer top terminal and the first lens bottom terminal. Other examples and related methods are also disclosed herein.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: January 3, 2023
    Assignee: Amkor Technology Singapore Holding Pte. Ltd.
    Inventors: Ki Dong Sim, Dong Joo Park, Jin Young Khim
  • Patent number: 11545370
    Abstract: A method for forming a pattern includes at least the following steps. A first material and a second material abutting the first material are provided. The first material and the second material have different radiation absorption rates. A blocking layer is formed over the first material and the second material. The blocking layer is globally irradiated with an electromagnetic radiation to allow part of the blocking layer to turn into a crosslinked portion. The remaining blocking layer forms a non-crosslinked portion. The non-crosslinked portion covers the second material. The non-crosslinked portion of the blocking layer is removed to expose the second material. A third material is formed over the exposed second material. The crosslinked portion of the blocking layer is removed.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: January 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Christine Y Ouyang
  • Patent number: 11532550
    Abstract: The present disclosure provides a method of forming a semiconductor device structure. The method includes forming a trench in a dielectric layer on a semiconductor substrate; forming a bottom metal feature of a first metal in a lower portion of the trench by a selective deposition; depositing a barrier layer in an upper portion of the trench, the barrier layer directly contacting both a top surface of the bottom metal feature and sidewalls of the dielectric layer; and forming a top metal feature of a second metal on the barrier layer, filling in the upper portion of the trench, wherein the second metal is different from the first metal in composition.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Yuan Chen, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11515158
    Abstract: Disclosed are semiconductor structure embodiments of a semiconductor-on-insulator region on a bulk substrate. The semiconductor-on-insulator region includes an upper semiconductor layer above and physically separated from the substrate by insulator-containing cavities (e.g., by dielectric layer and/or a pocket of trapped air, of trapped gas, or under vacuum) and, optionally, by a lower semiconductor layer. Disclosed method embodiments include forming openings that extend vertically through the upper semiconductor layer, through a sacrificial semiconductor layer and, optionally, through a lower semiconductor layer to the substrate. Then, a selective isotropic etch process is performed to form cavities, which extend laterally off the sides of the openings into the sacrificial semiconductor layer.
    Type: Grant
    Filed: March 11, 2020
    Date of Patent: November 29, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ramsey Hazbun, Alvin J. Joseph, Siva P. Adusumilli, Cameron Luce
  • Patent number: 11495567
    Abstract: A multi-pin wafer level chip scale package is achieved. One or more solder pillars and one or more solder blocks are formed on a silicon wafer wherein the one or more solder pillars and the one or more solder blocks all have a top surface in a same horizontal plane. A pillar metal layer underlies the one or more solder pillars and electrically contacts the one or more solder pillars with the silicon wafer through an opening in a polymer layer over a passivation layer. A block metal layer underlies the one or more solder blocks and electrically contacts the one or more solder pillars with the silicon wafer through a plurality of via openings through the polymer layer over the passivation layer wherein the block metal layer is thicker than the pillar metal layer.
    Type: Grant
    Filed: August 17, 2020
    Date of Patent: November 8, 2022
    Assignee: Dialog Semiconductor (UK) Limited
    Inventors: Habeeb Mohiuddin Mohammed, Rajesh Subraya Aiyandra
  • Patent number: 11488984
    Abstract: A wiring structure includes a structure body including a pattern, a first conductive layer above the structure body, the first conductive layer having a shape, the shape crossing an edge of a pattern of the structure body and reflecting a step of the edge of the pattern of the structure body, a first insulating layer above the first conductive layer, the first insulating layer having a first opening overlapping the edge of the pattern of the structure body in a plane view, and r is arranged with a second opening in a region overlapping the semiconductor layer in a plane view, a second conductive layer in the first opening, the second conductive layer being connected to the first conductive layer.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: November 1, 2022
    Assignee: Japan Display Inc.
    Inventor: Yohei Yamaguchi
  • Patent number: 11462630
    Abstract: Embodiments described herein generally relate to doping of three dimensional (3D) structures on a substrate. In some embodiments, a conformal dopant containing film may be deposited over the 3D structures. Suitable dopants that may be incorporated in the film include halogen atoms. The film may be subsequently annealed to diffuse the dopants into the 3D structures.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: October 4, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Rui Cheng, Yi Yang, Karthik Janakiraman, Abhijit Basu Mallick
  • Patent number: 11456358
    Abstract: A maskless, patterned graphene film is produced through use of a tunable metal as a catalyst for graphene growth. The metal layer contains precisely defined textures that control the formation of the graphene film. Specifically, graphene growth can be controlled from F-LG (few layer graphene) down to 2-LG (2-layer graphene) and 1-LG (1-layer graphene). More than one texture can be created to form maskless patterns of graphene. Once the graphene layer(s) are grown, the film can be released from the metal and applied to any form and shape of rigid or flexible substrate for a variety of different applications where graphene cannot be normally grown directly.
    Type: Grant
    Filed: January 21, 2020
    Date of Patent: September 27, 2022
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventor: Eugene S. Zakar