Patents Examined by Wasiul Haider
  • Patent number: 11798868
    Abstract: A semiconductor die having a metal tab connected thereto. The metal tab includes at least one slot on at least one side of the metal tab, wherein the at least one slot i) creates an opening between at least two portions of the metal tab and ii) exposes the semiconductor die in relation to the metal tab. The semiconductor die can be a silicon (Si) die and the metal tab can be a copper (Cu) tab, where the at least one slot includes at least four slots corresponding to each of at least four sides of the metal, and wherein with respect to each of the at least four sides, each corresponding slot i) creates an opening between at least two portions of the Cu metal tab and ii) exposes the Si semiconductor die in relation to the Cu metal tab.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: October 24, 2023
    Inventor: Thomas Spann
  • Patent number: 11784106
    Abstract: A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a first semiconductor die, a second semiconductor die, a molding compound, a heat dissipation module and an adhesive material. The first and second semiconductor dies are different types of dies and are disposed side by side. The molding compound encloses the first and second semiconductor dies. The heat dissipation module is located directly on and in contact with the back sides of the first and second semiconductor dies. The adhesive material is filled and contacted between the heat dissipation module and the molding compound. The semiconductor package has a central region and a peripheral region surrounding the central region. The first and second semiconductor dies are located within the central region. A sidewall of the heat dissipation module, a sidewall of the adhesive material and a sidewall of the molding compound are substantially coplanar.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: October 10, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Yang Yu, Chin-Liang Chen, Kuan-Lin Ho, Yu-Min Liang, Wen-Lin Chen
  • Patent number: 11784222
    Abstract: A method of semiconductor fabrication includes providing a semiconductor structure having a substrate and first, second, third, and fourth fins above the substrate. The method further includes forming an n-type epitaxial source/drain (S/D) feature on the first and second fins, forming a p-type epitaxial S/D feature on the third and fourth fins, and performing a selective etch process on the semiconductor structure to remove upper portions of the n-type epitaxial S/D feature and the p-type epitaxial S/D feature such that more is removed from the n-type epitaxial S/D feature than the p-type epitaxial S/D feature.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Chun-An Lin, Wei-Yuan Lu, Guan-Ren Wang, Peng Wang
  • Patent number: 11776952
    Abstract: Structures for a silicon-controlled rectifier and methods of forming a structure for a silicon-controlled rectifier. The structure includes first and second wells in the semiconductor substrate, a first terminal including a first doped region in the first well, and a second terminal including a second doped region in the second well. The first well and the second doped region have a first conductivity type, and the second well and the first doped region have a second conductivity type opposite to the first conductivity type. First and second conductor layers are positioned on the semiconductor substrate. The first conductor layer partially overlaps with the first well, and the second conductor layer partially overlaps with the second well. A third doped region, which has the second conductivity type, is laterally positioned in the semiconductor substrate between the first and second conductor layers.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: October 3, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Sagar Premnath Karalkar, Jie Zeng, Milova Paul, Souvick Mitra
  • Patent number: 11769808
    Abstract: A semiconductor memory device includes: a semiconductor substrate; a memory cell array disposed separately from the semiconductor substrate in a first direction; and first and second transistor arrays disposed on the semiconductor substrate. The semiconductor substrate includes a first region to a fourth region arranged in a second direction and a fifth region to an eighth region arranged in the second direction. These regions are each adjacent in a third direction. The memory cell array includes first conducting layers disposed in the first to fourth regions and second conducting layers disposed in the fifth to eighth regions. The first transistor array includes transistors connected to the plurality of first conducting layers via contacts disposed in the second region. The second transistor array includes transistors connected to the plurality of second conducting layers via contacts disposed in the seventh region.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: September 26, 2023
    Assignee: Kioxia Corporation
    Inventor: Tetsuaki Utsumi
  • Patent number: 11769694
    Abstract: A method includes forming an opening in a dielectric layer, depositing a seed layer in the opening, wherein first portions of the seed layer have a first concentration of impurities, exposing the first portions of the seed layer to a plasma, wherein after exposure to the plasma the first portions have a second concentration of impurities that is less than the first concentration of impurities, and filling the opening with a conductive material to form a conductive feature. In an embodiment, the seed layer includes tungsten, and the conductive material includes tungsten. In an embodiment, the impurities include boron.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: September 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Chiang Wu, Hsueh Wen Tsau, Chia-Ching Lee, Cheng-Lung Hung, Ching-Hwanq Su
  • Patent number: 11769810
    Abstract: A semiconductor device according to an embodiment includes an oxide semiconductor layer, a gate electrode, and the gate electrode, a first electrode electrically connected to the oxide semiconductor layer, a second electrode electrically connected to the oxide semiconductor layer, a first conductive layer provided at at least one position between the oxide semiconductor layer and the first electrode and between the oxide semiconductor layer and the second electrode, the first conductive layer containing a first metal element, a first element different from the first metal element, and one of oxygen (O) or nitrogen (N), and a second conductive layer between the oxide semiconductor layer and the first conductive layer, the second conductive layer containing oxygen (O) and a second element different from both of the first metal element and the first element. The gate electrode is between the first electrode and the second electrode in the first direction.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: September 26, 2023
    Assignee: Kioxia Corporation
    Inventors: Junji Kataoka, Tomomasa Ueda, Shushu Zheng, Nobuyoshi Saito, Keiji Ikeda
  • Patent number: 11770929
    Abstract: A semiconductor device includes gate layers stacked on a substrate in a first direction perpendicular to an upper surface of the substrate, and channel structures penetrating the gate layers and extending in the first direction, each of the channel structures includes first dielectric layers on side surfaces of the gate layers, respectively, and spaced apart from each other in the first direction, electric charge storage layers on side surfaces of the first dielectric layers, respectively, and spaced apart from each other in the first direction, a second dielectric layer extending perpendicularly to the substrate to conform to side surfaces of the electric change storage layers, and a channel layer extending perpendicularly, and each of the first dielectric layers has a first maximum length, and each of the electric charge storage layers has a second maximum length greater than the first maximum length in the first direction.
    Type: Grant
    Filed: August 14, 2020
    Date of Patent: September 26, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sunil Shim, Suhyeong Lee, Taisoo Lim
  • Patent number: 11764309
    Abstract: In a transistor including an oxide semiconductor film, field-effect mobility and reliability are improved. A semiconductor device includes a gate electrode, an insulating film over the gate electrode, an oxide semiconductor film over the insulating film, and a pair of electrodes over the oxide semiconductor film. The oxide semiconductor film includes a first oxide semiconductor film, a second oxide semiconductor film over the first oxide semiconductor film, and a third oxide semiconductor film over the second oxide semiconductor film. The first oxide semiconductor film, the second oxide semiconductor film, and the third oxide semiconductor film include the same elements. The second oxide semiconductor film includes a region having a higher carrier density than the first oxide semiconductor film and the third oxide semiconductor film.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: September 19, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 11764266
    Abstract: A semiconductor device includes a first field-effect transistor positioned over a substrate, a second field-effect transistor stacked over the first field-effect transistor, a third field-effect transistor stacked over the second field-effect transistor, and a fourth field-effect transistor stacked over the third field-effect transistor. A bottom gate structure is disposed around a first channel structure of the first field-effect transistor and positioned over the substrate. An intermediate gate structure is disposed over the bottom gate structure and around a second channel structure of the second field-effect transistor and a third channel structure of the third field-effect transistor. A top gate structure is disposed over the intermediate gate structure and around a fourth channel structure of the fourth field-effect transistor.
    Type: Grant
    Filed: December 5, 2022
    Date of Patent: September 19, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Lars Liebmann, Jeffrey Smith, Daniel Chanemougame, Paul Gutwin
  • Patent number: 11747608
    Abstract: A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: September 5, 2023
    Inventors: Enri Duqi, Dario Paci, Lorenzo Baldo, Domenico Giusti
  • Patent number: 11742342
    Abstract: An electrostatic discharge (ESD) device having a small size, a low turn-on voltage, and a low on resistance and an ESD protection circuit including the ESD device are provided. The ESD device includes a well formed in a substrate to have a first conductive type, an active region being defined at an upper portion of the substrate, a plurality of fins extending in a first direction to have a structure protruding from the substrate, a first conductive impurity region formed with first conductive impurities, a second conductive impurity region formed with second conductive impurities, and a fin-cut isolation region disposed between the first conductive impurity region and the second conductive impurity region in the first direction to cut each fin, wherein a bottom surface of the fin-cut isolation region is higher than a bottom surface of the active region.
    Type: Grant
    Filed: January 8, 2021
    Date of Patent: August 29, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sukjin Kim, Mijin Lee, Chanhee Jeon
  • Patent number: 11742436
    Abstract: A semiconductor device includes an integrated trench capacitor in a substrate, with a field oxide layer on the substrate. The trench capacitor includes trenches extending into semiconductor material of the substrate, and a capacitor dielectric in the trenches on the semiconductor material. The trench capacitor further includes an electrically conductive trench-fill material on the capacitor dielectric. A portion of the capacitor dielectric extends into the field oxide layer, between a first segment of the field oxide layer over the trench-fill material and a second segment of the field oxide layer over the semiconductor material. The integrated trench capacitor has a trench contact to the trench-fill material in each of the trenches, and substrate contacts to the semiconductor material around the trenches, with no substrate contacts between the trenches.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: August 29, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Binghua Hu, Yanbiao Pan, Django Trombley
  • Patent number: 11737286
    Abstract: A selector device includes a first electrode composed of a first metal having a first work function. A second electrode is composed of a second metal having a second work function. A selector layer is disposed between the first and second electrodes and is composed of a dielectric material having a conduction band and a valence band defining a band gap of at least 5 electron volts. Dopant atoms are disposed in the selector layer to form a sub-conduction band that is below the conduction band and above the work functions. When a threshold voltage is applied across the first and second electrodes, and a magnitude of the threshold voltage exceeds an energy difference between the sub-conduction band and the work functions, but does not exceed an energy difference between the conduction band and the work functions, an on-current will conduct through the selector layer.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: August 22, 2023
    Assignee: THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK
    Inventors: Karsten Beckmann, Nathaniel Cady
  • Patent number: 11737277
    Abstract: A semiconductor device includes a stack structure on a substrate, the stack structure including interlayer insulating layers and first gate electrodes alternately stacked on each other, a semiconductor layer in an opening penetrating through the stack structure, a first dielectric layer between the semiconductor layer and the stack structure, and a lower pattern closer to the substrate than to the first gate electrodes in the stack structure, the lower pattern including a first surface facing the first dielectric layer, and a second surface facing the stack structure, the second surface defining an acute angle with the first surface, wherein the first dielectric layer includes a first portion facing the stack structure, and a second portion facing the first surface of the lower pattern, the second portion having a thickness greater than a thickness of the first portion.
    Type: Grant
    Filed: November 10, 2021
    Date of Patent: August 22, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ji Hoon Choi, Sung Gil Kim, Seulye Kim, Jung Ho Kim, Hong Suk Kim, Phil Ouk Nam, Jae Young Ahn, Han Jin Lim
  • Patent number: 11728381
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to electrostatic discharge (ESD) devices and methods of manufacture. The structure includes a bipolar transistor device, including a base region, having a base contact region, in a first well of a first conductivity type, a collector region, having a collector contact region, in a second well of a second conductivity type, and an emitter region, having an emitter contact region, in the first well, located between the base contact region and the second well, and a reverse-doped resistance well, of the second conductivity type, located in the first well of the first conductivity type between the base contact region and the emitter contact region structured to decrease turn-on voltage of the bipolar transistor device.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: August 15, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Kyongjin Hwang, Raunak Kumar, Robert J. Gauthier, Jr.
  • Patent number: 11721772
    Abstract: A varactor structure includes a substrate. A first and second gate structure are disposed on the substrate. The first and second gate structures each include a base portion and a plurality of line portions connected thereto. The line portions of each of the first and second gate structures is alternately arranged. A meander diffusion region is formed in the substrate and surrounds the line portions. A first set of contact plugs is planned with at least two columns or rows and disposed on the base portions of the first and second gate structures. A second set of contact plugs is planned with at least two columns or rows and disposed on the meander diffusion region. A first conductive layer is disposed on a top end of the first set of contact plugs. A second conductive layer is disposed on a top end of the second set of contact plugs.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: August 8, 2023
    Assignee: United Microelectronics Corp.
    Inventors: Purakh Raj Verma, Su Xing
  • Patent number: 11721732
    Abstract: A semiconductor device includes a semiconductor part, first to third electrodes, and first and second control electrodes. The semiconductor part is provided between the first and second electrodes. On the second electrode side of the semiconductor part, the first control electrode and the third electrode are provided in a first trench, and the second control electrode is provided in a second trench. The first control electrode is provided between the second and third electrode. In a first direction from the first control electrode toward the second control electrode, the first trench has first and second widths. The first width is a combined width of the third electrode and insulating portions provided on both sides of the third electrode. The second width is a combined width of the first control electrode and the gate insulating films on both sides thereof. The first width is greater than the second width.
    Type: Grant
    Filed: January 27, 2022
    Date of Patent: August 8, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventor: Masataka Ino
  • Patent number: 11721691
    Abstract: A method for producing a semiconductor device, the method includes, forming, on a substrate made from a semiconductor substance, at least one bipolar junction (BJ) transistor including a first terminal connected to a first well, the first well formed in the substrate and includes a first dopant having a first dopant concentration. At least one non-BJ transistor is formed on the substrate, the non-BJ transistor includes a second terminal connected to a second well, and the second well formed in the substrate and includes a second dopant having a same polarity as the first dopant. The first dopant concentration of the BJ transistor is higher than the second dopant concentration of the non-BJ transistor.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: August 8, 2023
    Assignee: MARVELL ASIA PTE LTD
    Inventors: Runzi Chang, Bo Wang
  • Patent number: 11710703
    Abstract: A fabric-based item may include fabric layers and other layers of material. An array of electrical components may be mounted in the fabric-based item. The electrical components may be mounted to a support structure such as a flexible printed circuit. The flexible printed circuit may have a mesh shape formed from an array of openings. Serpentine flexible printed circuit segments may extend between the openings. The electrical components may be light-emitting diodes or other electrical devices. Polymer with light-scattering particles or other materials may cover the electrical components. The flexible printed circuit may be laminated between fabric layers or other layers of material in the fabric-based item.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: July 25, 2023
    Assignee: Apple Inc.
    Inventors: Daniel D. Sunshine, Paul S. Drzaic, Daniel A. Podhajny, David M. Kindlon, Hoon Sik Kim, Kathryn P. Crews, Yung-Yu Hsu