Abstract: Methods and systems for evaluating and controlling a lithography process are provided. For example, a method for reducing within wafer variation of a critical metric of a lithography process may include measuring at least one property of a resist disposed upon a wafer during the lithography process. A critical metric of a lithography process may include, but may not be limited to, a critical dimension of a feature formed during the lithography process. The method may also include altering at least one parameter of a process module configured to perform a step of the lithography process to reduce within wafer variation of the critical metric. The parameter of the process module may be altered in response to at least the one measured property of the resist.

Abstract: Methods for treating cells, e.g. proliferating cells such as tumor cells, comprise exposing them to cell-damaging agents (which can cause indirect damage, e.g. as vectors for delivery of a gene encoding a cytokine or antigen) and to antigen-presenting cells so as to damage them or reduce their proliferation.

Abstract: A method and apparatus for displaying directory-linked canned messages on a display (20) of a portable device (10) having selective call receiving functions. A personal name directory (100) is stored in the device (10). The name directory (100) comprises a plurality of entries (102), each entry comprising at least one telephone number and at least one canned message corresponding to the at least one telephone number. A paging message including a telephone number is received by the portable device (10). The personal name directory (100) is searched to determine if the telephone number received in the paging message matches with a telephone number in any of the personal name directory entries (102). If there is a match, the canned message which corresponds to the personal name directory entry that matches the telephone number received in the paging message is displayed. Otherwise, a default message is displayed.