Abstract: A switch that includes a droplet capable of spreading between two conductors to allow them to be coupled when a voltage is applied. The droplet can be enclosed by a cap that is bonded to a wafer that the droplet is placed upon, and include metallic properties. The cap can create a cavity that may be filled by a fluid, gas, or vapor. The cavity can have multiple conductors that extend partially or fully through it. The droplet can couple the conductors when specific voltages, or frequencies are applied to them. At the specific voltage and frequency the droplet can spread allowing at least two conductors to be coupled.

Abstract: Millimeter wave energy is provided to a spectroscopy cavity of a spectroscopy device that contains interrogation molecules. The microwave energy is received after it traverses the spectroscopy cavity. The amount of interrogation molecules in the spectroscopy cavity is adjusted by activating a precursor material in one or more sub-cavities coupled to the spectroscopy cavity by a diffusion path to increase the amount of interrogation molecules or by activating the getter material in one or more sub-cavities coupled to the spectroscopy cavity by a diffusion path to decrease the amount of interrogation molecules.

Abstract: A clock apparatus with: (i) a gas cell, including a continuous path cavity including a sealed interior for providing a signal waveguide; (ii) an apparatus for providing an electromagnetic wave to travel along the continuous path cavity and for circulating around the continuous path cavity back toward and past a point of entry of the electromagnetic wave in the continuous path cavity; (iii) a dipolar gas inside the sealed interior of the cavity; and (iv) receiving apparatus for detecting an amount of energy in the electromagnetic wave, wherein the amount of energy is responsive to an amount of absorption of the electromagnetic wave as the electromagnetic wave passes through the dipolar gas.

Abstract: An apparatus includes a substrate containing a cavity and a dielectric structure covering at least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may include a launch structure formed on the dielectric structure and outside the hermetically sealed cavity. The launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to enter the hermetically sealed cavity through the dielectric structure in a direction orthogonal to the first direction.

Abstract: An electronic device includes a package substrate, a circuit assembly, and a housing. The circuit assembly is mounted on the package substrate. The circuit assembly includes a first sealed cavity formed in a device substrate. The housing is mounted on the package substrate to form a second sealed cavity about the circuit assembly.

Abstract: A pressure transducer includes a cavity, a first dipolar molecule disposed within the cavity, and a second dipolar molecule disposed within the cavity. The first dipolar molecule exhibits a quantum rotational state transition at a fixed frequency with respect to cavity pressure. The second dipolar molecule exhibits a quantum rotation state transition at a frequency that varies with cavity pressure.

Abstract: An illustrate method (and device) includes etching a cavity in a first substrate (e.g., a semiconductor wafer), forming a first metal layer on a first surface of the first substrate and in the cavity, and forming a second metal layer on a non-conductive structure (e.g., glass). The method also may include removing a portion of the second metal layer to form an iris to expose a portion of the non-conductive structure, forming a bond between the first metal layer and the second metal layer to thereby attach the non-conductive structure to the first substrate, sealing an interface between the non-conductive structure and the first substrate, and patterning an antenna on a surface of the non-conductive structure.

Abstract: Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.

Abstract: An apparatus includes a substrate containing a cavity and a dielectric structure covering at least a portion of the cavity. The cavity is hermetically sealed. The apparatus also may include a launch structure formed on the dielectric structure and outside the hermetically sealed cavity. The launch structure is configured to cause radio frequency (RF) energy flowing in a first direction to enter the hermetically sealed cavity through the dielectric structure in a direction orthogonal to the first direction. Various types of launch structures are disclosed herein.

Abstract: A method includes forming a plurality of layers of an oxide and a metal on a substrate. For example, the layers may include a metal layer sandwiched between silicon oxide layers. A non-conductive structure such as glass is then bonded to one of the oxide layers. An antenna can then be patterned on the non-conductive structure, and a cavity can be created in the substrate. Another metal layer is deposited on the surface of the cavity, and an iris is patterned in the metal layer to expose the one of the oxide layers. Another metal layer is formed on a second substrate and the two substrates are bonded together to thereby seal the cavity.

Abstract: A millimeter wave apparatus, with a substrate, a transceiver in a first fixed position relative to the substrate, and a gas cell in a second fixed position relative to the substrate. The clock apparatus also comprises at least four waveguides.

Abstract: A pressure transducer includes a cavity, dipolar molecules disposed within the cavity, and pressure measurement circuitry. The pressure measurement circuitry is configured to measure a width of an absorption peak of the dipolar molecules, and to determine a value of pressure in the cavity based on the width of the absorption peak.

Abstract: A method for forming a sealed cavity includes bonding a non-conductive structure to a first substrate to form a non-conductive aperture into the first substrate. On a surface of the non-conductive structure opposite the first substrate, the method includes depositing a first metal layer. The method further includes patterning a first iris in the first metal layer, depositing a first dielectric layer on a surface of the first metal layer opposite the non-conductive structure, and patterning an antenna on a surface of the first dielectric layer opposite the first metal layer. The method also includes creating a cavity in the first substrate, depositing a second metal layer on a surface of the cavity, patterning a second iris in the second metal layer, and bonding a second substrate to a surface of the first substrate opposite the non-conductive structure to thereby seal the cavity.

Abstract: One or more apparatus providing over-travel protection for actuators are disclosed. An example apparatus includes a mirror; a first plate coupled to the mirror; and a support post coupled the first plate, the support post structured to prevent the mirror from moving within a threshold distance to a second plate.

Abstract: Described examples include a method of fabricating a gas cell, including forming a cavity in a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity, and activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.

Abstract: Disclosed examples provide gas cells and a method of fabricating a gas cell, including forming a cavity in a first substrate, forming a first conductive material on a sidewall of the cavity, forming a glass layer on the first conductive material, forming a second conductive material on a bottom side of a second substrate, etching the second conductive material to form apertures through the second conductive material, forming conductive coupling structures on a top side of the second substrate, and bonding a portion of the bottom side of the second substrate to a portion of the first side of the first substrate to seal the cavity.

Abstract: A clock apparatus with: (i) a gas cell, including a continuous path cavity including a sealed interior for providing a signal waveguide; (ii) an apparatus for providing an electromagnetic wave to travel along the continuous path cavity and for circulating around the continuous path cavity back toward and past a point of entry of the electromagnetic wave in the continuous path cavity; (iii) a dipolar gas inside the sealed interior of the cavity; and (iv) receiving apparatus for detecting an amount of energy in the electromagnetic wave, wherein the amount of energy is responsive to an amount of absorption of the electromagnetic wave as the electromagnetic wave passes through the dipolar gas.

Abstract: A clock apparatus, with: (i) a gas cell, including a cavity including a sealed interior for providing a signal waveguide; (ii) a first apparatus for providing a first electromagnetic wave to travel in the cavity and along a first direction; (iii) a second apparatus for providing a second electromagnetic wave to travel in the cavity and along a second direction opposite the first direction; (iv) a dipolar gas inside the sealed interior of the cavity; and (v) receiving apparatus for detecting an amount of energy in the second electromagnetic wave after the second electromagnetic wave passes through the dipolar gas.

Abstract: A clock apparatus with a gas cell. The gas cell includes: (i) a first chamber including a sealed interior for providing a signal waveguide; and (ii) a second chamber, in fluid communication with the first chamber, and comprising apparatus for directing atoms having a selected velocity vector into the first chamber.

Abstract: Described examples include a method of fabricating a gas cell, including forming a cavity in a first substrate, providing a nonvolatile precursor material in the cavity of the first substrate, bonding a second substrate to the first substrate to form a sealed cavity including the nonvolatile precursor material in the cavity, and activating the precursor material after or during forming the sealed cavity to release a target gas inside the sealed cavity.