Patents by Inventor Alexander Goldin
Alexander Goldin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240014825Abstract: Embodiments disclosed herein include a method of calibrating a tool for converting photonic signals to electrical signals. In an embodiment, the method comprises connecting a calibration module to a calibrated current source, finding a transfer function for a plurality of modes with the calibration module, and storing the transfer functions in a lookup table.Type: ApplicationFiled: July 11, 2022Publication date: January 11, 2024Inventors: Mikhail Taraboukhine, Oleg Serebryanov, Alexander Goldin, Vilen Nestorov
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Publication number: 20230396939Abstract: The invention relates to a method of suppressing undesired noise in a hearing aid, the hearing aid comprising a handheld unit, in which a microphone is integrated, and another microphone located externally of the handheld unit and connected thereto.Type: ApplicationFiled: May 30, 2023Publication date: December 7, 2023Inventors: Alexander Goldin, Ishay Berkovich, Alex Radzishevsky
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Patent number: 11156494Abstract: Apparatus and methods for determining the liquid level of a canister are described. A magnetic field generated by a floating magnet within the canister is measured by a plurality of magnetic sensors outside of the canister. Methods of calibrating the magnetic sensors and measuring the location of the floating magnet are also described.Type: GrantFiled: December 6, 2016Date of Patent: October 26, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Oleg V. Serebryanov, Alexander Goldin, Kenric Choi
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Patent number: 10734257Abstract: Methods and apparatus for heating a substrate in a process chamber are provided herein. In some embodiments, an apparatus for heating a substrate in a process chamber includes a lamp group comprising one or more sets of lamps to provide radiant energy to heat a substrate when disposed in the process chamber, wherein each set of lamps comprises a plurality of lamps wired in series, and wherein each set of lamps is wired in parallel with respect to other sets of the one or more sets of lamps; an alternating current (AC) power source to produce an AC input waveform; and a lamp driver to power the lamp group, the lamp driver including a rectifier coupled to the AC power source to convert the AC input waveform to DC voltage; and a direct current to direct current (DC/DC) converter to reduce voltage of the DC power.Type: GrantFiled: April 19, 2013Date of Patent: August 4, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Oleg Serebryanov, Joseph M. Ranish, Alexander Goldin
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Patent number: 10332763Abstract: Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.Type: GrantFiled: January 4, 2016Date of Patent: June 25, 2019Assignee: APPLIED MATERIALS, INCLInventors: Oleg V. Serebryanov, Alexander Goldin, Joseph M. Ranish
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Patent number: 9737959Abstract: The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.Type: GrantFiled: September 5, 2014Date of Patent: August 22, 2017Assignee: Applied Materials, Inc.Inventors: Dean C. Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Teritski, Alexander Goldin
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Publication number: 20170160123Abstract: Apparatus and methods for determining the liquid level of a canister are described. A magnetic field generated by a floating magnet within the canister is measured by a plurality of magnetic sensors outside of the canister. Methods of calibrating the magnetic sensors and measuring the location of the floating magnet are also described.Type: ApplicationFiled: December 6, 2016Publication date: June 8, 2017Inventors: Oleg V. Serebryanov, Alexander Goldin, Kenric Choi
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Publication number: 20170162408Abstract: A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.Type: ApplicationFiled: February 23, 2017Publication date: June 8, 2017Inventors: Alexander Goldin, Oleg V. Serebryanov
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Patent number: 9612020Abstract: A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.Type: GrantFiled: August 29, 2013Date of Patent: April 4, 2017Assignee: Applied Materials, Inc.Inventors: Alexander Goldin, Oleg V. Serebryanov
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Publication number: 20160196992Abstract: Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.Type: ApplicationFiled: January 4, 2016Publication date: July 7, 2016Inventors: Oleg V. SEREBRYANOV, Alexander GOLDIN, Joseph M. Ranish
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Patent number: 9345118Abstract: Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.Type: GrantFiled: November 4, 2014Date of Patent: May 17, 2016Assignee: APPLIED MATERIALS, INC.Inventors: Oleg Serebryanov, Alexander Goldin
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Publication number: 20150054404Abstract: Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.Type: ApplicationFiled: November 4, 2014Publication date: February 26, 2015Inventors: OLEG SEREBRYANOV, Alexander GOLDIN
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Publication number: 20150053659Abstract: The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.Type: ApplicationFiled: September 5, 2014Publication date: February 26, 2015Inventors: Dean C. Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Teritski, Alexander Goldin
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Patent number: 8878461Abstract: Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.Type: GrantFiled: June 30, 2011Date of Patent: November 4, 2014Assignee: Applied Materials, Inc.Inventors: Oleg Serebryanov, Alexander Goldin
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Patent number: 8829393Abstract: The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.Type: GrantFiled: April 9, 2012Date of Patent: September 9, 2014Assignee: Applied Materials, Inc.Inventors: Dean C. Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski, Alexander Goldin
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Publication number: 20140027440Abstract: A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.Type: ApplicationFiled: August 29, 2013Publication date: January 30, 2014Inventors: Alexander Goldin, Oleg V. Serebryanov
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Publication number: 20130287377Abstract: Methods and apparatus for heating a substrate in a process chamber are provided herein. In some embodiments, an apparatus for heating a substrate in a process chamber includes a lamp group comprising one or more sets of lamps to provide radiant energy to heat a substrate when disposed in the process chamber, wherein each set of lamps comprises a plurality of lamps wired in series, and wherein each set of lamps is wired in parallel with respect to other sets of the one or more sets of lamps; an alternating current (AC) power source to produce an AC input waveform; and a lamp driver to power the lamp group, the lamp driver including a rectifier coupled to the AC power source to convert the AC input waveform to DC voltage; and a direct current to direct current (DC/DC) converter to reduce voltage of the DC power.Type: ApplicationFiled: April 19, 2013Publication date: October 31, 2013Inventors: OLEG SEREBRYANOV, JOSEPH M. RANISH, ALEXANDER GOLDIN
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Patent number: 8548312Abstract: A rapid thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The rapid thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.Type: GrantFiled: February 19, 2010Date of Patent: October 1, 2013Assignee: Applied Materials, Inc.Inventors: Alexander Goldin, Oleg V. Serebryanov
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Patent number: 8503497Abstract: Embodiments provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser, a ramp generator to ramp down laser power, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the laser power upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down laser power upon detection of missing pulses or signal failure.Type: GrantFiled: December 12, 2011Date of Patent: August 6, 2013Assignee: Applied Materials, Inc.Inventors: Oleg Serebryanov, Alexander Goldin, Abhilash J. Mayur, Leonid M. Tertitski
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Publication number: 20130002140Abstract: Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.Type: ApplicationFiled: June 30, 2011Publication date: January 3, 2013Applicant: APPLIED MATERIALS, INC.Inventors: OLEG SEREBRYANOV, Alexander Goldin