Patents by Inventor Alexander S. Borovik

Alexander S. Borovik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Silicon source reagent compositions, and method of making and using same for microelectronic device structure
    Publication number: 20020180028
    Abstract: A method of synthesizing an aminosilane source reagent composition, by reacting an aminosilane precursor compound with an amine source reagent compound in a solvent medium comprising at least one activating solvent component, to yield an aminosilane source reagent composition having less than 1000 ppm halogen.
    Type: Application
    Filed: March 29, 2002
    Publication date: December 5, 2002
    Inventors: Alexander S. Borovik, Ziyun Wang, Chongying Xu, Thomas H. Baum, Brian L. Benac