Abstract: The present invention relates to a capacitive MEMS gyroscope with drive-signal induced offset cancelling features. In a MEMS gyroscope of the type including force feedback circuitry, the drive signal is modulated according to a known modulation scheme or frequency. The modulation scheme/frequency of the drive signal is used by offset cancelling circuitry to determine the offset in the rate signal caused by the drive signal. The determined offset is subsequently removed from the rate signal.

Abstract: An improved design for a microelectromechanical device that enables multi-axis detection but is also more robust in demanding operating conditions. The device has a balanced structure formed of two oscillating inertial masses, coupled in a way that optimally utilizes inherent stiffnesses of spring structures to increase robustness of the combined device structure.

Abstract: A MEMS gyroscope comprises a first resonator with one or more first Coriolis element pairs, and a second resonator with one or more second Coriolis element pairs. The primary oscillation of these resonators is driven with the same drive signal, and a coupling arrangement between the first and second resonators synchronizes the primary oscillation of the one or more first Coriolis element pairs with the primary oscillation of the one or more second Coriolis element pairs. The coupling arrangement does not synchronize the secondary oscillation of the one or more first Coriolis element pairs with the secondary oscillation of the one or more second Coriolis element pairs. The secondary oscillations of the first and second electromechanical resonators are therefore independent of each other.

Abstract: A microelectromechanical gyroscope comprising first, second, third and fourth Coriolis masses, arranged in that order on an x-axis. In the primary oscillation mode, the Coriolis masses are configured to oscillate so that the second and third Coriolis masses move in linear translation along the x-axis away from a center point when the first and fourth Coriolis masses move in linear translation along the x-axis towards the first center point, and vice versa. When the gyroscope undergoes rotation about a y-axis which is perpendicular to the x-axis, the Coriolis masses are configured to oscillate so that the first, second, third and fourth Coriolis masses undergo vertical motion in a z-direction, wherein the first and third Coriolis masses move up when the second and fourth Coriolis masses move down, and vice versa.

Abstract: A gyroscope comprises four Coriolis masses arranged around a center point where a lateral axis crosses a transversal axis orthogonally in the device plane. The first and second masses are aligned on the lateral axis, and the third and fourth masses are aligned on the transversal axis. The gyroscope further comprises four pairs of elongated mass elements. The mass elements of the first pair are transversally aligned on opposite sides of the lateral axis outside of the first mass. The mass elements of the second pair are transversally aligned on opposite sides of the lateral axis outside of the second mass. The mass elements of the third pair are laterally aligned on opposite sides of the first transversal axis outside of the third mass. The mass elements of the fourth pair are laterally aligned on opposite sides of the first transversal axis outside of the fourth mass.

Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.

Abstract: This disclosure describes a microelectromechanical multiaxis gyroscope comprising a proof mass quartet, a central suspension arrangement for suspending the proof mass quartet from the central anchor point. The gyroscope also comprises a synchronization frame and a detection mass quartet. One or more lateral corner springs extends to each detection mass from the laterally adjacent proof mass, and one or more transversal corner springs extends to each detection mass from the transversally adjacent proof mass.

Abstract: The present invention relates to MEMS (microelectromechanical systems) accelerometers, in particular to an accelerometer designed to reduce error in the accelerometer output. The MEMS accelerometer includes a proof mass, which is capable of movement along at least two perpendicular axes and at least one measurement structure. The proof mass is mechanically coupled to the measurement structure along the sense axis of the measurement structure, such that movement of the proof mass along the sense axis causes the moveable portion of the measurement structure to move, and is decoupled from the measurement structures along an axis or axes perpendicular to the sense axis of the measurement structure, such that movement of the proof mass perpendicular to the sense axis of the measurement structure does not cause the moveable portion of the measurement structure to move.

Abstract: This disclosure describes a multiaxis gyroscope comprising a first proof mass quartet centered around a first quartet center point and a second proof mass quartet centered around a second quartet center point. In the primary oscillation mode all masses in each proof mass quartet move simultaneously either radially toward and away from the corresponding quartet center point, or in the same tangential direction in relation to the corresponding quartet center point.

Abstract: A scanning microelectromechanical reflector system comprising a mobile reflector mass and a mobile frame mass which surrounds the mobile reflector mass when the reflector plane coincides with the mobile frame plane. The mobile frame mass is suspended from a fixed frame which at least partly surrounds the mobile frame mass when the mobile frame plane coincides with the fixed frame plane. The reflector system further comprises a pair of first torsion beams aligned on a first axis in the mobile frame plane, and one or more first actuation units which can be configured to rotate the reflector mass and the mobile frame mass about the first axis.

Abstract: A microelectromechanical gyroscope comprises a first proof mass quartet centred around a first quartet center point and a second proof mass quartet centred around a second quartet center point. The gyroscope comprises a suspension arrangement configured to accommodate the primary and secondary oscillating motion of the first and second proof mass quartets. The suspension arrangement comprises a first synchronization frame and a second synchronization frame. Each synchronization frame surrounds the corresponding proof mass quartet, and each proof mass is coupled to the surrounding synchronization frame with one or more frame suspension springs. The gyroscope also comprises a lateral synchronization spring which extends from the first proof mass quartet to the second proof mass quartet.

Abstract: The disclosure relates to a microelectromechanical gyroscope which comprises first and second proof masses which form a first proof mass pair and third and fourth proof masses which form a second proof mass pair. The oscillation of the first and second proof mass pairs is synchronized by a synchronization element which comprises a ringlike body and torsion bars which extend along the x-axis from the ringlike body to the first, second, third and fourth proof masses.

Abstract: An optical device that provides a broadened circular scanning pattern. The device includes a reflector system dimensioned to form a coupled oscillator with two modes of oscillation for circular tilt motion, a first mode oscillation in a first resonance frequency and a second mode of oscillation in a second resonance frequency that is different from the first resonance frequency. A signal processing element is configured to control the actuation signals to maintain a first amplitude in the first mode of oscillation, and a second amplitude in the second mode of oscillation.

Abstract: The present invention provides a high-accuracy low-noise MEMS accelerometer by using at least two symmetric out-of-plane proof masses for both out-of-plane and in-plane axes. Movement of the proof masses in one or more in-plane sense axes is measured by comb capacitors with mirrored comb electrodes that minimise cross-axis error from in-plane movement of the proof mass out of the sense axis of the capacitor. The two out-of-plane proof masses rotate in opposite directions, thus maintaining their combined centre of mass at the centre of the accelerometer even as they rotate out of plane.

Abstract: The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction.

Abstract: The present invention relates to a capacitive MEMS gyroscope with drive-signal induced offset cancelling features. In a MEMS gyroscope of the type including force feedback circuitry, the drive signal is modulated according to a known modulation scheme or frequency. The modulation scheme/frequency of the drive signal is used by offset cancelling circuitry to determine the offset in the rate signal caused by the drive signal. The determined offset is subsequently removed from the rate signal.

Abstract: The invention relates to microelectromechanical systems (MEMS), and specifically to a mirror system, for example to be used in LiDAR (Light Detection and Ranging). The MEMS mirror system of the invention uses four suspenders, each of which is connected to the reflector body at two separate connection points which can be independently displaced by piezoelectric actuators. By actuating adjacent and opposite pairs of piezoelectric actuators, the reflector body can be driven to oscillated about two orthogonal axes.

Abstract: This disclosure describes a microelectromechanical multiaxis gyroscope comprising a proof mass quartet, a central suspension arrangement for suspending the proof mass quartet from the central anchor point. The gyroscope also comprises a synchronization frame and a detection mass quartet. One or more lateral corner springs extends to each detection mass from the laterally adjacent proof mass, and one or more transversal corner springs extends to each detection mass from the transversally adjacent proof mass.

Abstract: A microelectromechanical gyroscope comprises a first proof mass quartet centred around a first quartet center point and a second proof mass quartet centred around a second quartet center point. The gyroscope comprises a suspension arrangement configured to accommodate the primary and secondary oscillating motion of the first and second proof mass quartets. The suspension arrangement comprises a first synchronization frame and a second synchronization frame. Each synchronization frame surrounds the corresponding proof mass quartet, and each proof mass is coupled to the surrounding synchronization frame with one or more frame suspension springs. The gyroscope also comprises a lateral synchronization spring which extends from the first proof mass quartet to the second proof mass quartet.

Abstract: A MEMS gyroscope comprises a first resonator with one or more first Coriolis element pairs, and a second resonator with one or more second Coriolis element pairs. The primary oscillation of these resonators is driven with the same drive signal, and a coupling arrangement between the first and second resonators synchronizes the primary oscillation of the one or more first Coriolis element pairs with the primary oscillation of the one or more second Coriolis element pairs. The coupling arrangement does not synchronize the secondary oscillation of the one or more first Coriolis element pairs with the secondary oscillation of the one or more second Coriolis element pairs. The secondary oscillations of the first and second electromechanical resonators are therefore independent of each other.