Abstract: A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.

Abstract: A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.

Abstract: A microelectromechanical gyroscope structure for detecting angular motion about an axis of angular motion. A drive element is suspended for one-dimensional motion in a direction of a drive axis, and a sense body carries one or more sense rotor electrodes and is coupled to the drive element with a first directional spring structure that forces the sense body to move with the drive element and has a preferred direction of motion in a direction of a sense axis. The drive element includes an actuation body and a drive frame wherein the first spring structure couples the sense body directionally to the drive frame, and a second directional spring structure that couples the drive frame to the actuation body and has a preferred direction of motion in the direction of the sense axis.

Abstract: The invention presents a spring structure (501), which has at least two masses (Ma, Mb) coupled in a first direction as opposite phase oscillators by means of springs (Sh1, Sh2) connected to them (Ma, Mb), via a loop (L, E) between said springs (Sh1, Sh2) connected to their coupling points, wherein oblique springs (Sl45, Sr45) are connected from said coupling points of the loop (L) to the anchors (A) of the base such that the longitudinal motion of the loop (L) is arranged to occur perpendicularly or substantially perpendicularly to said first direction, to thus attenuate opposite phase oscillation other than that of the masses (Ma, Mb). The invention also presents the use of a spring structure in a resonator and/or in a resonator array as well as in a sensor or a sensor comprising system.

Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

Abstract: A micro-mechanical resonator is provided. The micro-mechanical resonator comprises two masses coupled in the direction of a common axis by a spring structure. The spring structure comprises a spring that couples at least a first bar connected to the masses and a second bar extending in the motion axis direction, said spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis. A micro-mechanical resonator matrix, a sensor and a navigation device are also provided.

Abstract: A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.

Abstract: A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.

Abstract: The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor, a second sensor, and a third sensor. The first sensor comprises a rotor electrode and stator electrode. The sensor comprises a first beam that is connected to a rotor electrode support structure and that is connected to the rotor electrode. The sensor comprises a second beam that is connected to the rotor electrode support structure and that is connected to the rotor electrode. The second sensor is situated in a first space circumscribed by the first beam, the first sensor, and the rotor electrode support structure. The third sensor is situated in a second space circumscribed by the second beam, the first sensor, and the rotor electrode support structure.

Abstract: The invention relates to measuring devices used for measuring angular velocity, and more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to the invention comprises at least two seismic mass structures (1), (2), excitation structures (3), (4) and coupling seesaw type springs (6), (7). The objective of the invention is to provide an improved sensor structure, which enables reliable measuring with good efficiency particularly in small vibrating micro-mechanical angular velocity sensor solutions.

Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

Abstract: A sensing device comprising a micromechanical gyroscope, the gyroscope comprising an improved sensing device with a micromechanical gyroscope, where the resonance frequency of the first mechanical resonator and the resonance frequency of the second mechanical resonator are adjusted to essentially coincide. The device comprises a feed-back loop connected to the second mechanical resonator, the quality factor of the combination of the feed-back loop and the second mechanical resonator being less than 10. More accurate sensing is achieved without essentially adding complexity to the sensor device configuration.

Abstract: The invention relates to measuring devices used in measuring angular velocity, and, more precisely, to vibrating micromechanical sensors of angular velocity. In the solution for a sensor of angular velocity, a mass is suspended using spring structures having non-orthogonal primary and secondary axes such, that an activation in phase with the primary motion is induced in a detection resonator. The angular velocity to be measured is detected from the phase difference between the primary motion and the secondary motion. The structure of the sensor of angular velocity enables reliable measuring with good performance, particularly, in small vibrating micromechanical solutions for a sensor of angular velocity.

Abstract: The invention shows a method to control a pointing device with an angular, rate sensor, that comprises generating an ensemble of orthogonal unit vector associated signals by at least one angular rate sensor to represent angular rates in a dimensional space for each mutually orthogonal unit vector direction of said dimensional space, amplifying the at least one of said signal non-linearly for determination of cursor on a screen for (x,y) coordinates of the screen, applying a decision criterion to determine the state of the pointing device as based on said unit vector associated signals. The invention also shows a pointer utilising the method and a system comprising such a pointer.

Abstract: The invention presents a spring structure (501), which has at least two masses (Ma, Mb) coupled in a first direction as opposite phase oscillators by means of springs (Sh1, Sh2) connected to them (Ma, Mb), via a loop (L, E) between said springs (Sh1, Sh2) connected to their coupling points, wherein oblique springs (Sl45, Sr45) are connected from said coupling points of the loop (L) to the anchors (A) of the base such that the longitudinal motion of the loop (L) is arranged to occur perpendicularly or substantially perpendicularly to said first direction, to thus attenuate opposite phase oscillation other than that of the masses (Ma, Mb). The invention also presents the use of a spring structure in a resonator and/or in a resonator array as well as in a sensor or a sensor comprising system.

Abstract: Embodiments of the invention relate to measuring devices used in measuring angular velocity and, more precisely, to vibrating micro-mechanical sensors of angular velocity. The sensor of angular velocity according to an embodiment of the invention is adapted to measure angular velocity in relation to two or three axes, and at the least two seismic masses (34-36, 52-53, 71-75) of the sensor of angular velocity are adapted to be activated into primary motion vibration by a common mode. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small size vibrating micro-mechanical sensors of angular velocity.

Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

Abstract: The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.