Patents by Inventor Atsushi Yamashita

Atsushi Yamashita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11555044
    Abstract: The present invention provides a thin-film forming raw material, which is used in an atomic layer deposition method, including a compound represented by the following general formula (1): where R1 to R4 each independently represent an alkyl group having 1 to 5 carbon atoms, and A1 represents an alkanediyl group having 1 to 5 carbon atoms.
    Type: Grant
    Filed: September 24, 2019
    Date of Patent: January 17, 2023
    Assignee: ADEKA CORPORATION
    Inventors: Nana Okada, Tomoharu Yoshino, Atsushi Yamashita
  • Publication number: 20230002423
    Abstract: The present invention provides a tin compound represented by the following general formula (1) (in the formula (1), R1 to R4 each independently represent a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, and R5 represents an alkanediyl group having 1 to 15 carbon atoms), a thin-film forming raw material including the compound, a thin-film formed by using the thin-film forming raw material, a method of using the compound as a precursor for producing the thin-film, and a method of producing a thin-film including: introducing a raw material gas obtained by vaporizing the thin-film forming raw material into a treatment atmosphere having a substrate set therein; and subjecting the tin compound in the raw material gas to decomposition and/or a chemical reaction in the treatment atmosphere, to thereby produce a thin-film containing a tin atom on a surface of the substrate.
    Type: Application
    Filed: October 12, 2020
    Publication date: January 5, 2023
    Applicant: ADEKA CORPORATION
    Inventors: Tomoharu YOSHINO, Yoshiki OOE, Atsushi YAMASHITA
  • Patent number: 11524973
    Abstract: Described herein are metal compounds and methods of fabricating semiconductor devices using the same. The metal compounds include a material of Chemical Formula 1.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: December 13, 2022
    Assignees: Samsung Electronics Co., Ltd., Adeka Corporation
    Inventors: Seung-Min Ryu, Akio Saito, Takanori Koide, Atsushi Yamashita, Kazuki Harano, Gyu-Hee Park, Soyoung Lee, Jaesoon Lim, Younjoung Cho
  • Publication number: 20220389570
    Abstract: Provided is a thin-film forming raw material containing a compound represented by the following formula (1): in the formula (1), R1 to R5 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a group containing a fluorine atom, M represents a metal atom, and ā€œnā€ represents a valence of the metal atom represented by M, provided that at least one of R2, R3, and R4 represents the group containing a fluorine atom.
    Type: Application
    Filed: October 19, 2020
    Publication date: December 8, 2022
    Applicant: ADEKA CORPORATION
    Inventors: Atsushi SAKURAI, Masako HATASE, Masaki ENZU, Keisuke TAKEDA, Ryota FUKUSHIMA, Atsushi YAMASHITA
  • Publication number: 20220364226
    Abstract: The present invention provides a method for producing an yttrium oxide-containing film by an atomic layer deposition method, including: a step (A) of introducing a raw material gas obtained by vaporizing a thin film-forming raw material containing tris(sec-butylcyclopentadienyl)yttrium into a processing atmosphere to deposit the tris(sec-butylcyclopentadienyl)yttrium on a substrate; and a step (B) of reacting the tris(sec-butylcyclopentadienyl)yttrium deposited on the substrate with a reactive gas containing a gas selected from the group consisting of oxygen plasma, ozone, ozone plasma, and mixtures thereof in the processing atmosphere to oxidize yttrium.
    Type: Application
    Filed: September 24, 2020
    Publication date: November 17, 2022
    Applicant: ADEKA CORPORATION
    Inventors: Akihiro NISHIDA, Atsushi YAMASHITA
  • Publication number: 20220301880
    Abstract: A substrate processing method includes: a preparing process of preparing a substrate in which a zirconium oxide film as a mask has been formed on a laminated film and dry-etched into a given shape; after the preparing process, a mask removing process of removing the zirconium oxide film by supplying a mask removing liquid containing sulfuric acid as a main component to the substrate; and after the mask removing process, a drying process of drying a surface of the substrate that is wet with a rinsing liquid.
    Type: Application
    Filed: March 9, 2022
    Publication date: September 22, 2022
    Inventors: Atsushi YAMASHITA, Koji KAGAWA
  • Publication number: 20220299117
    Abstract: Staying of a drain on a cylinder attached to a lower side of a valve casing is suppressed, and occurrence of corrosion of the cylinder is suppressed. A steam valve includes a valve casing, a valve disc disposed within the valve casing, a cylinder disposed on a lower side of the valve casing and having a piston rod extending upward, a valve stem vertically penetrating a lower portion of the valve casing and having one end coupled to the piston rod via a coupling and having another end coupled to the valve disc, a cover having a larger diameter than the piston rod and the coupling and configured to separate the piston rod and the coupling from each other by being interposed between the piston rod and the coupling, and a tubular skirt hanging down from a peripheral portion of the cover and surrounding a periphery of a head portion of the piston rod.
    Type: Application
    Filed: February 2, 2022
    Publication date: September 22, 2022
    Applicant: MITSUBISHI HEAVY INDUSTRIES, LTD.
    Inventors: Kenya Nishimura, Atsushi Yamashita
  • Patent number: 11377824
    Abstract: The camera captures an image of a surrounding environment of a work vehicle and outputs image data indicative of the image. The shape sensor measures a three-dimensional shape of the surrounding environment and outputs 3D shape data indicative of the three-dimensional shape. A controller acquires the image data and the 3D shape data. The controller generates a three-dimensional projection model based on the 3D shape data. The three-dimensional projection model portrays the three-dimensional shape of the surrounding environment. The image is projected onto the three-dimensional projection model based on the image data, thereby generating display image data that represents a display image of the surrounding environment of the work vehicle.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: July 5, 2022
    Assignees: THE UNIVERSITY OF TOKYO, KOMATSU LTD.
    Inventors: Atsushi Yamashita, Soichiro Iwataki, Hiromitsu Fujii, Masataka Fuchida, Alessandro Moro, Hajime Asama, Kazuki Kure
  • Patent number: 11335896
    Abstract: A method for producing an yttrium oxide-containing thin film by atomic layer deposition, the method comprising: a step for introducing a raw material gas containing tris(sec-butylcyclopentadienyl) yttrium into a treatment atmosphere in order to deposit tris(sec-butylcyclopentadienyl) yttrium on a substrate; and a step for introducing a reactive gas containing water vapor into the treatment atmosphere and causing the reactive gas to react with the tris(sec-butylcyclopentadienyl) yttrium that has been deposited on the substrate, thereby oxidizing yttrium is provided.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: May 17, 2022
    Assignee: ADEKA CORPORATION
    Inventors: Akihiro Nishida, Atsushi Yamashita
  • Publication number: 20220024953
    Abstract: Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including an alkoxide compound represented by the following general formula (1): where R1 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, R2 and R3 each independently represent an alkyl group having 1 to 5 carbon atoms, and z1 represents an integer of from 1 to 3.
    Type: Application
    Filed: December 3, 2019
    Publication date: January 27, 2022
    Applicant: ADEKA CORPORATION
    Inventors: Atsushi SAKURAI, Masako HATASE, Tomoharu YOSHINO, Akihiro NISHIDA, Atsushi YAMASHITA
  • Publication number: 20220017554
    Abstract: A raw material for forming a thin film, comprising a compound represented by General Formula (1) below. (in the formula, R1 represents a linear or branched alkyl group having 1 to 5 carbon atoms, R2 represents hydrogen or a linear or branched alkyl group having 1 to 5 carbon atoms, R3 and R4 each independently represent a linear or branched alkyl group having 1 to 5 carbon atoms, A represents an alkanediyl group having 1 to 4 carbon atoms and M represents copper, iron, nickel, cobalt or manganese.
    Type: Application
    Filed: September 30, 2021
    Publication date: January 20, 2022
    Applicant: ADEKA CORPORATION
    Inventors: Tomoharu YOSHINO, Nana OKADA, Akihiro NISHIDA, Atsushi YAMASHITA
  • Publication number: 20210356694
    Abstract: An imaging optical system includes, in order from an object side: a meniscus first lens an object-side surface of which is convex and that has negative refractive power; a stop; a second lens that has positive refractive power; and a biconcave third lens. The imaging optical system satisfies Expression (1): 0.10<d12/f?0.81 where d12 represents a spatial distance along an optical axis between the first lens and the second lens, and f represents a focal length of the entire imaging optical system.
    Type: Application
    Filed: May 12, 2021
    Publication date: November 18, 2021
    Inventors: Atsushi YAMASHITA, Hidekazu TOTSUKA
  • Publication number: 20210347991
    Abstract: A polyamide resin composition is provided which can be blow molded while concurrently satisfying blow moldability and uniform wall thickness of the molten resin, exhibits excellent thermal stability when the resin composition is accumulated as a melt and thereby gives molded articles with a good surface appearance, and is further excellent in impact resistance at room and low temperatures. The polyamide resin composition includes, based on 100 mass % of the polyamide resin composition, 40 to 84 mass % of a polyamide resin (A), not less than 15 mass % of an olefin-based ionomer (B), 0 to 10 mass % of an impact modifier (C), and 0.1 to 3 mass % of heat resistant agents (D). The polyamide resin (A) includes at least one selected from the group consisting of aliphatic copolyamides (A-1) and aromatic copolyamides (A-2). The heat resistant agents (D) include two or more kinds of organic hindered phenol heat resistant agents (D-1).
    Type: Application
    Filed: July 31, 2019
    Publication date: November 11, 2021
    Applicant: UBE INDUSTRIES, LTD.
    Inventors: Tetsuya YASUI, Atsushi YAMASHITA
  • Publication number: 20210340162
    Abstract: The present invention provides a thin-film forming raw material, which is used in an atomic layer deposition method, including a compound represented by the following general formula (1): where R1 to R4 each independently represent an alkyl group having 1 to 5 carbon atoms, and A1 represents an alkanediyl group having 1 to 5 carbon atoms.
    Type: Application
    Filed: September 24, 2019
    Publication date: November 4, 2021
    Applicant: ADEKA CORPORATION
    Inventors: Nana OKADA, Tomoharu YOSHINO, Atsushi YAMASHITA
  • Patent number: 11161867
    Abstract: A raw material for forming a thin film, comprising a compound represented by General Formula (1) below. (in the formula, R1 represents a linear or branched alkyl group having 1 to 5 carbon atoms, R2 represents hydrogen or a linear or branched alkyl group having 1 to 5 carbon atoms, R3 and R4 each independently represent a linear or branched alkyl group having 1 to 5 carbon atoms, A represents an alkanediyl group having 1 to 4 carbon atoms and M represents copper, iron, nickel, cobalt or manganese.).
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: November 2, 2021
    Assignee: ADEKA CORPORATION
    Inventors: Tomoharu Yoshino, Nana Okada, Akihiro Nishida, Atsushi Yamashita
  • Publication number: 20210214922
    Abstract: The camera captures an image of a surrounding environment of a work vehicle and outputs image data indicative of the image. The shape sensor measures a three-dimensional shape of the surrounding environment and outputs 3D shape data indicative of the three-dimensional shape. A controller acquires the image data and the 3D shape data. The controller generates a three-dimensional projection model based on the 3D shape data. The three-dimensional projection model portrays the three-dimensional shape of the surrounding environment. The image is projected onto the three-dimensional projection model based on the image data, thereby generating display image data that represents a display image of the surrounding environment of the work vehicle.
    Type: Application
    Filed: January 29, 2019
    Publication date: July 15, 2021
    Inventors: Atsushi YAMASHITA, Soichiro IWATAKI, Hiromitsu FUJII, Masataka FUCHIDA, Alessandro MORO, Hajime ASAMA, Kazuki KURE
  • Patent number: 11048239
    Abstract: A control parameter optimizing system and an operation optimizing apparatus equipped therewith are provided, the system being applicable to an existing plant without modifying the control panel or equipment of the plant, the system further being capable of optimizing the operation control of the plant in accordance with diverse operational requirements. The system includes an objective function setting section, a plant model, and a control parameter optimizing section. The control parameter optimizing section includes an optimization control parameter selecting section and an optimization control parameter adjusting section. The optimization control parameter selecting section selects as an optimization control parameter the control parameter for optimizing an objective function based on control logic information extracted from a power plant.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: June 29, 2021
    Assignee: Mitsubishi Power, Ltd.
    Inventors: Yasuhiro Yoshida, Takuya Yoshida, Takaaki Sekiai, Yuya Tokuda, Kazunori Yamanaka, Atsushi Yamashita, Norihiro Iyanaga
  • Patent number: 10920313
    Abstract: A diazadienyl compound represented by General Formula (I) below: wherein R1 represents a C1-6 linear or branched alkyl group, and M represents nickel atom or manganese atom. In particular, since a compound in which R1 in General Formula (I) is a methyl group has a high vapor pressure and a high thermal decomposition starting temperature, the compound is useful as a raw material for forming a thin film by a CVD method or ALD method.
    Type: Grant
    Filed: July 5, 2017
    Date of Patent: February 16, 2021
    Assignee: ADEKA CORPORATION
    Inventors: Tomoharu Yoshino, Masaki Enzu, Akihiro Nishida, Atsushi Yamashita
  • Publication number: 20200361970
    Abstract: Described herein are metal compounds and methods of fabricating semiconductor devices using the same. The metal compounds include a material of Chemical Formula 1.
    Type: Application
    Filed: April 24, 2020
    Publication date: November 19, 2020
    Applicants: Samsung Electronics Co., Ltd., Adeka Corporation
    Inventors: SEUNG-MIN RYU, AKIO SAITO, TAKANORI KOIDE, ATSUSHI YAMASHITA, KAZUKI HARANO, GYU-HEE PARK, SOYOUNG LEE, JAESOON LIM, YOUNJOUNG CHO
  • Patent number: 10787127
    Abstract: A display system includes a work vehicle, a first camera, a computation device, and a display device. The first camera is attached to one side portion of the work vehicle. The first camera has an optical axis inclined downward with respect to a horizontal direction. The first camera captures a first image including a surrounding environment of the work vehicle and a first vehicle body portion. The computation device generates a display image from the first image. The display image includes a surrounding image that depicts the surrounding environment of the work vehicle in a bird's-eye view, and a vehicle image. The vehicle image may combine a vehicle model depicted in the work vehicle and an image of the first vehicle body portion captured by the first camera, or may be an image of the first vehicle body portion. The display device displays the display image.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: September 29, 2020
    Assignees: THE UNIVERSITY OF TOKYO, KOMATSU LTD.
    Inventors: Atsushi Yamashita, Hajime Asama, Hiromitsu Fujii, Wei Sun, Takashi Tsukamoto, Kazuki Kure