Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Abstract: A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ?. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ?.

Abstract: A micromechanical component and a method for manufacturing such a component, the component having a micromechanical structure and an integrated circuit, the micromechanical structure being monolithically integrated into the circuit, the circuit being provided in a circuit area of the substrate, and the micromechanical structure being provided in a sensor area of the substrate, the material of the substrate being provided in the area of a sacrificial layer as well as in the area of a function layer without a transition.

Abstract: An electrolysis device producing alkali metals from a liquid alkali metal heavy metal alloy, including at least two connected tubes forming an electrolysis unit. Two solid electrolyte tubes are arranged concentrically in each tube and oriented with openings towards one end of each tube such that a first annular gap for guiding a liquid alkali metal forming an anode is located between the inside of the tube and the outside of the solid electrolyte tubes. An alloy inlet and outlet for the liquid alkali metal in each of the tubes leads into the first annular gap of a tube. An inner chamber sealed off from the alloy inlet, first annular gap, and alloy outlet in each solid electrolyte tube receives liquid alkali metal that can be used as a cathode connected to the alkali metal outlet. Two respective closure devices are arranged at the two ends of each tube.

Abstract: The present invention relates to a process for coating apparatuses and apparatus parts for chemical plant construction—which are taken to mean, for example, apparatus, tank and reactor walls, discharge devices, valves, pumps, filters, compressors, centrifuges, columns, dryers, comminution machines, internals, packing elements and mixing elements—wherein a metal layer or a metal/polymer dispersion layer is deposited in an electroless manner on the apparatus(es) or apparatus part(s) to be coated by bringing the parts into contact with a metal electrolyte solution which, in addition to the metal electrolyte, comprises a reducing agent and optionally the polymer or polymer mixture to be deposited in dispersed form, where at least one polymer is halogenated.

Abstract: The invention relates to a process for the production of a heat transfer device, which comprises electroless chemical deposition of a metal/polymer dispersion layer, in which the polymer is halogenated, on a heat transfer surface. The invention furthermore relates to a process for the production of a heat transfer device, wherein a metal/phosphorus layer with a thickness of from 1 to 15 &mgr;m is applied by electroless chemical deposition before application of the metal/polymer dispersion layer. The invention furthermore relates to a heat transfer device which can be produced by a process according to the invention, and to the use of a coating, produced by electroless chemical deposition of a metal/polymer dispersion layer, in which the polymer is halogenated, for reducing the tendency of the coated surfaces to accumulate solids from fluids, causing fouling.