Abstract: A method of manufacturing an inkjet printhead, in which a solvent included in a positive photoresist composition or in a non-photosensitive soluble polymer composition which is used to form a sacrificial layer has a different polarity from that of a solvent included in a negative photoresist composition that is used to form at least one of a channel forming layer and a nozzle layer.

Abstract: A MEMS (Micro Electro Mechanical System) device and a method of manufacturing the same, in which an detection indicator is formed on a chamber layer stacked on a substrate such that a user easily inspects whether the chamber layer has a required thickness. The MEMS device can include two detection indicators that are formed on the chamber layer and have different depth from each other, or an detection indicator which is formed on the chamber layer and has a tapered sectional shape in which an upper surface of the detection indicator is gradually narrowed in a downward direction such that a user can easily inspect whether the chamber layer has a required thickness. The user can precisely determine whether the chamber layer is planarized to a required thickness by planarizing the detection indicator formed on the chamber layer, and inspecting the detection indicator by using an optical microscope, thereby facilitating inspection for a thickness of the chamber layer.

Abstract: A coating film to prevent a conspicuous fingerprint has a water contact angle of no less than 60° so that most of water contained in fingerprints on the coating film evaporates without forming a layer adsorbed on the coating film. Further, the coating film has lipophilicity and has a diiodomethane contact angle of no more than 45° so that the coating film exhibits enhanced affinity to fingerprints, which primarily contain oily components.

Abstract: A photoresist composition including an oxetane-containing compound represented by Formula 1 or 2, an oxirane-containing compound represented by Formula 3 or 4, a photoinitiator, and a solvent, a method of forming a pattern using the photoresist composition, and an inkjet print head including a polymerization product of the photoresist composition. The photoresist composition provides a polymerization product which resists formation of cracks due to an inner stress, and has excellent heat tolerance, excellent chemical resistance, excellent adhesiveness, and excellent durability.

Abstract: Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate which includes an ink feed passage, a chamber layer, which is disposed on the substrate and a plurality of ink chambers in which ink supplied from the ink feed passage is filled. It also includes a nozzle layer, which is disposed in the chamber layer and includes a plurality of nozzles through which the ink is ejected. The chamber layer and the nozzle layer are cured products of a first negative photoresist composition and a second negative photoresist composition. Each of the first negative photoresist composition and the second negative photoresist composition includes an epoxidized multifunctional bisphenol B novolak resin, a cationic optical initiator, and a solvent.

Abstract: An inkjet printhead includes an ink flow path including a nozzle through which ink is ejected and is formed of a conductive epoxy resin, the conductive epoxy resin is a hardening result of a conductive cross-linked polymer resist composition formed by actinic radiation, and the conductive cross-linked polymer resist composition includes (a) at least one epoxy precursor polymer selected from a phenol novolak precursor polymer and an alicyclic precursor polymer including glycidyl ether group, (b) a metal alkoxide compound represented by the following formula R?M(OR)n, where R? refers to a functional group including an oxirane group or an oxetanyl group, R refers to a C1-10alkyl group, and M is a metal selected from the group consisting of Al, Ti, and Zr, (c) a cationic photoinitiator, and (d) a solvent. The inkjet printhead includes an ink flow path formed of a conductive epoxy resin and a trench formed around a heater of the inkjet printhead to dissipate residual heat generated by the heater.

Abstract: The present disclosure provides an inkjet printhead and a method of manufacturing the inkjet printhead. The inkjet printhead includes: a substrate having an ink feed hole; a chamber layer disposed on the substrate, the chamber layer including a plurality of ink chambers that may be filled with ink supplied through the ink feed hole; a nozzle layer disposed on the chamber layer, the nozzle layer including a plurality of nozzles through which ink is ejected; and a glue layer disposed between the substrate and the chamber layer. The glue layer includes a cured product of an oxetane resin composition.

Abstract: A method of manufacturing an inkjet print head that includes an improved process of forming an ink feed hole, thereby enabling an increase in productivity and a favorable ink supply via the ink feed hole. The method includes preparing a substrate on which a heater to heat an ink is formed on the front side thereof, forming a flow passage formation layer on the front side of the substrate such that the flow passage formation layer defines an ink flow passage, forming a nozzle layer provided with a nozzle on the flow passage formation layer, forming a first protective layer such that the first protective layer covers the flow passage formation layer and the nozzle layer, applying a mask material used to etch the substrate to the rear side of the substrate, applying a second protective layer to the lateral side of the substrate to protect the lateral side of the substrate, and forming an ink feed hole on the substrate by wet etching. Tantalum (Ta) is used as the mask material.

Abstract: A liquid-type composition for forming a photosensitive polymer complex and a method of preparing a photosensitive polymer complex containing silver nanoparticles using the same are provided. The composition for forming a photosensitive polymer complex includes a multifunctional epoxy resin, a photoacid generator, an organic solvent and a silver compound, or additionally includes a multifunctional acrylate resin and a photoinitiator, or an additive, e.g., a surfactant or a flow improver. This composition is applied, selectively exposed, and developed, thus preparing a photosensitive polymer complex, which contains silver nanoparticles uniformly dispersed and formed in the polymer pattern portion thereof through photo reduction and is therefore improved in terms of physical or chemical properties, e.g., heat resistance and wear resistance.

Abstract: A method of manufacturing an inkjet printhead, including forming a nozzle layer by radiating actinic radiation to a cross-linked polymer resist composition including a precursor polymer, a cationic photoinitiator, and a solvent, in which a concentration of the cationic photoinitiator is varied to control a tapered angle of a nozzle included in the nozzle layer.

Abstract: Provided are an inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate which includes an ink feed passage, a chamber layer, which is disposed on the substrate and a plurality of ink chambers in which ink supplied from the ink feed passage is filled. It also includes a nozzle layer, which is disposed in the chamber layer and includes a plurality of nozzles through which the ink is ejected. The chamber layer and the nozzle layer are cured products of a first negative photoresist composition and a second negative photoresist composition. Each of the first negative photoresist composition and the second negative photoresist composition includes an epoxidized multifunctional bisphenol B novolak resin, a cationic optical initiator, and a solvent.

Abstract: An inkjet printhead to prevent clogging of nozzles and spreading of ink during ejection, and a method of manufacturing the inkjet printhead. The inkjet printhead includes a substrate, a substrate, a passage forming layer formed on the substrate, and a nozzle layer formed on the passage forming layer and including a material including an epoxy group or a hydroxyl group, wherein the epoxy group or the hydroxyl group is protected by an alcohol-protecting group.

Abstract: Disclosed is a method of manufacturing an inkjet printhead. The method includes: forming a chamber layer comprising a plurality of ink chambers on a substrate; forming a sacrificial layer comprising water soluble polymer on the chamber layer so as to fill the ink chambers; forming a nozzle layer comprising a plurality of nozzles on the sacrificial layer and the chamber layer; forming an ink feed hole for ink supply in the substrate; and removing the sacrificial layer. The sacrificial layer and the chamber layer may be planarized using a chemical mechanical polishing (CMP) process. The CMP process may utilize a hard polishing, in which an oil based slurry along with polishing pad of hard material to reduce the occurrences of dishing phenomenon.

Abstract: A method of manufacturing an inkjet printhead includes forming a heater and an electrode on a substrate, forming a flow path forming layer by coating a first negative photoresist composition on the substrate, forming a sacrifice layer, planarizing the flow path forming layer and the sacrifice layer, forming a nozzle layer by coating a second negative photoresist composition on the flow path forming layer, forming an ink feed hole in the substrate, and eliminating the sacrifice layer, wherein the first and second negative photoresist compositions include a prepolymer which comprises one selected from the group consisting of a glycidyl ether functional group, a ring-opened glycidyl ether functional group, and an oxytein functional group in a monomer repeat unit, and one selected from the group consisting of a phenol novolac resin-based backbone, a bisphenol-A-based backbone, a bisphenol-F-based backbone, and an alicyclic backbone; a cationic initiator; a solvent; and a plasticizer.

Abstract: An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.

Abstract: A method of manufacturing an inkjet printhead, in which a solvent included in a positive photoresist composition or in a non-photosensitive soluble polymer composition which is used to form a sacrificial layer has a different polarity from that of a solvent included in a negative photoresist composition that is used to form at least one of a channel forming layer and a nozzle layer.

Abstract: An inkjet printhead and a method of manufacturing the same. The inkjet printhead includes a substrate, a chamber layer to define an ink chamber on an upper portion of the substrate, and an adhesive portion to adhere to the substrate and the chamber, wherein the adhesive portion is formed of a phenolic sensitive resin.

Abstract: An oxetane-containing compound, a photoresist composition including the same, a method of preparing patterns using the photoresist composition, and an inkjet print head including polymerization products of the oxetane-containing compound.

Abstract: An inkjet printhead includes a substrate having an ink chamber which is filled with ink to be ejected, a nozzle plate formed on the substrate in a position corresponding to the ink chamber, and a heat generating resistor installed in the ink chamber and formed of TiNx, where x ranges from 0.2 to 0.5, to generate ink bubbles in the ink by generating heat.

Abstract: A method of manufacturing an inkjet printhead using a channel forming material, in which a glue layer to enhance an adhesive force between a substrate and a channel forming layer is not required.